Boat inlet and outlet conveying device of ALD (atomic layer deposition) equipment

Abstract

The utility model provides an in-out boat conveying device of ALD (atomic layer deposition) equipment, which comprises a fixing frame, a boat support mechanism, a boat storage mechanism and a conveying mechanism, and the conveying mechanism is provided with a boat support in-place detection module and a first boat in-place detection module. The boat support in-place detection module is used for detecting whether a boat support mechanism is arranged on the conveying mechanism or not, the first boat in-place detection module is used for detecting whether a slide boat is arranged on the boat support mechanism located at the boat transplanting position or not, and by means of the device, the accuracy of slide boat transferring is improved, and then the failure rate of the in-out boat conveying device can be reduced; the conveying mechanism is also provided with a double-module synchronous belt conveying structure; according to the utility model, an independent boat supporting mechanism is also arranged for supporting the slide glass boat, so that separated supporting and conveying are realized; according to the utility model, a guiding and position correcting structure is arranged on the boat support mechanism and the conveying mechanism, and the designed guiding and position correcting structure can well realize accurate positioning of the boat support mechanism in actual movement.

Description

Technical Field

[0001] This utility model belongs to the field of solar cell technology, and more specifically, it relates to an inlet and outlet conveying device for an ALD device. Background Technology

[0002] With the continuous development of the photovoltaic industry, solar cell technology is constantly being updated and iterated, and ALD (atomic layer deposition) equipment is being used more and more widely in the production process of solar cells.

[0003] Existing ALD (Alternating Discharge) equipment mainframe's loading, unloading, and storage systems typically employ a structure where the boat support mechanism is mounted on the slider of the conveyor mechanism. The boat support mechanism is driven by a rack and pinion system to reciprocate and feed the load boats. Simultaneously, a hoisting mechanism is used to transfer the load boats. However, if the contact switch signal on the hoisting mechanism malfunctions, resulting in the loss of a "boat present" or "boat absent" signal, it can lead to a "boat collision," increasing the failure rate of the ALD equipment mainframe's loading, unloading, and storage system.

[0004] Meanwhile, based on comprehensive considerations of process stability, precise control, convenient maintenance, and cost control for conveying and temporarily storing metal boats in the main ALD equipment platform, there is an urgent need for a superior control and conveying device for the main ALD equipment platform to enter and exit the boat, in order to adapt to the rapidly evolving technological needs of the solar cell industry. Utility Model Content

[0005] The purpose of this invention is to provide an inbound / outbound conveyor for ALD equipment, which aims to reduce the failure rate of the inbound / outbound conveyor for ALD equipment.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] This utility model provides an inlet / outlet conveying device for ALD equipment, comprising:

[0008] Fixture;

[0009] Boat support mechanism, used to support the film carrier boat;

[0010] A boat storage mechanism, installed on the fixed frame, is used to temporarily store the boat support mechanism;

[0011] A conveying mechanism is installed on the fixed frame and located above the boat storage mechanism. Its two ends are the boat support entry / exit position and the boat transfer position, respectively, and it is used to transport the boat support mechanism back and forth between the boat support entry / exit position and the boat transfer position.

[0012] The conveying mechanism is equipped with a boat support in-situ detection module and a first boat in-situ detection module. The boat support in-situ detection module is used to detect whether the boat support mechanism is on the conveying mechanism, and the first boat in-situ detection module is used to detect whether the carrier boat is on the boat support mechanism located at the boat transplanting position.

[0013] Furthermore, the conveying mechanism is also equipped with a deceleration detection module and a stop detection module. The deceleration detection module is used to detect whether the boat support mechanism has reached the boat support deceleration position, and the stop detection module is used to detect whether the boat support mechanism has reached the boat transfer position.

[0014] Furthermore, the conveying mechanism includes a first conveying module and a second conveying module arranged opposite to each other, and the first conveying module and the second conveying module respectively convey the boat support mechanism through a first synchronous belt and a second synchronous belt.

[0015] Furthermore, the boat support in-situ detection module adopts a through-beam photoelectric sensor, with the transmitting end of the through-beam photoelectric sensor installed on the first conveying module and the receiving end of the through-beam photoelectric sensor installed on the second conveying module.

[0016] Furthermore, the positioning stop detection module is installed near the end of the second conveying module, and the distance between the positioning stop detection module and the end of the second conveying module is t. The total length of the second conveying module is S. The transmitting end of the through-beam photoelectric sensor is installed at the starting end of the first conveying module, and the installation distance between the receiving end and the transmitting end along the conveying direction of the second synchronous belt is X, where X > SLt.

[0017] Furthermore, it also includes:

[0018] A guide assembly is installed on the first conveying module and the second conveying module, and is used to guide and define the position of the boat support mechanism on the conveying mechanism.

