Crystal orientation device

Abstract

The utility model discloses a crystal orientation device, which comprises an operation table, a crystal orientation device and a crystal orientation device, the crystal placing piece is arranged on the operation table, is suitable for placing a crystal and is positioned on one side of the reference plate in the first direction; the crystal adjusting assembly is arranged on the operation table and is in transmission connection with the crystal placing piece, and the crystal adjusting assembly selectively drives the crystal placing piece to move in the second direction, and / or in the third direction, and / or in the circumferential direction, so that the crystal on the crystal adjusting assembly is fit with the reference plate, the first direction, the second direction and the third direction are perpendicular to one another. Therefore, the crystal adjusting assembly is arranged on the operation table, and the crystal adjusting assembly drives the crystal placing piece to move in the second direction, the third direction and the circumferential direction, so that the crystal on the crystal adjusting assembly is matched with the reference plate, the adjustment of the crystal orientation can be facilitated, and the accuracy of crystal orientation can be further improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a crystal orientation instrument. Background Technology

[0002] In the semiconductor manufacturing industry, orientation analyzers are indispensable instruments in the precision manufacturing and processing of crystals. Utilizing the principle of X-ray diffraction, orientation analyzers can quickly determine the cutting angle of crystals, achieving precise directional cutting.

[0003] In existing technologies, the slots on the orientation instrument used to place the crystal cannot be rotated or adjusted, and the slots cause scratches and damage to the surface of the tumbled crystal rod during crystal orientation measurement. In addition, due to cutting and tumbling deviations during crystal orientation measurement, the crystal positioning surface cannot be completely aligned with the reference plane of the orientation instrument platform, which directly affects the accuracy of the crystal orientation measurement results and is detrimental to subsequent processing. Utility Model Content

[0004] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a crystal orientation instrument that can improve the accuracy of crystal orientation.

[0005] A crystal orientation instrument according to an embodiment of the present invention includes: an operating table on which a reference plate is disposed; a crystal placement component disposed on the operating table, the crystal placement component being adapted to place a crystal and located on one side of the reference plate in a first direction; and a crystal adjustment assembly disposed on the operating table and pulsatorically connected to the crystal placement component, the crystal adjustment assembly selectively driving the crystal placement component to move in a second direction, and / or in a third direction, and / or in the circumferential direction, so that the crystal on the crystal adjustment assembly is in contact with the reference plate, wherein the first direction, the second direction, and the third direction are perpendicular to each other.

[0006] Therefore, by setting a crystal adjustment assembly on the operating table, the crystal adjustment assembly drives the crystal placement component to move in the second direction, the third direction and the circumferential direction, so that the crystal on the crystal adjustment assembly is in contact with the reference plate. This facilitates the adjustment of the crystal orientation and thus improves the accuracy of crystal orientation.

[0007] According to some embodiments of the present invention, the crystal adjustment assembly includes a first adjustment member, the first adjustment member includes a first sliding plate and a first slider, the first sliding plate is disposed on the operating table, the first slider is slidably disposed on the first sliding plate in a second direction, and the first slider is connected to the crystal placement member.

[0008] According to some embodiments of the present invention, the crystal adjustment assembly includes a second adjustment member, the second adjustment member including a second sliding plate and a second slider, the second sliding plate being disposed on the operating table, the second slider being slidable in a third direction relative to the second sliding plate, and the second slider being connected to the crystal placement member.

[0009] According to some embodiments of the present invention, the second slide plate is connected to the first slider, one end of the second slider is connected to the crystal placement member, and the other end is slidably disposed on the second slide plate in a third direction.

[0010] According to some embodiments of the present invention, the crystal adjustment assembly further includes a third adjustment component, the third adjustment component includes a third slider, the operating table is provided with a slide groove, the slide groove is arc-shaped, and the third slider is circumferentially slidably disposed in the slide groove.

