Online vacuum sintering furnace

Abstract

The utility model relates to the technical field of semiconductor chip processing equipment, and provides an online vacuum sintering furnace. The online vacuum sintering furnace comprises a normal-temperature reduction station, a preheating reduction station, a reduction station, a welding station, a cooling station and a carrying mechanism. The previous station of the preheating reduction station is a normal-temperature reduction station, and the preheating reduction station comprises a preheating reduction chamber; the reduction station comprises a first cavity, a second cavity, a first moving device, a first air inlet pipeline and a first air exhaust pipeline, and the first moving device is connected with the second cavity and drives the second cavity to move so that the second cavity and the preheating reduction cavity can be matched to form a first closed space for providing a vacuum environment or a reducing atmosphere environment for workpiece reduction; the first air inlet pipeline and the first air exhaust pipeline are connected with the first closed space. Normal-temperature reduction at the normal-temperature reduction station is achieved, workpieces are prevented from being oxidized at the normal-temperature reduction station, and the machining quality of the workpieces is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor chip processing equipment technology, and in particular to an online vacuum sintering furnace. Background Technology

[0002] Currently, most semiconductor chip packaging equipment uses an assembly line approach, requiring chip soldering and packaging. To ensure the quality of chip soldering, the process must be carried out in a vacuum or reducing environment before and during soldering. Existing semiconductor chip packaging equipment cannot achieve room-temperature reduction at the reduction station, where workpieces are easily oxidized, resulting in low workpiece processing quality. Summary of the Invention

[0003] This application provides an online vacuum sintering furnace to solve the technical problems in the prior art where chips cannot achieve room temperature reduction, workpieces are easily oxidized at the room temperature reduction station, and the processing quality of workpieces is not high.

[0004] An online vacuum sintering furnace, comprising:

[0005] A room temperature reduction station is used to reduce the workpiece at room temperature, and a heat insulation mechanism is provided at the outlet end of the room temperature reduction station.

[0006] A preheating and reduction station is used to preheat and reduce a workpiece. The preheating and reduction station includes a preheating and reduction chamber, and the heat insulation mechanism is provided at the inlet end of the preheating and reduction station.

[0007] The reduction station is used to reduce the preheated and reduced workpiece. The reduction station includes a first chamber, a second chamber, a first moving device, a first air inlet pipe, and a first air extraction pipe. The first chamber is located around the second chamber. The first moving device is connected to the second chamber and drives the second chamber to move so that the second chamber and the preheated and reduced chamber cooperate to form a first sealed space that provides a vacuum environment or a reducing atmosphere environment for the reduced workpiece. The first air inlet pipe and the first air extraction pipe are respectively connected to the first sealed space.

[0008] The welding station is used to weld the restored workpiece.

[0009] The cooling station is used to cool the welded workpiece.

[0010] A conveying mechanism is used to convey workpieces so that they can move between the ambient temperature reduction station, the preheating reduction station, the reduction station, the welding station, and the cooling station.

[0011] According to the online vacuum sintering furnace of this utility model, the heat insulation mechanism includes a heat insulation drive mechanism, a heat insulation pad, a heat insulation cavity, and a heat insulation plate; the heat insulation plate is disposed in the heat insulation cavity, the heat insulation drive mechanism is disposed above the heat insulation cavity, the heat insulation pad is disposed below the heat insulation drive mechanism, and the heat insulation drive mechanism drives the heat insulation plate to move.

[0012] The online vacuum sintering furnace according to this utility model also includes heat insulation plate cooling holes, and the heat insulation plate cooling holes are provided inside the heat insulation plate.

[0013] The online vacuum sintering furnace according to this utility model further includes a first gas extraction mechanism and a second gas extraction mechanism; the first gas extraction mechanism is arranged above the ambient temperature reduction station, and the second gas extraction mechanism is arranged above the preheating reduction station.

[0014] According to the online vacuum sintering furnace of this utility model, the preheating reduction station further includes a heating platform, which is disposed on the bottom plate of the preheating reduction chamber, and the preheating reduction chamber is provided with a first air inlet.