[0019] Furthermore, the guiding component includes a first guide bar installed on the first conveying module and located on one side of the first synchronous belt, a second guide bar installed on the second conveying module and located on one side of the second synchronous belt, a first positioning block installed at the end of the first conveying module, and a second positioning block installed at the end of the second conveying module.

[0020] Furthermore, the guiding assembly includes a plurality of guide blocks mounted on the first conveying module and the second conveying module.

[0021] Furthermore, each of the guide blocks is provided with at least one oblong hole, which is used to adjust the installation position of the guide block.

[0022] Furthermore, the boat support mechanism includes:

[0023] The first support includes a first support side plate and a second support side plate arranged opposite to each other, and a first support top plate and a second support top plate spaced apart between the first support side plate and the second support side plate. Guide wheels are provided on both the first support side plate and the second support side plate, and the guide wheels cooperate with the guide blocks to form a guiding and positioning structure.

[0024] Multiple first support columns are erected on the first support top plate and the second support top plate, and are used to jointly support the slide boat.

[0025] Furthermore, the first support side plate, the first support top plate, the second support side plate, and the second support top plate together form a receiving area, and a buffer pad is provided in the receiving area to catch the battery cells falling from the carrier boat.

[0026] Furthermore, there are four first support columns, two of which are erected at intervals on the first support top plate and the top of the two first support columns are provided with positioning pins, and the other two first support columns are erected at intervals on the second support top plate.

[0027] Furthermore, the boat storage mechanism includes: a second bracket and a plurality of second support columns erected on the second bracket. A second boat in-situ detection module is provided on the top of some of the second support columns. The second boat in-situ detection module is used to detect whether the boat support mechanism is on the boat storage mechanism.

[0028] Compared with the prior art, the beneficial effects of the inlet and outlet conveying device for ALD equipment provided by this utility model are as follows:

[0029] 1. This utility model can detect whether there is a boat support mechanism and a plate carrier boat on the conveying mechanism, ensuring that the plate carrier boat can be accurately transferred to the storage boat mechanism through the boat hoisting mechanism, thereby improving the accuracy of plate carrier boat transfer and reducing the failure rate of the inlet and outlet boat conveying device.

[0030] 2. The present invention adopts a dual-module synchronous belt conveyor structure for the conveying mechanism, which has the advantages of smooth and stable conveying, accurate detection, control and positioning, low noise, high conveying cleanliness and easy installation and maintenance.

[0031] 3. This utility model utilizes an independent boat support mechanism to support the cell carrier boat, achieving separate support and transportation. This reduces the cell breakage rate caused by impact vibration during operation of an integrated support and transportation structure, and improves the convenience of equipment installation and maintenance.

[0032] 4. This utility model adopts a guide and positioning structure on the boat support mechanism and the conveying mechanism. The designed guide and positioning structure can achieve accurate positioning of the boat support mechanism in actual movement. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 A three-dimensional structural diagram of the inlet and outlet boat conveyor device in the existing ALD equipment;

[0035] Figure 2 A three-dimensional structural schematic diagram of the inlet and outlet boat conveying device of the ALD equipment provided in the preferred embodiment of this utility model;

[0036] Figure 3 A top view of the inlet and outlet conveyor device of the ALD equipment provided in the preferred embodiment of this utility model;

[0037] Figure 4 A three-dimensional structural schematic diagram of a boat support mechanism for carrying a plank boat, provided for a preferred embodiment of the present utility model;

[0038] Figure 5 A three-dimensional structural schematic diagram of the boat support mechanism provided in a preferred embodiment of this utility model;

[0039] Figure 6 A top view of the boat support mechanism provided in a preferred embodiment of this utility model;

[0040] Figure 7 for Figure 6 Enlarged structural diagram at point A in the middle;

[0041] Figure 8 A three-dimensional structural schematic diagram of the boat storage mechanism provided in a preferred embodiment of this utility model;

[0042] Figure 9 A schematic flowchart of the control method for the inlet and outlet conveying device of the ALD equipment provided in a preferred embodiment of this utility model;

[0043] The main markings in the attached figures are as follows:

[0044] 1. Carrying boat; 2. Boat support mechanism; 3. Conveying mechanism; 4. Fixing frame; 5. Boat storage mechanism;

[0045] 21. First support column; 22. First bracket; 23. Buffer pad; 24. Positioning pin; 25. Guide wheel; 221. First support side plate; 222. Second support side plate; 223. First support top plate; 224. Second support top plate;

[0046] 31. First conveyor module; 32. Second conveyor module; 310. First synchronous belt; 320. Second synchronous belt;

[0047] 41. Slider; 42. Slide rail;

[0048] 51. Second support column; 52. Second bracket;