[0011] According to some embodiments of the present invention, the third adjusting member further includes a support plate, which is connected to the third slider, and the first sliding plate is connected to the support plate, and the first sliding plate is movable relative to the operating table.

[0012] According to some embodiments of the present invention, the support plate is spaced apart from the first slider, the second slider and the second sliding plate.

[0013] According to some embodiments of the present invention, the crystal placement component includes at least two rollers, which are disposed on one side of the reference plate in a first direction and extend in the first direction. Two adjacent rollers are disposed opposite each other in a second direction to define a crystal placement groove. The rollers are connected to the second slider and / or the support plate.

[0014] According to some embodiments of the present invention, one end of the roller shaft in the first direction is connected to the second slider, and the other end of the roller shaft in the first direction is connected to the support plate.

[0015] According to some embodiments of the present invention, the crystal orientation instrument further includes a universal joint coupling, a support plate is provided on the support plate, one end of the universal joint coupling is rotatably connected to the roller shaft, and the other end of the universal joint coupling is rotatably connected to the support.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0018] Figure 1 This is a schematic diagram of a crystal orientation instrument according to an embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of a crystal orientation instrument according to an embodiment of the present invention from another perspective;

[0020] Figure 3 This is a schematic diagram of a crystal orientation instrument according to an embodiment of the present invention from another perspective.

[0021] Figure label:

[0022] 100. Crystal orientation instrument; 200. Crystal;

[0023] 10. Control panel; 11. Reference plate; 12. Slide rail;

[0024] 20. Crystal placement component; 21. Roller shaft;

[0025] 30. Crystal adjustment assembly; 31. First adjustment component; 311. First sliding plate; 312. First slider; 32. Second adjustment component; 321. Second sliding plate; 322. Second slider; 33. Third adjustment component; 331. Third slider; 332. Support plate;

[0026] 40. Universal joint coupling; 50. Support; 60. Bearing housing; 70. Bearing housing bracket; 80. Z-type bracket. Detailed Implementation

[0027] The embodiments of the present invention are described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. The embodiments of the present invention are described in detail below.

[0028] The following is for reference. Figures 1-3 A crystal orientation instrument 100 according to an embodiment of the present invention is described.

[0029] Combination Figures 1-3 As shown, the crystal orientation instrument 100 according to the embodiment of the present utility model may mainly include: an operating table 10, a crystal placement component 20 and a crystal adjustment component 30. The operating table 10 is provided with a reference plate 11, and a reference surface that needs to be aligned with the wafer during orientation is provided on the reference plate 11, so as to ensure the accuracy of wafer orientation.

[0030] Furthermore, the crystal placement component 20 is disposed on the operating table 10. The crystal placement component 20 is adapted to place the crystal 200 and is located on one side of the reference plate 11 in the first direction. Specifically, in the embodiments of this utility model, the crystal placement component 20 is used to support the crystal 200 to be oriented on the crystal orienter 100, so as to ensure the structural stability of the crystal 200 during the orienting process and improve the accuracy of the crystal 200 orienting result.

[0031] Furthermore, the crystal placement component 20 is located on the operating table 10, which allows the operating table 10 to provide stable and reliable support for the crystal placement component 20, thereby ensuring the stability of the crystal 200 placed on the crystal placement component 20. Furthermore, the crystal placement component 20 is located on one side of the reference plate 11 in the first direction, so that when the crystal 200 is placed on the crystal placement component 20, it is close to the reference plate 11, so that the crystal 200 can be in contact with the reference surface on the reference plate 11.

[0032] Furthermore, the crystal adjustment assembly 30 is disposed on the operating table 10 and is connected to the crystal placement component 20 in a transmission manner. In this way, the crystal adjustment assembly 30 can drive the crystal 200 placement component to move on the operating table 10, thereby adjusting the position of the crystal placement component 20 on the operating table 10 relative to the reference plate 11 on the operating table 10, and thus adjusting the position of the crystal 200 on the crystal placement component 20 relative to the reference plate 11 on the operating table 10.

