Conveying device

Abstract

The utility model discloses a conveying device. The conveying device comprises a rack, a transmission mechanism and a cleaning mechanism. The transmission mechanism comprises a conveying belt which is used for bearing silicon wafers. The cleaning mechanism is detachably arranged on the rack and located below the conveying belt. The cleaning mechanism comprises a powder receiving box and a cleaning part, the powder receiving box is detachably installed on the rack, a feeding port is formed in the top end of the powder receiving box, the cleaning part is arranged in the powder receiving box, and the cleaning part can partially stretch out of the feeding port, makes contact with the lower side part of the conveying belt and is used for cleaning particles attached to the conveying belt into the powder receiving box. According to the conveying device, the cleaning piece is adopted for sweeping away the silicon powder on the conveying belt, the powder receiving box is adopted for collecting the silicon powder, and when the powder receiving box collects more silicon powder, the powder receiving box is detached from the rack, so that the risk that the silicon powder diffuses again and is polluted is reduced while the silicon powder is cleaned.

Description

Technical Field

[0001] This application relates to the field of photovoltaic manufacturing equipment, and more particularly to a conveying device. Background Technology

[0002] In the production of photovoltaic materials, silicon wafers are generally transported by conveyor belts. However, silicon powder on the wafers tends to stick to the conveyor belt. Usually, a brush is used to sweep away the silicon powder on the conveyor belt, and then a dust collection box is used to collect the swept silicon powder. However, the brush is separate from the dust collection box. When the silicon powder in the dust collection box is poured out, the silicon powder in the dust collection box tends to spread outward, resulting in poor silicon powder cleaning effect. Utility Model Content

[0003] In view of this, this application provides a conveying device with good silicon powder cleaning effect.

[0004] Embodiments of this application provide a conveying device, which includes a frame, a transmission mechanism, and a cleaning mechanism. The transmission mechanism includes a conveyor belt for carrying silicon wafers. The cleaning mechanism is detachably mounted on the frame and located below the conveyor belt. The cleaning mechanism includes a powder receiving box and a cleaning component. The powder receiving box is detachably mounted to the frame, and a feed inlet is provided at the top of the powder receiving box. The cleaning component is disposed inside the powder receiving box and can partially extend from the feed inlet, contacting the lower part of the conveyor belt to clean particulate matter adhering to the conveyor belt into the powder receiving box.

[0005] In the above embodiments, after the cleaning component removes silicon powder from the conveyor belt, it collects it into the powder receiving box. When the powder receiving box has collected a large amount of silicon powder, the powder receiving box and the cleaning component are removed from the frame, thereby achieving the cleaning of silicon powder.

[0006] In some embodiments, the powder receiving box has an internal mounting plate, a cleaning component is connected to the mounting plate, and there are gaps between the mounting plate and the bottom wall and at least one side wall of the powder receiving box.

[0007] In some embodiments, the powder receiving box includes a box body and a cover. The box body has an opening on the side away from the frame, and the cover is detachably and movably connected to the box body and closes the opening.

[0008] In some embodiments, the conveying device further includes a fixing component, which is disposed on the frame, and the powder receiving box is detachably connected to the frame via the fixing component.

[0009] In some embodiments, the fixing assembly includes a magnet and a fixing member, which are respectively disposed on the frame. The magnet is configured to attract the powder receiving box. The fixing member is configured to pass through the powder receiving box.

[0010] In some embodiments, the conveying device further includes a rotating shaft mechanism, which includes a shaft core rotatably mounted to the frame. The transmission mechanism further includes a driving wheel and at least one driven wheel, the driving wheel being sleeved onto the outer wall of the shaft core. The driven wheel is rotatably mounted to the frame, and a conveyor belt is sleeved onto the outer sides of the driving wheel and the driven wheel.

[0011] In some embodiments, the frame includes a base and a fixing plate. The fixing plate is disposed on the upper surface of the base. The end face of the fixing plate has a groove in a direction perpendicular to the axial direction of the shaft core. A portion of the shaft core can be inserted into the groove and rotatably connected to the fixing plate.

