Semi-automatic constant-speed extinction device

Abstract

The utility model discloses a semi-automatic constant-speed extinction device, which belongs to the technical field of extinction exposure and comprises a variable frequency motor, the top of a base is fixedly connected with a short fixing support and a bearing support, the top of the base is provided with a sliding groove, and the base is slidably connected with a long fixing support through the sliding groove. The outer side walls of the short fixing support and the long fixing support are rotationally connected with fixing shafts, the long fixing support is fixedly connected with a triangular leaning body through the fixing shafts, the outer side wall of the bearing support is rotationally connected with a rotating shaft, and the short fixing support is sleeved with extinction adhesive tape through the fixing shafts. According to the semi-automatic constant-speed delustering device, the rotating shaft is driven by the arranged variable frequency motor to roll one end of the delustering adhesive tape, so that a semiconductor sample moves along with the delustering adhesive tape, and the delustering adhesive tape is fully adhered to the back surface of the sample through the triangular leaning body mounted on the outer side wall of the fixed shaft in the middle; therefore, the sample can be rapidly and uniformly subjected to extinction treatment, and compared with manual extinction, the efficiency is higher, and the extinction effect is better.

Description

Technical Field

[0001] This utility model belongs to the field of extinction exposure technology, specifically, it relates to a semi-automatic uniform speed extinction device. Background Technology

[0002] Conventional semiconductors take into account the reflection of semiconductor materials before exposure. If the wafer substrate is a highly reflective material such as glass or metal, there will be a light reflection problem. When the exposure process is performed, some light is reflected and some light passes through the substrate into the bottom layer. The reflected light will return to the photoresist layer, which will lead to overexposure of the photoresist or interference with the original light, making the exposed image blurry or distorted.

[0003] An anti-reflective layer is usually applied before photoresist to absorb interference or reflected light. Currently, manual coating is commonly used, but the coating process is complex, which affects the processing progress of subsequent processes and leads to a decrease in the extinction efficiency of the sample.

[0004] To address the aforementioned problems, this application proposes a semi-automatic uniform speed extinction device. Utility Model Content

[0005] In view of the problems in the related technologies, this utility model proposes a semi-automatic uniform speed extinction device to overcome the above-mentioned technical problems existing in the existing related technologies.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A semi-automatic uniform speed matting device includes a variable frequency motor. A base is fixedly connected to the outer wall of the variable frequency motor. A short fixed bracket and a bearing bracket are fixedly connected to the top of the base. A sliding groove is provided on the top of the base. A long fixed bracket is slidably connected to the base through the sliding groove. Fixed shafts are rotatably connected to the outer walls of both the short and long fixed brackets. A triangular support is fixedly connected to the long fixed bracket through the fixed shaft. A rotating shaft is rotatably connected to the outer wall of the bearing bracket. Matting tape is sleeved on the short fixed bracket through the fixed shaft.

[0008] Preferably, the three sides of the triangular abutment have different curvatures.

[0009] Preferably, a positioning box is fixedly connected to the top of the base, and a shrinkage groove is provided inside the positioning box. A spring is fixedly connected to the positioning box through the shrinkage groove. A limit plate is fixedly connected to the end of the spring away from the base, and an arc-shaped limit block is fixedly connected to the side of the limit plate away from the spring.

[0010] Preferably, the base has a positioning groove through a sliding groove, and a sliding shaft is slidably connected to the base through the positioning groove. The side of the sliding shaft near the long fixed bracket is fixedly connected to the long fixed bracket.

[0011] Preferably, both the fixed shaft and the outer wall of the positioning groove are threaded with locking bolts.

[0012] Preferably, the output end of the variable frequency motor is fixedly connected to a drive shaft, and the outer side wall of the bearing bracket is rotatably connected to a rotating shaft. The end of the drive shaft away from the variable frequency motor is fixedly connected to the rotating shaft.

