Valve performance test system

Abstract

The utility model discloses a valve performance test system, which is used for testing the performance of a valve and comprises a sealed chamber, a valve seat and a valve seat, the fixing seat is arranged in the sealing cavity and used for fixing the valve; the vibration detector is arranged in the sealed cavity, is connected with the valve plate and is used for testing a vibration index of the valve in a moving state; the granularity analyzer is communicated with the sealing chamber and is used for testing a dust generation index of the valve in a motion state; and the vacuum leak detector is communicated with the sealing chamber and is used for testing the sealing index of the valve. According to the utility model, the vibration performance of the valve is detected through the vibration detector, the motion precision test of the valve is realized, the dust generation condition of the valve is detected through the granularity analyzer, the cleanliness test of the valve is realized, and the sealing detection of the valve is realized through the vacuum leak detector. The reliability test of the valve is realized, so that the effect of multi-directional performance test of the valve can be achieved, and the valve test efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of valve testing technology, and specifically to a valve performance testing system. Background Technology

[0002] In manufacturing processes, such as semiconductor equipment production, valve shut-off capabilities are typically required. Therefore, developing valves suitable for equipment production is a crucial step. A key challenge in valve development is understanding performance data to ensure the developed valve meets production requirements. Current technologies typically employ various testing equipment to measure different valve parameters. However, some performance indicators, such as motion accuracy and lifespan, cannot be quantified or visualized. Furthermore, since each performance test requires specialized equipment, and numerous tests cannot be performed concurrently, overall testing efficiency is significantly reduced. Therefore, improving valve performance testing efficiency is a problem that those skilled in the art need to address. Utility Model Content

[0003] This utility model provides a valve performance testing system, which aims to achieve multi-dimensional performance testing of valves, thereby improving valve testing efficiency.

[0004] This utility model embodiment provides a valve performance testing system for testing the performance of a valve. The valve includes a valve plate, a motion mechanism, and a drive mechanism connected in sequence. The drive mechanism can drive the motion mechanism to move the valve plate, thus putting the valve in a moving state. The valve performance testing system includes:

[0005] Sealed chamber;

[0006] A mounting base, disposed within the sealed cavity, is used to fix the valve;

[0007] A vibration detector is installed in the sealed chamber and connected to the valve plate to test the vibration index of the valve in motion.

[0008] A particle size analyzer, connected to the sealed chamber, is used to test the dust generation index of the valve in motion.

[0009] A vacuum leak detector, connected to the sealed chamber, is used to test the sealing performance of the valve.

[0010] Furthermore, the inner wall of the sealed chamber is provided with a heating element for controlling the internal temperature of the sealed chamber.

[0011] Furthermore, a noise collector for testing the noise performance of the valve is also installed in the sealed chamber.

[0012] Furthermore, a magnetic switch is provided on the motion mechanism, and an oscilloscope for acquiring the magnetic signal of the magnetic switch is also provided in the sealed cavity.

[0013] Furthermore, it also includes a trajectory acquisition device for acquiring the motion trajectory of the valve plate in motion.

[0014] Furthermore, it also includes a filter, which is in communication with the sealed chamber and is used to input filtered airflow into the sealed chamber.

[0015] Furthermore, the valve also includes a valve box, and the filter is connected to the valve box for carrying particles generated in the valve box into the particle size analyzer.

[0016] Furthermore, a purge hole is provided on the side of the sealed chamber, which is used to input gas into the sealed chamber to drive the particles in the sealed chamber to move within the sealed chamber.

[0017] Furthermore, a dust generation test hole is provided on the side of the sealed chamber. The dust generation test hole is used to extract gas from the sealed chamber so as to drive the particles in the sealed chamber into the particle size analyzer.

[0018] Furthermore, multiple fixing bases are provided.