[0033] According to some embodiments of the present invention, the crystal adjustment assembly 30 selectively drives the crystal placement member 20 to move in the second direction so that the crystal 200 on the crystal adjustment assembly 30 engages with the reference plate 11.

[0034] According to some other embodiments of the present invention, the crystal adjustment assembly 30 selectively drives the crystal placement member 20 to move upward in a third direction, so that the crystal 200 on the crystal adjustment assembly 30 engages with the reference plate 11.

[0035] According to some other embodiments of the present invention, the crystal adjustment assembly 30 selectively drives the crystal placement member 20 to move in the circumferential direction so that the crystal 200 on the crystal adjustment assembly 30 engages with the reference plate 11.

[0036] According to some other embodiments of the present invention, the crystal adjustment assembly 30 selectively drives the crystal placement member 20 to move upward in a second direction and a third direction, so that the crystal 200 on the crystal adjustment assembly 30 engages with the reference plate 11.

[0037] According to some other embodiments of the present invention, the crystal adjustment assembly 30 selectively drives the crystal placement member 20 to move in the second direction and circumferential direction, so that the crystal 200 on the crystal adjustment assembly 30 engages with the reference plate 11.

[0038] According to some other embodiments of the present invention, the crystal adjustment assembly 30 selectively drives the crystal placement member 20 to move in the third direction and the circumferential direction, so that the crystal 200 on the crystal adjustment assembly 30 engages with the reference plate 11.

[0039] According to some other embodiments of the present invention, the crystal adjustment assembly 30 selectively drives the crystal placement member 20 to move in the second direction, the third direction and the circumferential direction, so that the crystal 200 on the crystal adjustment assembly 30 is engaged with the reference plate 11.

[0040] In embodiments of this utility model, the first direction, the second direction, and the third direction are perpendicular to each other.

[0041] If the crystal 200 is placed on the crystal placement component 20, and the end face of the crystal 200 axially close to the reference plate 11 cannot be matched with the reference surface on the reference plate 11, the crystal adjustment component 30 in this embodiment of the present invention can drive the crystal placement component 20 to rotate in multiple directions on the crystal orientation instrument 100 to find the peak value of the measured crystal orientation, that is, the deviation of the measured crystal orientation.

[0042] This not only increases the adjustment range of crystal 200 on crystal orientation instrument 100, enabling all-round adjustment of crystal 200 during orientation cutting, but also allows crystal 200 to be aligned with reference plate 11 to ensure the accuracy of crystal orientation measurement, thus avoiding errors in subsequent processes.

[0043] Therefore, by setting a crystal adjustment component 30 on the operating table 10, the crystal adjustment component 30 drives the crystal placement component 20 to move in the second direction, the third direction and the circumferential direction, so that the crystal 200 on the crystal adjustment component 30 is in contact with the reference plate 11. This facilitates the adjustment of the orientation of the crystal 200 and improves the accuracy of the crystal 200 orientation.

[0044] Combination Figures 1-3 As shown, the crystal adjustment assembly 30 includes a first adjustment member 31, which includes a first sliding plate 311 and a first slider 312. The first sliding plate 311 is disposed on the operating table 10, and the first slider 312 is slidably disposed on the first sliding plate 311 in a second direction. The first slider 312 is connected to the crystal placement member 20.

[0045] Specifically, in the crystal adjustment assembly 30, a first adjustment member 31, consisting of a first sliding plate 311 and a first slider 312, is provided to adjust the position of the crystal placement member 20 relative to the operating table 10 in the second direction. The first slider 312 is connected to the crystal placement member 20, allowing the crystal placement member 20 and the first slider 312 to move synchronously. The first slider 312 is slidably disposed on the first sliding plate 311 and is slidable relative to the first sliding plate 311 along the second direction, allowing the crystal placement member 20 and the first slider 312 to move together along the second direction.