[0012] In some embodiments, the rotating shaft mechanism further includes a bearing assembly disposed on the outer side wall of the shaft core. The bearing assembly is detachably connected to the fixed plate and is used to support the rotation of the shaft core relative to the fixed plate.

[0013] In some embodiments, the conveying device includes one or more conveying units, each configured to convey the same silicon wafer. Each conveying unit includes two fixed plates, two transmission mechanisms, and two cleaning mechanisms. The two fixed plates are arranged axially spaced along a shaft core. Each transmission mechanism is mounted on the outer side of one fixed plate, and the conveyor belts of adjacent transmission mechanisms respectively carry both sides of the silicon wafer. Each cleaning mechanism is detachably mounted on the outer side of one fixed plate. Each conveying unit includes two bearing assemblies located between the two fixed plates, each bearing assembly being connected to the inner side of one fixed plate.

[0014] In some embodiments, the cleaning component is fixedly or rotatably connected to the powder receiving box, and the cleaning component is movable relative to the conveyor belt. The cleaning component includes a plurality of bristles. When the cleaning component is fixedly connected to the powder receiving box, the plurality of bristles are distributed parallel to the conveying direction of the conveyor belt. When the cleaning component is rotatably connected to the powder receiving box, the plurality of bristles are distributed in a ring, and the rotation center line of the cleaning component is perpendicular to the conveying direction of the conveyor belt. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a conveying device provided in an embodiment of this application.

[0016] Figure 2 for Figure 1 A schematic diagram of the conveyor device for removing the cover plate.

[0017] Figure 3 for Figure 1 A side view of a portion of the structure of the conveying device.

[0018] Figure 4 for Figure 1 An exploded view of the powder receiving box of the conveying device.

[0019] Figure 5for Figure 1 A schematic diagram of another part of the conveying device.

[0020] Explanation of main component symbols

[0021] 10. Conveying device; 11. Frame; 111. Base; 112. Fixing plate; 1121. Groove; 12. Transmission mechanism; 121. Conveyor belt; 122. Drive wheel; 123. Driven wheel; 13. Cleaning mechanism; 131. Powder receiving box; 1311. Box body; 13110. Mounting plate; 13111. Opening; 13112. Feed inlet; 1312. Cover plate; 132. Cleaning component; 1321. Brush bristles; 14. Fixing assembly; 141. Magnet; 142. Fixing component; 15. Rotating shaft mechanism; 151. Shaft core; 152. Bearing assembly; 153. Drive wheel. Detailed Implementation

[0022] The technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0023] It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or may also have an intervening component. When a component is considered to be "placed" on another component, it can be directly placed on the other component or may also have an intervening component. The terms "top," "above," "below," "front," "back," and similar expressions used in this article are for illustrative purposes only.

[0024] The terms “first”, “second”, etc., are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implying the quantity, specific order, or primary and secondary relationship of the indicated technical features.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0026] Some embodiments of this application will now be described with reference to the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0027] In some embodiments, please refer to Figures 1 to 4A conveying device 10 is used to convey silicon wafers (not shown). The conveying device 10 includes a frame 11, a transmission mechanism 12, and a cleaning mechanism 13. The transmission mechanism 12 includes a conveyor belt 121, which is disposed on the frame 11 and is used to contact the silicon wafers and drive them to be conveyed. The cleaning mechanism 13 includes a powder receiving box 131 and a cleaning component 132 disposed on the powder receiving box 131. The powder receiving box 131 is detachably disposed on the frame 11 and is located below the conveyor belt 121. The top of the powder receiving box 131 has a feed inlet 13112 facing the conveyor belt 121. The cleaning component 132 is disposed inside the powder receiving box 131. Part of the cleaning component 132 can extend out from the feed port 13112 and contact the lower surface of the conveyor belt 121. When the conveyor belt 121 rotates, the cleaning component 132 cleans the silicon powder on the lower surface of the conveyor belt 121 and causes the silicon powder to fall into the powder receiving box 131, which helps to reduce the risk of silicon powder scattering during the cleaning process of the cleaning component 132.

