Clamping mechanism based on ion beam fine trimming compensator

Abstract

The utility model discloses a clamping mechanism based on an ion beam fine trimming compensator. The clamping mechanism comprises an adapter plate, a base and a fixed pressing strip. The adapter plate is Z-shaped, the upper end of the adapter plate is connected with a conveying mechanism of the ion beam polishing machine, and the lower end of the adapter plate is fixedly connected with the top of the base; a groove matched with the compensator is formed in the bottom of the base, and the upper end of the compensator is arranged in the groove; the multiple sets of fixing pressing strips are arranged in the circumferential direction of the groove at intervals, the upper ends of the fixing pressing strips are connected with the edge of the base, and the lower ends of the fixing pressing strips make contact with the lower end face of the compensator. The utility model has the beneficial effects that the Z-shaped adapter plate is arranged and can be connected with a transportation mechanism of the ion beam polishing machine and also can be connected with the base, so that the transportation mechanism of the ion beam polishing machine and the large-caliber compensator are kept at a certain distance, and the mutual interference between the transportation mechanism of the ion beam polishing machine and the large-caliber compensator is avoided; and meanwhile, axial positioning of the large-diameter compensator is achieved through the fixing pressing strips, and the clamping problem of the large-diameter compensator is solved.

Description

Technical Field

[0001] This utility model relates to the field of optical technology, specifically to a clamping mechanism based on an ion beam precision compensator. Background Technology

[0002] Ion beam finishing technology primarily utilizes the principle of ion sputtering. A Gaussian-shaped ion beam emitted from a wide-beam, low-energy ion source bombards the surface of the workpiece. During bombardment, when surface atoms acquire sufficient energy to overcome surface binding energy, they detach from the workpiece surface, eliminating high-point errors and achieving convergence of surface shape accuracy errors. Based on quantitative surface shape error detection data of optical components, appropriate process parameters and processing strategies are selected. Under computer control, the surface of the optical components is polished. By controlling the residence time of the ion beam on the component surface, the amount of material removed can be precisely controlled, correcting local surface shape errors and achieving the final surface shape accuracy requirements, thus realizing the purpose of workpiece finishing.

[0003] Large-aperture compensators (specifically, compensators with an aperture greater than 400mm) are high-precision optical inspection devices. They provide nanometer-level precision surfaces as reference planes for inspecting the surface accuracy of high-precision optical components and for testing and calibrating the optical performance and specifications of high-precision optical equipment. Large-aperture compensators are generally divided into planar compensators and spherical compensators, both known for their high precision, large aperture, and heavy weight. For the high surface accuracy requirements of large-aperture compensators, ion beam finishing is currently the best optical processing method. The key technology for ion beam finishing of large-aperture compensators lies in how to achieve the positioning and rapid hoisting of these compensators. However, existing ion beam clamping fixtures are designed by the original manufacturer to clamp optical components with a maximum diameter of Ф300mm×20mm. These are general-purpose clamping fixtures for small-aperture optical components, and their hook size, disk diameter, and height are insufficient for clamping large-aperture, heavy compensators.

[0004] Therefore, it is necessary to improve existing technologies. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of the technology by providing a clamping mechanism based on an ion beam precision compensator, which aims to solve the problem that existing clamping fixtures cannot clamp large-diameter compensators.

[0006] The technical solution adopted in this utility model is: a clamping mechanism based on an ion beam precision compensator, including an adapter plate, a base and a fixing strip;

[0007] The adapter plate is Z-shaped, with its upper end connected to the transport mechanism of the ion beam polisher and its lower end fixedly connected to the top of the base.

[0008] The base has a groove at its bottom that is adapted to the compensator, and the upper end of the compensator is located in the groove.

[0009] The fixing strips are in multiple sets, arranged at intervals along the circumference of the groove. The upper end of the fixing strip is connected to the edge of the base, and the lower end of the fixing strip is in contact with the lower end face of the compensator.

[0010] According to the above scheme, the adapter plate includes an upper first horizontal plate segment, a middle vertical plate segment, and a lower second horizontal plate segment;

[0011] The first horizontal plate segment is detachably connected to the transport mechanism of the ion beam polishing machine. One end of the first horizontal plate segment is connected to the upper end of the vertical plate segment, and the lower end of the vertical plate segment is connected to one end of the second horizontal plate segment. The second horizontal plate segment is mounted on the base and is detachably connected to the base.

[0012] According to the above scheme, the base is disc-shaped, and the groove is coaxial with the base.

[0013] According to the above scheme, the diameter of the groove is 0.5mm larger than the diameter of the compensator.

