Shield plate switching sputtering mechanism

Abstract

The utility model discloses an anti-adhesion plate switching sputtering mechanism which comprises a case, a driving assembly is arranged at the top of the case, a rotating rod is arranged in the case through the driving assembly, the rotating rod is rotatably connected with the case, a rotating plate is fixedly installed on the surface of the rotating rod, the rotating plate is slidably connected with the case, and an anti-adhesion plate is fixedly installed on the surface of the rotating rod. A rotating assembly is arranged on the side face of the rotating plate, a mounting plate is arranged on the side face of the rotating plate through the rotating assembly, a mounting assembly is arranged in the mounting plate, an anti-attachment plate is arranged on the side face of the mounting plate through the mounting assembly, an electric push rod is fixedly mounted in the machine box, and a workbench is fixedly mounted at the output end of the electric push rod. A moving assembly is arranged in the machine box, and a sputtering source is arranged in the machine box through the moving assembly. And the interruption of sputtering coating work caused by replacement of the anti-adhesion plate is effectively avoided, the production continuity is ensured, and the utilization rate of equipment is improved.

Description

Technical Field

[0001] This utility model relates to the field of sputtering technology, and in particular to a sputtering mechanism for switching anti-sticking plates. Background Technology

[0002] Vacuum sputtering is a technique that uses physical methods to vaporize a material source into gaseous molecules, atoms, or ions in a vacuum environment, and then deposits them on the surface of a substrate through a low-pressure gas or plasma process to give it a thin film with a special function. Because the sputtering source sputters randomly in different directions during the sputtering process, in addition to adhering to the surface of the target substrate, some of it will also adhere to the surface of other surrounding parts. In order to protect other structural components from adhesion and deposition of film, anti-adhesion plates are needed for covering and protection.

[0003] Chinese patent application publication number CN208829756U discloses a sputtering mechanism for switching anti-sputtering plates, comprising a frame, a sputtering source, a conveyor table, and a worktable within the frame. The worktable is positioned on the conveyor table, and the sputtering source is positioned above the worktable. Anti-sputtering plate assemblies are provided on both sides of the conveyor table. Each anti-sputtering plate assembly includes an anti-sputtering plate, a rotating bracket, and a support. The anti-sputtering plate is vertically arranged, and both its upper and lower sides have symmetrical bends. The rotating bracket is horizontally arranged. The rotating bracket engages with the rear side of the anti-splash plate; the bracket is located on the lower side of the anti-splash plate, and engages with the bent portion on the lower side; since most of the splashed target material is deposited in the lower middle part of the anti-splash plate, although the above patent can reduce the frequency of anti-splash plate replacement and cleaning by rotating the anti-splash plate by changing its position, when the anti-splash plate needs to be replaced, the operation space for replacement is small because the anti-splash plate is replaced inside the frame, and a lot of time is required to replace the anti-splash plate, which is not conducive to the use of the sputtering mechanism. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides an anti-sputtering plate switching mechanism to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A sputtering mechanism for switching anti-sticking plates includes a chassis. A drive assembly is disposed on the top of the chassis. A rotating rod is disposed inside the chassis via the drive assembly and is rotatably connected to the chassis. A rotating plate is fixedly mounted on the surface of the rotating rod and is slidably connected to the chassis. A rotating assembly is disposed on the side of the rotating plate. A mounting plate is disposed on the side of the rotating plate via the rotating assembly. A mounting assembly is disposed inside the mounting plate. An anti-sticking plate is disposed on the side of the mounting plate via the mounting assembly. An electric push rod is fixedly mounted inside the chassis. A worktable is fixedly mounted on the output end of the electric push rod. A moving assembly is disposed inside the chassis, and a sputtering source is disposed inside the chassis via the moving assembly.

[0007] Preferably, the drive assembly includes a dual-axis motor fixedly mounted on the top of the chassis, a first bevel gear fixedly mounted on the output end of the dual-axis motor, a second bevel gear meshing on the surface of the first bevel gear, and the second bevel gear being fixedly connected to the rotating rod.

[0008] Preferably, the rotating assembly includes a rotating motor fixedly disposed on the side of the rotating plate, and a rotating shaft is fixedly mounted on the output end of the rotating motor, and the rotating shaft is fixedly connected to the mounting plate.

[0009] Preferably, the mounting assembly includes a mounting hole that extends through the interior of the mounting plate, a mounting post that overlaps inside the mounting hole, the mounting post that is fixedly connected to the anti-collision plate, and a nut that is threaded onto the surface of the mounting post.

[0010] Preferably, the moving component includes a linear motor fixedly installed inside the chassis, the linear motor having a moving base, and the moving base being fixedly connected to the sputtering source.

[0011] Preferably, the chassis has a hinged door on the front side, and a handle is fixedly installed on the front side of the door.