[0028] In addition, silicon powder has a small diameter and is easily suspended in the air. Generally, the cleaning component 132 and the powder receiving box 131 are set separately. When the silicon powder is poured, the powder receiving box 131 is removed from the frame 11, and the powder receiving box 131 and the cleaning component 132 move relative to each other. The cleaning component 132 will agitate the air inside the powder receiving box 131, thereby causing the silicon powder suspended in the air to diffuse out of the powder receiving box 131 with the flowing air.

[0029] In this embodiment, since the cleaning component 132 is installed inside the powder receiving box 131, when there is a lot of silicon powder in the powder receiving box 131, the powder receiving box 131 and the cleaning component 132 are removed from the frame 11 together. This helps to keep the powder receiving box 131 and the cleaning component 132 relatively stationary, so as to reduce the risk of the powder receiving box 131 and the cleaning component 132 moving relative to each other and stirring the silicon powder in the powder receiving box 131 before pouring out the silicon powder.

[0030] In some embodiments, please refer to Figure 2 The cleaning component 132 is a brush, and the cleaning component 132 includes multiple bristles 1321.

[0031] In some embodiments, the cleaning component 132 is fixedly connected to the powder receiving box 131 so that when the conveyor belt 121 moves, the cleaning component 132 can move relative to the conveyor belt 121 and make all the bristles 1321 clean the underside of the conveyor belt 121. The multiple bristles 1321 are distributed along the transmission direction parallel to the conveyor belt 121 to increase the contact area between the bristles 1321 and the conveyor belt 121, thereby improving the cleaning effect of the cleaning component 132.

[0032] In other embodiments, multiple bristles 1321 are arranged in a ring, and the cleaning member 132 is rotatably connected to the powder receiving box 131. The rotation center line of the cleaning member 132 is perpendicular to the transmission direction of the conveyor belt 121, so that when the conveyor belt 121 moves, the cleaning member 132 can move relative to the conveyor belt 121 and make all the bristles 1321 clean the underside of the conveyor belt 121.

[0033] It is understandable that when the multiple bristles 1321 are arranged in a circular shape on a cross-section perpendicular to the rotation center line, the cleaning element 132 is in line contact with the conveyor belt 121. Furthermore, when the multiple bristles 1321 are arranged in an oblong shape on a cross-section perpendicular to the rotation center line, the cleaning element 132 is in surface contact with the conveyor belt 121, which helps to increase the contact area between the cleaning element 132 and the conveyor belt 121, thereby improving the cleaning effect of the cleaning element 132.

[0034] In other embodiments, the cleaning component 132 is a cleaning cloth or a scraper.

[0035] In some embodiments, please refer to Figure 2 and Figure 3 The powder receiving box 131 includes a box body 1311 and a mounting plate 13110. The box body 1311 is detachably connected to the frame 11. The mounting plate 13110 is connected to the inner side wall of the box body 1311, and there is a gap between the mounting plate 13110 and at least one side wall of the box body 1311. The cleaning component 132 is installed on the mounting plate 13110 so that the cleaning component 132 is suspended inside the box body 1311, thereby reducing the obstruction of the bottom of the cleaning component 132 to the box body 1311, which facilitates the silicon powder to fall to the bottom of the box body 1311 and helps to increase the collection capacity of the box body 1311.

[0036] In some embodiments, the top of the housing 1311 is provided with a feed inlet 13112, and a portion of the cleaning component 132 extends from the feed inlet 13112 toward the conveyor belt 121.

[0037] In some embodiments, the powder receiving box 131 further includes a sliding cover (not shown), which is slidably disposed on the top of the box body 1311 to cover the feed inlet 13112. When the cleaning mechanism 13 is working, the sliding cover opens, and the cleaning component 132 extends out from the box body 1311 and contacts the conveyor belt 121. When there is a large amount of silicon powder in the box body 1311, the sliding cover is closed before the powder receiving box 131 is unloaded from the frame 11, so that the box body 1311 forms a closed space. This reduces the risk of silicon powder spreading or leaking outward from the box body 1311 during the process of unloading the powder receiving box 131 from the frame 11 and pouring out the silicon powder.

[0038] When the cleaning component 132 is a brush, the sliding cover can push the brush to bend and deform during the process of sliding to close the feed inlet 13112, so as to reduce the risk of interference between the sliding cover and the cleaning component 132, which would cause the sliding cover to fail to close.