[0046] Furthermore, the first slide plate 311 is set on the operating table 10. This not only ensures that the first slider 312 can move stably in the second direction relative to the first slide plate 311, but also allows the first slider 312 to drive the crystal placement member 20 to move in the second direction relative to the operating table 10 and the reference plate 11 on the operating table 10. In this way, the position of the crystal placement member 20 relative to the reference plate 11 in the second direction can be adjusted, and thus the position of the crystal 200 relative to the reference surface on the reference plate 11 in the second direction can be adjusted.

[0047] Combination Figures 1-2 As shown, the crystal adjustment assembly 30 includes a second adjustment member 32, which includes a second sliding plate 321 and a second slider 322. The second sliding plate 321 is disposed on the operating table 10, and the second slider 322 is slidable in the third direction relative to the second sliding plate 321. The second slider 322 is connected to the crystal placement member 20.

[0048] Specifically, in the crystal adjustment assembly 30, a first adjustment member 31, composed of a second sliding plate 321 and a second slider 322, is provided to adjust the position of the crystal placement member 20 relative to the operating table 10 in a third direction. The second slider 322 is connected to the crystal placement member 20, allowing the crystal placement member 20 and the second slider 322 to move synchronously. The second slider 322 is slidably disposed on the second sliding plate 321 and is slidable relative to the second sliding plate 321 in a third direction, thus allowing the crystal placement member 20 and the second slider 322 to move synchronously in a third direction.

[0049] Furthermore, the second slide plate 321 is mounted on the operating table 10. This not only ensures that the second slider 322 can move stably relative to the second slide plate 321 in a third direction, but also allows the second slider 322 to drive the crystal placement component 20 to move relative to the operating table 10 and the reference plate 11 on the operating table 10 in a third direction. In this way, the position of the crystal placement component 20 relative to the reference plate 11 in a third direction can be adjusted, and thus the position of the crystal 200 relative to the reference surface on the reference plate 11 in a third direction can be adjusted.

[0050] Combination Figures 1-2As shown, the second sliding plate 321 is connected to the first slider 312. Specifically, in the embodiment of this utility model, the second sliding plate 321 in the second adjusting member 32 is connected to the first slider 312 in the first adjusting member 31. In this way, the crystal adjusting assembly 30 can simultaneously realize the movement of the crystal placement member 20 relative to the reference plate 11 in the second direction and the third direction, and can realize the position adjustment of the crystal 200 relative to the reference surface in the second direction and the third direction.

[0051] Furthermore, one end of the second slider 322 is connected to the crystal placement member 20, and the other end is slidably disposed on the second slide plate 321 in the third direction. This arrangement not only enables the second slider 322 to drive the crystal placement member 20 to move in the third direction, but also enables the second slide plate 321 to be driven by the first slider 312 when the first slider 312 slides relative to the first slide plate 311 in the second direction, thereby driving the second slider 322 to slide in the second direction. This allows the position of the crystal 200 relative to the reference plane to be adjusted in the second and third directions.

[0052] In the embodiments of this utility model, the first sliding plate 311 and the support plate 332, as well as the second sliding plate 321 and the first slider 312, are all fixed by screws. The second slider 322 and the crystal placement component 20 can be connected by a Z-shaped bracket 80 to ensure that the crystal placement component 20 extends in the first direction. This can avoid the installation error of the crystal placement component 20 from affecting the deviation result of the crystal orientation measurement.

[0053] Combination Figures 1-2 As shown, the crystal adjustment assembly 30 also includes a third adjustment member 33, which includes a third slider 331. A slide groove 12 is provided on the operating table 10. The slide groove 12 is arc-shaped, and the third slider 331 is circumferentially slidable within the slide groove 12. Specifically, the third slider 331 is disposed in the slide groove 12 on the operating table 10 so that the third slider 331 is movable relative to the support plate 332.