[0013] In summary, the technical effects and advantages of this utility model are as follows: This semi-automatic uniform speed matting device uses a variable frequency motor to drive a rotating shaft to wind up one end of the matting tape, allowing the semiconductor sample to move along with the matting tape. The triangular support installed on the outer wall of the fixed shaft in the middle spreads the matting tape evenly onto the back of the sample, thus enabling rapid and uniform matting treatment of the sample. Compared with manual matting, it is more efficient and has a better matting effect. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0015] Figure 2 This is a schematic diagram of the triangular support body and related structures of this utility model;

[0016] Figure 3 This is a schematic diagram of the sliding shaft and related structures of this utility model;

[0017] Figure 4 This is a schematic diagram of the arc-shaped limiting block and its related structures of this utility model.

[0018] In the diagram: 1. Variable frequency motor; 2. Base; 3. Positioning box; 4. Locking bolt; 5. Drive shaft; 6. Short fixed bracket; 7. Long fixed bracket; 8. Bearing bracket; 9. Fixed shaft; 10. Rotating shaft; 11. Triangular support; 12. Sliding shaft; 13. Slide groove; 14. Positioning groove; 15. Shrinkage groove; 16. Spring; 17. Limiting plate; 18. Arc-shaped limiting block; 19. Matte adhesive tape. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0020] Reference Figure 1-2A semi-automatic uniform speed matting device includes a variable frequency motor 1. A base 2 is fixedly connected to the outer wall of the variable frequency motor 1. A short fixed bracket 6 and a bearing bracket 8 are fixedly connected to the top of the base 2. A sliding groove 13 is provided on the top of the base 2. A long fixed bracket 7 is slidably connected to the base 2 through the sliding groove 13. A fixed shaft 9 is rotatably connected to the outer walls of both the short fixed bracket 6 and the long fixed bracket 7. A triangular support body 11 is fixedly connected to the long fixed bracket 7 through the fixed shaft 9. A rotating shaft 10 is rotatably connected to the outer wall of the bearing bracket 8. A matting tape 19 is sleeved on the short fixed bracket 6 through the fixed shaft 9. By moving the long fixed bracket 7 inside the sliding groove 13, the position of the long fixed bracket 7 can be adjusted according to the size of the sample. The long fixed bracket 7 drives the fixed shaft 9 and the triangular support body 11 to support the matting tape 19, so that the matting tape 19 can be effectively adhered to the back of the sample, and the sample can be effectively matted.

[0021] Reference Figure 2 The three sides of the triangular support 11 have different curvatures. By making the curvatures of the three sides of the triangular support 11 different, the matte tape 19 is supported by adjusting the different curvatures, so that the matte tape 19 can be effectively adhered to the back of the sample, preventing omissions or incomplete matte treatment.

[0022] Reference Figure 4 A positioning box 3 is fixedly connected to the top of the base 2. The positioning box 3 has a shrinkage groove 15 inside. A spring 16 is fixedly connected to the positioning box 3 through the shrinkage groove 15. A limit plate 17 is fixedly connected to the end of the spring 16 away from the base 2. An arc-shaped limit block 18 is fixedly connected to the side of the limit plate 17 away from the spring 16. By making the spring 16 inside the positioning box 3 squeeze the limit plate 17, the limit plate 17 drives the arc-shaped limit block 18 to squeeze and limit the matte tape 19, which can prevent the matte tape 19 from shifting its position when rotating.

[0023] Reference Figure 3 The base 2 has a positioning groove 14 through the slide groove 13. The base 2 is slidably connected to the sliding shaft 12 through the positioning groove 14. The side of the sliding shaft 12 near the long fixed bracket 7 is fixedly connected to the long fixed bracket 7. The sliding shaft 12 moves inside the positioning groove 14 and drives the long fixed bracket 7 to slide inside the slide groove 13. The position of the long fixed bracket 7 at the top of the base 2 can be adjusted so that the long fixed bracket 7 drives the triangular support body 11 to support the matte tape 19.

