Horizontal double-sided vacuum coating machine

Abstract

The utility model discloses a horizontal double-sided vacuum coating machine which comprises a plurality of coating chambers, at least two coating chambers are connected with the same transfer chamber, the transfer chamber is connected with a heating chamber and / or an inlet and outlet chamber, and a feeding and discharging manipulator for transferring workpieces is arranged in the transfer chamber. The horizontal double-sided vacuum coating machine has the advantages of being high in equipment utilization rate, capable of reducing cost, reducing equipment occupied space and the like.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a horizontal double-sided vacuum coating machine. Background Technology

[0002] Horizontal double-sided vacuum coating machines can meet the requirements of double-sided film formation in one pass, and have advantages such as good uniformity, stable film formation, and high efficiency. They are suitable for single / double-sided coating processes of various products, such as conductive films, semiconductors, superhard films, cut-off filters, and automotive LiDAR. To meet the need for efficient loading and unloading of workpieces in a vacuum environment, horizontal double-sided vacuum coating machines are typically equipped with inlet / outlet chambers, heating chambers, and transfer chambers. The inlet / outlet chambers and heating chambers are equipped with workpiece carriers for holding multiple workpieces, while the transfer chamber is equipped with a robotic arm for transferring workpieces between the inlet / outlet chamber, heating chamber, and coating chamber. During loading, the workpiece is first placed in the inlet / outlet chamber, then transferred to the heating chamber by the robotic arm, and then transferred to the coating chamber. During unloading, the workpiece in the coating chamber is transferred to the inlet / outlet chamber by the robotic arm, and then unloaded from the inlet / outlet chamber. In existing technologies, a set of inlet / outlet chambers, heating chambers, and transfer chambers corresponds to one coating chamber. That is, a set of inlet / outlet chambers, heating chambers, and transfer chambers is used for loading and unloading materials in only one coating chamber, which has the problems of low utilization rate, high cost, and large space occupation. Utility Model Content

[0003] The technical problem to be solved by this utility model is to overcome the shortcomings of the existing technology and provide a horizontal double-sided vacuum coating machine with high equipment utilization, reduced cost and reduced equipment space occupation.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] A horizontal double-sided vacuum coating machine includes multiple coating chambers, at least two of which are connected to the same transfer chamber. The transfer chamber is connected to a heating chamber and / or an inlet / outlet chamber. The transfer chamber is equipped with a loading / unloading robot for transferring workpieces.

[0006] As a further improvement to the above technical solution:

[0007] Multiple coating chambers are connected to the same transfer chamber. The loading and unloading robot is installed in the transfer chamber via a translation component and can be driven by the translation component to perform loading and unloading operations on each coating chamber.

[0008] Multiple coating chambers are arranged sequentially at intervals along a straight line, and multiple coating chambers are located on the same side of the transfer chamber.

[0009] Each coating chamber is also connected to another transfer chamber, and each transfer chamber is connected to an entrance / exit chamber.

[0010] The transfer chambers, which are individually connected to each coating chamber and the transfer chambers that connect multiple coating chambers simultaneously, are located on opposite sides of the coating chambers.

[0011] The horizontal double-sided vacuum coating machine has two coating chambers, which are located on opposite sides of a transfer chamber and are both connected to the transfer chamber. The loading and unloading robot is fixedly installed inside the transfer chamber.

[0012] The transfer chamber is connected to both the heating chamber and the inlet / outlet chamber, and the heating chamber and the inlet / outlet chamber are located between the two coating chambers and are situated on opposite sides of the transfer chamber.

[0013] The heating chamber and the inlet / outlet chamber are equipped with multi-layer workpiece carriers for placing workpieces.

[0014] Compared with the prior art, the advantages of this utility model are:

[0015] This utility model discloses a horizontal double-sided vacuum coating machine with multiple coating chambers, at least two of which are connected to the same transfer chamber. A transfer chamber and a loading / unloading robot can simultaneously load and unload materials from two or more coating chambers, resulting in high equipment utilization, reduced costs, and less space required. Furthermore, it eliminates the need for heating chambers and / or inlet / outlet chambers connected to the transfer chamber, further reducing costs and space requirements. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the horizontal double-sided vacuum coating machine in Example 1.

