Micro differential pressure sensor calibration device

Abstract

A micro differential pressure sensor calibration device provided by the present application comprises a calibration assembly, a pressure control system and a lifting driving device, the test assembly comprises a calibration base, an upper chamber and a probe card, a sealed calibration chamber is formed between the calibration base and the upper chamber, the sealed calibration chamber is used for placing a to-be-calibrated product, and the probe card is used for detecting the to-be-calibrated product. The probe card is fixedly installed in the upper cavity, the lifting driving device is fixedly connected with the upper cavity, and the lifting driving device is used for driving the upper cavity to conduct lifting motion, the automatic calibration device has the advantages that efficiency is high, whole-board matrix typesetting calibration can be achieved, and compared with traditional single-piece calibration, the efficiency is improved by 18-54 times; 2, the cost is low, and compared with the cost of a traditional single calibration system, the cost is saved by about 5 / 6; and 3, the precision is high, and the precision control is expected to be improved to + / -5Pa from traditional + / -15Pa.

Description

Technical Field

[0001] This utility model relates to the field of sensor calibration technology, specifically to a micro differential pressure sensor calibration device. Background Technology

[0002] A differential pressure sensor is a system that uses a high-precision, high-stability micro-pressure chip and undergoes rigorous and precise signal processing, including pressure compensation, signal amplification, reverse polarity protection, pressure switch, and pressure signal conversion.

[0003] Micro differential pressure sensors are widely used in applications such as nebulizers, ventilators, micro-airflow detection, and micro-differential pressure detection. Before application, micro differential pressure sensors require calibration testing to achieve optimal product consistency. With increasing demands for miniaturization, multi-functional integration, and higher accuracy, traditional calibration and testing systems for micro differential pressure sensors suffer from poor accuracy and inconsistent product performance, failing to meet market requirements. Utility Model Content

[0004] The purpose of this utility model is achieved through the following technical measures: a micro differential pressure sensor calibration device, including a calibration component, a pressure control system, and a lifting drive device. The calibration component includes a calibration base, an upper chamber, and a probe card. A sealed calibration chamber is formed between the calibration base and the upper chamber. The sealed calibration chamber is used to place the product to be calibrated. The probe card is fixedly installed inside the upper chamber. The lifting drive device is fixedly connected to the upper chamber and is used to drive the upper chamber to perform lifting and lowering actions. The pressure control system is used to provide compressed air to the sealed calibration chamber.

[0005] As a preferred embodiment, the pressure control system includes a program control system, a gas source control system, and a pressure control solenoid valve. The program control system controls the switching action of the pressure control solenoid valve, and the gas source control system provides a high-precision, linearly adjustable, and stable gas source to provide negative pressure during product calibration.

[0006] As a preferred embodiment, the pressure-controlled solenoid valve is fixedly installed on the upper chamber.

[0007] As a preferred embodiment, the probe card provides power, grounding, and output continuity during product calibration.

[0008] As a preferred embodiment, the upper chamber is provided with a negative pressure air source interface, a probe card power interface, and a sealing detection device interface.

[0009] As a preferred option, the calibration base is equipped with positioning pins to accurately position the product.

[0010] As a preferred embodiment, a silicone pad is provided at the connection between the upper chamber and the calibration base.

[0011] Due to the adoption of the above technical solution, the advantages of this utility model compared with the prior art are:

[0012] 1. High efficiency: This application can achieve whole-board matrix layout calibration, which is 18 to 54 times more efficient than traditional single-chip calibration.

[0013] 2. Low cost: Compared with the traditional single-chip calibration system, the cost of this application is reduced by about 5 / 6.

[0014] 3. High precision: The precision control of this application is expected to be improved from the traditional ±15Pa to ±5Pa.

[0015] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0016] Appendix Figure 1 This is a schematic diagram of the structure of this utility model. Detailed Implementation

[0017] Example: As attached Figure 1 As shown, a differential pressure sensor calibration device includes a calibration component, a pressure control system, and a lifting drive device 5. The calibration component includes a calibration base 1, an upper chamber 4, and a probe card 3. A sealed calibration chamber is formed between the calibration base 1 and the upper chamber 4. The sealed calibration chamber is used to place the product 2 to be calibrated. The probe card 3 is fixedly installed inside the upper chamber 4. The lifting drive device 5 is fixedly connected to the upper chamber 4 and is used to drive the upper chamber 4 to perform lifting and lowering actions. The lifting drive device 5 is a hydraulic or pneumatic control device. The pressure control system is used to provide compressed air to the sealed calibration chamber.