[0049] 61. Boat in-situ detection module; 62. First boat in-situ detection module; 63. Arrival and stop detection module; 64. Second boat in-situ detection module; 65. Deceleration detection module; 611. Transmitter; 612. Receiver;

[0050] 71. First guide bar; 72. Second guide bar; 73. First stop block; 74. Second stop block; 75. Guide block; 751. Waist-shaped hole; 752. Circular hole. Detailed Implementation

[0051] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0052] Please see Figure 1 The existing ALD equipment main unit's boat loading and unloading storage system mostly adopts a structure in which the boat support mechanism 2 is installed on the slider 41 of the conveying mechanism 3, and the boat support mechanism 2 is driven to reciprocate to feed the boat through a gear and rack transmission. The existing structure has the following disadvantages: 1) The slide rail 42 is long, requiring multiple segments to be spliced, which has high requirements for installation and positioning, high maintenance difficulty, and high manufacturing cost; 2) The power transmission rack is long, requiring multiple segments to be spliced, which has high requirements for installation and positioning, high maintenance difficulty, and high manufacturing cost; 3) The splicing points of the slide rail 42 are prone to impact vibration, which leads to an increase in the breakage rate of the battery cells and a large amount of transmission noise; 4) The splicing points of the rack are prone to impact vibration, which leads to an increase in the breakage rate of the battery cells and a large amount of transmission noise; 5) The internal operating temperature of the equipment is relatively high. The slide rail 42 and the rack are located between the processed stage and the unprocessed stage. The lubricating grease on the slide rail 42 and the rack is prone to volatilization in the high temperature environment and contaminates the battery cells; 6) The boat support mechanism 2 is fixed on the conveying structure. This integrated structure is time-consuming and labor-intensive to disassemble and assemble during maintenance.

[0053] Meanwhile, a hoisting mechanism is used to transfer the sheet carrier boat. However, if the contact switch signal on the hoisting mechanism malfunctions, resulting in the loss of a "boat present" or "boat absent" signal, it may cause a "boat collision" accident, which will increase the failure rate of the ALD equipment's main unit's boat loading, unloading, and storage system.

[0054] In response, this utility model, based on comprehensive considerations of process stability, precise control, convenient maintenance, and cost control of conveying and temporarily storing metal boats in the main unit of ALD equipment, provides a superior control and conveying device for the main unit of ALD equipment to enter and exit the boat, in order to adapt to the rapidly evolving technological needs of the solar cell industry.

[0055] Please refer to the following: Figures 2 to 9 The preferred embodiment of this utility model provides an inlet / outlet conveying device for an ALD device, comprising:

[0056] Mounting bracket 4;

[0057] Boat support mechanism 2 is used to support the slide boat 1;

[0058] The boat storage mechanism 5 is installed on the fixed frame 4 and is used to temporarily store the boat support mechanism 2;

[0059] The conveying mechanism 3 is installed on the fixed frame 4 and located above the boat storage mechanism 5. Its two ends are the boat support entry / exit position and the boat transfer position, respectively, and it is used to convey the boat support mechanism 2 back and forth between the boat support entry / exit position and the boat transfer position.

[0060] The conveying mechanism 3 is equipped with a boat support in-situ detection module 61 and a first boat in-situ detection module 62. The boat support in-situ detection module 61 is used to detect whether there is a boat support mechanism 2 on the conveying mechanism 3, and the first boat in-situ detection module 62 is used to detect whether there is a carrier boat 1 on the boat support mechanism 2 located at the boat transplanting position.

[0061] The ALD equipment loading and unloading boat conveying device provided by this utility model adopts a boat support in-situ detection module 61 and a first boat in-situ detection module 62 on the conveying mechanism 3. This allows the device to detect whether there is a boat support mechanism 2 and a plate carrier boat 1 on the conveying mechanism 3, ensuring that the plate carrier boat 1 can be accurately transferred to the storage boat mechanism 5 through the lifting boat mechanism. This improves the accuracy of plate carrier boat transfer and reduces the failure rate of the loading and unloading boat conveying device.

[0062] In a preferred embodiment, such as Figure 3 As shown, the conveying mechanism 3 is also equipped with a deceleration detection module 65 and a stop detection module 63. The deceleration detection module 65 is used to detect whether the boat support mechanism 2 has reached the boat support deceleration position, and the stop detection module 63 is used to detect whether the boat support mechanism 2 has reached the boat transfer position.