[0019] This utility model embodiment provides a valve performance testing system for testing the performance of a valve. The valve includes a valve plate, a moving mechanism, and a driving mechanism connected in sequence. The driving mechanism drives the moving mechanism to move the valve plate, putting the valve in a moving state. The valve performance testing system includes: a sealed chamber; a fixed seat disposed in the sealed chamber for fixing the valve; a vibration detector disposed in the sealed chamber and connected to the valve plate for testing the vibration index of the valve in motion; a particle size analyzer connected to the sealed chamber for testing the dust generation index of the valve in motion; and a vacuum leak detector connected to the sealed chamber for testing the sealing index of the valve. This utility model embodiment uses a vibration detector to detect the vibration performance of the valve during movement to test the valve's motion accuracy, a particle size analyzer to detect the dust generation of the valve during movement to test the valve's cleanliness, and a vacuum leak detector to test the valve's sealing for testing its reliability. This achieves multi-faceted performance testing of the valve, thereby improving the efficiency of valve performance testing. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a first-view structural schematic diagram of a valve performance testing system provided in an embodiment of the present invention;

[0022] Figure 2 A schematic diagram of a valve structure in a valve performance testing system provided by this utility model embodiment;

[0023] Figure 3 A second-view structural schematic diagram of a valve performance testing system provided in an embodiment of this utility model;

[0024] Figure 4 This is a third-view structural schematic diagram of a valve performance testing system provided in an embodiment of the present invention. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0026] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0027] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0028] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0029] Please see below. Figures 1 to 3 This utility model provides a valve performance testing system for testing the performance of valve 1. Valve 1 includes a valve plate 11, a motion mechanism 12, and a drive mechanism 13 connected sequentially. The drive mechanism 13 can drive the motion mechanism 12 to move the valve plate 11, thus putting valve 1 in a moving state. The valve performance testing system includes:

[0030] Sealed chamber 2;

[0031] A fixing seat 21 is disposed in the sealed chamber 2 and is used to fix the valve 1;

[0032] Vibration detector 22 is installed in the sealed chamber 2 and connected to the valve plate 11, and is used to test the vibration index of the valve 1 in motion.

[0033] The particle size analyzer 23 is connected to the sealed chamber 2 and is used to test the dust generation index of the valve 1 in motion.

[0034] The vacuum leak detector 24 is connected to the sealed chamber 2 and is used to test the sealing performance of the valve 1.

[0035] In this embodiment, the valve performance testing system specifically includes a sealed chamber 2, a vibration detector 22, a particle size analyzer 23, and a vacuum leak detector 24. The vibration detector 22 detects the vibration performance of the valve 1 during movement to achieve the motion accuracy test of the valve 1. The particle size analyzer 23 detects the dust generated by the valve 1 during movement to achieve the cleanliness test of the valve 1. The vacuum leak detector 24 performs a sealing test on the valve 1 to achieve the reliability test of the valve 1. In this way, the valve 1 can be tested in multiple directions, thereby improving the performance testing efficiency of the valve 1.

[0036] In practical applications, the valve performance testing system may further include a data analysis device, such as a server or service terminal, and this data analysis device is communicatively connected to the vibration detector 22, particle size analyzer 23, and vacuum leak detector 24. This allows the system to collect relevant data, such as vibration data, dust generation data, and sealing data, from the vibration detector 22, particle size analyzer 23, and vacuum leak detector 24 respectively. The data analysis device then summarizes and analyzes the collected data and outputs accurate and reliable performance test indicators. Preferably, after collecting and summarizing the data, these data can be plotted as a performance test chart, thus enabling more scientific and efficient performance test analysis. Furthermore, the vibration detector 22 may specifically include a vibration Bluetooth module, which can be directly attached to the valve plate 11 (essentially a vibration sensor attached to the valve plate 11). Figure 4 As shown, this allows for a more intuitive vibration test. The particle size analyzer 23 is used to detect the size and quantity of particles in the sealed chamber 2, thereby determining the cleanliness performance of the valve 1. Furthermore, in practical applications, the particle size analyzer 23 and the vacuum leak detector 24 are connected to the sealed chamber 1 via pipelines. The particle size analyzer 23 and the vacuum leak detector 24 can be connected to the sealed chamber 1 separately via pipelines, or they can share a single pipeline. When the particle size analyzer 23 and the vacuum leak detector 24 share a single pipeline, one end of the pipeline is connected to the sealed chamber 1, and the other end has two branches. Each branch is connected to both the particle size analyzer 23 and the vacuum leak detector 24 via the shared pipeline. Preferably, a shut-off valve can be installed on the pipeline branch to control the testing process. For example, when particle size testing is required using particle size analyzer 23, the shut-off valve on the pipe branch connected to particle size analyzer 23 can be opened, and the shut-off valve on the pipe branch connected to vacuum leak detector 24 can be closed; when vacuum testing is required using vacuum leak detector 24, the shut-off valve on the pipe branch connected to vacuum leak detector 24 can be opened, and the shut-off valve on the pipe branch connected to particle size analyzer 23 can be closed.