[0015] According to the online vacuum sintering furnace of this utility model, the reduction station further includes: a first sealing device, which is disposed at the opening end of the second chamber and is adapted to be sealed to the opening end of the first chamber.

[0016] According to the online vacuum sintering furnace of this utility model, the reduction station further includes:

[0017] A first heating device is disposed inside the second chamber;

[0018] A first cooling device is located inside the second chamber.

[0019] According to the online vacuum sintering furnace of this utility model, the cooling station includes a cooling chamber and a water cooling device, the water cooling device is located in the cooling chamber, and the cooling chamber is provided with a second air inlet.

[0020] According to the online vacuum sintering furnace of this utility model, the conveying mechanism includes:

[0021] Support platform, used for placing workpieces;

[0022] A horizontal drive unit, connected to the support platform, is used to drive the support platform to move horizontally;

[0023] A vertical drive unit is connected to the support platform and is used to drive the support platform to move vertically.

[0024] According to the online vacuum sintering furnace of this utility model, the welding station includes a third chamber and a second moving device. The first chamber is located around the second chamber and the third chamber. The second moving device is connected to the third chamber and drives the third chamber to move so that the third chamber and the preheating reduction chamber cooperate to form a second sealed space that provides a vacuum environment or a reducing atmosphere environment for the welded workpiece.

[0025] This invention uses a heat insulation mechanism to isolate the ambient temperature reduction station, reducing the impact of the temperature of the preheating reduction station on the ambient temperature reduction station, thus achieving ambient temperature reduction and preventing oxidation of the workpiece, thereby improving the processing quality of the workpiece. The heat insulation plate of the heat insulation mechanism is equipped with cooling holes to achieve effective heat insulation. The first air extraction mechanism improves the temperature stability of the ambient temperature reduction station. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the structure of an online vacuum sintering furnace. Figure 1 ;

[0028] Figure 2 This is a schematic diagram of the structure of an online vacuum sintering furnace. Figure 2 ;

[0029] Figure 3 This is a three-dimensional structural diagram of the isolation mechanism;

[0030] Figure 4 This is a structural schematic diagram of the reduction station and welding station provided in this application;

[0031] Figure 5 This is a top view of the restoration station and welding station provided in this application;

[0032] Figure 6 yes Figure 5 A cross-sectional schematic diagram of AA in the middle;

[0033] Figure 7 This is a 3D structural diagram of the handling mechanism;

[0034] Figure 8 This is a schematic diagram of the main structure of the conveying mechanism;

[0035] Figure 9 This is a top view structural diagram of the conveying mechanism;

[0036] Figure 10 yes Figure 5 A schematic diagram of the AA cross-section when the second and third chambers descend to form a closed space.

[0037] Figure labels

[0038] 1. Feeding device; 2. Preheating and reduction station; 21. Preheating and reduction chamber; 22. Second exhaust mechanism; 23. Heat insulation mechanism; 3. Reduction station; 31. First chamber; 32. Second chamber; 33. First moving device; 34. First air inlet pipe; 35. First exhaust pipe; 4. Welding station; 41. Third chamber; 42. Second moving device; 43. Second air inlet pipe; 44. Second exhaust pipe; 5. Cooling station; 6. Handling mechanism; 61. Support platform; 62. Horizontal drive unit; 63. Vertical drive unit; 7. Unloading device; 8. Feeding and conveying device; 9. Unloading and conveying device; 10. Room temperature reduction station; 101. First exhaust mechanism; 231. Heat insulation drive mechanism; 232. Heat insulation pad; 233. Heat insulation chamber; 234. Heat insulation plate; 2341. Cooling holes of heat insulation plate. Detailed Implementation

[0039] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0040] In the description of the embodiments of this utility model, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0041] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.

[0042] In this embodiment of the utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0043] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0044] The following is combined Figures 1-10 Describe an online vacuum sintering furnace, comprising:

[0045] The ambient temperature reduction station 10 is used to reduce the workpiece at ambient temperature. The outlet end of the ambient temperature reduction station 10 is equipped with a heat insulation mechanism 23.

