AF film evaporation coating device

Abstract

The utility model discloses an AF film evaporation coating device which comprises a shell with an evaporation cavity and a plurality of evaporation boats arranged in the evaporation cavity, and each evaporation boat is connected with an independent power supply. The AF film evaporation coating device has the advantages that the distribution uniformity of gaseous substances in the whole evaporation cavity after AF stock solution drops are evaporated can be improved, the coating quality is improved, and the like.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to an AF film evaporation coating device. Background Technology

[0002] Vacuum coating is a method of forming a coating by heating a metal or non-metal material under high vacuum conditions, causing it to evaporate and condense onto the surface of the workpiece (metal, semiconductor, or insulator).

[0003] Antifouling film (AF film), as a commonly used coating material, is widely used in optoelectronic components such as touch screens and lenses. Evaporation coating apparatus for AF film generally includes a housing with an evaporation chamber and multiple evaporation boats located within the evaporation chamber to receive and heat the AF stock solution. During operation, the AF stock solution is dripped into the evaporation boats, heated and evaporated into a gaseous state, and then ejected from the nozzles of the evaporation chamber for coating. Existing evaporation coating apparatuses for AF films consist of two parallel conductive copper busbars within the evaporation chamber. Multiple evaporation boats are sequentially arranged at intervals along the extension direction of each busbar, connected in parallel to the two busbars. One end of each busbar is connected to an AC power source to supply power to the evaporation boats. As the evaporation boats gradually move away from the power source, voltage loss occurs, leading to a gradual decrease in the heating power of the boats along the direction away from the power source. This results in a gradual decrease in the evaporation efficiency and evaporation rate, causing uneven distribution of the gaseous substances after AF stock solution evaporation within the evaporation chamber and uneven ejection of the gaseous substances, thus affecting coating quality. Furthermore, the use of AC power requires a transformer, resulting in high cost and large space requirements for the evaporation coating apparatus. Utility Model Content

[0004] The technical problem to be solved by this utility model is to overcome the shortcomings of the existing technology and provide an AF film evaporation coating device that can improve the uniformity of the distribution of gaseous matter after the evaporation of AF raw liquid droplets in the entire evaporation chamber and improve the coating quality.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] An AF film evaporation coating apparatus includes a housing with an evaporation chamber and multiple evaporation boats disposed within the evaporation chamber, each evaporation boat being connected to an independent power supply.

[0007] As a further improvement to the above technical solution:

[0008] The shell has two conductive posts for each evaporation boat, which are connected to the power supply for energization. The conductive posts extend from the outside of the shell into the evaporation chamber, and the evaporation boat is connected and installed between the two conductive posts.

[0009] The conductive post is detachably mounted on the housing via a detachable connection assembly.

[0010] The detachable connection assembly includes a mounting base and a through hole on the side wall of the housing. The mounting base is connected to the housing by fasteners and covers and seals the through hole. The mounting base has two mounting through holes, and the two conductive posts connected to each evaporation boat are respectively inserted into the two mounting through holes. The detachable connection assembly also includes a sealing mechanism for sealing the gap between the conductive posts and the mounting through holes.

[0011] The sealing mechanism includes a sealing ring and an annular sealing boss disposed on a conductive post, wherein the sealing ring is press-fitted between the annular sealing boss and the mounting base.

[0012] The conductive post is detachably connected to a connecting seat at one end inside the evaporation chamber, and the evaporation boat is fixedly installed on the connecting seat of the corresponding two conductive posts.

[0013] The evaporation boat is pressed and fixed to the connecting seat by a pressure plate, and the pressure plate is connected and fixed to the connecting seat by pressure screws.

[0014] The connector is provided with a retaining sleeve that forms a positioning groove on the outside of the conductive post, and the connector is fixed to the conductive post by bolts.

[0015] The power supply is a DC power supply.

[0016] Compared with the prior art, the advantages of this utility model are:

[0017] The AF film evaporation coating device of this invention uses an independent power supply to power each evaporation boat, which can ensure that the heating power of each evaporation boat is consistent, resulting in good consistency in evaporation efficiency and evaporation amount. This is beneficial to improving the uniformity of the distribution of gaseous matter after the AF raw liquid droplets evaporate in the entire evaporation chamber and improving the coating quality. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of an AF film evaporation coating apparatus.

[0019] Figure 2 This is a side view of the AF film evaporation coating apparatus.

[0020] Figure 3 This is an exploded three-dimensional structural diagram of an AF film evaporation coating apparatus.

[0021] Figure 4 This is a three-dimensional structural diagram of the evaporation boat mounted on the mounting base.

[0022] Figure 5This is a cross-sectional view of the evaporation boat mounted on the mounting base.

[0023] Legend:

[0024] 1. Shell; 11. Evaporation chamber; 12. Through hole; 2. Evaporation boat; 3. Power supply; 4. Conductive post; 41. Annular sealing boss; 5. Mounting base; 51. Mounting through hole; 6. Sealing ring; 7. Connecting base; 71. Slot; 8. Pressure plate; 101. Press-fit screw; 102. Bolt. Detailed Implementation

[0025] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] like Figures 1 to 3 As shown, the AF film evaporation coating apparatus of this embodiment includes a housing 1 with an evaporation chamber 11 and multiple evaporation boats 2 disposed within the evaporation chamber 11. Each evaporation boat 2 is connected to an independent power supply 3. This AF film evaporation coating apparatus uses an independent power supply 3 to power each evaporation boat 2, ensuring consistent heating power for each boat. This results in good consistency in evaporation efficiency and evaporation volume, which is beneficial for improving the uniformity of gaseous material distribution after evaporation of the AF raw droplets within the entire evaporation chamber 11, thereby improving the coating quality.