[0054] In an embodiment of the present invention, the slide groove 12 extends circumferentially along at least a portion of the reference plate 11, so that the third slider 331 can slide in the slide groove 12 circumferentially along the reference plate 11.

[0055] Combination Figures 1-3 As shown, the third adjustment member 33 also includes a support plate 332, which is connected to the third slider 331. The first slide plate 311 is connected to the support plate 332 and is movable relative to the operating table 10. In this way, the support plate 332 and the first slide plate 311 can slide along the circumference of the reference plate 11, and the third adjustment member 33, the first adjustment member 31 and the second adjustment member 32 can slide along the circumference of the reference plate 11.

[0056] In the embodiments of this utility model, the support plate 332 is used to support the crystal placement component 20, the first adjustment component 31, and the second adjustment component 32. When the first adjustment component 31 adjusts the position of the crystal placement component 20 relative to the reference plate 11 along the second direction and / or the second adjustment component 32 adjusts the position of the crystal placement component 20 relative to the reference plate 11 along the third direction, the support plate 332 can drive the third slider 331 to slide in the groove 12 relative to the reference plate 11 along its circumference. In this way, when the first adjustment component 31 and / or the second adjustment component 32 move, the angle between the axial direction of the crystal 200 on the crystal placement component 20 and the reference surface on the reference plate 11 can be adjusted by the third adjustment component 33, thereby achieving the engagement of the crystal 200 with the reference surface and achieving accurate orientation of the crystal 200.

[0057] In this embodiment of the present invention, the end of the support plate 332 away from the reference plate 11 is L-shaped. This ensures the stability of the support plate 332 driving the third slider 331 to slide relative to the reference plate 11 in the slide groove 12 along its circumference, thereby improving the accuracy of the crystal orientation instrument 100 in determining the crystal orientation.

[0058] Combination Figure 2 As shown, the support plate 332 is spaced apart from the first slider 312, the second slider 322, and the second sliding plate 321. This arrangement prevents interference between the support plate 332 and any of the first slider 312, the second slider 322, and the second sliding plate 321, thereby ensuring the smoothness of the support plate 332 when it moves along the circumferential direction of the reference plate 11. This ensures the reliability of the crystal 200 on the crystal placement component 20 relative to the reference surface on the reference plate 11, and ensures the reliability of the crystal 200 engaging with the reference plate 11 under the action of the crystal adjustment component 30.

[0059] Combination Figure 2 and Figure 3 As shown, the crystal placement member 20 includes at least two rollers 21, which are disposed on one side of the reference plate 11 in a first direction and extend in the first direction. Two adjacent rollers 21 are disposed opposite each other in a second direction to define a crystal 200 placement groove.

[0060] Specifically, at least two rollers 21 on the crystal placement member 20 are used to support the crystal 200 to be oriented, which is placed on the crystal placement member 20, and can ensure the stability of the crystal 200 during orientation. The rollers 21 are located on one side of the reference plate 11 in the first direction, which can place the crystal 200 to be oriented on one side of the reference plate 11 in the first direction and prepare for the orientation of the crystal 200.

[0061] Furthermore, the roller 21 extends in the first direction, so that when the crystal 200 is placed on the roller 21, the axial direction of the crystal 200 can be made as perpendicular as possible to the reference surface on the reference plate 11. If there is a deviation between the axial section of the crystal 200 and the reference surface, the angle between the axial direction of the crystal 200 and the reference surface can be adjusted by the first adjusting member, the second adjusting member and the third adjusting member, so that the axial section of the crystal 200 is in contact with the reference surface.

[0062] Furthermore, at least two rollers 21 define a crystal 200 placement groove in the second direction, which ensures the stability of the crystal 200 placed on the crystal placement member 20 along the first direction.

[0063] In some embodiments of this utility model, the roller 21 is connected to the second slider 322.

[0064] In some other embodiments of this utility model, the roller 21 is connected to the support plate 332.