[0063] It should be noted that the "boat carrier entry / exit position" refers to the position where the boat carrier mechanism 2 enters or exits the transmission mechanism 3, and this position is located at the end of the transmission mechanism 3 closest to the solar cell coating equipment. The "boat transfer position" refers to the position where the solar cell carrier boat 1 on the transmission mechanism 3 is lifted by the hoisting boat mechanism, and also refers to the position where the transmission mechanism 3 receives the solar cell carrier boat 1 transferred by the hoisting boat mechanism; this position is also located at the end of the transmission mechanism 3 closest to the solar cell coating equipment. The "boat carrier deceleration position" refers to the position where the transmission mechanism 3 is triggered to decelerate, allowing the boat carrier mechanism 2 to smoothly and stably decelerate to the boat transfer position.

[0064] It should also be noted that the present invention may be equipped with any one of photoelectric sensors, proximity switches and contact switches for the boat support in-position detection module 61, the first boat in-position detection module 62, the in-position stop detection module 63 and the deceleration detection module 65.

[0065] In a preferred embodiment, such as Figure 2 and Figure 3 As shown, the conveying mechanism 3 includes a first conveying module 31 and a second conveying module 32 arranged opposite to each other. The first conveying module 31 and the second conveying module 32 respectively convey the boat support mechanism 2 through the first synchronous belt 310 and the second synchronous belt 320.

[0066] It should be understood that the first conveying module 31 and the second conveying module 32 operate on the same principle. Taking the first conveying module 31 as an example, the first conveying module 31 mainly includes a driving wheel, a driven wheel, a first synchronous belt 310, and a servo motor. For example, the driving wheel is installed at the beginning of the first conveying module 31, the driven wheel is installed at the end of the first conveying module 31, and the first synchronous belt 310 connects the driving wheel and the driven wheel. The servo motor drives the driving wheel to rotate, and the first synchronous belt 310 drives the driven wheel to rotate. At the same time, the boat-carrying mechanism 2 moves with the first synchronous belt 310. Furthermore, the first conveying module 31 and the second conveying module 32 can share a single servo motor. For example, the driving wheel of the first conveying module 31 is connected to the driving wheel of the second conveying module 32 through a connecting shaft. This allows the two driving wheels of the conveying mechanism 3 to rotate synchronously through a single servo motor, driving the first synchronous belt 310 and the second synchronous belt 320 to move synchronously, thus enabling the conveying mechanism 3 to transport the boat-carrying mechanism 2.

[0067] The ALD equipment inlet / outlet conveying device provided by this utility model features a dual-module synchronous belt conveying structure in its conveying mechanism 3. Servo motors drive the first and second conveying modules to operate smoothly and precisely without impact vibration, reducing transmission noise. This conveying method also boasts low manufacturing, installation, and maintenance costs, convenient debugging, and strong compatibility. Furthermore, this inlet / outlet conveying device eliminates grease contamination sources, improving the cleanliness of the equipment's interior. The synchronous belt conveying structure also provides shock absorption, reducing fragmentation and increasing equipment output and yield.

[0068] In a preferred embodiment, such as Figure 3 As shown, the boat carrier in-situ detection module 61 adopts a through-beam photoelectric sensor. The transmitting end 611 of the through-beam photoelectric sensor is installed on the first conveying module 31, and the receiving end 612 of the through-beam photoelectric sensor is installed on the second conveying module 32.

[0069] The boat support presence detection module 61 employs a through-beam photoelectric sensor, with the transmitter 611 and receiver 612 of the through-beam photoelectric sensor respectively positioned on the first conveying module 31 and the second conveying module 32. This boat support presence detection module 61 uses the transmitter 611 to emit light, and the receiver 612 detects whether this light is blocked or reflected back by the boat support mechanism 2, thereby detecting the presence of the boat support mechanism 2.

[0070] To ensure that the boat support in-situ detection module 61 can accurately detect whether there is a boat support mechanism 2 on the conveying mechanism 3, the installation position of the boat support in-situ detection module 61 on the conveying mechanism 3 can be set to meet the following conditions:

[0071] like Figure 3 As shown, the arrival stop detection module 63 is installed near the end of the second conveying module 32, and the distance between the arrival stop detection module 63 and the end of the second conveying module 32 is t. The total length of the second conveying module 32 is S. The transmitting end 611 of the through-beam photoelectric sensor is installed at the starting end of the first conveying module 31, and the installation distance between the receiving end 612 and the transmitting end 611 along the conveying direction of the second synchronous belt 320 is X, where X > SLt.

[0072] In a preferred embodiment, such as Figure 3 As shown, the deceleration detection module 65 is installed near the end of the second conveying module 32, and the deceleration detection module 65 is a certain distance away from the stop detection module 63.

[0073] In a preferred embodiment, such as Figure 3 As shown, the number of first boat in-situ detection modules 62 is set to two, and the two first boat in-situ detection modules 62 are arranged at intervals on the second conveying module 32.

