Wafer boat transfer equipment and ALD (atomic layer deposition) system applying same

Abstract

The utility model provides a wafer boat transfer device and an ALD system using the same, and the wafer boat transfer device comprises a boat inlet and outlet module which comprises a boat receiving driving device which is used for driving a boat receiving carrier to move between a first boat inlet and outlet position and a second boat inlet and outlet position; the boat receiving detection device is used for detecting whether the boat receiving carrier receives the target wafer boat in place or not; the boat moving module comprises a transfer driving device and is used for driving a boat moving mechanism to transfer the target boat between the boat receiving carrier at the second boat inlet and outlet position and the boat pushing carrier of the boat pushing module; and the boat pushing module comprises a loading and unloading driving device and is used for driving the boat pushing carrier to enter and exit the ALD equipment reaction cavity, so that the target boat is loaded and unloaded in the reaction cavity. According to the wafer boat transfer equipment provided by the utility model, the failure rate of the wafer boat transfer equipment is reduced by optimizing a mechanical structure, a sensor layout, signal judgment and a cooperative control method of each device, potential safety hazards caused by signal misjudgment are avoided when a failure occurs in a system operation process, and the capacity of ALD equipment is greatly met.

Description

Technical Field

[0001] This utility model relates to the field of atomic layer deposition technology, and in particular to a crystal boat transfer device and an ALD system using the same. Background Technology

[0002] As one of the important semiconductor thin film deposition equipment, ALD equipment is also widely used in the photovoltaic field. With the rapid development of the photovoltaic industry, the demand for silicon wafer coating capacity of ALD equipment has also increased rapidly. As a silicon wafer handling device, the layout and control strategy of the crystal boat transfer equipment in the ALD equipment, which transfers the crystal boat between the coating reaction chamber and the crystal boat transfer device in the furnace cabinet, directly affects the capacity of the ALD equipment.

[0003] During full-load processing of ALD equipment, the crystal boat transfer equipment is relatively prone to malfunctions. This can lead to collisions due to blockages during the loading / unloading, pushing, and moving (lifting) of crystal boats. When the moving (lifting) module releases the corresponding crystal boat carrier from the pushing and loading / unloading modules, premature release of the robotic arm before the travel distance is complete can easily cause a crushing accident. When the pushing module's carrier retrieves or places crystal boats within the ALD furnace's coating reaction chamber, any vertical or lateral displacement of the carrier and crystal boat relative to their preset positions within the chamber can create a safety hazard, potentially causing collisions between the carrier / crystal boat and the reaction chamber. Utility Model Content

[0004] This utility model proposes a crystal boat transfer device for ALD equipment and an ALD system using the same, in order to solve the technical problem that collision accidents are prone to occur in the crystal boat transfer process of existing ALD equipment.

[0005] To solve the above problems, the technical solution adopted by this utility model is as follows:

[0006] This utility model provides a crystal boat transfer device, comprising:

[0007] The inbound / outbound module includes: a receiving boat drive device for driving the receiving boat carrier to move between a first inbound / outbound position and a second inbound / outbound position; and a receiving boat detection device for detecting whether the receiving boat carrier has received the target crystal boat in place.

[0008] The boat transfer module includes a transfer drive device for driving the boat transfer mechanism to transfer the target crystal boat between the receiving vehicle that arrives at the second entry / exit boat position and the pushing vehicle of the boat pusher module;

[0009] The boat-pushing module includes a loading and unloading drive device for driving the boat-pushing vehicle in and out of the reaction chamber of the ALD device, so as to load and unload the target crystal boat into and out of the reaction chamber.

[0010] Furthermore, the boat-moving mechanism is a boat-moving robot arm used to grasp the target crystal boat and move the target crystal boat between the receiving carrier and the pushing carrier under the drive of the transfer drive device;

[0011] The boat-moving module also includes:

[0012] The boat-grabbing detection device is used to detect whether the boat-moving mechanism has successfully grabbed the target crystal boat.

[0013] Furthermore, the boat-pushing module also includes a boat-pushing detection device, used to detect whether the boat-pushing vehicle has received the target crystal boat in place.

