Integrated light source device and laser direct writing equipment

Abstract

The embodiment of the utility model discloses an integrated light source device, which is applied to laser direct writing equipment and comprises a seat body, a plurality of first through holes with the same specification are arranged in an array along the thickness direction from the upper horizontal end face to the lower horizontal end face of the seat body, and a plurality of light sources are arranged in each first through hole. A group of laser assemblies with the same specification, which can be independently detached and adjusted, are mounted on each row, and focuses formed after laser emitted by the plurality of groups of laser assemblies in each row is focused are positioned on the same straight line after being adjusted. According to the utility model, disassembly and assembly of a single group or multiple groups of laser assemblies can be realized, and instant replacement and maintenance of faulted lasers are facilitated; meanwhile, through the integrated light source device, the distance between the exposure points of each group of laser assemblies can be adjusted, so that the exposure points of a plurality of lasers on the same straight line are located on the same straight line after being adjusted, and the problem that the exposure positions of the lasers are inaccurate due to manufacturing and mounting errors of the laser assemblies is solved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of laser direct imaging, especially relates to an integrated light source device and laser direct writing equipment. BACKGROUND

[0002] In the field of laser direct writing equipment, for the setting of integrated light source, reference patent application: an integrated semiconductor laser direct imaging device with micro-lens array (publication number CN115113493A), the usual practice is: a plurality of array distributed laser light sources 41 are integrated on a substrate 40, and a plurality of focusing lenses 22 corresponding to the plurality of laser light sources 41 are integrated on another micro-lens array assembly 50. Then the substrate 40 and the micro-lens array assembly 50 are aligned, so that theoretically each laser light source (i.e. laser) is on the optical axis of the corresponding focusing lens 22. However, this design is theoretically feasible, but it is difficult to implement in practice, because due to manufacturing and assembly errors, it is impossible to ensure that each laser light source is on the optical axis of the corresponding focusing lens 22, and because the focusing lens is fixed after installation, even if it is found that the laser light source 41 is not on the optical axis of the corresponding focusing lens 22, the position of the laser light source 41 or the focusing lens 22 cannot be adjusted so that the laser light source 41 is on the optical axis of the corresponding focusing lens 22. Secondly, because a plurality of array distributed laser light sources 41 are integrated on a substrate 40, and a plurality of focusing lenses 22 are integrated on another micro-lens array assembly 50, when one or more laser light sources 41 fail, or one or more focusing lenses 22 fail, it is impossible to replace them individually. SUMMARY

[0003] The utility model provides a kind of integrated light source device, its purpose is to solve the following problems: one, the problem that laser light source and / or focusing lens is troublesome to replace;Two, the problem that focusing lens is inconvenient to adjust.

[0004] The utility model scheme is as follows:

[0005] An integrated light source device, comprising: a seat body, a plurality of same specifications first through holes are arranged in the thickness direction of the upper horizontal end surface to the lower horizontal end surface of the seat body, in each of the first through holes, a group of same specifications laser assembly that can be individually detached and adjusted is installed, and the focal points of the laser emitted by the plurality of groups of laser assemblies in each row are located on the same straight line after adjustment.

[0006] In some embodiments: the laser assembly comprises: a laser seat, the laser seat is provided with a second through hole in the thickness direction, one end of the second through hole is embedded with a light source, the other end is embedded with a focusing lens, and the laser seat is detachably mounted at the lower end face of the seat body in the first through hole;

[0007] The laser assembly further comprises a rotating drum located on the other side of the first through hole opposite to the laser seat, one end of the rotating drum close to the focusing lens is horizontal, the other end is an inclined surface, and a light-transmitting sheet is arranged on the inclined surface; and the rotating drum is coaxial with the first through hole and the second through hole.

[0008] In some embodiments, the laser seat comprises a bottom plate and a circular boss extending upward from the thickness direction of the bottom plate, the second through hole penetrates through the circular boss and the bottom plate, and the circular boss is detachably inserted into the first through hole.