[0037] In one embodiment, the inner wall of the sealed chamber 2 is provided with a heating element 25 for controlling the internal temperature of the sealed chamber 2.

[0038] By setting the heating element 25, the valve 1 can be heated to above its operating temperature to simulate harsh working conditions. For example, the heating element 25 can be used to raise the valve 1 to 200°C, causing it to perform opening and closing cycles for performance testing. During this process, the vibration performance, dust generation, and sealing performance of the valve 1 are monitored in real time using a vibration detector 22, a particle size analyzer 23, and a vacuum leak detector 24 to evaluate the stability and temperature resistance of the valve 1 under harsh high-temperature environments. This test simulates the extreme conditions that the valve 1 may encounter in actual working environments, ensuring that the valve 1 maintains excellent performance under various conditions. Furthermore, this testing method helps users better understand the behavior of the valve 1 at high temperatures, providing strong data support for subsequent optimization design and improvement. In practical applications, the heating element 25 can be a heating plate or a heating tube, and the number of heating elements 25 can be set according to actual needs, such as being installed on opposite inner walls of the sealing chamber 2.

[0039] In one embodiment, a noise collector (not shown in the figure) for testing the noise performance of the valve 1 is also provided in the sealed chamber 2.

[0040] A noise collector can be used to collect abnormal noises from moving parts, thereby achieving performance testing of the reliability and stability of valve 1. The noise collector can accurately capture various sound signals generated by valve 1 during its movement, including normal mechanical noise and any potential abnormal noise. By analyzing the collected noise data, potential problems in the moving mechanism 12 of valve 1 can be identified in a timely manner, such as bearing wear or poor gear meshing. These problems often reflect specific frequency characteristics in the noise signal. This noise monitoring method not only improves the comprehensiveness and accuracy of valve 1 performance testing but also provides a scientific basis for valve 1 maintenance. In practical applications, the noise collector can be installed on the inner wall of the sealed chamber 2, or on the valve plate 11 or the moving mechanism 12 of valve 1. Multiple noise collectors can also be deployed simultaneously to improve the accuracy of noise performance testing.

[0041] In one embodiment, a magnetic switch is provided on the motion mechanism 12, and an oscilloscope (not shown in the figure) for acquiring the magnetic signal of the magnetic switch is also provided in the sealed chamber 2.

[0042] By acquiring signals from the magnetic switch using an oscilloscope, key parameters such as opening and closing times and the operating speed of the motion mechanism 12 can be collected. These parameters can then be used to perform stability tests on valve 1. The combined use of the magnetic switch and the oscilloscope makes the monitoring of the valve 1's movement process more accurate and real-time. The oscilloscope can record the signal waveform triggered by the magnetic switch at high resolution. By analyzing these waveforms, the opening and closing times of valve 1, as well as the speed changes during movement, can be accurately calculated. This data is of great significance for evaluating the dynamic performance of valve 1, optimizing the design of the motion mechanism 12, and predicting the lifespan of valve 1. In addition, the use of the oscilloscope improves the automation of the test, reduces errors from manual operation, and makes the entire testing process more efficient and reliable.

[0043] In one embodiment, a trajectory acquisition device 26 is also included, used to acquire the motion trajectory of the valve plate 11 in motion.