[0014] According to the above scheme, the fixing strip is Z-shaped, including a fitting part, a fixing part connected to the upper end of the fitting part, and a supporting part connected to the lower end of the fitting part; the upper end of the fitting part extends radially outward to form the fixing part, and the lower end of the fitting part extends radially inward to form the supporting part; the fixing part is connected to the edge of the base; the inner surface of the fitting part is an arc surface adapted to the outer peripheral surface of the compensator; the upper surface of the supporting part contacts and presses against the lower end surface of the compensator.

[0015] According to the above scheme, adhesive tape is fixed to the inner side of the bonding part and the upper surface of the supporting part.

[0016] According to the above scheme, multiple sets of fixing strips are arranged at intervals along the outer periphery of the groove.

[0017] According to the above scheme, the fixing part of the fixing strip is detachably connected to the edge of the base.

[0018] According to the above scheme, the depth of the groove is smaller than the thickness of the compensator.

[0019] According to the above scheme, the depth of the groove is less than the thickness of the base.

[0020] The beneficial effects of this utility model are as follows:

[0021] 1. This utility model features a Z-shaped adapter plate, which can be connected to both the transport mechanism of the ion beam polishing machine and the base, maintaining a certain distance between the transport mechanism of the ion beam polishing machine and the large-diameter compensator, thus avoiding mutual interference. At the same time, the axial positioning of the large-diameter compensator is achieved through the fixing pressure strip, solving the clamping problem of the large-diameter compensator in ion beam precision finishing.

[0022] 2. This utility model adopts a Z-shaped adapter plate that is detachably connected to the ion beam polishing machine transport mechanism and base, which improves work efficiency and avoids complex connection mechanisms; the Z-shaped adapter plate is a universal part, which facilitates the manufacture of clamping mechanisms.

[0023] 3. In this utility model, adhesive tape is provided on the inner side of the fixing strip to avoid direct hard contact between the fixing strip and the large-diameter compensator, which could cause damage.

[0024] 4. In this utility model, a corresponding base plate can be configured according to the model of the large-diameter compensator. The same base plate can be used to clamp the same model of large-diameter compensator, which improves the utilization rate.

[0025] 5. This utility model has a simple and reasonable structure, is easy to operate, and is easy to implement. Attached Figure Description

[0026] Figure 1 This is a structural schematic diagram of a specific embodiment of the present invention.

[0027] Figure 2 This is a cross-sectional view of this embodiment.

[0028] Figure 3 This is a top view of this embodiment.

[0029] In the figure: 1. Adapter plate, 1.1. Through hole, 1.2. First threaded through hole; 2. Base, 2.1. Groove, 2.2. Second threaded through hole, 2.3. First countersunk groove; 3. Fixing strip, 3.1. Second countersunk groove, 3.2. Fixing part, 3.3. Fitting part, 3.4. Supporting part; 4. Compensator. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0031] See Figures 1-3 A compensator clamping mechanism, specifically a clamping mechanism for ion beam precision finishing of large-diameter compensators, includes an adapter plate 1, a base 2 and a fixing strip 3;

[0032] The adapter plate 1 is Z-shaped. The upper end of the adapter plate 1 is connected to the transport mechanism of the ion beam polishing machine, and the lower end of the adapter plate 1 is connected and fixed to the top of the base 2.

[0033] The base 2 has a groove 2.1 at its bottom that is adapted to the compensator 4, and the upper end of the compensator 4 is located in the groove 2.1.

[0034] The fixed pressure strip 3 is in multiple sets and is arranged at intervals along the circumference of the groove 2.1; the upper end of the fixed pressure strip 3 is connected to the side of the base 2, and the lower end of the fixed pressure strip 3 contacts and presses against the edge of the lower end face of the compensator 4 (without contacting the mirror surface of the compensator 4). The lower end face of the compensator 4 is located in the working cavity of the ion polishing machine.

[0035] In this invention, a Z-shaped adapter plate 1 connects the transport mechanism of the ion beam polishing machine to the base 2, and a fixing strip 3 is used to fix the compensator 4 on the base 2, thus achieving precise positioning of the compensator 4 during ion beam polishing. The compensator 4 has a disc-shaped structure with a diameter exceeding 400 mm.

[0036] Preferably, the adapter plate 1 includes an upper first horizontal plate segment, a middle vertical plate segment, and a lower second horizontal plate segment;

[0037] The first horizontal plate segment is detachably connected to the transport mechanism of the ion beam polishing machine. One end of the first horizontal plate segment is connected to the upper end of the vertical plate segment, and the lower end of the vertical plate segment is connected to one end of the second horizontal plate segment. The second horizontal plate segment is mounted on the base 2 and is detachably connected to the base 2.