[0009] In some embodiments, the laser assembly further comprises a gasket arranged between the corresponding laser seat and the seat body.

[0010] The utility model discloses further disclose a kind of laser direct writing equipment, and the integrated light source device described above is arranged on the laser direct writing equipment.

[0011] The utility model has the beneficial technical effects that: since the seat body of the integrated light source device is arrayed with a plurality of first through holes, each of the first through holes is installed with a group of same-specification laser assemblies that can be individually detached and adjusted, thus, when one or more groups of laser assemblies malfunction, they are convenient to disassemble or replace, making current maintenance simple or easy; meanwhile, each group of laser assemblies is provided with a rotating drum, by adjusting the rotating drum, the intersection points of each laser of a plurality of groups of laser assemblies in the same row after focusing can be on the same straight line, solving the problem of inaccurate exposure points caused by manufacturing and installation errors of laser assemblies. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is the perspective view of the integrated light source device described in the embodiments of the present application;

[0013] Figure 2 It is the A main view of Figure 1

[0014] Figure 3 It is the top view of Figure 2

[0015] Figure 4 It is the B-B sectional view of Figure 3

[0016] Figure 5 ​​​It is a perspective view of the seat body 110.

[0017] Figure 6 It is Figure 4 The specific structure of one of the laser component groups 120;

[0018] Figure 7 It is a detailed structural view of the laser seat 121. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0020] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application; the terms "first", "second", "third" are only used for description and cannot be understood as indicating or implying relative importance; in addition, unless otherwise explicitly specified and limited, the terms "mounting", "connection" and "connection" should be understood in a broad sense; for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate object; it can be the communication between two elements inside. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0021] Reference Figure 1 , Figure 1 It is a perspective view of the integrated light source device described in the embodiments of the present application. The integrated light source device 10 comprises a seat body 110, and a plurality of first through holes 111 (see Figure 5 In each first through hole 111, a group of same-specification laser components 120 that can be individually detached and adjusted are installed. Figure 3 Figure 3 It is Figure 2 ​the same row of the A-A cross section shown in FIG. 1 (a top view) are focused and adjusted to be located on the same straight line E-E, as shown in FIG. 1 (a top view), and FIG. 2 (a side view). Figure 4 .

[0022] Referring to Figure 6 In some embodiments, each group of laser assembly 120 comprises: a laser seat 121, a second through hole 1212 is arranged in the thickness direction of the laser seat 121, a light source 122 is embedded at the upper end in the second through hole 1212, and a focusing lens 123 is embedded at the lower end, and the laser seat 121 is detachably mounted at the first through hole at the lower end surface of the seat body; the laser assembly 120 further comprises a rotating drum 124 located at the other side of the first through hole 111 opposite to the laser seat 121, one end of the rotating drum 124 close to the focusing lens is horizontal, and the other end is an inclined surface, and a light-transmitting sheet 125 is arranged on the inclined surface; the rotating drum 124 is coaxial with the first through hole 111 and the second through hole 1212. A third through hole 126 is arranged on the rotating drum 124 along the axial direction. The rotating drum 124 is arranged with one end horizontal and the other end inclined, and the light-transmitting sheet 125 is arranged on the inclined surface, which is to reduce the half-wave loss of the laser beam emitted by the light source 122. For details, see patent CN113885197B, which will not be repeated here. The laser beam emitted by the light source 122 passes through the focusing lens 123, then passes through the first through hole 111 and the third through hole 126, and is incident on the light-transmitting sheet 125. Since the light-transmitting sheet 125 is inclinedly placed on the inclined surface of the rotating drum 124, the laser beam will reduce the half-wave loss on the light-transmitting sheet 125, so that the utilization efficiency of the laser beam is improved.