[0044] Using a trajectory acquisition device 26 (such as a high-speed camera), the trajectory path and repeatability of the valve plate 11 can be recorded, allowing for more precise motion accuracy performance testing of the valve 1 in conjunction with the vibration detector 22. Specifically, the use of the trajectory acquisition device 26 makes monitoring the motion trajectory of the valve 1 intuitive and accurate. Through devices such as high-speed cameras, every detail of the valve plate 11 during high-speed movement can be captured, including the smoothness of its trajectory, the repeatability of the trajectory, and whether there are any abnormal deviations or vibrations. This data is crucial for evaluating the motion accuracy of the valve 1, identifying potential design flaws, and optimizing the performance of the valve 1. Combined with the vibration detector 22, the vibration generated by the valve plate 11 during movement can be further analyzed. The vibration detector 22 can accurately measure key parameters such as the frequency and amplitude of the valve plate 11's vibration, helping to determine whether the valve 1 has abnormal noises or excessive wear. This comprehensive testing method not only improves the accuracy of the performance evaluation of the valve 1 but also provides strong data support for the optimized design of the valve 1.

[0045] In one embodiment, a filter 27 is also included, which is in communication with the sealed chamber 2 and is used to input filtered airflow into the sealed chamber 2.

[0046] Furthermore, the valve 1 also includes a valve box, and the filter 27 is connected to the valve box for carrying the particles generated in the valve box into the particle size analyzer 23.

[0047] The airflow output through filter 27 carries particles generated inside the valve housing of valve 1 into particle size analyzer 23, thus enabling particle measurement in the vacuum zone of valve 1. In this embodiment, the airflow delivered to the sealed chamber 2 via filter 27 not only ensures the cleanliness of the airflow entering the sealed chamber 2, avoiding the influence of external impurities on the test results, but also introduces particles generated inside the valve housing into particle size analyzer 23. This allows for real-time monitoring of particle generation during valve 1's movement, thereby achieving the desired cleanliness and sealing performance of valve 1. Furthermore, this design facilitates the monitoring and control of the cleanliness inside valve 1, helping to promptly identify and resolve potential contamination issues. By comprehensively utilizing filter 27, sealed chamber 2, and particle size analyzer 23, users can be provided with more comprehensive and accurate test data, thus providing strong support for the performance evaluation and optimized design of valve 1.

[0048] In one embodiment, a purge hole 28 is provided on the side of the sealed chamber 2. The purge hole 28 is used to input gas into the sealed chamber 2 to drive the particles in the sealed chamber 2 to move within the sealed chamber 2.

[0049] Introducing gas into the sealed chamber 2 through the purge port 28 not only helps to achieve uniform particle distribution and improve the accuracy of particle measurement, but also further cleans the interior of the sealed chamber 2 through the purging action of the gas, reducing the impact of residual particles on subsequent tests. In practical applications, the purge port 28 can be connected to a purging mechanism to input purging gas into the sealed chamber 2. The position and size of the purge port 28 can also be set according to actual needs to ensure uniform gas input and effective particle agitation. Furthermore, the pressure and flow rate of the purging gas can also be adjusted according to actual needs to achieve optimal particle measurement and cleaning results.

[0050] In another embodiment, a dust generation test hole 29 is also provided on the side of the sealed chamber 2. The dust generation test hole 29 is used to extract gas from the sealed chamber 2 so as to drive the particles in the sealed chamber 2 into the particle size analyzer 23.

[0051] The gas introduced by the dust-generating purge is passed into the sealed chamber and circulates throughout the chamber before finally flowing into the particle size analyzer through the outlet. This allows particles within the sealed chamber 2 to be extracted into the particle size analyzer 23. This not only simplifies the particle size analysis process and improves testing efficiency but also ensures sufficient movement and distribution of particles within the sealed chamber 2, thereby further enhancing the accuracy and reliability of particle measurement. In practical applications, the dust-generating test port 29 is connected to a dust-generating purge mechanism to input dust-generating purge gas into the sealed chamber 2. The position and size of the dust-generating test port 29 can also be set according to actual needs to ensure smooth gas extraction and effective particle flow. Furthermore, during the dust-generating test, the gas pressure and flow rate can be flexibly adjusted as needed to meet the requirements of different testing scenarios.