[0014] Preferably, the boat receiving vehicle reciprocates between the first boat entry / exit position and the second boat entry / exit position along a first horizontal direction;

[0015] The transfer drive unit includes:

[0016] The transfer lifting mechanism is used to drive the transfer translation mechanism to move up and down in the vertical direction;

[0017] The transfer and translation mechanism is used to drive the boat-transfer manipulator to reciprocate between the boat-receiving vehicle and the boat-pushing vehicle along a second horizontal direction perpendicular to the first horizontal direction.

[0018] The loading and unloading drive unit includes:

[0019] The loading and unloading lifting mechanism is used to drive the loading and unloading translation mechanism to move up and down in the vertical direction so that the loading and unloading translation mechanism matches the height of the corresponding reaction chamber.

[0020] The loading and unloading translation mechanism is used to drive the boat-pushing vehicle to reciprocate between the second boat entry / exit position side and the corresponding height reaction chamber along the first horizontal direction.

[0021] Preferably, the boat-moving robot includes:

[0022] The boat transfer frame is mounted on the horizontal moving part of the transfer and translation mechanism;

[0023] Four mechanical grippers, mounted on the boat-moving frame, are used to grab the target crystal boat;

[0024] The boat-grabbing detection device includes:

[0025] At least two contact switches are respectively set on the corresponding mechanical gripper to detect whether the mechanical gripper has grasped the target crystal boat.

[0026] Preferably, the boat-pushing detection device includes:

[0027] A horizontal displacement sensor is used to detect whether the target crystal boat received by the boat-pushing vehicle has shifted to a predetermined position in the horizontal direction.

[0028] Furthermore, the boat-pushing detection device also includes:

[0029] A height displacement sensor is used to detect whether the target crystal boat received by the boat-pushing vehicle has shifted to a predetermined position in the height direction.

[0030] Preferably, the receiving vessel includes:

[0031] The boat-receiving base is mounted on the horizontal moving part of the boat-receiving drive device;

[0032] Four boat-carrying brackets are located on the boat-receiving base and are used to support the target crystal boat;

[0033] The boat receiving and testing device includes:

[0034] At least two carrier detection sensors are installed on the corresponding carrier brackets to detect whether the carrier brackets have lifted the target crystal boat.

[0035] Furthermore, the boat-receiving drive device includes:

[0036] The frame base extends along a first horizontal direction between the first and second entry / exit boat positions;

[0037] A boat-receiving guide structure is located on the top of the frame base and extends along the first horizontal direction between the first boat entry / exit position and the second boat entry / exit position. The boat-receiving vehicle is movably mounted on the boat-receiving guide structure.

[0038] The boat-receiving translation mechanism is used to drive the boat-receiving vehicle to reciprocate along the boat-receiving guide structure;

[0039] The entry and exit module also includes:

[0040] The crystal boat temporary storage device is located inside the hollow side of the frame base and below the second entry / exit position. It is used to receive and temporarily store the target crystal boat from the boat transfer robot.

[0041] This utility model also provides an ALD system, including an ALD device and a crystal boat transport device, and also includes the aforementioned crystal boat transfer device. The crystal boat transport device is used to transport the target crystal boat to be coated to a first inlet / outlet position and to receive the coated target crystal boat from the first inlet / outlet position.

[0042] Compared with the prior art, the present invention has the following beneficial effects:

[0043] The crystal boat transfer equipment for ALD equipment provided by this utility model optimizes the mechanical structure, sensor layout, signal discrimination, and collaborative control methods of various devices to reduce the failure rate of the crystal boat transfer equipment, avoid safety hazards caused by signal misjudgment when a fault occurs during system operation, and greatly meet the production capacity of ALD equipment. Attached Figure Description

[0044] To more clearly illustrate the technical solution proposed by this utility model, the present utility model will be described in detail below with reference to the embodiments and accompanying drawings. It should be understood that the embodiments and accompanying drawings described in the following detailed description are merely some embodiments of this utility model, and those skilled in the art can make changes to these drawings under the concept of this utility model.