[0039] In other embodiments, a lifting mechanism is provided between the cleaning component 132 and the mounting plate 13110 to drive the cleaning component 132 to move up and down and make the end of the cleaning component 132 contact the conveyor belt 121. When the sliding cover is sliding to close the feed inlet 13112, the lifting mechanism drives the cleaning component 132 to descend so that the cleaning component 132 avoids the sliding cover.

[0040] In some embodiments, please refer to Figure 3 The box 1311 has an opening 13111 on one side for pouring silicon powder or replacing the cleaning component 132. The powder receiving box 131 also includes a cover plate 1312, which closes to the opening 13111 when the cleaning component 132 is performing cleaning work, so that the box 1311 forms a semi-enclosed space to reduce the risk of silicon powder spreading outward.

[0041] In some embodiments, the opening 13111 is located on the side of the housing 1311 away from the frame 11 to avoid the risk of unstable connection between the housing 1311 and the frame 11 when the cover 1312 is connected to the frame 11.

[0042] In some embodiments, the mounting plate 13110 is connected to an inner side wall of the housing 1311 near the frame 11, and there is a gap between the mounting plate 13110 and the other side walls of the housing 1311. Meanwhile, the opening 13111 is located on the side of the housing 1311 away from the frame 11. When the cleaning component 132 is performing cleaning work, the silicon powder swept into the housing 1311 can easily accumulate under and around the mounting plate 13110 through the gap, avoiding disturbance of the silicon powder in the housing 1311 when the brush cleans the conveyor belt 121. When the cover plate 1312 of the powder receiving box 131 is separated from the housing 1311, the silicon powder accumulated under and around the mounting plate 13110 can be poured out from the opening 13111.

[0043] In some embodiments, please refer to Figure 3 The conveying device 10 also includes a fixing component 14, which is located on the frame 11. The box 1311 is quickly connected to or quickly separated from the frame 11 through the fixing component 14, so that the powder receiving box 131 drives the cleaning component 132 to be quickly unloaded from the frame 11, thereby achieving the effect of quickly pouring silicon powder. This facilitates the cleaning mechanism 13 to continuously clean the conveying device 10, which helps to improve the cleaning efficiency of the conveying device 10.

[0044] In some embodiments, the housing 1311 is made of a ferromagnetic material, or the housing 1311 is provided with ferromagnetic components that attract the magnet 141. See also... Figure 4 The fixing component 14 includes a magnet 141 disposed on the side of the frame 11, which attracts the box 1311, thereby achieving the effect of quickly fixing the box 1311 to the frame 11.

[0045] In other embodiments, the fixing component 14 includes a fixing member 142. As the box 1311 moves toward the frame 11, the fixing member 142 passes through the box 1311 to support the box 1311, thereby fixing the powder receiving box 131 to the frame 11.

[0046] Furthermore, the fixing component 14 includes both a magnet 141 and a fixing member 142. The fixing member 142 is arranged perpendicularly to the side of the frame 11. When the box 1311 moves closer to the frame 11 and the magnet 141, the box 1311 only needs to move closer to the frame 11 in a direction perpendicular to the side of the frame 11 to achieve the effect of the magnet 141 adsorbing the box 1311 while the fixing member 142 is inserted into the box 1311, thereby achieving the effect of the box 1311 being connected to both the fixing member 142 and the magnet 141 at the same time.

[0047] In addition, compared to the method of sliding the box 1311 into the fixing member 142 so that the fixing member 142 is wrapped around the box 1311, the method of the fixing member 142 being a rod-shaped member inserted into the box 1311 makes the structure of the fixing member 142 simpler and more compact.

[0048] In some embodiments, the number of fasteners 142 and magnets 141 are two or more.

[0049] In other embodiments, the fixing component 14 is a snap-fit ​​structure (not shown). For example, the snap-fit ​​structure is a sliding snap-fit. The box body 1311 and the frame 11 are respectively provided with male and female snap-fit ​​structures. When the snap-fit ​​structure on the box body 1311 and the snap-fit ​​structure on the frame 11 are aligned in the vertical direction, the box body 1311 is lowered relative to the frame 11 so that the male and female snap-fit ​​structures are engaged with each other, thereby achieving the effect of quick connection between the box body 1311 and the frame 11.