[0017] Figure 2 This is a schematic diagram of the horizontal double-sided vacuum coating machine in Example 2.

[0018] Legend:

[0019] 1. Coating chamber; 2. Transfer chamber; 3. Heating chamber; 4. Inlet / outlet chamber; 5. Loading / unloading robot; 6. Translation assembly. Detailed Implementation

[0020] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] Example 1:

[0022] like Figure 1As shown, the horizontal double-sided vacuum coating machine of this embodiment includes multiple coating chambers 1, with at least two coating chambers 1 connected to the same transfer chamber 2. The transfer chamber 2 is connected to a heating chamber 3 and / or an inlet / outlet chamber 4. A loading / unloading robot 5 for transferring workpieces is installed inside the transfer chamber 2. This horizontal double-sided vacuum coating machine has multiple coating chambers 1, and at least two coating chambers 1 are connected to the same transfer chamber 2. By setting up a transfer chamber 2 and a loading / unloading robot 5, loading / unloading can be performed simultaneously on two or more coating chambers 1, resulting in high equipment utilization, reduced costs, and less space occupied. It also reduces the number of heating chambers 3 and / or inlet / outlet chambers 4 connected to the transfer chamber 2, further reducing costs and space occupied.

[0023] In this embodiment, multiple coating chambers 1 are connected to the same transfer chamber 2. Multiple loading / unloading robots 5 are installed in the transfer chamber 2 via translation components 6 and can be driven by the translation components 6 to perform loading and unloading operations on each coating chamber 1. By driving the loading / unloading robots 5 to move within the transfer chamber 2 via the translation components 6, the loading / unloading robots 5 can perform loading and unloading operations between the coating chambers 1, heating chambers 3, and inlet / outlet chambers 4. Using the translation components 6 to drive the loading / unloading robots 5 can adapt to different numbers and arrangements of coating chambers 1.

[0024] In this embodiment, multiple coating chambers 1 are arranged sequentially at intervals along a straight line, and multiple coating chambers 1 are located on the same side of the transfer chamber 2. The layout is compact, occupies little space, and the number of coating chambers 1 can be flexibly adjusted as needed.

[0025] The horizontal double-sided vacuum coating machine in this embodiment has two coating chambers 1, and a transfer chamber 2 is connected to a heating chamber 3 and an inlet / outlet chamber 4. In other embodiments, the number of coating chambers 1 connected to the same transfer chamber 2 can be three or more, or the transfer chamber 2 can be connected only to the heating chamber 3 or the inlet / outlet chamber 4 as needed. The translation component 6 in this embodiment adopts existing technology, such as conventional track-type moving trolleys, moving modules, etc. In other embodiments, when it is necessary to move the loading / unloading robot 5 along a non-linear path, the translation component 6 can correspondingly adopt existing moving components that drive the loading / unloading robot 5 along a non-linear path.

[0026] In another embodiment, preferably, each coating chamber 1 is also separately connected to another transfer chamber 2, and each transfer chamber 2 connected to each coating chamber 1 is connected to an inlet / outlet chamber 4. This allows for loading using transfer chambers 2 that simultaneously connect to multiple coating chambers 1, and unloading using transfer chambers 2 individually connected to each coating chamber 1, enabling separate loading and unloading operations and improving production efficiency. More preferably, the transfer chambers 2 individually connected to each coating chamber 1 and the transfer chambers 2 simultaneously connected to multiple coating chambers 1 are located on opposite sides of the coating chamber 1, a reasonable arrangement that facilitates loading and unloading operations.

[0027] In this embodiment, the heating chamber 3 and the inlet / outlet chamber 4 are equipped with multi-layer workpiece carriers for placing workpieces, which facilitates the simultaneous loading and unloading of multiple workpieces and reduces the number of vacuum breaks.

