Heating plate for MOCVD (Metal Organic Chemical Vapor Deposition) reaction cavity

Abstract

The utility model discloses a heating plate for an MOCVD (Metal Organic Chemical Vapor Deposition) reaction cavity, which comprises a pair of heating plate bodies, the pair of heating plate bodies are symmetrically arranged, each of the pair of heating plate bodies comprises a heating wire, the heating wires are formed by winding in an arc-shaped manner, and the heating plates are arranged in the arc-shaped manner. The heating wires, close to each other, of the pair of heating plates are vertically arranged, a first electrode pin is integrally formed at one end of each heating wire, and a second electrode pin is integrally formed at the other end of each heating wire. According to the utility model, the arc tail end of the heating plate is changed into a linear tail end through geometric treatment, so that the symmetry is better; after the heating plates form a circle, the temperature uniformity is better under the condition that the resistance is not changed; as the heating plates take straight lines as boundaries, whether the actual size is a standard size or not can be conveniently measured after installation; after being heated and expanded, the limit size of the failure form is convenient to observe.

Description

Technical Field

[0001] This utility model belongs to the field of MOCVD technology, specifically relating to a heating plate for an MOCVD reaction chamber. Background Technology

[0002] When growing thin films on an MOCVD machine, the uniformity of the temperature field is required to be high. Therefore, a heating plate with uniform heating and a long service life plays a crucial role in the fabrication of semiconductor chips.

[0003] The heating wires used in the currently popular A7 machines on the market, such as Figure 1 As shown, the spatial arrangement of the heating wire is unreasonable, resulting in a large distance between the ends of the arc at the corner of the two heating wires (positions shown in ① and ②). This causes temperature coupling at this point, resulting in a lower temperature and making it impossible to accurately measure the deformation of the heating wire under heat.

[0004] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0005] The purpose of this invention is to provide a heating plate for an MOCVD reaction chamber, which can solve the problem of temperature coupling caused by the large distance between the ends of the corner arcs when a pair of heating plates are combined, and the inability to accurately measure the deformation of the heating wire under heat.

[0006] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:

[0007] A heating plate for an MOCVD reaction chamber includes a pair of heating plate bodies arranged symmetrically and assembled symmetrically. Each heating plate body includes a heating wire wound in an arc shape. This arc-shaped winding increases the area of ​​the heating wire arrangement, thereby improving the heating efficiency and temperature distribution uniformity of the heating plate. The heating wires close to each other in the pair of heating plate bodies are arranged vertically. This vertical arrangement effectively shortens the distance between the two heating plate bodies when they are assembled together. Consequently, the distance between the rounded ends of the two heating plate bodies is smaller, preventing temperature coupling at the rounded ends and effectively increasing the temperature at these ends. This allows for accurate measurement of the heating plate's deformation due to heat. One end of the heating wire is integrally formed with a first electrode foot, and the other end of the heating wire is integrally formed with a second electrode foot. The first electrode foot and the second electrode foot connect the heating wire to a power source, thereby generating heat by providing power.

[0008] Preferably, after the heating plate is powered on, the current flows into the heating wire through the first electrode pin. When the current passes through the heating wire with uniform gaps, it generates heat and controls the uniformity of the temperature. By optimizing the rounded corners on both sides of the heating plate body, the current flows in a straight line at the position where the heating plate body is close to each other, which effectively controls the weakening of the heat at the edge and avoids temperature coupling at the arc end of the heating plate body. This effectively increases the temperature at the arc end, so that the amount of deformation of the heating plate due to heat can be accurately measured. Finally, the current flows out from the second electrode pin.

[0009] In one or more embodiments of this utility model, the heating wire, the first electrode foot, and the second electrode foot are all made of tungsten. By using tungsten as the material for making the heating plate, the high temperature resistance of the heating plate is improved while the thermal conductivity is also improved.

[0010] In one or more embodiments of this utility model, the heating wire is arranged in a vertical manner in two parts, upper and lower, such that both upper and lower parts are provided with heating wires arranged in a vertical manner.