[0065] In some other embodiments of the present invention, the roller 21 is connected to the second slider 322 and the support plate 332.

[0066] Combination Figure 2 As shown, one end of the roller shaft 21 in the first direction is connected to the second slider 322, and the other end of the roller shaft 21 in the first direction is connected to the support plate 332. Specifically, in the embodiment of this utility model, the support plate 332 extends along the first direction on one side of the reference plate 11 in the first direction. The supporting force of the operating table 10 on one end of the roller shaft 21 in the first direction can be transmitted sequentially through the end of the support plate 332 near the first slide plate 311, the first slide plate 311, the first slider 312, the second slide plate 321, and the second slider 322. The supporting force of the operating table 10 on the other end of the roller shaft 21 in the first direction can be transmitted to the roller shaft 21 through the end of the support plate 332 near the reference plate 11. In this way, not only can the balance of the roller shaft 21 in the first direction be guaranteed, but also the roller shaft 21 can be rotated relative to the reference plate 11 in the second direction.

[0067] With this configuration, on the one hand, by sliding the first slider 312 along the second direction on the first slide plate 311, the angle between the projections of the crystal 200 and the reference plate 11 onto the plane formed by the first and second directions can be adjusted; by sliding the second slider 322 along the third direction on the second slide plate 321, the angle between the projections of the crystal 200 and the reference plate 11 onto the plane formed by the third and second directions can be adjusted. On the other hand, the third slider 331 can move circumferentially along the reference plate 11 in the slide groove 12, so that the end face of the crystal 200 axially close to the reference plate 11 can rotate relative to the reference surface on the reference plate 11. Thus, under the action of the first adjusting member 31 and the second adjusting member 32, the crystal 200 can be adjusted to be in contact with the reference plate 11, thereby ensuring the accuracy of the crystal 200 orientation.

[0068] Combination Figure 1 and Figure 2 As shown, the crystal orientation instrument 100 also includes a universal joint coupling 40, and a support 50 is provided on the support plate 332. One end of the universal joint coupling 40 is rotatably connected to the roller shaft 21, and the other end of the universal joint coupling 40 is rotatably connected to the support 50. Specifically, at the end of the support plate 332 near the reference plate 11 in the first direction, the support plate 332 is provided with the support 50, which is used to mount the universal joint coupling 40. The end of the roller shaft 21 near the reference plate 11 in the first direction is connected to the universal joint coupling 40, so that the end of the roller shaft 21 near the reference plate 11 in the first direction can rotate relative to the support plate 332 in any direction.

[0069] With this configuration, when the second slider 322 slides relative to the second slide plate 321 in the third direction, the end of the roller 21 near the reference plate 11 in the first direction can rotate relative to the support 50 in the third direction, thereby adjusting the angle between the projections of the crystal 200 and the reference plate 11 on the reference plane formed by the third and second directions, so that the crystal 200 and the reference plate 11 are in contact.

[0070] Further (supplementing other structures) in this embodiment of the utility model, the roller 21 is a cylindrical structure, and a bearing seat 60 is provided at the end of the roller 21 in the first direction near the reference plate 11. The bearing seat 60 is located on the bearing seat support 70, and the bearing seat support 70 is connected to the end of the universal joint coupling 40 away from the support 50. With this arrangement, not only can the end of the roller 21 in the first direction near the reference plate 11 rotate relative to the support plate 332 in any direction, but the roller 21 can also rotate 360° around its axial direction. In this way, during the orientation process of the crystal 200, the roller 21 will not damage the surface of the crystal 200, and the crystal 200 can be adjusted in all directions during the orientation process. This can meet the various crystal orientation measurement and adjustment conditions, and can better solve the problem of inaccurate crystal orientation measurement caused by the deviation in the crystal 200 cutting and grinding process, which causes the axial end face of the crystal 200 to not match the reference plane of the crystal orientation instrument 100.