[0024] Reference Figure 1The outer walls of the fixed shaft 9 and the positioning groove 14 are threaded with locking bolts 4. The locking bolts 4 on the outer walls of the fixed shaft 9, the sliding shaft 12 and the positioning groove 14 can fix the position of the fixed shaft 9, the sliding shaft 12 and the positioning groove 14, preventing the device from shaking during use and making the device more stable.

[0025] Reference Figure 1 The output end of the variable frequency motor 1 is fixedly connected to the drive shaft 5, and the outer side wall of the bearing bracket 8 is rotatably connected to the rotating shaft 10. The end of the drive shaft 5 away from the variable frequency motor 1 is fixedly connected to the rotating shaft 10. The variable frequency motor 1 drives the drive shaft 5 to rotate, so that the drive shaft 5 can drive the rotating shaft 10 to run. Thus, the rotating shaft 10 can be used to wind up one end of the matte tape 19, so that the matte tape 19 can effectively perform matte treatment on the sample.

[0026] Working principle: By placing the matte tape 19 on the fixed shaft 9 at the top of the short fixed bracket 6, the arc-shaped limiting block 18 holds the matte tape 19 in place. Pull out the matte tape 19, and the back of the matte tape 19 passes through the triangular abutment 11. Select a suitable surface of the triangular abutment 11, and adjust the long fixed bracket 7 to a suitable position in the slide groove 13 via the sliding shaft 12. Then, the end of the matte tape 19 away from the short fixed bracket 6 is attached to the rotating shaft 10. Turn on the frequency converter motor 1 to drive the rotating shaft 10 to wind up the matte tape 19. Place the back of the sample that needs to be matted against the triangular abutment 11 and move synchronously with the matte tape 19. When the back of the sample is completely covered with the matte tape 19, stop the frequency converter motor 1. Cut off the sample with the matte tape 19 attached to its back with scissors, thus matting the back of the sample.

[0027] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A semi-automatic constant-velocity extinction device comprising a variable frequency motor (1), characterized in that, The outer side wall of the variable frequency motor (1) is fixedly connected with a base (2), the top of the base (2) is fixedly connected with a short fixed support (6) and a bearing support (8), the top of the base (2) is provided with a sliding groove (13), the base (2) is slidably connected with a long fixed support (7) through the sliding groove (13), the outer side wall of the short fixed support (6) and the long fixed support (7) is rotatably connected with a fixed shaft (9), the long fixed support (7) is fixedly connected with a triangular body (11) through the fixed shaft (9), the outer side wall of the bearing support (8) is rotatably connected with a rotating shaft (10), the short fixed support (6) is sleeved with an extinction adhesive tape (19) through the fixed shaft (9).

2. A semi-automatic constant velocity extinction device according to claim 1, characterized in that, The three edges of the triangular body (11) are inconsistent in curvature.

3. A semi-automatic constant velocity extinction device according to claim 1, wherein The top of the base (2) is fixedly connected with a positioning box (3), the inside of the positioning box (3) is provided with a contraction groove (15), the positioning box (3) is fixedly connected with a spring (16) through the contraction groove (15), the end, away from the base (2), of the spring (16) is fixedly connected with a limiting plate (17), the side, away from the spring (16), of the limiting plate (17) is fixedly connected with an arc-shaped limiting block (18).

4. A semi-automatic constant velocity extinction device according to claim 1, wherein The base (2) is provided with a positioning groove (14) through the sliding groove (13), the base (2) is slidably connected with a sliding shaft (12) through the positioning groove (14), the side, close to the long fixed support (7), of the sliding shaft (12) is fixedly connected with the long fixed support (7).

5. A semi-automatic constant velocity extinction device according to claim 4, wherein The outer side wall of the fixed shaft (9) and the positioning groove (14) is threadedly connected with a locking bolt (4).

6. A semi-automatic constant velocity extinction device according to claim 1, wherein The output end of the variable frequency motor (1) is fixedly connected with a driving shaft (5), the outer side wall of the bearing support (8) is rotatably connected with a rotating shaft (10), the end, away from the variable frequency motor (1), of the driving shaft (5) is fixedly connected with the rotating shaft (10).

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