[0045] Figure 1 A three-dimensional structural schematic diagram of the crystal boat transfer device provided by this utility model, omitting the boat entry / exit module and the boat pushing module;

[0046] Figure 2 for Figure 1 A three-dimensional structural diagram of an embodiment of a crystal boat transfer device, showing the boat entry / exit module and the boat pushing module, with the housing hidden;

[0047] Figure 3 for Figure 2 An enlarged structural diagram of the inlet / outlet module;

[0048] Figure 4 for Figure 2 An enlarged structural diagram of the boat-moving module in the diagram;

[0049] Figure 5 for Figure 2 An enlarged structural diagram of the boat-pushing module in the diagram.

[0050] The main markings in the attached figures are as follows:

[0051] 1. Boat entry / exit module; 11. Boat receiving drive device; 111. Frame base; 112. Boat receiving guide structure; 1121. Boat receiving guide rail; 113. Boat receiving translation mechanism; 1131. Boat receiving drive motor; 1132. Synchronous belt; 12. Boat receiving carrier; 121. Boat receiving base; 122. Boat carrier bracket; 123. Boat receiving slider; 13. Boat receiving detection device; 131. Boat carrier detection sensor; 14. Boat temporary storage device; 141. Temporary storage base; 142. Temporary storage bracket; 15. Temporary storage detection device; 151. Temporary storage detection sensor; 2. Boat transfer module; 21. Transfer drive device; 211. Transfer lifting mechanism; 212. Transfer translation mechanism; 2121. Motor base; 2122. 2123 Transfer drive motor; 22 Boat transfer guide rail; 22 Boat transfer mechanism; 221 Boat transfer frame; 2211 Boat transfer slide rail; 2212 Movable rack; 222 Mechanical gripper; 23 Boat gripping detection device; 231 Contact switch; 3 Boat pushing module; 31 Loading and unloading drive device; 311 Loading and unloading lifting mechanism; 312 Loading and unloading translation mechanism; 3121 Rack base; 3122 Loading and unloading guide rail; 3123 Fixed rack; 32 Boat pushing carrier; 321 Carrier frame; 322 Crystal boat placement slot; 323 Loading and unloading drive motor; 33 Boat pushing detection device; 331 Horizontal displacement sensor; 332 Height displacement sensor; 4 Target crystal boat; 5 Housing; 6 Drive gear.

[0052] Other markings in the diagram are as follows:

[0053] A. First entry / exit boat position; B. Second entry / exit boat position; X. First horizontal direction; Y. Second horizontal direction; Z. Vertical direction. Detailed Implementation

[0054] To make the technical problem to be solved, the technical solution and the beneficial effects of this utility model clearer, the following description is provided in conjunction with the appendix. Figure 1-5 The present invention will be further described in detail with reference to the embodiments.

[0055] Please refer to the following: Figure 1-5 The crystal boat transfer device provided by this utility model includes:

[0056] The inlet / outlet module 1 includes a receiving drive device 11 for driving the receiving carrier 12 to move between the first inlet / outlet position A and the second inlet / outlet position B; a receiving detection device 13 for detecting whether the receiving carrier 12 has received the target crystal boat 4 in place; the boat transfer module 2 includes a transfer drive device 21 for driving the boat transfer mechanism 22 to transfer the target crystal boat 4 between the receiving carrier 12 that has arrived at the second inlet / outlet position B and the boat pusher 32 of the boat pusher module 3; the boat pusher module 3 includes a loading / unloading drive device 31 for driving the boat pusher 32 to enter and exit the reaction chamber (not shown in the figure) of the ALD device (not shown in the figure) so that the target crystal boat 4 can be loaded and unloaded in the reaction chamber.

[0057] Please see Figure 2 , 4 In this embodiment, the boat-moving mechanism 22 is a boat-moving robot, which is used to grab the target crystal boat 4 and move the target crystal boat 4 between the receiving boat carrier 12 and the pushing boat carrier 32 under the drive of the transfer drive device 21.

[0058] The boat-moving module 2 also includes:

[0059] The boat-grabbing detection device 23 is used to detect whether the boat-moving mechanism 22 has grabbed the target crystal boat 4 in place.