[0027] In this embodiment, each evaporation boat 2 on the housing 1 is provided with two conductive posts 4 that are connected to the power supply 3 for energizing. The conductive posts 4 extend from the outside of the housing 1 into the evaporation chamber 11, and the evaporation boat 2 is connected and installed between the two conductive posts 4. The conductive posts 4 are used for energizing and also serve as the supporting structure for the evaporation boat 2, which can improve the structural compactness and reduce the cost.

[0028] In this embodiment, the conductive post 4 is detachably mounted on the housing 1 via a detachable connection assembly, which facilitates manufacturing, assembly, replacement, and maintenance.

[0029] In this embodiment, as Figures 3 to 5 As shown, the detachable connection assembly includes a mounting base 5 and a through hole 12 on the side wall of the housing 1. The mounting base 5 is installed on the housing 1 by fasteners and covers and seals the through hole 12. The mounting base 5 has two mounting through holes 51, and the two conductive posts 4 connected to each evaporation boat 2 are respectively inserted into the two mounting through holes 51. The detachable connection assembly also includes a sealing mechanism for sealing the gap between the conductive posts 4 and the mounting through holes 51. This type of detachable connection assembly is convenient to manufacture, assemble, replace, and maintain. The fasteners are screws, specifically multiple screws arranged around the through hole 12 to connect and fix the mounting base 5 to the housing 1.

[0030] In this embodiment, the sealing mechanism includes a sealing ring 6 and an annular sealing boss 41 disposed on the conductive post 4. The sealing ring 6 is pressed and installed between the annular sealing boss 41 and the mounting base 5. It has a simple structure, low cost and good sealing performance.

[0031] In this embodiment, as Figure 3 and Figure 4 As shown, one end of the conductive post 4 located inside the evaporation chamber 11 is detachably connected to a connecting seat 7. The evaporation boat 2 is fixedly installed on the connecting seats 7 of the corresponding two conductive posts 4. The connection between the evaporation boat 2 and the conductive post 4 through the connecting seats 7 facilitates manufacturing and assembly, and helps to ensure the installation stability of the evaporation boat 2.

[0032] In this embodiment, the evaporation boat 2 is pressed and fixed on the connecting seat 7 by the pressure plate 8. The pressure plate 8 is connected and fixed to the connecting seat 7 by the press screws 101, which makes the installation of the evaporation boat 2 stable and convenient for disassembly and maintenance.

[0033] In this embodiment, the connector 7 is provided with a retainer that is positioned on the outside of the conductive post 4 to form a positioning groove 71. The connector 7 is connected and fixed to the conductive post 4 by bolts 102, which can improve the connection stability between the connector 7 and the conductive post 4 and has good conductivity.

[0034] In this embodiment, the power supply 3 is a DC power supply. Compared with AC power supply, there is no need to install a transformer, which can reduce costs and space occupation.

[0035] The above description is merely a preferred embodiment of this utility model, and the protection scope of this utility model is not limited to the above embodiments. For those skilled in the art, improvements and modifications obtained without departing from the technical concept of this utility model should also be considered within the protection scope of this utility model.

Claims

1. An AF film evaporation coating apparatus, comprising a housing (1) having an evaporation chamber (11) and a plurality of evaporation boats (2) disposed within the evaporation chamber (11), characterized in that: Each evaporation boat (2) is connected to an independent power supply (3).

2. The AF film evaporation coating apparatus according to claim 1, characterized in that: The housing (1) is provided with two conductive posts (4) for each evaporation boat (2) connected to the power supply (3) for power supply. The conductive posts (4) extend from the outside of the housing (1) into the evaporation chamber (11). The evaporation boat (2) is connected and installed between the two conductive posts (4).

3. The AF film evaporation coating apparatus according to claim 2, characterized in that: The conductive post (4) is detachably mounted on the housing (1) via a detachable connection assembly.

4. The AF film evaporation coating apparatus according to claim 3, characterized in that: The detachable connection assembly includes a mounting base (5) and a through hole (12) on the side wall of the housing (1). The mounting base (5) is connected to the housing (1) by fasteners and covers and seals the through hole (12). The mounting base (5) is provided with two mounting through holes (51). Two conductive posts (4) connected to each evaporation boat (2) are respectively inserted into the two mounting through holes (51). The detachable connection assembly also includes a sealing mechanism for sealing the gap between the conductive posts (4) and the mounting through holes (51).

5. The AF film evaporation coating apparatus according to claim 4, characterized in that: The sealing mechanism includes a sealing ring (6) and an annular sealing boss (41) disposed on the conductive post (4). The sealing ring (6) is pressed and installed between the annular sealing boss (41) and the mounting base (5).

6. The AF film evaporation coating apparatus according to claim 2, characterized in that: The conductive post (4) is detachably connected to a connecting seat (7) at one end inside the evaporation chamber (11), and the evaporation boat (2) is fixedly installed on the connecting seat (7) of the corresponding two conductive posts (4).

7. The AF film evaporation coating apparatus according to claim 6, characterized in that: The evaporation boat (2) is pressed and fixed on the connecting seat (7) by the pressure plate (8), and the pressure plate (8) is connected and fixed to the connecting seat (7) by the pressure screw (101).

8. The AF film evaporation coating apparatus according to claim 6, characterized in that: The connecting seat (7) is provided with a ferrule that is positioned outside the conductive post (4) to form a positioning groove (71). The connecting seat (7) is connected and fixed to the conductive post (4) by bolts (102).

9. The AF film evaporation coating apparatus according to any one of claims 1 to 8, characterized in that: The power supply (3) is a DC power supply.

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