Plating pot mounting assembly and high-vacuum coating equipment

Abstract

The utility model relates to the technical field of special equipment for continuous plating, in particular to a plating pot mounting component and high-vacuum coating equipment. The plating pot mounting assembly comprises an annular planet support, a matching face is formed at the bottom of the planet support, four mounting supports are arranged on the matching face at intervals in the circumferential direction of the planet support, the four mounting supports are detachably matched with the planet support, each mounting support comprises a first matching plate and a second matching plate, the first matching plates are parallel to the planet support, and the second matching plates are parallel to the planet support. The second matching plate extends away from the matching face, and the end, away from the first matching plate, of the second matching plate is detachably matched with the plating pot. The high-vacuum coating equipment comprises the plating pot mounting assembly. The mounting bracket is detachably connected with the planetary bracket through the matching bolt and the matching nut, and the second matching plate is matched with the plating pot in a plug-in manner, so that when plating pots with different sizes are replaced, only the corresponding mounting bracket needs to be replaced, the whole planetary bracket does not need to be replaced, the modification period is greatly shortened, and the production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the technical field of special equipment for continuous coating, specifically to a plating pot mounting assembly and a high vacuum coating equipment. Background Technology

[0002] High vacuum coating equipment is a device that uses vacuum technology to deposit thin films on the surface of a substrate. It is widely used in electronics, optics, materials, and other fields. During operation, the film material is placed in a vacuum coating chamber. By heating the source material to a high temperature, its surface atoms gain sufficient kinetic energy to escape and fly towards the substrate. In a vacuum, these atoms do not collide with gas molecules, thus allowing them to be directly deposited on the substrate surface to form a thin film.

[0003] In current high-vacuum coating equipment, the plating pot mounting bracket is typically designed as a single piece. While this design offers certain advantages in manufacturing, such as higher overall strength and simplified assembly, it suffers from limitations in practical applications. Different models and processes of electroplating equipment may have significantly different dimensions, shapes, and stress requirements for the plating pots, making a single-piece mounting bracket unsuitable for universal use. Whenever a manufacturer needs to change to a different specification of plating pot, the entire mounting bracket must be replaced or redesigned, resulting in lengthy modification cycles and low production efficiency. Utility Model Content

[0004] This invention provides a plating pot mounting assembly and a high vacuum coating equipment, which can overcome some or all the defects of the prior art.

[0005] According to the embodiment of this utility model, the plating pot mounting assembly includes a planetary support in the shape of an annulus. A mating surface is formed at the bottom of the planetary support. Four mounting brackets are spaced apart along the circumference of the planetary support on the mating surface. The four mounting brackets are detachably mated with the planetary support. Each mounting bracket includes a first mating plate and a second mating plate. The first mating plate is arranged parallel to the planetary support. The second mating plate extends away from the mating surface. The end of the second mating plate away from the first mating plate is detachably mated with the plating pot.

[0006] In a preferred embodiment of this utility model, a first mounting hole is formed through the mating end of the first mating plate and the planetary support, and a second mounting hole is formed correspondingly at the planetary support. A mating bolt is provided at the first mounting hole, and a mating nut is provided at the mating bolt. The mating bolt is used to pass through the first mounting hole and the second mounting hole and mate with the mating nut.

[0007] In a preferred embodiment of this utility model, a spring washer is also provided at the mating bolt, and the spring washer is used to abut against the first mating plate and the mating nut.

[0008] In a preferred embodiment of this utility model, the second mating plate and the mating end of the plating pot form a third mounting hole through the plate, and a mating post is formed correspondingly at the plating pot, the mating post being used to mate with the third mounting hole.

[0009] In a preferred embodiment of this utility model, a rolling shaft is formed along the axial direction at the free end of the mating column. The diameter of the rolling shaft is smaller than the diameter of the mating column. A roller is sleeved on the rolling shaft, and a locking bolt is also provided on the rolling shaft. The locking bolt is used to keep the roller sleeved on the rolling shaft.

[0010] In a preferred embodiment of this utility model, a fitting sleeve is provided between the locking bolt and the first fitting plate. The fitting sleeve is fitted onto the fitting post and abuts against the roller.

[0011] In a preferred embodiment of this invention, the included angle between the first mating plate and the second mating plate is 115°.

[0012] The high vacuum coating equipment provided according to the embodiment of the utility model includes the above-mentioned coating pot mounting assembly.

[0013] Beneficial effects:

[0014] The mounting bracket and planetary support are detachably connected by mating bolts and nuts. The second mating plate and the plating pot are connected by a plug-in joint. When changing to a different size plating pot, only the corresponding mounting bracket needs to be replaced, without replacing the entire planetary support, which greatly shortens the modification cycle and improves production efficiency.