[0060] Please see Figure 2 , 5 In this embodiment, the boat-pushing module 3 also includes a boat-pushing detection device 33, which is used to detect whether the boat-pushing vehicle 32 has received the target crystal boat 4 in place.

[0061] Please refer to the following: Figure 2-5 In this embodiment, the boat receiving vehicle 12 reciprocates between the first boat entry / exit position A and the second boat entry / exit position B along the first horizontal direction X.

[0062] The transfer drive unit 21 includes:

[0063] The transfer lifting mechanism 211 is used to drive the transfer translation mechanism 212 to move up and down in the vertical direction Z; the transfer translation mechanism 212 is used to drive the boat-moving robot to reciprocate between the boat-receiving carrier 12 and the boat-pushing carrier 32 in the second horizontal direction Y perpendicular to the first horizontal direction X.

[0064] The loading and unloading drive unit 31 includes:

[0065] The loading and unloading lifting mechanism 311 is used to drive the loading and unloading translation mechanism 312 to move up and down in the vertical direction Z so that the loading and unloading translation mechanism 312 matches the height of the corresponding reaction chamber; the loading and unloading translation mechanism 312 is used to drive the boat pusher 32 to reciprocate between the second boat entry / exit position B side and the corresponding height reaction chamber in the first horizontal direction X.

[0066] Please see Figure 2 , 4 In this embodiment, the boat-moving robot includes:

[0067] The boat-moving frame 221 is mounted on the horizontal moving part of the transfer and translation mechanism 212; four mechanical grippers 222 are mounted on the boat-moving frame 221 and are used to jointly grasp the target crystal boat 4.

[0068] The boat-grabbing detection device 23 includes:

[0069] At least two contact switches 231 are respectively set on the corresponding mechanical grippers 222 to detect whether the mechanical grippers 222 have grasped the target crystal boat 4.

[0070] Only when all corresponding mechanical grippers 222's contact switches 231 are simultaneously on or off, allowing the central control device to receive "boat present" or "boat absent" signals from all contact switches 231, will the boat-transferring robot execute the next action. Otherwise, the central control device will control the alarm device to issue an alarm signal, the alarm light will flash, the central control panel will display "Abnormal boat entry / exit / receive signal," and all devices of the crystal boat transfer equipment will be suspended, prompting ALD system operators to check for system abnormalities.

[0071] Please see Figure 2 , 5 In this embodiment, the boat-pushing detection device 33 includes:

[0072] The horizontal displacement sensor 331 is used to confirm whether there is a target crystal boat 4 on the pusher carrier 32, and to detect whether the target crystal boat 4 received by the pusher carrier 32 has shifted to a predetermined position in the horizontal direction. Only when the pusher detection device 33 determines that there is a boat on the pusher carrier 32 will other detection signals of the target crystal boat 4 on the pusher module 3 be regarded as valid signals by the control device. When the pusher carrier 32 is in the state of having a boat, if the target crystal boat 4 is detected to have shifted to a predetermined position, that is, the left or right side of the target crystal boat 4 deviates from the predetermined position, the pusher detection device 33 will capture the abnormal signal and transmit it to the central control device. The central control device controls the alarm device to issue an alarm signal, the alarm light flashes, and the central control panel displays "Pusher and boat receiving signal abnormal" and controls the various devices of the crystal boat transfer equipment to stop operating.

[0073] Please see Figure 2 , 5 In this embodiment, the boat-pushing detection device 33 further includes:

[0074] The height displacement sensor 332 is used to detect whether the target crystal boat 4 received by the boat pusher 32 has shifted to a predetermined position in the height direction.

[0075] Please see Figure 2 , 3In this embodiment, the receiving vessel 12 includes:

[0076] The receiving boat base 121 is mounted on the horizontal moving part of the receiving boat drive device 11; four boat carriers 122 are provided on the receiving boat base 121 for supporting the target crystal boat 4.