[0074] It should be understood that, from Figure 3 From the top view shown, one of the first boat in-situ detection modules 62 is installed on the second delivery module near the transmitter 611 in the boat support in-situ detection module 61, and the other first boat in-situ detection module 62 is installed on the second delivery module near the deceleration detection module 65. Meanwhile, from... Figure 2As shown in the 3D view, the two first boat in-situ detection modules 62 are mounted on the second conveying module 32 by supporting vertical plates. The two first boat in-situ detection modules 62 are much higher than the second synchronous belt 320, so that the height position of the two first boat in-situ detection modules 62 matches the height position of the sheet carrier boat 1 supported by the boat support mechanism 2, thereby detecting whether there is a sheet carrier boat 1.

[0075] In a preferred embodiment, the in-and-out conveyor of the ALD device further includes a guide assembly. This guide assembly is mounted on the first conveyor module 31 and the second conveyor module 32, and is used to guide and define the position of the boat support mechanism 2 on the conveyor mechanism 3.

[0076] like Figure 2 , Figure 3 As shown, the guide assembly includes a first guide bar 71 installed on the first conveying module 31 on one side of the first synchronous belt 310, a second guide bar 72 installed on the second conveying module 32 on one side of the second synchronous belt 320, a first positioning block 73 installed at the end of the first conveying module 31, and a second positioning block 74 installed at the end of the second conveying module 32.

[0077] The ALD equipment in this utility model is provided with a guide component. Specifically, a first guide bar 71 and a first stop block 73 are provided on the first conveying module 31, and a second guide bar 72 and a second stop block 74 are provided on the second conveying module 32. The first guide bar 71 and the second guide bar 72 can guide the boat support mechanism 2 to prevent the boat support mechanism 2 from deviating on the conveying mechanism 3, and the first stop block 73 and the second stop block 74 can limit the boat support mechanism 2 to ensure that the boat support mechanism 2 stops at the predetermined position.

[0078] like Figure 3 , Figure 6 As shown, the guide assembly also includes a plurality of guide blocks 75 mounted on the first conveying module 31 and the second conveying module 32. Each guide block 75 is provided with at least one oblong hole 751 for adjusting the mounting position of the guide block 75.

[0079] It should be understood that, such as Figure 7 As shown, the guide block 75 on the conveying mechanism 3 and the guide wheel 25 on the boat support mechanism 2 cooperate one by one to form a guiding and positioning structure. The guiding and positioning structure will be described in detail later, and will not be repeated here.

[0080] In a preferred embodiment, such as Figure 4 , Figure 5 and Figure 6 As shown, the boat support mechanism 2 includes a first bracket 22 and a plurality of first support columns 21.

[0081] The first support 22 includes a first support side plate 221 and a second support side plate 222 disposed opposite to each other, and a first support top plate 223 and a second support top plate 224 spaced between the first support side plate 221 and the second support side plate 222. Guide wheels 25 are provided on both the first support side plate 221 and the second support side plate 222.

[0082] Multiple first support columns 21 are erected on the first support top plate 223 and the second support top plate 224, and are used to jointly support the carrier boat 1.

[0083] It should be noted that the present invention features a separate design for the boat support mechanism 2 and the conveying mechanism 3. When the boat support mechanism 2 is placed on the conveying mechanism 3, the boat support mechanism 2 does not need to be rigidly connected to the conveying mechanism 3 by screws.

[0084] The first support 22 can be configured to be composed of a first support side plate 221, a first support top plate 223, a second support side plate 222, and a second support top plate 224, which are sequentially spliced ​​together. The splicing design of the first support 22 facilitates disassembly and maintenance.

[0085] In addition, the first support side plate 221, the first support top plate 223, the second support side plate 222 and the second support top plate 224 together form a receiving area, and a buffer pad 23 is provided in the receiving area. The buffer pad 23 is used to catch the battery cells that fall from the carrier boat 1.

[0086] The first support 22 is equipped with a buffer pad 23. When the solar cells in the solar cell carrier boat 1 fall onto the buffer pad 23 during the transportation process, the buffer pad 23 can play a good cushioning role, preventing the solar cells from breaking when they fall, thereby reducing the breakage rate of the solar cells.

[0087] The buffer pad 23 can be made of heat-insulating material. For example, the buffer pad 23 can be made of heat-insulating cotton, which can play the role of heat insulation and buffering at the same time. While reducing the breakage rate of the battery cells during the process, it also reduces the heat transferred from the completed cell carrier boat 1 to the conveying mechanism 3, thereby protecting the normal operation of the conveying mechanism 3.

[0088] Taking four first support columns 21 as an example, two first support columns 21 are erected at intervals on the first support top plate 223, and the top of the two first support columns 21 is provided with positioning pins 24. The other two first support columns 21 are erected at intervals on the second support top plate 224.