[0052] In one embodiment, multiple mounting bases 21 are provided. By providing multiple mounting bases 21, different performance tests can be performed on the same valve 1 simultaneously, thereby enabling the overall performance testing system to efficiently perform multiple sets of tests and reduce the time spent changing valves 1 and resetting test parameters. In practical applications, each mounting base 21 can also be equipped with an independent test interface and sensor to ensure that the sealed chamber 2 can simultaneously perform the same performance index test on multiple valves 1. This design not only improves testing efficiency but also enhances the reliability and comparability of test results. Furthermore, the provision of multiple mounting bases 21 also facilitates batch testing, enabling the performance testing system to meet the needs of large-scale valve 1 performance testing.

[0053] In practical applications, the shape of the fixing seat 21 is adapted to the shape of the valve 1, so that the valve 1 can be precisely fixed in the fixing seat 21 to maintain the stability of the valve 1 and avoid affecting the testing process. Preferably, the fixing seat 21 can be provided with a locking mechanism, such as bolts, nuts, or clamping devices, to ensure stability under vibration or impact loads. The fixing seat 21 can be made of high-strength materials, such as steel or aluminum alloy, to provide sufficient rigidity and durability. The yield strength and fatigue limit of the material are key factors determining its stability. In addition, considering that the sealing chamber 2 is equipped with a heating element 25, which will keep the sealing chamber 2 at a high temperature, the structure of the fixing seat 21 operating in a high-temperature environment needs to consider the effect of thermal expansion. The design should include appropriate gaps or use materials with different coefficients of thermal expansion to maintain the stability of the structure, thereby further improving the accuracy of the performance test of the valve 1.

[0054] In summary, the valve performance testing system provided in this embodiment can organically combine multiple performance testing indicators of valve 1, such as motion accuracy measurement, leakage measurement, temperature resistance measurement, reliability measurement, stability measurement, cleanliness measurement, and noise measurement, thereby achieving the effect of offline testing on a single platform. This can greatly accelerate the development process while ensuring the reliability of test data, and through multi-dimensional data comparison, more scientific and efficient development scheme design can be achieved, thereby optimizing development costs.

[0055] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the systems disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple; relevant parts can be referred to in the method section. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

[0056] It should also be noted that, in this specification, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A valve performance testing system for testing the performance of a valve, wherein the valve comprises a valve plate, a motion mechanism, and a drive mechanism connected in sequence, the drive mechanism driving the motion mechanism to move the valve plate, thereby putting the valve in a moving state, characterized in that... The valve performance testing system includes: Sealed chamber; A mounting base, disposed within the sealed cavity, is used to fix the valve; A vibration detector is installed in the sealed chamber and connected to the valve plate to test the vibration index of the valve in motion. A particle size analyzer, connected to the sealed chamber, is used to test the dust generation index of the valve in motion. A vacuum leak detector, connected to the sealed chamber, is used to test the sealing performance of the valve.

2. The valve performance testing system according to claim 1, characterized in that, The inner wall of the sealed chamber is provided with a heating element for controlling the internal temperature of the sealed chamber.

3. The valve performance testing system according to claim 1, characterized in that, The sealed chamber is also equipped with a noise collector for testing the noise performance of the valve.

4. The valve performance testing system according to claim 1, characterized in that, A magnetic switch is provided on the motion mechanism, and an oscilloscope for acquiring the magnetic signal of the magnetic switch is also provided in the sealed cavity.

5. The valve performance testing system according to claim 1, characterized in that, It also includes a trajectory acquisition device for acquiring the motion trajectory of the valve plate in motion.

6. The valve performance testing system according to claim 1, characterized in that, It also includes a filter that is in communication with the sealed chamber and is used to input filtered airflow into the sealed chamber.

7. The valve performance testing system according to claim 6, characterized in that, The valve also includes a valve box, and the filter is connected to the valve box for carrying particles generated in the valve box into the particle size analyzer.

8. The valve performance testing system according to claim 1, characterized in that, A purge hole is provided on the side of the sealed chamber. The purge hole is used to introduce gas into the sealed chamber to drive the particles in the sealed chamber to move within the sealed chamber.

9. The valve performance testing system according to claim 1, characterized in that, The sealed chamber is also provided with a dust generation test hole on its side. The dust generation test hole is used to extract gas from the sealed chamber so as to drive the particles in the sealed chamber into the particle size analyzer.

10. The valve performance testing system according to claim 1, characterized in that, Multiple mounting bases are provided.

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