Feeding and discharging system for vacuum coating machine and horizontal vacuum coating machine

Abstract

The utility model discloses a loading and unloading system for a vacuum coating machine and a horizontal vacuum coating machine, the loading and unloading system for the vacuum coating machine comprises an inlet and outlet chamber, a conveying device and a workpiece carrier, a bearing device for bearing the workpiece carrier is arranged in the inlet and outlet chamber; the conveying device is provided with a transferring assembly used for bearing the workpiece carrying frame and conveying the workpiece carrying frame to the bearing device. The horizontal vacuum coating machine is provided with the feeding and discharging system for the vacuum coating machine. The automatic feeding and discharging device has the advantages that automatic feeding and discharging can be achieved, production efficiency can be improved, and feeding and discharging are convenient.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a loading and unloading system for a vacuum coating machine and a horizontal vacuum coating machine. Background Technology

[0002] Horizontal vacuum coating machines can meet the requirements of double-sided film deposition in a single operation, and have advantages such as good uniformity, stable film formation, and high efficiency. They are suitable for single / double-sided coating processes of various products, such as conductive films, semiconductors, superhard films, cut-off filters, and automotive LiDAR. To meet the need for efficient loading and unloading of workpieces in a vacuum environment, horizontal vacuum coating machines are usually equipped with inlet and outlet chambers for transition. Workpiece carriers for placing multiple workpieces are set up in the inlet and outlet chambers, and a robotic arm is used to transfer workpieces between the workpiece carriers and the coating chamber. In existing technologies, the workpiece carriers are fixedly located in the inlet and outlet chambers. When loading and unloading workpieces, the inlet and outlet chambers are opened, and workpieces are manually placed one by one onto the workpiece carriers or unloaded one by one. This manual loading and unloading method is inefficient, requiring the horizontal vacuum coating machine to stop and wait during loading and unloading, resulting in reduced production efficiency. Furthermore, the workers operating within the inlet and outlet chambers are inconvenient for loading and unloading. Utility Model Content

[0003] The technical problem to be solved by this utility model is to overcome the shortcomings of the existing technology and provide a loading and unloading system for a vacuum coating machine and a horizontal vacuum coating machine that can realize automatic loading and unloading, improve production efficiency and facilitate loading and unloading.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] A loading and unloading system for a vacuum coating machine includes an inlet / outlet chamber, a conveying device, and a workpiece carrier. The inlet / outlet chamber is provided with a support device for carrying the workpiece carrier, and the conveying device is provided with a transfer component for carrying the workpiece carrier and transferring the workpiece carrier onto the support device.

[0006] Preferably, in the above-mentioned vacuum coating machine loading and unloading system, the transfer component includes a translation mechanism for carrying the workpiece carrier and an AGV trolley with lifting function, wherein the translation mechanism is installed on the AGV trolley.

[0007] In the above-mentioned vacuum coating machine loading and unloading system, preferably, the translation mechanism is a telescopic fork mechanism.

[0008] In the above-mentioned vacuum coating machine loading and unloading system, preferably, the workpiece carrier is provided with a groove or support block for cooperating with the telescopic fork mechanism to lift the workpiece carrier.

[0009] In the aforementioned vacuum coating machine loading and unloading system, preferably, the translation mechanism is mounted on the AGV trolley via a transition bracket.

[0010] Preferably, in the above-mentioned loading and unloading system for the vacuum coating machine, the supporting device includes a support platform and a height adjustment component for adjusting the height of the support platform.

[0011] In the above-mentioned vacuum coating machine loading and unloading system, preferably, the height adjustment component includes a lifting guide rod and a lifting drive mechanism located outside the inlet and outlet chamber. The lifting guide rod is installed through the bottom wall of the inlet and outlet chamber, the support platform is installed on the lifting guide rod, and the lifting drive mechanism drives the lifting guide rod to move up and down.

[0012] In the above-mentioned vacuum coating machine loading and unloading system, preferably, the lifting drive mechanism is a telescopic drive component or a lead screw mechanism driven by a motor.