[0089] Positioning pins 24 are provided on two of the first support columns 21. The top of the positioning pins 24 is provided with a conical surface, which is beneficial for guiding and positioning, thereby preventing the slide boat 1 from slipping due to inertia or accidental collision during the transport process. The other two second support columns 51 are not provided with positioning pins 24, so that there can be installation errors in the length direction of the first bracket 22. These two second support columns 51 only need to provide support for the slide boat 1. Compared with the implementation where all four first support columns 21 are provided with positioning pins 24, this preferred embodiment can reduce the installation accuracy requirements and save processing and labor resources.

[0090] This invention allows the first support 22 to be made of a metal material. For example, the first support 22 can be made of aluminum or other metal materials. The slide carrier 1 is also usually made of a metal material, in which case the slide carrier 1 can also be called a metal boat.

[0091] It should be noted that this utility model adopts multiple guide and positioning structures on the conveying mechanism 3 and the boat support mechanism 2. In actual movement, the guide and positioning structures can achieve accurate positioning of the boat support mechanism 2.

[0092] Each guide alignment structure is formed by the cooperation of a guide block 75 and a guide wheel 25. The guide block 75 is locked after installation and cannot automatically deflect. When the guide wheel 25 contacts the guide block 75, the guide wheel 25 is forced to conform to the current shape of the guide block 75 under strong force. It should be understood that the function of the guide alignment structure is to align the entire boat support mechanism 2 in its final position. The subsequent boat lifting mechanism needs to grasp the carrier boat 1 on the boat support mechanism 2, and the boat lifting mechanism will also have errors during installation. Therefore, the current shape of the guide block 75 is determined by the boat lifting mechanism. By forcibly changing the position of the guide wheel 25 through the guide block 75, the shape of the entire boat support mechanism 2 is changed.

[0093] like Figure 6 As shown, the boat support mechanism 2 is equipped with four guide wheels 25, which are installed at the four corners of the first bracket 22. That is, a guide wheel 25 is provided at each end of the first support side plate 221 and the second support side plate 222.

[0094] like Figure 3 As shown, the conveying mechanism 3 is provided with four guide blocks 75, two of which are installed on the first conveying module 31 and the other two are installed on the second conveying module 32.

[0095] like Figure 7As shown, each guide block 75 has three alternately distributed oblong holes 751 and two circular holes 752. Each guide block 75 is mounted on the conveying mechanism 3 by a screw passing through the corresponding oblong hole 751 and a set screw passing through the corresponding circular hole 752. It should be understood that the oblong holes 751 allow for adjustment of the installation position of the guide block 75, and the screw will tighten once the installation position is determined. Because of the oblong holes 751, the screw has a certain amount of room to move. If the force exerted by the guide block 75 on the guide wheel 25 is too great, the guide wheel 25 may not move and may instead push the guide block 75 out. At the same time, the set screw can increase the locking strength of the screw.

[0096] In a preferred embodiment, such as Figure 8 As shown, the boat storage mechanism 5 includes a second bracket 52 and a plurality of second support columns 51 erected on the second bracket 52. A second boat in-situ detection module 64 is provided on the top of some of the second support columns 51.

[0097] This invention takes four second support columns 51 as an example. In this case, the storage boat mechanism 5 is supported and temporarily stored by the four second support columns 51. Two of the second support columns 51 are equipped with a second boat presence detection module 64 at their tops. This module detects whether there is a carrier boat 1 on the storage boat mechanism 5. This invention allows the second boat presence detection module 64 to be any one of a photoelectric sensor, a proximity switch, or a contact switch.

[0098] It should be noted that the inlet and outlet conveying device of the ALD equipment also includes a control unit. This control unit can obtain the detection results of the boat carrier in place detection module 61, the first boat in place detection module 62, the in-place stop detection module 63, the second boat in place detection module 64, and the deceleration detection module 65, respectively. It can also control the start, stop, and deceleration of the conveying mechanism 3, and can also control the transfer of the plate carrier boat 1 to the conveying mechanism 3 or the storage boat mechanism 5 through the hoisting mechanism.

[0099] Based on the specific structure of the inlet and outlet boat conveying device of the ALD equipment described above, the inlet and outlet boat conveying control method of the ALD equipment includes at least the following steps:

[0100] S10. Control the conveying mechanism to transport the boat support mechanism carrying the boat along the boat entry direction until the boat support mechanism reaches the boat transfer position.

[0101] S20. When a plank is detected on the plank support mechanism at the plank transfer position, the plank is allowed to be lifted by the plank lifting mechanism.

[0102] S30. Control the conveying mechanism to transport the boat support mechanism along the boat outgoing direction until the boat support mechanism reaches the boat support entry / exit position.

[0103] S40. When it is detected that there is no boat support mechanism on the conveying mechanism, the sheet carrier boat is allowed to be transferred to the storage boat mechanism through the boat hoisting mechanism.