[0023] Due to the inevitable errors in the manufacture and installation of the laser seat 121, the light source 122, the focusing lens 123, the rotating drum 124 and the light-transmitting sheet 125 of each group of laser assembly 120, as Figure 3 shown, even theoretically, the focal points of the laser beams emitted by the several lasers arranged in a row are difficult to be actually located on the same straight line E-E as Figure 4 shown. Therefore, the purpose of designing the rotating drum 124 is to adjust the rotation of the rotating drum 124 so that the light-transmitting sheet 125 rotates with the rotating drum 124, and finally the convergence points of the laser beams are adjusted to be located on the same straight line. For details of the adjustment method, see patent CN113885197B.

[0024] In some embodiments, referring to Figure 7The laser mount 121 includes a base plate 1210 and a circular boss 1211 extending upward from the thickness direction of the base plate 1210. A second through hole 1212 penetrates the base plate 1210 and the circular boss 1211. The circular boss 1211 is detachably inserted into... Figure 5 Within the corresponding first through hole 111. On each side of the circular boss 1211, two fourth through holes 1213 are exemplaryly provided. Figure 1 The two screws 127 passed through. Figure 7 After the two fourth through holes 1213 are in the middle, in Figure 5 The laser mount 121 is detachably fixed to the base 110 by fixing it to the two screw holes 112. Figure 1 .

[0025] In some embodiments, reference Figure 1 and Figure 6 Each laser assembly 120 also includes a shim 128, which is disposed between the laser base 121 and the base body 110 and is used to adjust the height of the laser assembly 120 on the laser base 121.

[0026] Because each laser assembly 120 of the integrated light source device is detachable and individually installed... Figure 5 Therefore, it can be understood that when one or more of the laser components 120 fail, for example, when one or more of the components of the laser mount 121, light source 122, focusing lens 123, rotating cylinder 124 and light transmission plate 125 of a certain laser component 120 fail, it is only necessary to replace the faulty component on site, thereby facilitating the maintenance of the laser components.

[0027] In some embodiments, reference Figure 5 The upper horizontal end face (the side facing the reader) and lower horizontal end face (the side facing away from the reader) of the seat 110 are rhomboid in shape, and all four sides are inclined. The rhomboid shape of the upper and lower horizontal end faces of the seat 110 is determined by requirements; therefore, the array of laser components 120 located on the seat 110 is also rhomboid in shape, see... Figure 5 Figure 5 A schematic diagram showing several first through holes 111 arranged in a rhombus shape. Of course, the base 110 can also be hexagonal, and the shape of the base 110 is set according to actual needs.

[0028] Therefore, the integrated light source device described in this utility model not only facilitates the adjustment of the focal point of the laser beam emitted by each laser, so that the focal points of the laser beams emitted by several lasers in the same row are aligned on the same straight line after adjustment, but also facilitates the replacement of each group of faulty laser components, making maintenance more convenient.

[0029] The utility model discloses still a kind of laser direct writing equipment (not shown), the laser direct writing equipment is provided with the integrated light source device mentioned in front.

[0030] Finally, it should be noted that: the above only for the preferred embodiments of the utility model, and is not used to limit the utility model, although the utility model is described in detail with reference to the foregoing embodiments, for the person skilled in the art, it still can modify the technical scheme recorded in the foregoing each embodiment, or equivalent replacement is carried out to part of technical features, any modification, equivalent replacement, improvement etc. made within the spirit and principles of the utility model, should be included in the protection scope of the utility model.

Claims

1. An integrated light source device, characterized in that, The application relates to a laser direct writing equipment. The laser seat is detachably arranged in the first through hole.

2. The integrated light source device of claim 1, wherein: The laser seat comprises a bottom plate and a circular boss extending upwards from the bottom plate, the second through hole penetrates the circular boss and the bottom plate, and the circular boss is detachably inserted into the first through hole. The laser direct writing equipment is provided with the integrated light source device as claimed in any one of claims 1 to 4.

3. The integrated light source device of claim 2, wherein the light source is a laser diode. ​ 4. The integrated light source device of any of claims 2 to 3, wherein, ​ 5. A laser direct writing apparatus, characterized by, ​

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