[0028] Example 2:

[0029] The horizontal double-sided vacuum coating machine in this embodiment is basically the same as that in Embodiment 1, the main difference being that, Figure 2 As shown, in this embodiment, the horizontal double-sided vacuum coating machine has only two coating chambers 1, which are located on opposite sides of a transfer chamber 2 and are both connected to the transfer chamber 2. The transfer chamber 2 is also connected to a heating chamber 3 and an inlet / outlet chamber 4. The loading / unloading robot 5 is fixedly installed inside the transfer chamber 2. This type of horizontal double-sided vacuum coating machine not only allows for simultaneous loading and unloading of two coating chambers 1 from a single set of transfer chamber 2, heating chamber 3, and inlet / outlet chamber 4, but also has a more compact structure, making it particularly suitable for relatively long and narrow installation spaces. Furthermore, with two coating chambers 1, the fixed installation of the loading / unloading robot 5 eliminates the need for a translation component 6, resulting in lower costs and simpler manufacturing, assembly, and maintenance.

[0030] In this embodiment, the transfer chamber 2 is connected to both the heating chamber 3 and the inlet / outlet chamber 4. The heating chamber 3 and the inlet / outlet chamber 4 are located between the two coating chambers 1 and are respectively located on opposite sides of the transfer chamber 2. With the heating chamber 3 and the inlet / outlet chamber 4 provided, the structural compactness can be further improved and the space occupied by the equipment can be reduced.

[0031] The above description is merely a preferred embodiment of this utility model, and the protection scope of this utility model is not limited to the above embodiments. For those skilled in the art, improvements and modifications obtained without departing from the technical concept of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A horizontal double-sided vacuum coater, characterized in that: The horizontal double-sided vacuum coating machine comprises a plurality of coating chambers (1), at least two of which are connected to a same transfer chamber (2), and the transfer chamber (2) is connected to a heating chamber (3) and / or an inlet and outlet chamber (4), and the transfer chamber (2) is provided with an upper and lower feeding mechanical arm (5) for transferring workpieces.

2. The horizontal double-sided vacuum coating machine according to claim 1, characterized in that: The plurality of coating chambers (1) are connected to the same transfer chamber (2), and the upper and lower feeding mechanical arm (5) is installed in the transfer chamber (2) through a translation assembly (6) and can be driven to move by the translation assembly (6) to perform loading and unloading operations on each coating chamber (1).

3. The horizontal double-sided vacuum coating machine according to claim 2, characterized in that: The plurality of coating chambers (1) are arranged in a straight line in sequence and are spaced apart, and the plurality of coating chambers (1) are located on the same side of the transfer chamber (2).

4. The horizontal double-sided vacuum coating machine according to claim 2, characterized in that: Each coating chamber (1) is also separately connected to another transfer chamber (2), and the transfer chamber (2) connected to each coating chamber (1) is connected to an inlet and outlet chamber (4).

5. The horizontal double-sided vacuum coating machine according to claim 4, characterized in that: The transfer chamber (2) connected to each coating chamber (1) and the transfer chamber (2) connected to the plurality of coating chambers (1) are separately arranged on opposite sides of the coating chamber (1).

6. The horizontal double-sided vacuum coating machine according to claim 1, characterized in that: The horizontal double-sided vacuum coating machine is provided with two coating chambers (1), and the two coating chambers (1) are separately arranged on opposite sides of a transfer chamber (2) and are connected to the transfer chamber (2), and the upper and lower feeding mechanical arm (5) is fixedly arranged in the transfer chamber (2).

7. The horizontal double-sided vacuum coating machine according to claim 5, characterized in that: The transfer chamber (2) is connected to a heating chamber (3) and an inlet and outlet chamber (4), and the heating chamber (3) and the inlet and outlet chamber (4) are located between the two coating chambers (1) and are separately arranged on opposite sides of the transfer chamber (2).

8. The horizontal double-sided vacuum coating machine according to any one of claims 1 to 7, characterized in that: The heating chamber (3) and the inlet and outlet chamber (4) are provided with a plurality of layers of workpiece carriers for placing workpieces.

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