[0104] By detecting whether there is a carrier boat and a boat support mechanism on the conveying mechanism, the control can determine whether the boat lifting mechanism is allowed to perform a transfer action, thereby reducing the failure rate of the boat conveying device.

[0105] In a preferred embodiment, the following steps are further included before the boat support mechanism reaches the boat transfer position:

[0106] S101. When the boat support mechanism is detected to have reached the boat support deceleration position, the conveying speed of the conveying mechanism is reduced so that the boat support mechanism decelerates to reach the boat transfer position.

[0107] In a preferred embodiment, the method for controlling the inbound and outbound transport of the ALD device further includes the following steps:

[0108] S50. When a wafer carrier boat is detected on the storage boat mechanism, the wafer carrier boat is allowed to be transferred to the cell coating equipment via the hoisting boat mechanism.

[0109] In a preferred embodiment, the method for controlling the inbound and outbound transport of the ALD device further includes the following steps:

[0110] S60. Control the conveying mechanism to transport the unloaded boat support mechanism along the boat entry direction until the boat support mechanism reaches the boat transfer position.

[0111] S70. When a cell carrier is detected on the cell carrier mechanism located at the cell transfer position, the control conveying mechanism is used to convey the cell carrier mechanism carrying the cell carrier along the exit direction, so that the cell carrier is conveyed to the cell loading and unloading equipment through the conveying mechanism.

[0112] To better understand, the following will be combined with Figure 9 A more complete explanation of the inbound and outbound conveying control method of the ALD equipment will be provided. It should also be understood that, in the following text, the carrier boat to be processed will be referred to as the "processing boat", and the carrier boat that has completed the processing will be referred to as the "processed boat".

[0113] 1) The battery cell loading and unloading equipment sends out the process boat, which is then carried into the conveying mechanism by the boat support mechanism.

[0114] 2) When the boat support detection module detects the boat support mechanism, it sends a boat support signal to the control unit, activates the conveying mechanism, and then transports the boat support mechanism through the conveying mechanism. At the same time, the first guide bar and the second guide bar work together to guide the boat support mechanism and prevent it from deviating.

[0115] 3) When the deceleration detection module detects the boat support mechanism, it triggers the first and second synchronous belts of the conveyor mechanism to decelerate, so that the boat support mechanism can decelerate smoothly and stably to reach the predetermined position.

[0116] 4) When the boat support mechanism moves to the point where it abuts against the first and second positioning blocks, the guide wheels on the boat support mechanism and the guide blocks on the conveying mechanism cooperate to form a guiding and positioning structure. This guiding and positioning structure allows for precise calibration of the boat support mechanism's position. Simultaneously, the positioning and stopping detection module detects that the boat support mechanism has reached its designated position and controls the conveying mechanism to stop operating.

[0117] 5) When the first boat in-situ detection module detects a boat awaiting processing on the boat support mechanism, the boat lifting mechanism performs a transfer action, thereby lifting the boat awaiting processing from the boat support mechanism. Simultaneously, the conveying mechanism is activated, causing the empty boat support mechanism to return along its original path until it exits the conveying mechanism. When the boat support in-situ detection module detects no boat support mechanism on the conveying mechanism, the boat lifting mechanism performs a transfer action, thereby transferring the boat awaiting processing to the boat storage mechanism for temporary storage. Subsequently, when the second boat in-situ detection module detects a boat awaiting processing on the boat storage mechanism, the boat lifting mechanism performs a transfer action, thereby transferring the boat awaiting processing to the battery cell coating equipment in the boat storage mechanism. The boat lifting mechanism then returns to its original position. After reaching the original position, the boat support mechanism re-enters the conveying mechanism. Once in position, the boat support mechanism stops moving, awaiting instructions to transport the processed boat.

[0118] 6) After the cell coating equipment completes the coating process, it sends out the coated boat. The boat lifting mechanism performs a grabbing action, transferring the coated boat to the boat support mechanism, which then returns to its original position. When the first boat in-situ detection module detects the coated boat on the boat support mechanism, it activates the conveying mechanism, which then sends the boat support mechanism carrying the coated boat to the cell loading and unloading equipment.

[0119] 7) Repeat the above actions to realize the turnover of the film carrier boat by the inlet and outlet boat conveying device.

[0120] The infeed / outfeed conveyor device provided by this utility model has advantages such as smooth and stable transport of the substrate boat, precise detection, control and positioning, low noise, high cleanliness of transport, and ease of installation and maintenance. Furthermore, by optimizing the infeed / outfeed conveyor structure and control method, it addresses the shortcomings of the current industry practice, improves the stability and cleanliness of the substrate boat transport and turnover, and thus provides a reliable application technology for process stability, equipment maintenance, and cost control in the main unit of ALD coating equipment for conveying and temporarily storing metal boats.