[0011] In one or more embodiments of this utility model, the first electrode foot is disposed on the inner side of the upper vertical end of the heating wire, and the second electrode foot is disposed on the outer side of the lower vertical end of the heating wire, so that when the current enters the heating wire through the first electrode foot and flows out through the second electrode foot, the current enters from the inner side of the heating wire and flows out from the outer side of the heating wire, thereby improving the heating effect of the heating wire.

[0012] In one or more embodiments of this utility model, the bending portion of the heating wire is set as an arc-shaped end, and the arc of the arc-shaped end is set as R. By setting the bending portion, the bending portion is optimized, and the influence of the bending portion on the temperature transmission of the heating plate is effectively avoided.

[0013] In one or more embodiments of this utility model, the angle of R is adjustable, so that the bending portion can be optimized according to actual needs.

[0014] In one or more embodiments of this utility model, a pair of mounting holes are provided on the first electrode pin and the second electrode pin in a through manner, so that the connection and installation of the first electrode pin and the second electrode pin are convenient.

[0015] In one or more embodiments of this utility model, the width and spacing of the heating wire can be adjusted when the heating wire is wound in an arc.

[0016] Compared with the prior art, this utility model transforms the arc-shaped ends of the heating plates into straight ends through geometric processing, resulting in better symmetry; after the heating plates are arranged into a circle, the temperature uniformity is better while the resistance remains unchanged; since the heating plates are all bounded by straight lines, it is easy to measure whether the actual size is standard after installation; after thermal expansion during use, it is easy to observe the limit size of the failure mode. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the heating wire used in the existing A7 machine tool;

[0019] Figure 2 This is a schematic diagram of a heating plate for an MOCVD reaction chamber according to one embodiment of the present invention;

[0020] Figure 3 This is a structural diagram of a heating plate for an MOCVD reaction chamber according to one embodiment of the present invention.

[0021] Explanation of key figure labels:

[0022] 11-Heating wire, 12-First electrode pin, 13-Second electrode pin, 14-Mounting hole, 15-Arc-shaped end. Detailed Implementation

[0023] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0024] like Figure 2 and Figure 3 As shown in one embodiment of the present invention, a heating plate for an MOCVD reaction chamber can solve the problem of temperature coupling caused by the large distance between the ends of the corner arcs when a pair of heating plates are combined, and the inability to accurately measure the deformation of the heating wire under heat.

[0025] like Figure 2 and Figure 3 As shown, the heating plate includes a heating plate body, and a pair of heating plate bodies are arranged symmetrically and assembled into a heating plate. Each pair of heating plate bodies includes a heating wire 11, which is wound in an arc shape. This arc-shaped winding increases the area of ​​the heating wire 11, thereby improving the heating efficiency and temperature distribution uniformity of the heating plate. The heating wires 11 near each other in the pair of heating plate bodies are arranged vertically, with the arc ends geometrically processed to become straight ends, further enhancing symmetry. Furthermore, the vertical arrangement of the heating plate bodies near each other effectively shortens the distance between them when the pair of heating plate bodies are assembled. This results in a smaller distance between the arc ends of the two heating plate bodies when in use, preventing temperature coupling at the arc ends and effectively increasing the temperature at the arc ends, thus facilitating accurate measurement of the heating plate's deformation due to heat. One end of the heating wire 11 is integrally formed with a first electrode foot 12, and the other end of the heating wire 11 is integrally formed with a second electrode foot 13. The first electrode foot 12 and the second electrode foot 13 connect the heating wire 11 to a power source, thereby generating heat by providing power to the heating wire 11.

[0026] Preferably, after the heating plate is powered on, the current flows into the heating wire 11 through the first electrode pin 12. When the current passes through the heating wire 11 with uniform gaps, it generates heat and controls the uniformity of the temperature. By geometrically processing the end of the heating plate body to make it a straight end, the current in the position where the heating plate bodies are close to each other can be well controlled to reduce the heat at the edge, avoid the temperature coupling at the arc end of the heating plate body, and effectively improve the temperature at the arc end so that the amount of deformation of the heating plate due to heat can be accurately measured. Finally, the current flows out from the second electrode pin 13.