[0013] A horizontal vacuum coating machine is provided, wherein the horizontal vacuum coating machine is equipped with the above-mentioned loading and unloading system for vacuum coating machines.

[0014] Compared with the prior art, the advantages of this utility model are:

[0015] The loading and unloading system for the vacuum coating machine of this utility model allows for automatic loading and unloading. During loading, the workpiece can be placed on the workpiece carrier in advance, and the workpiece carrier can be sent to the bearing device using a conveying device. During unloading, the workpiece carrier containing the workpiece to be unloaded in the inlet and outlet chamber can be taken out by the conveying device and transferred to a predetermined position. This enables automatic loading and unloading, and the vacuum coating chamber does not need to stop and wait during loading and unloading, which can improve the production efficiency of the vacuum coating machine. It also eliminates the need for workers to operate the inlet and outlet chambers, making loading and unloading convenient.

[0016] The horizontal vacuum coating machine of this invention also has the advantages of the loading and unloading system of the vacuum coating machine of this invention. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the loading and unloading system for a vacuum coating machine.

[0018] Figure 2 This is a schematic diagram of the three-dimensional structure of the translation mechanism.

[0019] Legend:

[0020] 1. Entrance / Exit Room; 2. Conveying Device; 21. Translation Mechanism; 22. AGV Cart; 23. Transition Support; 3. Workpiece Carrier; 4. Bearing Device; 41. Bearing Platform; 42. Lifting Guide Rod. Detailed Implementation

[0021] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0022] Example 1:

[0023] like Figure 1 and Figure 2 As shown, the loading and unloading system for the vacuum coating machine in this embodiment includes an inlet / outlet chamber 1, a conveying device 2, and a workpiece carrier 3. The inlet / outlet chamber 1 is equipped with a carrier 4 for supporting the workpiece carrier 3. The conveying device 2 is equipped with a transfer component for supporting the workpiece carrier 3 and transferring it to the carrier 4. During loading, the workpiece can be pre-placed on the workpiece carrier 3, and the conveying device 2 will transfer the workpiece carrier 3 to the carrier 4. During unloading, the conveying device 2 will remove the workpiece carrier 3 containing the workpiece to be unloaded from the inlet / outlet chamber 1 and transfer it to a predetermined position. This system enables automatic loading and unloading, and the vacuum coating chamber does not need to stop during loading and unloading, improving the production efficiency of the vacuum coating machine. It also eliminates the need for workers to operate the inlet / outlet chamber 1, making loading and unloading convenient.

[0024] In this embodiment, the transfer assembly includes a translation mechanism 21 for carrying the workpiece carrier 3 and an AGV trolley 22 with lifting function. The translation mechanism 21 is mounted on the AGV trolley 22. The AGV trolley 22 can move and adjust the height of the translation mechanism 21, thereby moving and adjusting the height of the workpiece carrier 3 carried on the translation mechanism 21. With the translation function of the translation mechanism 21, the workpiece carrier 3 can be placed on the carrying device 4 in the inlet / outlet chamber 1, or the workpiece carrier 3 can be removed from the carrying device 4 in the inlet / outlet chamber 1. This transfer assembly has the advantages of simple structure and ease of implementation.

[0025] In this embodiment, the translation mechanism 21 is a telescopic fork mechanism, which is a readily available and commercially available component. The aforementioned AGV trolley 22 with lifting function is also a readily available and commercially available component. They are easy to obtain, and the transfer components are easy to implement and apply.

[0026] In this embodiment, the workpiece carrier 3 is provided with a groove or support block for cooperating with the telescopic fork mechanism to lift the workpiece carrier 3. By providing the groove or support block, it is convenient for the telescopic fork mechanism to place the workpiece carrier 3 on the carrying device 4 or remove the workpiece carrier 3 from the carrying device 4.

[0027] In this embodiment, the translation mechanism 21 is mounted on the AGV trolley 22 via a transition bracket 23. When the height adjustment range of the AGV trolley 22 is limited, the height adjustment range of the translation mechanism 21 can be adjusted by using transition brackets 23 of different heights to adapt to the bearing device 4 of different heights.