[0077] The receiving boat detection device 13 includes:

[0078] At least two boat-carrying detection sensors 131 are respectively installed on the corresponding boat-carrying brackets 122 to detect whether the boat-carrying brackets 122 have lifted the target crystal boat 4. The system determines whether the receiving boat carrier 12 has received the target crystal boat 4 by using at least two boat-carrying detection sensors 131 on the corresponding boat-carrying brackets 122. Only when the central control device receives "boat present" or "boat absent" signals from all boat-carrying detection sensors 131 of the receiving boat detection device 13 will it control the boat entry / exit module 1 to execute the next action. Otherwise, the PLC control module will control the alarm module to issue an alarm signal, the alarm light will flash, and the central control panel will display "Boat entry / exit receiving signal abnormality." The moving parts of the ALD clean bench will suspend operation, prompting the ALD professional equipment operator to check for the abnormality.

[0079] Please see Figure 2 , 3 In this embodiment, the boat-receiving drive device 11 includes:

[0080] A frame base 111 extends along a first horizontal direction X between a first boat entry / exit position A and a second boat entry / exit position B; a boat receiving guide structure 112 is located on top of the frame base 111 and extends along a first horizontal direction X between a first boat entry / exit position A and a second boat entry / exit position B; a boat receiving carrier 12 is movably mounted on the boat receiving guide structure 112; a boat receiving translation mechanism 113 is used to drive the boat receiving carrier 12 to reciprocate along the boat receiving guide structure 112.

[0081] The inbound / outbound module 1 also includes:

[0082] The crystal boat temporary storage device 14 is located inside the hollow side of the frame base 111 and below the second entry / exit position B. It is used to receive and temporarily store the target crystal boat 4 from the boat transfer robot.

[0083] Please see Figure 2 , 3In a preferred embodiment of this invention, the boat-receiving guide structure 112 includes a boat-receiving guide rail 1121, which is respectively disposed on the top two sides of the frame base 111 in the second horizontal direction Y, and extends along the first horizontal direction X between the first boat-entry / exit position A and the second boat-entry / exit position B. The bottom of the boat-receiving carrier 12 is movably mounted on the boat-receiving guide rail 1121 via a boat-receiving slider 123. The boat-receiving translation mechanism 113 is a synchronous belt pulley mechanism, including a boat-receiving drive motor 1131 mounted on one side of the frame base 111 in the second horizontal direction Y, and a synchronous belt 1132 driven by the boat-receiving drive motor 1131 and circulating along the first horizontal direction X between the first boat-entry / exit position A and the second boat-entry / exit position B. The boat-receiving carrier 12 is connected to the synchronous belt 1132 of the synchronous belt pulley mechanism on one side in the second horizontal direction Y.

[0084] Please see Figure 2 , 3 In this embodiment, the crystal boat temporary storage device 14 is a temporary storage carrier, including:

[0085] A temporary storage base 141 is located inside the hollow of the frame base 111 and below the second entry / exit boat position B; four temporary storage brackets 142 are located on the temporary storage base 141 and are used to receive and lift the target crystal boat 4 that cannot be transported away in time from the boat transfer robot.

[0086] The inbound / outbound module 1 also includes:

[0087] Temporary storage detection device 15, including:

[0088] At least two temporary storage detection sensors 151 are respectively installed on the corresponding temporary storage brackets 142 to detect whether the temporary storage brackets 142 have lifted the target crystal boat 4. The working principle of the temporary storage detection sensor 151 is the same as that of the boat-carrying detection sensor 131 mentioned above, and will not be described again here.

[0089] In other embodiments (not shown in the figures), the boat translation mechanism 113 may also use a linear drive mechanism such as a lead screw and nut or a gear and rack instead of a synchronous belt pulley mechanism.

[0090] Please see Figure 2 , 4In a preferred embodiment of this invention, the transfer lifting mechanism 211 is a screw and nut mechanism, and the transfer translation mechanism 212 is a gear and rack mechanism. It includes a motor base 2121 mounted on the vertically lifting nut moving part of the screw and nut mechanism (transfer lifting mechanism 211), and a transfer drive motor 2122 mounted on the motor base 2121. The output shaft of the transfer drive motor 2122 is vertically positioned and extends downward through the bottom of the motor base 2121. A drive gear 6 is mounted on the output shaft. A pair of boat guide rails 2123 are parallel and spaced apart at the bottom of the motor base 2121, and extend along the second horizontal direction Y. One of the boat guide rails 2123 is located on one side of the drive gear 6.