[0012] Preferably, there are multiple rotating rods, and the multiple rotating rods are symmetrically distributed, and the rotating rods are made of stainless steel.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: When the anti-fouling plate switching sputtering mechanism needs to be replaced, the drive component causes the rotating rod to rotate, which in turn causes the rotating plate to rotate. This causes the rotating component to drive the mounting plate to rotate, which in turn drives the anti-fouling plate to rotate until the rotating plate rotates 180 degrees. This allows the anti-fouling plate that was originally outside the chassis to enter the chassis and continue working, and the anti-fouling plate that was originally inside the chassis to be switched to the outside of the chassis for replacement. This effectively avoids the interruption of sputtering work caused by the replacement of the anti-fouling plate, ensures the continuity of production, and improves the utilization rate of the equipment. Attached Figure Description

[0014] Figure 1 This is a three-dimensional perspective view of the present invention;

[0015] Figure 2 This is a cross-sectional view of the present invention;

[0016] Figure 3 This utility model Figure 2 Enlarged view of point A in the middle;

[0017] Figure 4 This is an exploded view of a partial structure of the present invention.

[0018] In the diagram: 1. Chassis; 2. Dual-axis motor; 3. First bevel gear; 4. Second bevel gear; 5. Rotating rod; 6. Rotating plate; 7. Rotary motor; 8. Shaft; 9. Mounting plate; 10. Mounting hole; 11. Mounting column; 12. Nut; 13. Anti-collision plate; 14. Electric push rod; 15. Worktable; 16. Linear motor; 17. Moving seat; 18. Sputtering source; 19. Box door; 20. Handle. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Reference Figure 1-4A sputtering mechanism for switching anti-sputtering plates includes a housing 1. A drive assembly is mounted on the top of the housing 1. Multiple rotating rods 5 are mounted inside the housing 1 via the drive assembly, arranged symmetrically. The rotating rods 5 are made of stainless steel and are rotatably connected to the housing 1. The drive assembly includes a dual-axis motor 2 fixedly mounted on the top of the housing 1. A first bevel gear 3 is fixedly mounted on the output end of the dual-axis motor 2. A second bevel gear 4 meshes with the surface of the first bevel gear 3 and is fixedly connected to the rotating rods 5. The drive assembly facilitates providing driving force for the rotation of the rotating rods 5, allowing them to rotate simultaneously. One drive source drives multiple rotating rods 5, reducing drive source waste. A rotating plate 6 is fixedly mounted on the surface of the rotating rods 5 and slidably connected to the housing 1. A rotating assembly is mounted on the side of the rotating plate 6, and a rotating component is mounted on the side of the rotating plate 6 via the rotating assembly. Mounting plate 9, with mounting components inside, has a protective plate 13 mounted on its side via the mounting components. An electric push rod 14 is fixedly mounted inside the housing 1, with a worktable 15 fixedly mounted at its output end. A moving component is also located inside the housing 1, with a sputtering source 18 mounted via the moving component. This protective plate switching sputtering mechanism allows the protective plate 13 to be replaced. The drive component rotates the rotating rod 5, causing the rotating plate 6 to rotate, which in turn drives the mounting plate 9 to rotate. This, in turn, causes the mounting components to rotate the protective plate 13 until the rotating plate 6 rotates 180 degrees. This allows the protective plate 13, previously outside the housing 1, to enter the housing 1 for continued operation, effectively preventing interruptions in sputtering operations due to the replacement of the protective plate 13, ensuring production continuity, and improving equipment utilization.

[0021] according to Figure 3 As shown, the rotating assembly includes a rotating motor 7 fixedly mounted on the side of the rotating plate 6. A rotating shaft 8 is fixedly mounted on the output end of the rotating motor 7. The rotating shaft 8 is fixedly connected to the mounting plate 9. The rotating motor 7 can rotate the rotating shaft 8, which in turn rotates the mounting plate 9, causing the mounting assembly to drive the anti-hit plate 13 to rotate. Since most of the splashed target material is deposited in the lower middle part of the anti-hit plate 13, the anti-hit plate 13 can be repositioned vertically, so that the anti-hit plate 13 can receive the target material evenly from both the top and bottom, thereby reducing the number of times the anti-hit plate 13 needs to be replaced.

[0022] according to Figure 4As shown, the mounting assembly includes a mounting hole 10 that penetrates the interior of the mounting plate 9. A mounting post 11 is attached inside the mounting hole 10 and is fixedly connected to the anti-collision plate 13. A nut 12 is threaded onto the surface of the mounting post 11. The nut 12 is removed, and the mounting post 11 is pulled out of the mounting hole 10. The anti-collision plate 13 on the outside of the chassis 1 is disassembled. The mounting post 11 on the new anti-collision plate 13 is inserted into the mounting hole 10, so that the anti-collision plate 13 fits against the mounting plate 9. The nut 12 is installed on the mounting post 11, so that the nut 12 fits against the mounting plate 9. This allows the anti-collision plate 13 to be installed on the mounting plate 9, facilitating the replacement of the anti-collision plate 13.