[0121] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A conveying device for loading and unloading boats in an ALD (Automatic Drainage) device, characterized in that, include: Fixture; Boat support mechanism, used to support the film carrier boat; A boat storage mechanism, installed on the fixed frame, is used to temporarily store the boat support mechanism; A conveying mechanism is installed on the fixed frame and located above the boat storage mechanism. Its two ends are the boat support entry / exit position and the boat transfer position, respectively, and it is used to transport the boat support mechanism back and forth between the boat support entry / exit position and the boat transfer position. The conveying mechanism is equipped with a boat support in-situ detection module and a first boat in-situ detection module. The boat support in-situ detection module is used to detect whether the boat support mechanism is on the conveying mechanism, and the first boat in-situ detection module is used to detect whether the carrier boat is on the boat support mechanism located at the boat transplanting position.

2. The inlet and outlet conveyor device for the ALD equipment as described in claim 1, characterized in that, The conveying mechanism is also equipped with a deceleration detection module and a stop detection module. The deceleration detection module is used to detect whether the boat support mechanism has reached the boat support deceleration position, and the stop detection module is used to detect whether the boat support mechanism has reached the boat transfer position.

3. The inlet and outlet conveyor device for the ALD equipment as described in claim 2, characterized in that, The conveying mechanism includes a first conveying module and a second conveying module arranged opposite to each other. The first conveying module and the second conveying module respectively convey the boat support mechanism through a first synchronous belt and a second synchronous belt.

4. The inlet and outlet conveyor device for the ALD equipment as described in claim 3, characterized in that, The boat support in-situ detection module uses a through-beam photoelectric sensor. The transmitting end of the through-beam photoelectric sensor is installed on the first conveying module, and the receiving end of the through-beam photoelectric sensor is installed on the second conveying module.

5. The inlet and outlet conveying device for the ALD equipment as described in claim 4, characterized in that, The arrival stop detection module is installed near the end of the second conveying module, and the distance between the arrival stop detection module and the end of the second conveying module is t. The total length of the second conveying module is S. The transmitting end of the through-beam photoelectric sensor is installed at the starting end of the first conveying module, and the installation distance between the receiving end and the transmitting end along the conveying direction of the second synchronous belt is X, where X > SLt.

6. The inlet and outlet conveyor device for the ALD equipment as described in claim 3, characterized in that, Also includes: A guide assembly is installed on the first conveying module and the second conveying module, and is used to guide and define the position of the boat support mechanism on the conveying mechanism.

7. The inlet and outlet conveyor device for the ALD equipment as described in claim 6, characterized in that, The guiding assembly includes a first guide bar installed on the first conveying module and located on one side of the first synchronous belt, a second guide bar installed on the second conveying module and located on one side of the second synchronous belt, a first positioning block installed at the end of the first conveying module, and a second positioning block installed at the end of the second conveying module.

8. The inlet and outlet conveying device for the ALD equipment as described in claim 6 or 7, characterized in that, The guiding assembly includes a plurality of guide blocks installed on the first conveying module and the second conveying module.

9. The inlet and outlet conveying device for the ALD equipment as described in claim 8, characterized in that, Each of the guide blocks is provided with at least one oblong hole for adjusting the installation position of the guide block.

10. The inlet and outlet conveying device for the ALD equipment as described in claim 9, characterized in that, The boat support mechanism includes: The first support includes a first support side plate and a second support side plate arranged opposite to each other, and a first support top plate and a second support top plate spaced apart between the first support side plate and the second support side plate. Guide wheels are provided on both the first support side plate and the second support side plate, and the guide wheels cooperate with the guide blocks to form a guiding and positioning structure. Multiple first support columns are erected on the first support top plate and the second support top plate, and are used to jointly support the slide boat.

11. The inlet and outlet conveying device for the ALD equipment as described in claim 10, characterized in that, The first support side plate, the first support top plate, the second support side plate, and the second support top plate together form a receiving area. A buffer pad is provided in the receiving area to catch the battery cells that fall from the carrier boat.

12. The inlet and outlet conveyor device for the ALD equipment as described in claim 10, characterized in that, The number of the first support columns is four, two of which are erected at intervals on the first support top plate and the top of the two first support columns are provided with positioning pins, and the other two are erected at intervals on the second support top plate.

13. The inlet and outlet conveyor device for the ALD equipment as described in claim 1, characterized in that, The boat storage mechanism includes: a second bracket and a plurality of second support columns erected on the second bracket. A second boat in-situ detection module is provided on the top of some of the second support columns. The second boat in-situ detection module is used to detect whether the boat support mechanism is on the boat storage mechanism.

Images