[0038] In this invention, the second horizontal plate segment of the adapter plate 1 and the base 2 can be connected by screws.

[0039] Preferably, the base 2 is disc-shaped, and the groove 2.1 is arranged coaxially with the base 2.

[0040] In this invention, each base 2 is fitted with a compensator 4. The bottom of the base 2 is provided with a groove 2.1 to match the compensator 4. Using the axis of the compensator 4 as a reference, a groove 2.1 adapted to the shape of the compensator 4 is cut from the bottom of the base 2, solving the problem of precise positioning of the compensator 4 and avoiding damage to its surface finish during positioning. To facilitate the placement of the compensator 4, the diameter of the groove 2.1 is slightly larger than that of the compensator 4, by 0.5 mm (0.25 mm on each side, as a positive tolerance for placement of the compensator 4); the groove 2.1 and the compensator 4 have a high tolerance fit.

[0041] Preferably, the fixing strip 3 is Z-shaped, including a fitting part 3.3, a fixing part 3.2 connected to the upper end of the fitting part 3.3, and a supporting part 3.4 connected to the lower end of the fitting part 3.3; the upper end of the fitting part 3.3 extends radially outward to form the fixing part 3.2, and the lower end of the fitting part 3.3 extends radially inward to form the supporting part 3.4 (specifically, it extends radially inward along the lower end face of the compensator 4); the fixing part 3.2 is connected to the edge of the base 2; the inner surface of the fitting part 3.3 is an arc surface adapted to the outer peripheral surface of the compensator 4 (the two fit together); the upper surface of the supporting part 3.4 contacts and presses against the edge of the lower end face of the compensator 4, and the supporting part 3.4 does not contact the mirror surface of the compensator 4.

[0042] Preferably, the inner surface of the fitting part 3.3 and the upper surface of the supporting part 3.4 are both fixed with high-temperature resistant adhesive tape to prevent the fixing strip 3 from directly contacting the compensator 4 and causing damage to the compensator 4.

[0043] In this invention, multiple sets of fixing strips 3 are arranged at intervals along the outer periphery of the groove 2.1, and the fixing part 3.2 of the fixing strip 3 is detachably connected to the edge of the base 2. The fixing strip 3 fixes the compensator 4 to the lower part of the base 2. In order to facilitate the fixing strip 3 to press the compensator 4 into the groove 2.1, the depth of the groove 2.1 is smaller than the thickness of the compensator 4 and smaller than the thickness of the base 2.

[0044] In this utility model, a corresponding base 2 can be set according to the model of compensator 4.

[0045] Example 1

[0046] like Figure 1 The clamping mechanism shown includes an adapter plate 1, a base 2, and a fixing strip 3.

[0047] The adapter plate 1 is Z-shaped, comprising an upper first horizontal plate segment, a middle vertical plate segment, and a lower second horizontal plate segment. The first horizontal plate segment is connected to the transport mechanism of the ion beam polisher. One end of the first horizontal plate segment is connected to the upper end of the vertical plate segment, and the lower end of the vertical plate segment is connected to one end of the second horizontal plate segment. The second horizontal plate segment is mounted on and connected to the base 2. Specifically, the first horizontal plate segment has two Ф15mm through holes 1.1, which fit with two Ф14.8mm cylinders on the transport mechanism of the ion beam polisher to achieve a connection. The second horizontal plate segment has six first threaded through holes 1.2 adapted to M4 bolts. The six M4 bolts pass through the first threaded through holes 1.2 and the first countersunk groove 2.3 on the base 2, connecting the base 2 to the adapter plate 1. The adapter plate 1 serves as a connecting link, thereby smoothly and firmly connecting the transport mechanism of the ion beam polishing machine and the base 2 in a simple manner.

[0048] The groove 2.1 on the base 2 is formed by rotating and cutting off the bottom of the base 2 with the axis of the base 2 as the center and the diameter of the compensator 4 increased by 0.5mm; the depth of the groove 2.1 is 3-5mm; the groove 2.1 ensures that the compensator 4 does not shift in the radial direction, and also has a certain expansion margin. The base 2 outside the groove 2.1 has second threaded through holes 2.2 that are adapted to M4 screws evenly distributed circumferentially. The M4 screw passes through the second threaded through holes 2.2 and the second countersunk groove 3.1 provided on the fixing pressure strip 3, connecting the base 2 to the fixing part 3.2 of the fixing pressure strip 3, and using the supporting part 3.4 of the fixing pressure strip 3 to restrict the longitudinal movement of the compensator 4.