[0046] Preheating and reduction station 2 is used to preheat and reduce the workpiece. Preheating and reduction station 2 includes a preheating and reduction chamber 21 and a heat insulation mechanism 23 is provided at the inlet end of the preheating and reduction station 2.

[0047] The reduction station 3 is used to reduce the preheated and reduced workpiece. The reduction station 3 includes a first chamber 31, a second chamber 32, a first moving device 33, a first air inlet pipe 34, and a first air extraction pipe 35. The first chamber 31 is located around the second chamber 32. The first moving device 33 is connected to the second chamber 32 and drives the second chamber 32 to move so that the second chamber 32 and the preheating and reduction chamber 21 cooperate to form a first sealed space that provides a vacuum environment or a reducing atmosphere environment for the reduced workpiece. The first air inlet pipe 34 and the first air extraction pipe 35 are respectively connected to the first sealed space.

[0048] Welding station 4 is used to weld the restored workpiece;

[0049] Cooling station 5 is used to cool the welded workpiece;

[0050] The conveying mechanism 6 is used to convey the workpiece so that it can move between the room temperature reduction station 10, the preheating reduction station 2, the reduction station 3, the welding station 4, and the cooling station 5.

[0051] In some embodiments, the heat insulation mechanism 23 includes a heat insulation drive mechanism 231, a heat insulation pad 232, a heat insulation cavity 233, and a heat insulation plate 234; the heat insulation plate 234 is disposed inside the heat insulation cavity 233, the heat insulation drive mechanism 231 is disposed above the heat insulation cavity 233, the heat insulation pad 232 is disposed below the heat insulation drive mechanism 231, and the heat insulation drive mechanism 231 drives the heat insulation plate 234 to move.

[0052] In some embodiments, the system further includes heat insulation plate cooling holes 2341, which are provided inside the heat insulation plate 234. Cooling gas or liquid is introduced into the heat insulation plate cooling holes 2341 to cool the heat insulation plate.

[0053] In some embodiments, the system further includes a first suction mechanism 101 and a second suction mechanism 22; the first suction mechanism 101 is disposed above the room temperature reduction station 10, and the second suction mechanism 22 is disposed above the preheating reduction station 2.

[0054] In some embodiments, the preheating reduction station 2 further includes a heating platform, which is disposed on the bottom plate of the preheating reduction chamber 21, and the preheating reduction chamber 21 is provided with a first air inlet.

[0055] In some embodiments, the restoration station 3 further includes a first sealing device, which is disposed at the opening end of the second chamber 32 and is adapted to be sealed to the opening end of the first chamber 31.

[0056] In some embodiments, the restoration station 3 further includes:

[0057] The first heating device is located inside the second chamber 32;

[0058] The first cooling device is located inside the second chamber 32.

[0059] In some embodiments, the cooling station 5 includes a cooling chamber and a water cooling device, the water cooling device being disposed in the cooling chamber, and the cooling chamber being provided with a second air inlet.

[0060] In some embodiments, the conveying mechanism 6 includes:

[0061] Support platform 61, the support platform 61 is used to place the workpiece;

[0062] A horizontal drive unit 62 is connected to the support platform 61 and is used to drive the support platform 61 to move horizontally.

[0063] The vertical drive unit 63 is connected to the support platform 61 and is used to drive the support platform 61 to move vertically.

[0064] In some embodiments, the welding station 4 includes a third chamber 41 and a second moving device 42. The first chamber 31 is located around the second chamber 32 and the third chamber 41. The second moving device 42 is connected to the third chamber 42 and drives the third chamber 42 to move so that the third chamber 42 and the preheating reduction chamber 21 cooperate to form a second sealed space that provides a vacuum environment or a reducing atmosphere environment for the welded workpiece. The second moving device 42 can be a lifting device, specifically a lifting moving device driven by pneumatic, electric, or hydraulic structures. The second moving device 42 is used to control the lifting movement of the third chamber 41. When the third chamber 41 moves to below the first chamber 31 and docks with the preheating reduction chamber 21, the two seal to form a second sealed space. A reducing gas, such as formic acid gas or hydrogen gas, is delivered into the second sealed space through the second air inlet pipe 43 to perform secondary reduction on the workpiece and weld it. Gas is extracted from the second sealed space through the second air extraction pipe 44.