[0091] The boat transfer frame 221 also includes a pair of boat transfer slide rails 2211, which are spaced apart on the top of the boat transfer frame 221 and respectively cooperate with a pair of boat transfer guide rails 2123. The horizontal moving component of the above-mentioned transfer translation mechanism 212 is a movable rack 2212 that is located on one side of one of the boat transfer slide rails 2211 and extends along the second horizontal direction Y and meshes with the drive gear 6. The output shaft of the drive motor 2122 is driven to rotate, so that the drive gear 6 drives the movable rack 2212, the boat transfer frame 221, and the mechanical gripper 222 to reciprocate between the boat receiving carrier 12 and the boat pushing carrier 32 along the second horizontal direction Y.

[0092] In other embodiments (not shown in the figures), the transfer and translation mechanism 212 may also use a linear drive mechanism such as a lead screw nut or a synchronous belt pulley instead of a gear and rack mechanism.

[0093] Please see Figure 2 , 5 In this embodiment, the loading and unloading lifting mechanism 311 is a screw and nut mechanism, and the loading and unloading translation mechanism 312 is a gear and rack mechanism, including a rack base 3121 mounted on the vertically moving nut moving part of the screw and nut mechanism (loading and unloading lifting mechanism 311), and loading and unloading guide rails 3122 and fixed racks 3123 that are spaced apart on the rack base 3121 in the vertical direction Z and extend along the first horizontal direction X; the boat pushing carrier 32 includes a carrier frame 321 extending along the first horizontal direction X, a boat placement slot 322 provided on the top of the carrier frame 321, and a loading and unloading drive motor 323 provided at one end of the carrier frame 321 in the first horizontal direction X. The output shaft of the loading and unloading drive motor 323 is horizontally arranged, and a drive gear 6 is mounted on the output shaft and meshes with the fixed rack 3123.

[0094] The drive motor 323 drives its output shaft to rotate, causing the drive gear 6 to reciprocate along the fixed rack 3123 in the first horizontal direction X, so that the boat pusher 32 reciprocates between the second boat entry / exit position B side and the reaction chamber at the corresponding height.

[0095] Please see Figure 2 , 5 In this embodiment, two height displacement sensors 332 are provided, which are respectively located on the top of the vehicle frame 321 and the top of the rack base 3121.

[0096] When the boat-pushing carrier 32 detects a "boat in progress" state, the height shift sensor 332 is used to confirm whether the target crystal boat 4 is placed stably on the boat-pushing carrier 32 when the boat-pushing carrier 32 receives the boat. When the crystal boat 4 tilts, the upper surface of one side of the crystal boat 4 will exceed the detection plane position. The height shift sensor 332 will capture the abnormal signal and transmit it to the central control device. The central control device will control the alarm device to issue an alarm signal, the alarm light will flash, and at the same time, the central control panel will display "Boat-pushing and receiving signal abnormal" and control all devices of the crystal boat transfer equipment to stop operating.

[0097] In this embodiment, the sensor may be a proximity switch or a photoelectric sensor, etc.

[0098] Please see Figure 1 , 2 The present invention also provides an ALD system, including an ALD device (not shown in the figure) and a crystal boat transport device (not shown in the figure), and also includes the aforementioned crystal boat transfer device, and the aforementioned central control device (not shown in the figure) for controlling the aforementioned devices. The crystal boat transport device is used to transport the target crystal boat 4 to be coated to the first entry / exit position A, and to receive the coated target crystal boat 4 from the first entry / exit position A.

[0099] In this embodiment, the ALD system also includes a housing 5, which is closed at the top and bottom in the vertical direction Z and at a pair of side ends in the second horizontal direction Y, and open at both ends in the first horizontal direction X. The ALD device, the housing 5 and the crystal boat transport device are arranged sequentially at intervals in the first horizontal direction X, that is, the housing 5 is located between the ALD device and the crystal boat transport device, and each device of the crystal boat transport device is installed inside the housing 5.

[0100] In this embodiment, the central control device adopts a PLC control device, including the control panel mentioned above for displaying the system status.