[0049] There are four sets of fixing strips 3, evenly spaced along the outer periphery of the groove 2.1. The fixing part 3.2 of the fixing strip 3 is connected to the base 2 on the outside of the groove 2.1 by M4 screws. The inner side of the fitting part 3.3 and the upper surface of the supporting part 3.4 of the fixing strip 3 are covered with high-temperature resistant adhesive tape, which contacts the compensator 4. The supporting part 3.4 of the fixing strip 3 protrudes from the fitting part 3.3 by 3-5mm. The compensator 4 is precisely fixed to the base 2 by the fixing strips 3 and can be suspended in the working chamber of the ion beam polishing machine. The diameter of the compensator 4 is greater than 400mm; the effective light-transmitting diameter of the lower end face of the compensator 4 is the area with a 5mm edge removed, that is, the mirror area of ​​the compensator 4 is the area with a 5mm edge removed from its lower end face.

[0050] Example 2

[0051] This embodiment has the same structure as Embodiment 1, except for the following configuration: there are three sets of fixing strips 3, which are evenly spaced along the outer periphery of the groove 2.1.

[0052] The installation and working principle of this utility model are as follows:

[0053] The upper end of the adapter plate 1 of the clamping mechanism is connected to the transport mechanism of the ion beam polishing machine. The compensator 4 is installed in the groove 2.1 of the base 2 of the clamping mechanism. At this time, the lower end face of the compensator 4 is located in the working cavity of the ion beam polishing machine. The ion beam polishing machine is started, and the ion source emits an ion beam to bombard the mirror surface of the compensator 4 (ion beam polishing is a non-contact processing method, which requires a certain processing distance, and the effective light transmission aperture of the lower end face of the compensator 4 is about 5mm of the edge removal area), and the mirror surface of the compensator 4 is polished and refined.

[0054] The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0055] Finally, it should be noted that the above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. However, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A clamping mechanism based on an ion beam trim compensator, characterized by, The adapter plate, the base and the fixing strip are included; The adapter plate is Z-shaped, the upper end of the adapter plate is connected with the transport mechanism of the ion beam polisher, and the lower end of the adapter plate is connected with the top of the base; The bottom of the base is provided with a groove matched with the compensator, and the upper end of the compensator is arranged in the groove; The fixing strip is arranged in multiple groups along the circumference of the groove, the upper end of the fixing strip is connected with the edge of the base, and the lower end of the fixing strip is in contact with the lower end surface of the compensator.

2. The ion beam figuring compensator-based clamping mechanism of claim 1, wherein, The adapter plate includes a first horizontal plate segment at the upper part, a vertical plate segment at the middle part and a second horizontal plate segment at the lower part; The first horizontal plate segment is detachably connected with the transport mechanism of the ion beam polisher, one end of the first horizontal plate segment is connected with the upper end of the vertical plate segment, the lower end of the vertical plate segment is connected with one end of the second horizontal plate segment, the second horizontal plate segment is arranged on the base and is detachably connected with the base.

3. The ion beam figuring compensator-based clamping mechanism of claim 1, wherein, The base is disc-shaped, and the groove is coaxial with the base.

4. The ion beam figuring compensator-based clamping mechanism of claim 3, wherein, The diameter of the groove is 0.5mm larger than the diameter of the compensator.

5. The ion beam figuring compensator-based clamping mechanism of claim 2, wherein, The fixing strip is Z-shaped and includes a fitting part, a fixing part connected with the upper end of the fitting part and a supporting part connected with the lower end of the fitting part; the upper end of the fitting part extends radially outward to form the fixing part, and the lower end of the fitting part extends radially inward to form the supporting part; the fixing part is connected with the edge of the base; the inner side surface of the fitting part is an arc surface matched with the outer peripheral surface of the compensator; the upper surface of the supporting part is in contact with and presses the edge part of the lower end surface of the compensator.

6. The ion beam figuring compensator-based clamping mechanism of claim 5, wherein, The inner side surface of the fitting part and the upper surface of the supporting part are both fixed with adhesive tape.

7. The ion beam figuring compensator-based clamping mechanism of claim 5, wherein, The fixing strip is arranged in multiple groups along the outer periphery of the groove.

8. The ion beam figuring compensator-based clamping mechanism of claim 5, wherein, The fixing part of the fixing strip is detachably connected with the edge of the base.

9. The ion beam figuring compensator-based clamping mechanism of claim 5, wherein, The depth of the groove is smaller than the thickness of the compensator.

10. The ion beam figuring compensator-based clamping mechanism of claim 5, wherein, The depth of the groove is smaller than the thickness of the base.

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