[0027] Preferably, the heating wire 11, the first electrode foot 12, and the second electrode foot 13 are all made of tungsten. Using tungsten as the material for the heating plate improves the high temperature resistance of the heating plate while also increasing the thermal conductivity.

[0028] like Figure 2 and Figure 3 As shown, the heating wire 11 is arranged vertically in two parts, upper and lower, so that both upper and lower parts are provided with heating wires 11 arranged vertically.

[0029] like Figure 2 and Figure 3 As shown, the first electrode foot 12 is located on the inner side of the upper vertical end of the heating wire 11, and the second electrode foot 13 is located on the outer side of the lower vertical end of the heating wire 11. This allows the current to enter the heating wire 11 through the first electrode foot 12 and flow out through the second electrode foot 13. The current enters from the inner side of the heating wire 11 and flows out from the outer side of the heating wire 11, which improves the heating effect of the heating wire 11.

[0030] like Figure 2 and Figure 3 As shown, when the heating wire 11 is set, the bent part is set as an arc end 15, and the arc of the arc end 15 is set as R. By setting the bent part, the bent part is optimized, and the influence of the bent part on the temperature transmission of the heating plate is effectively avoided.

[0031] Preferably, the angle of R is adjustable, allowing the bending section to be optimized according to actual needs.

[0032] like Figure 2 and Figure 3 As shown, a pair of mounting holes 14 are provided on the first electrode pin 12 and the second electrode pin 13 in a through manner, which facilitates the connection and installation of the first electrode pin 12 and the second electrode pin 13.

[0033] Preferably, the width and spacing of the heating wire 11 can be adjusted when it is wound in an arc shape, which improves the practicality of the heating plate.

[0034] In use, after the heating plate is powered on, the current flows into the heating wire 11 through the first electrode pin 12. When the current passes through the heating wire 11 with uniform gaps, the heating wire 11 emits heat. By geometrically processing the end of the heating plate body to make it a straight end, the current in the position where the heating plate bodies are close to each other can be well controlled to reduce the heat at the edge, avoid temperature coupling at the arc end of the heating plate body, and effectively improve the temperature at the arc end, so as to accurately measure the amount of deformation of the heating plate due to heat. Finally, the current flows out from the second electrode pin 13.

[0035] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0036] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A heating plate for an MOCVD reaction chamber, comprising a heating plate body, characterized in that, The heating plate body is provided in a pair, and the pair of heating plate bodies are arranged symmetrically. Each pair of heating plate bodies includes a heating wire, which is wound in an arc shape. The heating wires of the pair of heating plates that are close to each other are arranged vertically. One end of the heating wire is integrally formed with a first electrode foot, and the other end of the heating wire is integrally formed with a second electrode foot.

2. The heating plate for an MOCVD reaction chamber according to claim 1, characterized in that, The heating wire, the first electrode pin, and the second electrode pin are all made of tungsten.

3. A heating plate for an MOCVD reaction chamber according to claim 1, characterized in that, The heating wire is arranged vertically in two parts, upper and lower.

4. A heating plate for an MOCVD reaction chamber according to claim 3, characterized in that, The first electrode foot is located on the inner side of the upper vertical end of the heating wire, and the second electrode foot is located on the outer side of the lower vertical end of the heating wire.

5. A heating plate for an MOCVD reaction chamber according to claim 1, characterized in that, The heating wire is configured with a curved end at the bend, and the curve of the curved end is defined as R.

6. A heating plate for an MOCVD reaction chamber according to claim 5, characterized in that, The angle of R is adjustable.

7. A heating plate for an MOCVD reaction chamber according to claim 1, characterized in that, Both the first electrode pin and the second electrode pin have a pair of through mounting holes.

8. A heating plate for an MOCVD reaction chamber according to claim 1, characterized in that, The width and spacing of the heating wire can be adjusted when it is wound in an arc.

Images