[0023] according to Figure 1 and Figure 2 As shown, the moving component includes a linear motor 16 fixedly installed inside the chassis 1. A moving seat 17 is provided on the linear motor 16. The moving seat 17 is fixedly connected to the sputtering source 18. A door 19 is hinged to the front of the chassis 1. A handle 20 is fixedly installed on the front of the door 19. The door 19 is opened by the handle 20, and the workpiece is placed on the worktable 15. The door 19 is closed by the handle 20. An external vacuum pump is used to evacuate the inside of the chassis 1, so that the inside of the chassis 1 is in a vacuum state. The worktable 15 is moved up and down by the electric push rod 14 to adjust the distance between the workpiece and the sputtering source 18. The workpiece is sputtered by the sputtering source 18. The moving seat 17 is moved back and forth by the linear motor 16, so that the sputtering source 18 moves back and forth, so that the sputtering source 18 completes the sputtering of the workpiece.

[0024] All electrical components mentioned in this article are connected to an external main controller and 220V AC mains power, and the main controller can be a conventional known device such as a computer for control.

[0025] When in use: When the anti-splash plate 13 needs to be replaced, start the dual-axis motor 2, which causes the first bevel gear 3 to rotate, the second bevel gear 4 to rotate, the rotating rod 5 to rotate, and the rotating plate 6 to rotate. This causes the rotary motor 7, the rotating shaft 8, the mounting plate 9, and the anti-splash plate 13 to rotate, making the rotating plate 6 rotate 180 degrees. This allows the anti-splash plate 13, which was originally outside the chassis 1, to enter the chassis 1. Then, the anti-splash plating work can continue through the anti-splash plate 13 inside the chassis 1. This switches the anti-splash plate 13 from inside the chassis 1 to outside the chassis 1. At the same time, remove the nut 12, pull out the mounting post 11 from the mounting hole 10, disassemble the anti-splash plate 13 outside the chassis 1, insert the mounting post 11 on the new anti-splash plate 13 into the mounting hole 10, so that the anti-splash plate 13 fits against the mounting plate 9, and install the nut 12 on the mounting post 11, so that the nut 12 fits against the mounting plate 9. This allows the anti-splash plate 13 to be installed on the mounting plate 9.

[0026] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0027] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A sheet-protecting switching sputtering mechanism comprising a cabinet (1), characterized in that, The top of the case (1) is provided with a drive assembly, the inside of the case (1) is provided with a rotating rod (5) through the drive assembly, the rotating rod (5) is rotatably connected with the case (1), the surface of the rotating rod (5) is fixedly installed with a rotating plate (6), the rotating plate (6) is slidably connected with the case (1), the side of the rotating plate (6) is provided with a rotating assembly, the side of the rotating plate (6) is provided with a mounting plate (9) through the rotating assembly, the inside of the mounting plate (9) is provided with a mounting assembly, the side of the mounting plate (9) is provided with an anti-plate (13) through the mounting assembly, the inside of the case (1) is fixedly installed with an electric push rod (14), the output end of the electric push rod (14) is fixedly installed with a workbench (15), the inside of the case (1) is provided with a moving assembly, the inside of the case (1) is provided with a sputtering source (18) through the moving assembly.

2. The sputtering apparatus according to claim 1, wherein The drive assembly comprises a double-shaft motor (2) fixedly arranged on the top of the case (1), a first bevel gear (3) is fixedly installed at the output end of the double-shaft motor (2), a second bevel gear (4) is meshed on the surface of the first bevel gear (3), and the second bevel gear (4) is fixedly connected with the rotating rod (5).

3. The sputtering apparatus according to claim 1, wherein The rotating assembly comprises a rotating motor (7) fixedly arranged on the side of the rotating plate (6), a rotating shaft (8) is fixedly installed at the output end of the rotating motor (7), and the rotating shaft (8) is fixedly connected with the mounting plate (9).

4. The sputtering apparatus according to claim 1, wherein The mounting assembly comprises a mounting hole (10) penetratingly arranged in the inside of the mounting plate (9), the inside of the mounting hole (10) is lapped with a mounting column (11), the mounting column (11) is fixedly connected with the anti-plate (13), and the surface of the mounting column (11) is threadedly connected with a nut (12).

5. The apparatus according to claim 1, wherein The moving assembly comprises a linear motor (16) fixedly arranged in the inside of the case (1), a moving seat (17) is arranged on the linear motor (16), and the moving seat (17) is fixedly connected with the sputtering source (18).

6. The apparatus according to claim 1, wherein The front side of the case (1) is hingedly connected with a box door (19), and the front side of the box door (19) is fixedly installed with a handle (20).

7. The apparatus according to claim 1, wherein The number of the rotating rod (5) is multiple, and the multiple rotating rods (5) are symmetrically distributed, and the rotating rod (5) is made of stainless steel.

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