[0101] In this embodiment, the ALD system also includes an alarm device for issuing alarm information about system malfunctions using audible and visual signals.

[0102] The ALD equipment is a furnace cabinet, which includes three to four reaction chambers set at different heights within the cabinet.

[0103] This utility model also provides a crystal boat transfer control method, which applies the above-mentioned ALD system and includes:

[0104] (1) Crystal boat transfer and loading control method:

[0105] The receiving carrier 12 of the inlet / outlet module 1 receives the crystal boat to be coated from the crystal boat transfer device at the first inlet / outlet position A, and transports the crystal boat to be coated from the first inlet / outlet position A along the first horizontal direction X to the second inlet / outlet position B by the receiving carrier 12. When the central control device determines that the reaction chamber at a certain height of the ALD equipment (ALD furnace cabinet) is "without a boat" and the corresponding pusher carrier 32 is in a "without a boat" state, the central control device controls the boat-moving robot to directly transport the crystal boat to be coated on the receiving carrier 12 at the second inlet / outlet position B to the pusher carrier 32 of the pusher module 3, and then the pusher carrier 32 transports the crystal boat to be coated to the reaction chamber at the corresponding height of the ALD furnace cabinet.

[0106] Specifically, if the central control device determines that the reaction chamber at a certain height of the ALD furnace cabinet is "without a boat", and the temporary storage carrier of the temporary storage device of the boat entry / exit module 1 is in the state of "a boat to be coated", and the boat transfer device does not transfer the "boat to be coated" to the receiving boat carrier 12, the central control device controls the boat-moving robot to move the boat to be coated on the temporary storage carrier located below the second boat entry / exit position B to the boat-pushing carrier 32, and then the boat-pushing carrier 32 moves the boat to be coated to the reaction chamber at the corresponding height of the ALD furnace cabinet.

[0107] Specifically, when the boat-pushing carrier 32 is performing the boat-pushing process and the temporary storage carrier is in a "no boat" state, and the receiving carrier 12 has already moved the crystal boat to be coated to the second entry / exit position B, the central control device controls the boat-moving robot to move the crystal boat to be coated on the receiving carrier 12 to the temporary storage position.

[0108] (2) Crystal boat transfer and unloading control method:

[0109] When the central control device determines that the silicon wafers in the crystal boats inside the reaction chamber of the ALD furnace cabinet have been coated, it controls the pusher carrier 32 to sequentially remove the coated crystal boats from the reaction chambers at various heights of the ALD furnace cabinet. The boat-moving robot first grabs the coated crystal boats on the pusher carrier 32 and transports them to the receiving carrier 12 located laterally at the second boat entry / exit position B. Then, the receiving carrier 12 directly transfers the coated crystal boats to the first boat entry / exit position A and hands them over to the crystal boat transfer device.

[0110] Specifically, when the central control device determines that there are both "coated crystal boats" and "no boats" in the reaction tubes at various heights of the ALD furnace cabinet, all devices in the ALD system will prioritize the boat unloading process.

[0111] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Those skilled in the art should understand that any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A wafer boat transfer apparatus, characterized by, The application relates to an ALD device, comprising: an in-out boat module (1), comprising: an in-out boat driving device (11) for driving an in-out boat carrier (12) to move between a first in-out boat position (A) and a second in-out boat position (B); an in-out boat detection device (13) for detecting whether the in-out boat carrier (12) receives a target boat (4) in place; a boat transfer module (2), comprising a transfer driving device (21) for driving a boat transfer mechanism (22) to transfer the target boat (4) between the in-out boat carrier (12) reaching the second in-out boat position (B) and a boat pushing module (3); the boat pushing module (3), comprising a loading-unloading driving device (31) for driving the boat pushing carrier (32) to enter and exit a reaction chamber of the ALD device, so as to load and unload the target boat (4) to the reaction chamber.

2. The wafer carrier transfer apparatus of claim 1, wherein the boat transfer mechanism (22) is a boat transfer robot for grabbing the target boat (4) and moving the target boat (4) between the in-out boat carrier (12) and the boat pushing carrier (32) under the driving of the transfer driving device (21); the boat transfer module (2) further comprises: a boat grabbing detection device (23) for detecting whether the boat transfer mechanism (22) grabs the target boat (4) in place.