[0050] In some embodiments, the conveying device 10 further includes a rotating shaft mechanism 15, which includes a shaft core 151 rotatably mounted to the frame 11. The transmission mechanism 12 further includes a driving wheel 122 and at least one driven wheel 123. The driving wheel 122 is sleeved on the outer side wall of the shaft core 151. The driven wheel 123 is rotatably mounted to the frame 11, and the conveyor belt 121 is sleeved on the outside of the driving wheel 122 and the driven wheel 123. The driving wheel 122 drives the conveyor belt 121 to move, and the driving wheel 122 and the driven wheel 123 jointly support the rotation of the conveyor belt 121, thereby realizing the function of the conveyor belt 121 carrying and conveying silicon wafers.

[0051] In some embodiments, please refer to Figure 1 , Figure 2 and Figure 5 The conveying device 10 also includes a rotating shaft mechanism 15 connected to the conveyor belt 121. The rotating shaft mechanism 15 drives the conveyor belt 121 to rotate, thereby achieving the effect of conveying silicon wafers. In some embodiments, the rotating shaft mechanism 15 is detachably connected to the frame 11. When the rotating shaft mechanism 15 is covered with silicon powder, the fixing plate 112 will obstruct the rotating shaft mechanism 15, making it difficult to clean the silicon powder on the rotating shaft mechanism 15. The rotating shaft mechanism 15 can be removed from the frame 11 to clean the silicon powder on the rotating shaft mechanism 15.

[0052] In some embodiments, please refer to Figure 5 The rotating shaft mechanism 15 includes a shaft core 151, which is rotatably mounted to the frame 11. A drive wheel 153 is sleeved on the shaft core 151 and is used for transmission connection with an external power unit. The transmission mechanism 12 also includes a drive wheel 122 and at least one driven wheel 123. The drive wheel 122 is sleeved on the outer wall of the shaft core 151. The driven wheel 123 is rotatably mounted to the frame 11, and the conveyor belt 121 is sleeved on the outer side of the drive wheel 122 and the driven wheel 123. When the conveying device 10 is operating, silicon wafers are placed on the conveyor belt 121, and the drive wheel 122 is supported by the shaft core 151 to rotate relative to the frame 11. When the external power unit drives the drive wheel 153 to rotate via a synchronous belt, the external power unit also synchronously drives the shaft core 151 and the drive wheel 122 to rotate, so that the drive wheel 122 can drive the conveyor belt 121 to rotate relative to the frame 11, thereby achieving the effect of the conveyor belt 121 transporting silicon wafers.

[0053] In some embodiments, please refer to Figure 2 The frame 11 includes a base 111 and a fixing plate 112, with the fixing plate 112 disposed on the top of the base 111.

[0054] The frame 11 is usually provided with shaft holes for the shaft core 151 to pass through. When the fixed plate 112 is provided with shaft holes, the shaft core 151 needs to move axially through the fixed plate 112 so that one end of the shaft core 151 passes through the holes on the drive wheel 122 of the conveyor belt 121, the fixed plate 112, the drive wheel 153, another fixed plate 112, and the drive wheel 122 of the other conveyor belt 121 in sequence, which makes the installation of the shaft core 151 inconvenient.

[0055] In some embodiments, the fixing plate 112 is provided with a groove 1121, which is located at the front end, rear end, or top end of the fixing plate 112. When installing the shaft core 151, the shaft core 151 is moved radially from the port of the groove 1121 into the groove 1121 (i.e., in the front-rear direction) so that a portion of the shaft core 151 is embedded in the groove 1121. This achieves the effect of mounting the shaft core 151 on the fixing plate 112, which helps to improve the disassembly efficiency of the shaft core 151, making it easier to remove the shaft core 151 from the fixing plate 112, thereby facilitating the cleaning or replacement of the shaft core 151 and the drive wheel 122 on the shaft core 151.

[0056] In some embodiments, please refer to Figure 5 The rotating shaft mechanism 15 includes a bearing assembly 152, which is connected to a fixed plate 112. The shaft core 151 passes through the bearing assembly 152 to enable the bearing assembly 152 to support the shaft core 151 to rotate relative to the fixed plate 112.