[0071] In embodiments of this utility model, the bearing housing 60 includes, but is not limited to, a T-shaped bearing housing 60, and the roller shaft 21 includes, but is not limited to, a rubber-coated roller shaft 21. The rubber-coated roller shaft 21 can make the contact surface between the roller shaft 21 and the crystal 200 smoother, so as to avoid damage to the crystal 200.

[0072] This embodiment of the invention simply adds a crystal adjustment component 30 to the existing crystal orientation instrument 100, which has certain applicability. The crystal adjustment component 30 allows for quick and accurate crystal orientation determination without damaging the crystal 200, thus avoiding inaccurate or impossible measurements. The crystal orientation instrument 100 of this embodiment can be adjusted omnidirectionally during crystal orientation determination, meeting more positional and angular requirements for crystal orientation determination of the crystal 200, and enabling precise adjustment. The crystal orientation instrument 100 of this embodiment has a simple structure, is easy to operate, has high efficiency, and avoids workpiece damage during use.

[0073] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "circumferential", "radial", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0074] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0075] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A crystal orientation apparatus characterized by comprising: The utility model relates to a crystal cutting device, which comprises: an operation table provided with a reference plate; a crystal placing part provided on the operation table, the crystal placing part being adapted to place a crystal and located on one side of the reference plate in a first direction; a crystal adjusting assembly provided on the operation table and in transmission connection with the crystal placing part, the crystal adjusting assembly selectively driving the crystal placing part to move in a second direction, and / or in a third direction, and / or in a circumferential direction, so that the crystal on the crystal adjusting assembly is in contact with the reference plate, wherein the first direction, the second direction and the third direction are perpendicular to each other.

2. The crystal orientation apparatus according to claim 1, characterized by The crystal adjusting assembly comprises a first adjusting part, the first adjusting part comprising a first sliding plate and a first sliding block, the first sliding plate being provided on the operation table, the first sliding block being slidably provided on the first sliding plate in the second direction, and the first sliding block being connected with the crystal placing part.

3. The crystal orienter of claim 2, wherein The crystal adjusting assembly comprises a second adjusting part, the second adjusting part comprising a second sliding plate and a second sliding block, the second sliding plate being provided on the operation table, the second sliding block being slidably provided on the second sliding plate in the third direction, and the second sliding block being connected with the crystal placing part.

4. The crystal orienter of claim 3, wherein The second sliding plate is connected with the first sliding block, one end of the second sliding block is connected with the crystal placing part, and the other end of the second sliding block is slidably provided on the second sliding plate in the third direction.

5. The crystal orientation apparatus according to claim 3, wherein The crystal adjusting assembly further comprises a third adjusting part, the third adjusting part comprising a third sliding block, a sliding groove being provided on the operation table, the sliding groove being in the shape of a circular arc, and the third sliding block being slidably provided in the sliding groove in a circumferential direction.

6. The crystal orienter of claim 5, wherein The third adjusting part further comprises a supporting plate, the supporting plate being connected with the third sliding block, the first sliding plate being connected with the supporting plate, and the first sliding plate being movable relative to the operation table.

7. The crystal orientation apparatus according to claim 6, characterized by The supporting plate is spaced apart from the first sliding block, the second sliding block and the second sliding plate.

8. The crystal orienter of claim 6, wherein The crystal placing part comprises at least two rollers, the rollers being provided on one side of the reference plate in the first direction and extending in the first direction, adjacent two rollers being oppositely provided in the second direction to define a crystal placing groove, and the rollers being connected with the second sliding block and / or the supporting plate.

9. The crystal orientation apparatus according to claim 8, characterized by One end of the roller in the first direction is connected with the second sliding block, and the other end of the roller in the first direction is connected with the supporting plate.

10. The crystal orientation apparatus according to claim 8, characterized by Further comprising a universal joint, a support being provided on the supporting plate, one end of the universal joint being rotatably connected with the roller, and the other end of the universal joint being rotatably connected with the support.

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