[0018] The pressure control system includes a program control system 6, a gas source control system 7, and a pressure control solenoid valve 8. The program control system 6 controls the opening and closing of the pressure control solenoid valve 8, and the gas source control system 7 provides a high-precision, linearly adjustable, and stable gas source to provide negative pressure during product calibration.

[0019] The pressure-controlled solenoid valve 8 is fixedly installed on the upper chamber 4.

[0020] The probe card 3 faces the PCB PAD side of the product to perform electrical testing. The probe card 3 provides power, grounding and output conduction during product calibration. The probe card 3 is fixed to the upper chamber 4, and the calibration work is carried out through the accurate positioning of the upper chamber 4.

[0021] The upper chamber 4 is equipped with a negative pressure air source interface, a probe card power interface, and a sealing detection device interface.

[0022] The calibration base 1 is equipped with a positioning pin for precise positioning of the product. The air inlet of the product in the middle is hollowed out, and the edge of the product is sealed with a silicone pad in conjunction with the silicone pad of the upper chamber 4. The upper chamber 4 and the calibration base 1 are precisely positioned by the positioning pin for the product 2 to be calibrated.

[0023] A silicone pad is provided at the connection between the upper chamber 4 and the calibration base 1.

[0024] The specific implementation plan for this application is as follows:

[0025] As shown in the attached diagram, before calibration, the hydraulic or pneumatic device 5 is controlled to open the upper chamber 4, and the product 2 to be calibrated is placed on the calibration base 1 and positioned using the locating pin. Then, the hydraulic or pneumatic device 5 is controlled to lower the upper chamber 4.

[0026] The program control system 6 automatically closes the pressure control solenoid valve 8, checks the airtightness during inflation, and then opens the pressure control solenoid valve 8 to balance the pressure difference between the chamber and the atmosphere.

[0027] Close the pressure control solenoid valve 8 again, power on the probe card 3, and the air source control system 7 outputs a stable negative pressure to begin product calibration.

[0028] After the product is calibrated, the hydraulic or pneumatic device 5 is used to open the upper chamber 4 and remove the product 2 to be calibrated, thus completing one cycle.

[0029] This application consists of a control system and calibration analysis software forming the calibration interactive interface. The control system and calibration analysis software use existing technology and will not be described in detail here.

Claims

1. A differential pressure sensor calibration apparatus, characterized by: The test assembly comprises a calibration base (1), an upper chamber (4) and a probe card (3), a sealed calibration chamber is formed between the calibration base (1) and the upper chamber (4), the sealed calibration chamber is used for placing a product (2) to be calibrated, the probe card (3) is fixedly installed inside the upper chamber (4), a lifting driving device (5) is fixedly connected with the upper chamber (4), the lifting driving device (5) is used for driving the upper chamber (4) to perform lifting action, and the pressure control system is used for providing compressed air for the sealed calibration chamber.

2. A differential pressure sensor calibration device according to claim 1, wherein: The pressure control system comprises a program control system (6), a gas source control system (7) and a pressure control electromagnetic valve (8), the program control system (6) controls the on-off action of the pressure control electromagnetic valve (8), the gas source control system (7) provides a high-precision, linearly adjustable and stable pressure gas source, and provides negative pressure when the product is calibrated.

3. A differential pressure sensor calibration device according to claim 2, wherein: The pressure control electromagnetic valve (8) is fixedly installed on the upper chamber (4).

4. A differential pressure sensor calibration apparatus as claimed in claim 3, wherein: The probe card (3) provides power supply, grounding and output conduction when the product is calibrated.

5. A differential pressure sensor calibration apparatus as claimed in claim 4, wherein: A negative pressure gas source interface, a probe card power supply interface and a sealing detection device interface are formed on the upper chamber (4).

6. A differential pressure sensor calibration device according to any one of claims 1 to 5, wherein: Positioning pins are additionally arranged on the calibration base (1) to accurately position the product.

7. A differential pressure sensor calibration apparatus as claimed in claim 6, wherein: A silica gel pad is arranged at the connection between the upper chamber (4) and the calibration base (1).

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