[0057] It is understandable that when the shaft core 151 moves radially out of the groove 1121, the bearing assembly 152 moves synchronously with the shaft core 151.

[0058] In some embodiments, the conveying device 10 includes a conveying unit. The conveying unit includes two fixed plates 112, two transmission mechanisms 12, and two cleaning mechanisms 13. The two fixed plates 112 are arranged axially at intervals along the shaft core 151, and the two fixed plates 112 are respectively connected to the top surface of the base 111 to fix the shaft core 151. Each transmission mechanism 12 is installed on the outside of a fixed plate 112, and the conveyor belts 121 of the two adjacent transmission mechanisms 12 respectively carry the two sides of the silicon wafer. The conveyor belts 121 of the two transmission mechanisms 12 contact the two ends of the silicon wafer, thereby helping to improve the stability of the silicon wafer carried by the conveyor belts 121. The conveyor belts 121 are located on the side of the fixed plate 112 away from the other fixed plate 112, so that the two conveyor belts 121 are located on the outside of the two fixed plates 112, so as to facilitate the removal of the conveyor belts 121 and the cleaning of the inside of the two fixed plates 112.

[0059] Each cleaning mechanism 13 is detachably mounted on the outside of a fixed plate 112, allowing for easy removal of the cleaning mechanism 13 from the fixed plate 112. Each conveying unit includes two bearing assemblies 152 located between two fixed plates 112, with each bearing assembly 152 connected to the inside of one fixed plate 112. This positions the bearing assemblies 152 and the conveyor belt 121 on opposite sides of the fixed plate 112, reducing the risk of interference between the bearing assemblies 152 and the conveyor belt 121, and also helping to reduce the distance between the conveyor belt 121 and the fixed plate 112, resulting in a more compact structure for the conveying device 10.

[0060] In some embodiments, the conveying device 10 has one or more conveying units, all of which are spaced apart along the axial direction of the shaft core 151. Each conveying unit is capable of conveying the same silicon wafer. By using two or more conveying units, the efficiency of the conveying device 10 in conveying silicon wafers can be improved. Figure 1 As shown, the conveying device 10 includes a conveying unit.

[0061] In some embodiments, all conveying units are capable of conveying silicon wafers in the same direction.

[0062] In other embodiments, at least one of the conveying units of the conveying device 10 is used to convey silicon wafers to external processing equipment. After the silicon wafers are processed, the remaining conveying units convey the silicon wafers in the reverse direction. This enables the conveying device 10 to simultaneously convey silicon wafers in both directions, thereby meeting the needs of external processing equipment for continuous processing of silicon wafers.

[0063] In some embodiments, the bearing assembly 152 includes a bearing (not identified) and a bearing sleeve (not identified) nested outside the bearing. The bearing sleeve contacts the retaining plate 112.

[0064] In some embodiments, the bearing sleeve of the bearing assembly 152 and the side of the fixing plate 112 are connected by a detachable connection method such as a threaded connection.

[0065] In other embodiments, a bearing assembly 152 is embedded in a groove 1121, with the bearing sleeve of the bearing assembly 152 contacting the sidewall of the groove 1121. The tension of the conveyor belt 121 is adjustable. When the shaft core 151 needs to be installed, the conveyor belt 121 is guided by a guide wheel (not labeled) so that the conveyor belt 121 acts on the shaft core 151 along the port of the groove 1121 toward the groove 1121, increasing the tension of the conveyor belt 121 and thus increasing the force exerted by the conveyor belt 121 on the shaft core 151, thereby fixing the shaft core 151 and the bearing assembly 152 in the groove 1121. When the shaft core 151 needs to be removed, the tension of the conveyor belt 121 is reduced to loosen the conveyor belt 121, thereby removing the force exerted by the conveyor belt 121 on the shaft core 151, so that the shaft core 151 can move the bearing assembly 152 out of the groove 1121, achieving the effect of quick removal of the shaft core 151 from the fixing plate 112.

[0066] In some embodiments, the conveyor belt 121 is an elastic belt, and the tension of the conveyor belt 121 can be adjusted by causing the elastic belt to deform elastically.