3. The pod transfer apparatus of claim 2, wherein, the boat pushing module (3) further comprises a boat pushing detection device (33) for detecting whether the boat pushing carrier (32) receives the target boat (4) in place.

4. The pod transfer apparatus of claim 3, wherein, the in-out boat carrier (12) reciprocates along a first horizontal direction (X) between the first in-out boat position (A) and the second in-out boat position (B); the transfer driving device (21) comprises: a transfer lifting mechanism (211) for driving a transfer translation mechanism (212) to move up and down along a vertical direction (Z); the transfer translation mechanism (212) is used for driving the boat transfer robot to reciprocate along a second horizontal direction (Y) perpendicular to the first horizontal direction (X) between the in-out boat carrier (12) and the boat pushing carrier (32); the loading-unloading driving device (31) comprises: a loading-unloading lifting mechanism (311) for driving a loading-unloading translation mechanism (312) to move up and down along the vertical direction (Z), so that the loading-unloading translation mechanism (312) matches the height of the corresponding reaction chamber; the loading-unloading translation mechanism (312) is used for driving the boat pushing carrier (32) to reciprocate along the first horizontal direction (X) between the second in-out boat position (B) and the reaction chamber with the corresponding height.

5. The wafer boat transfer apparatus of claim 4, wherein, the boat transfer robot comprises: a boat transfer frame (221) arranged on a horizontal moving part of the transfer translation mechanism (212); four mechanical grippers (222) arranged on the boat transfer frame (221) and used for grabbing the target boat (4); the boat grabbing detection device (23) comprises: at least two contact switches (231) arranged on the corresponding mechanical grippers (222) and used for detecting whether the mechanical grippers (222) have grabbed the target boat (4).

6. The wafer boat transfer apparatus of claim 4, wherein, the boat pushing detection device (33) comprises: A horizontal displacement sensor (331) is configured to detect whether the target wafer boat (4) received by the wafer boat pushing device (32) is horizontally displaced by a predetermined position.

7. The wafer boat transfer apparatus of claim 6, wherein, The wafer boat pushing detection device (33) further comprises: A height displacement sensor (332) is configured to detect whether the target wafer boat (4) received by the wafer boat pushing device (32) is vertically displaced by a predetermined position.

8. The pod transfer apparatus of any one of claims 4-7, wherein, The wafer boat receiving device (12) comprises: A wafer boat receiving base (121) is mounted on the horizontal moving part of the wafer boat receiving driving device (11); Four wafer boat supporting frames (122) are arranged on the wafer boat receiving base (121) and configured to support the target wafer boat (4); The wafer boat receiving detection device (13) comprises: At least two wafer boat supporting detection sensors (131) are arranged on the corresponding wafer boat supporting frames (122) and configured to detect whether the wafer boat supporting frames (122) have supported the target wafer boat (4).

9. The wafer boat transfer apparatus of claim 8, wherein, The wafer boat receiving driving device (11) comprises: A frame base (111) is arranged along the first horizontal direction (X) between the first wafer in-out position (A) and the second wafer in-out position (B); A wafer boat receiving guide structure (112) is arranged on the top of the frame base (111) and extends along the first horizontal direction (X) between the first wafer in-out position (A) and the second wafer in-out position (B), and the wafer boat receiving device (12) is movably mounted on the wafer boat receiving guide structure (112); A wafer boat receiving translation mechanism (113) is configured to drive the wafer boat receiving device (12) to reciprocate along the wafer boat receiving guide structure (112); The wafer in-out module (1) further comprises: A wafer boat temporary storage device (14) is arranged inside the hollow of the frame base (111) and below the second wafer in-out position (B), and is configured to receive and temporarily store the target wafer boat (4) from the wafer boat pushing mechanical hand.

10. An ALD system comprising an ALD apparatus and a pod transfer device, characterized in that, The wafer boat transfer device is also used for transporting the target wafer boat (4) to be coated to the first wafer in-out position (A) and receiving the target wafer boat (4) coated from the first wafer in-out position (A).

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