[0015] Furthermore, components such as the plating pot, mounting bracket, and rollers are all independent modules, which can be directly replaced locally when damaged, without the need for overall replacement, thus reducing maintenance costs. Attached Figure Description

[0016] Figure 1 This is a top view of the plating pot mounting assembly in at least one embodiment of the present invention;

[0017] Figure 2 This is a schematic diagram of the main structure of the plating pot mounting assembly in at least one embodiment of the present invention;

[0018] Figure 3 for Figure 2 Enlarged view of a portion of point A in the middle;

[0019] Figure 4 This is a schematic diagram of the connection structure at the plating pot in at least one embodiment of the present invention. Detailed Implementation

[0020] Seen in Figure 1-4This embodiment provides a plating pot 3 mounting assembly, which includes a circular planetary support 1 with four sets of second mounting holes evenly distributed around its bottom mating surface. The first mating plate 21 of the mounting bracket 2 passes through the first mounting hole and the second mounting hole by mating bolts 4, and is locked and fixed by mating nuts 5 and spring washers 6, thereby achieving a stable mating between the mounting bracket 2 and the planetary support 1.

[0021] The second mating plate 22 extends outward at an angle of 115°, and its third mounting hole is inserted into the mating post 31 of the plating pot 3, thereby realizing the installation of the plating pot 3. When using it, if it is necessary to replace the plating pot 3 of a different size, only the mounting bracket 2 of the corresponding size needs to be replaced, without replacing the planetary bracket 1, thus improving production efficiency.

[0022] In addition, a rolling shaft 32 is formed axially at the free end of the mating post 31. The diameter of the rolling shaft 32 is smaller than the diameter of the mating post 31. A roller 7 is fitted on the rolling shaft 32. A locking bolt 8 is also provided on the rolling shaft 32. The locking bolt 8 is used to keep the roller 7 fitted on the rolling shaft 32.

[0023] Therefore, the locking bolt 8 can achieve the fixed fit between the second mating plate 22 and the plating pot 3, as well as the rotational fit between the roller 7 and the rolling shaft 32.

[0024] Understandably, roller 7 is used to cooperate with the track of the high vacuum coating equipment, and together with the motor to drive the mounting assembly of the coating pot 3, thereby realizing the rotation of the mounting assembly of the coating pot 3 on the track, making the coating more uniform.

[0025] In some embodiments, a fitting sleeve 10 is provided between the locking bolt 8 and the first fitting plate 21. The fitting sleeve 10 is fitted onto the fitting post 31 and abuts against the roller 7.

[0026] Another embodiment of this utility model provides a high vacuum coating equipment, which includes the above-mentioned coating pot 3 mounting assembly, as well as a track and a drive motor. The planetary support 1 is provided with a pipe-shaped drive support 9 at the end away from the mating surface. The drive support 9 is connected to the drive shaft of the drive motor by a flat key. When the drive shaft of the drive motor rotates, it drives the coating pot 3 mounting assembly to rotate at the track.

[0027] It is readily understood that those skilled in the art can combine, split, or reorganize the embodiments provided in this application to obtain other embodiments, all of which do not exceed the protection scope of this application.

Claims

1. A kettle mounting assembly comprising a kettle, characterised in that, The planet support in the shape of a ring, the bottom of the planet support forms a matching surface, the matching surface is provided with four installation supports along the circumference of the planet support, the four installation supports are detachably matched with the planet support, the installation support comprises a first matching plate and a second matching plate, the first matching plate is arranged in parallel with the planet support, the second matching plate extends away from the matching surface, and the end of the second matching plate away from the first matching plate is detachably matched with the pot.

2. The kettle mounting assembly of claim 1, wherein, The first matching plate is provided with a first installation hole penetrating the matching end of the planet support, the planet support is correspondingly provided with a second installation hole, the first installation hole is provided with a matching bolt, the matching bolt is provided with a matching nut, and the matching bolt is used for penetrating the first installation hole and the second installation hole and being matched with the matching nut.

3. The kettle mounting assembly of claim 2, wherein, The matching bolt is further provided with a spring washer, and the spring washer is used for abutting and matching the first matching plate and the matching nut.

4. The kettle mounting assembly of claim 1, wherein, The second matching plate is provided with a third installation hole penetrating the matching end of the pot, and the pot is correspondingly provided with a matching column for matching with the third installation hole.

5. The kettle mounting assembly of claim 4, wherein, The free end of the matching column is provided with a rolling shaft along the axial direction, the diameter of the rolling shaft is smaller than the diameter of the matching column, the rolling shaft is provided with a roller, and the rolling shaft is further provided with a locking bolt for keeping the roller sleeved on the rolling shaft.

6. The kettle mounting assembly of claim 5, wherein, A matching sleeve is arranged between the locking bolt and the first matching plate, the matching sleeve is sleeved on the matching column and abuts and matches with the roller.

7. The kettle mounting assembly of claim 1, wherein, The included angle between the first matching plate and the second matching plate is 115°.

8. A high vacuum coating apparatus, characterized by, The pot installation assembly comprises any one of claims 1-7.

Images