[0028] In this embodiment, the supporting device 4 includes a supporting platform 41 and a height adjustment component for adjusting the height of the supporting platform 41. On one hand, adjusting the height of the supporting platform 41 via the height adjustment component facilitates the placement of the workpiece carrier 3 on or removal of the workpiece carrier 3 from the supporting device 4 in conjunction with the conveying device 2. When using a combination of a translation mechanism 21 and an AGV trolley 22 as the transfer component, an AGV trolley 22 without lifting functionality can be used. On the other hand, adjusting the height of the supporting platform 41 via the height adjustment component facilitates the transfer of workpieces between the workpiece carrier 3 and the coating chamber by a robotic arm.

[0029] In this embodiment, the height adjustment assembly includes a lifting guide rod 42 and a lifting drive mechanism located outside the inlet / outlet chamber 1. The lifting guide rod 42 is installed through the bottom wall of the inlet / outlet chamber 1, and the support platform 41 is mounted on the lifting guide rod 42. The lifting drive mechanism drives the lifting guide rod 42 to move up and down. By driving the lifting guide rod 42 to move up and down, the height of the support platform 41 can be adjusted. This height adjustment assembly has the advantages of simple structure, easy control, and easy manufacturing and assembly.

[0030] In this embodiment, the lifting drive mechanism is a telescopic drive component or a lead screw mechanism driven by a motor. The telescopic drive component can be a cylinder, hydraulic cylinder, or similar type. In other embodiments, the lifting drive mechanism can also adopt other existing structural forms, as long as it can achieve the lifting movement of the lifting guide rod 42.

[0031] Example 2:

[0032] A horizontal vacuum coating machine is provided, which is equipped with the loading and unloading system for a vacuum coating machine of Example 1. Since this horizontal vacuum coating machine adopts the loading and unloading system for a vacuum coating machine of Example 1, it also possesses the advantages of that system.

[0033] The above description is merely a preferred embodiment of this utility model, and the protection scope of this utility model is not limited to the above embodiments. For those skilled in the art, improvements and modifications obtained without departing from the technical concept of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A loading and unloading system for a vacuum coating machine, characterized in that: The device includes an entrance / exit chamber (1), a conveying device (2), and a workpiece carrier (3). The entrance / exit chamber (1) is provided with a carrying device (4) for carrying the workpiece carrier (3). The conveying device (2) is provided with a transfer assembly for carrying the workpiece carrier (3) and sending the workpiece carrier (3) to the carrying device (4). The transfer assembly includes a translation mechanism (21) for carrying the workpiece carrier (3) and an AGV trolley (22) with lifting function. The translation mechanism (21) is installed on the AGV trolley (22).

2. The loading and unloading system for a vacuum coating machine according to claim 1, characterized in that: The translation mechanism (21) is a telescopic fork mechanism.

3. The loading and unloading system for a vacuum coating machine according to claim 2, characterized in that: The workpiece carrier (3) is provided with a groove or support block for cooperating with the telescopic fork mechanism to lift the workpiece carrier (3).

4. The loading and unloading system for a vacuum coating machine according to claim 1, characterized in that: The translation mechanism (21) is mounted on the AGV trolley (22) via a transition bracket (23).

5. The loading and unloading system for a vacuum coating machine according to any one of claims 1 to 4, characterized in that: The support device (4) includes a support platform (41) and a height adjustment component for adjusting the height of the support platform (41).

6. The loading and unloading system for a vacuum coating machine according to claim 5, characterized in that: The height adjustment assembly includes a lifting guide rod (42) and a lifting drive mechanism located outside the entrance / exit chamber (1). The lifting guide rod (42) is installed through the bottom wall of the entrance / exit chamber (1). The support platform (41) is installed on the lifting guide rod (42). The lifting drive mechanism drives the lifting guide rod (42) to move up and down.

7. The loading and unloading system for a vacuum coating machine according to claim 6, characterized in that: The lifting drive mechanism is a telescopic drive component or a lead screw mechanism driven by a motor.

8. A horizontal vacuum coating machine, characterized in that: The horizontal vacuum coating machine is equipped with a loading and unloading system for vacuum coating machines as described in any one of claims 1 to 7.

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