[0065] In some embodiments, the device further includes a loading conveyor 8 and a discharging conveyor 9. The loading conveyor 8 is connected to the loading device 1, and the discharging conveyor 9 is connected to the discharging device 7. The loading conveyor 8 transports the workpiece to the position of the loading device 1, and the discharging conveyor 9 transports the workpiece from the discharging device 7 to the next device. Preferably, the loading conveyor 8 and the discharging conveyor 9 can be belt conveyors or scraper conveyors, etc.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. An online vacuum sintering furnace, characterized in that, include: A room temperature reduction station is used to reduce the workpiece at room temperature, and a heat insulation mechanism is provided at the outlet end of the room temperature reduction station. A preheating and reduction station is used to preheat and reduce a workpiece. The preheating and reduction station includes a preheating and reduction chamber, and the heat insulation mechanism is provided at the inlet end of the preheating and reduction station. The reduction station is used to reduce the preheated and reduced workpiece. The reduction station includes a first chamber, a second chamber, a first moving device, a first air inlet pipe, and a first air extraction pipe. The first chamber is located around the second chamber. The first moving device is connected to the second chamber and drives the second chamber to move so that the second chamber and the preheated and reduced chamber cooperate to form a first sealed space that provides a vacuum environment or a reducing atmosphere environment for the reduced workpiece. The first air inlet pipe and the first air extraction pipe are respectively connected to the first sealed space. The welding station is used to weld the restored workpiece. The cooling station is used to cool the welded workpiece. A conveying mechanism is used to convey workpieces so that they can move between the ambient temperature reduction station, the preheating reduction station, the reduction station, the welding station, and the cooling station.

2. The online vacuum sintering furnace according to claim 1, characterized in that, The heat insulation mechanism includes a heat insulation drive mechanism, a heat insulation pad, a heat insulation cavity, and a heat insulation plate; the heat insulation plate is disposed in the heat insulation cavity, the heat insulation drive mechanism is disposed above the heat insulation cavity, the heat insulation pad is disposed below the heat insulation drive mechanism, and the heat insulation drive mechanism drives the heat insulation plate to move.

3. The online vacuum sintering furnace according to claim 2, characterized in that, It also includes heat insulation plate cooling holes, which are provided inside the heat insulation plate.

4. The online vacuum sintering furnace according to claim 1, characterized in that, It also includes a first air extraction mechanism and a second air extraction mechanism; the first air extraction mechanism is arranged above the room temperature reduction station, and the second air extraction mechanism is arranged above the preheating reduction station.

5. The online vacuum sintering furnace according to claim 1, characterized in that, The preheating and reduction station also includes a heating platform, which is disposed on the bottom plate of the preheating and reduction chamber, and the preheating and reduction chamber is provided with a first air inlet.

6. The online vacuum sintering furnace according to claim 1, characterized in that, The reduction station further includes a first sealing device, which is located at the opening end of the second chamber and is adapted to be sealed to the opening end of the first chamber.

7. The online vacuum sintering furnace according to claim 1, characterized in that, The restoration station also includes: A first heating device is disposed inside the second chamber; A first cooling device is located inside the second chamber.

8. The online vacuum sintering furnace according to claim 1, characterized in that, The cooling station includes a cooling chamber and a water-cooling device. The water-cooling device is located in the cooling chamber, and the cooling chamber is provided with a second air inlet.

9. The online vacuum sintering furnace according to claim 1, characterized in that, The transport mechanism includes: Support platform, used for placing workpieces; A horizontal drive unit, connected to the support platform, is used to drive the support platform to move horizontally; A vertical drive unit is connected to the support platform and is used to drive the support platform to move vertically.

10. The online vacuum sintering furnace according to any one of claims 1 to 9, characterized in that, The welding station includes a third chamber and a second moving device. The first chamber is located around the second chamber and the third chamber. The second moving device is connected to the third chamber and drives the third chamber to move so that the third chamber and the preheating reduction chamber cooperate to form a second sealed space that provides a vacuum environment or a reducing atmosphere environment for the welded workpiece.

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