[0067] In other embodiments, the conveying device 10 further includes a tensioning mechanism (not identified) to adjust the tension of the conveyor belt 121.

[0068] In some embodiments, the tensioning mechanism may also guide the conveyor belt 121.

[0069] Furthermore, those skilled in the art should recognize that the above embodiments are merely illustrative of this application and are not intended to limit this application. Any appropriate changes and variations made to the above embodiments within the substantive scope of this application fall within the scope of this application.

Claims

1. A conveying device for conveying silicon wafers, characterized in that, include: frame; A transmission mechanism is disposed on the frame, the transmission mechanism including a conveyor belt for carrying the silicon wafer; The cleaning mechanism is detachably mounted on the frame and located below the conveyor belt; The cleaning mechanism includes a powder receiving box and a cleaning component. The powder receiving box is detachably installed on the frame. The top of the powder receiving box is provided with a feed inlet. The cleaning component is disposed inside the powder receiving box and can partially extend from the feed inlet and contact the lower part of the conveyor belt to clean the particles adhering to the conveyor belt into the powder receiving box.

2. The conveying device according to claim 1, characterized in that, The powder receiving box has an internal mounting plate, and the cleaning component is connected to the mounting plate. There are gaps between the mounting plate and the bottom wall and at least one side wall of the powder receiving box.

3. The conveying device according to claim 1, characterized in that, The powder receiving box includes: The box body has an opening on the side of the box body away from the frame; A cover plate, which is detachably connected to the box body and closes the opening.

4. The conveying device according to claim 1, characterized in that, The conveying device also includes a fixing component, which is disposed on the frame, and the powder receiving box can be detachably connected to the frame through the fixing component.

5. The conveying device according to claim 4, characterized in that, The fixing component includes a magnet and a fixing member, which are disposed on the frame; The magnet is configured to attract the powder receiving box; The fastener is configured to pass through the powder receiving box.

6. The conveying device according to claim 1, characterized in that, The conveying device further includes a rotating shaft mechanism, which includes a shaft core that is rotatably mounted to the frame. The transmission mechanism also includes: A drive wheel, which is sleeved onto the outer wall of the shaft core; At least one driven wheel is rotatably mounted to the frame, and the conveyor belt is sleeved over the outside of the driving wheel and the driven wheel.

7. The conveying device according to claim 6, characterized in that, The frame includes a base and a fixing plate. The fixing plate is disposed on the upper surface of the base. The end face of the fixing plate has a groove in a direction perpendicular to the axial direction of the shaft core. A portion of the shaft core can be inserted into the groove and rotatably connected to the fixing plate.

8. The conveying device according to claim 7, characterized in that, The rotating shaft mechanism further includes a bearing assembly, which is disposed on the outer side wall of the shaft core; The bearing assembly is detachably connected to the fixing plate, and the bearing assembly is used to support the rotation of the shaft core relative to the fixing plate.

9. The conveying device according to claim 8, characterized in that, The conveying device includes one or more conveying units, each of which is configured to convey the same silicon wafer. Each of the conveying units includes two fixed plates, two transmission mechanisms, and two cleaning mechanisms. The two fixed plates are arranged at an axial distance along the shaft core. Each transmission mechanism is installed on the outside of one of the fixed plates, and the conveyor belts of two adjacent transmission mechanisms respectively carry the two sides of the silicon wafer. Each cleaning mechanism is detachably installed on the outside of one of the fixed plates. Each of the conveying units includes two bearing assemblies located between the two fixed plates, and each bearing assembly is connected to the inside of one of the fixed plates.

10. The conveying device according to claim 1, characterized in that, The cleaning component is fixedly or rotatably connected to the powder receiving box, and the cleaning component is movable relative to the conveyor belt. The cleaning component includes multiple brush bristles. When the cleaning component is fixedly connected to the powder receiving box, the multiple brush bristles are distributed along the transmission direction parallel to the conveyor belt. When the cleaning component is rotatably connected to the powder receiving box, the multiple bristles are distributed in a ring, and the rotation center line of the cleaning component is perpendicular to the transmission direction of the conveyor belt.

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