Flexible pressure sensor and array type pressure detection device

Abstract

The utility model discloses a flexible pressure sensor and an array type pressure detection device, and relates to the technical field of pressure sensing technology. The pressure sensor comprises a shell, a flexible substrate is fixedly connected to the bottom in the shell, and a pressure sensor array is fixedly connected to the top of the flexible substrate; an inner cavity of the pressure sensor array is provided with an anti-fracture assembly. According to the flexible pressure sensor, the durability and the fracture resistance of the flexible pressure sensor are remarkably improved by arranging the fracture resistance assembly, specifically, the elastic substrate is made of the high-elasticity material, external impact and pressure can be effectively absorbed, the sensor is prevented from being fractured when the sensor is used for a long time or subjected to large external force, and the service life of the sensor is prolonged. The conductive layer adopts a patterned carbon nanotube film, not only has excellent conductivity, but also has good flexibility, and can maintain stable electrical properties under complex deformation, and the packaging layer further protects the conductive layer and the elastic substrate, and prevents corrosion of an external environment to the sensor.

Description

TECHNICAL FIELD

[0001] The utility model belongs to pressure sensing technology technical field, especially, relate to a kind of flexible pressure sensor and array pressure detection device. BACKGROUND

[0002] Pressure sensor is a kind of equipment for measuring gas or liquid pressure, it provides real-time monitoring and control to pressure by converting pressure signal into proportional electric signal, pressure sensor is usually composed of pressure sensitive element (such as piezoelectric element, strain gauge etc.) and signal processing circuit, when pressure acts on sensitive element, it will cause its deformation or electrical property change, thereby generating electric signal.

[0003] The pressure sensor in prior art, in the process of use, still exist some problems, such as: traditional pressure sensor usually needs to be in direct contact with external structure, this design makes that sensor is in contact and collision after a long time, internal element is easy to break or damage, thereby affecting its long-term stability and durability, in addition, the sensor arrangement of existing array pressure detection device is unreasonable, sensitivity is lower, cannot effectively improve the sensing ability of pressure change, lead to measurement error is larger, thereby affecting the overall detection effect and accuracy.

[0004] Therefore, we provide a kind of flexible pressure sensor and array pressure detection device to solve the problems in the above. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a kind of flexible pressure sensor and array pressure detection device, by the cooperation of anti-fracture assembly and optimization component, solve the pressure sensor and array pressure detection device in prior art, pressure sensor is easy to break damage, and the problem of big measurement error of pressure detection device.

[0006] To solve the above technical problem, the utility model is realized by the following technical scheme.

[0007] The utility model relates to a kind of flexible pressure sensor and array pressure detection device, including shell, flexible substrate is fixedly connected in the shell inner bottom, the flexible substrate top is fixedly connected with pressure sensor array;Resistance-breaking assembly is arranged in the pressure sensor array inner cavity, resistance-breaking assembly includes the elastic substrate fixedly connected in the bottom of pressure sensor array, the conductive layer being arranged in the top of elastic substrate, and the encapsulation layer being arranged in the top of conductive layer, the resistance-breaking assembly is made of elastic substrate, conductive layer and encapsulation layer composite, and the flexibility of pressure sensor array is improved by resistance-breaking assembly;Optimization component is arranged in the shell inner cavity, and optimization component includes temperature sensor and humidity sensor fixedly connected in the inner top of flexible substrate, and contact membrane is fixedly connected in the top of shell, and the detection accuracy of pressure sensor array is optimized by optimization component.

[0008] The utility model further sets up, elastic substrate top is fixedly connected with lower compressible resistance layer, and lower compressible resistance layer top is fixedly connected with the bottom of conductive layer.

[0009] The utility model further sets up, and encapsulation layer bottom is fixedly connected with upper compressible resistance layer, and upper compressible resistance layer bottom is fixedly connected with the top of conductive layer.

[0010] The utility model further sets up, and elastic substrate is PDMS material, and thickness is 0.1mm-1mm, and conductive layer is patterned carbon nanotube film, and thickness is 10nm-1μm, and encapsulation layer is PDMS material, and thickness is 0.05mm-0.5mm.

[0011] The utility model further sets up, and shell bottom is equipped with heat dissipation layer, and heat dissipation layer surface is equipped with heat dissipation hole.

[0012] The utility model further sets up, and the both sides of encapsulation layer are equipped with connecting port, for connecting external equipment.

[0013] The utility model further sets up, and the material of contact membrane is TPU film, and contact membrane is used for directly contacting external pressure, and transmits pressure to internal sensor array.

[0014] The utility model has following beneficial effects.

[0015] 1.The utility model discloses a break -resistant assembly is set up, has improved the durability and the break -resistant performance of flexible pressure sensor significantly, in particular, the elastic base adopts high elasticity material, can effectively absorb external impact and pressure, prevents the sensor from breaking when long -time use or is subjected to greater external force, the conductive layer adopts patterned carbon nanotube film, not only has excellent conductivity, also has good flexibility, can keep stable electrical property under complex deformation, the encapsulation layer further protects the conductive layer and elastic base, prevents the erosion of outside environment to the sensor.

[0016] 2.The utility model discloses through setting up optimization component, effectively has improved the detection accuracy and stability of array type pressure detection device, temperature sensor and humidity sensor real -time monitoring environmental condition to the temperature and humidity compensation of pressure signal through signal processing unit, has eliminated the interference of environmental factor to the detection result, contact membrane adopts TPU film, can even transmit the external pressure to the internal pressure sensor array, protect the sensor from mechanical damage, in addition, the arrangement mode of pressure sensor array is optimized, combines signal processing algorithm, further reduces the detection error, improves spatial resolution and detection consistency.

[0017] Of course, any product implementing the utility model does not necessarily need to achieve all the advantages described above at the same time. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will be needed to use the drawing of the embodiment to introduce briefly.

[0019] Figure 1 It is a kind of flexible pressure sensor and array type pressure detection device's perspective view.

[0020] Figure 2 It is a kind of flexible pressure sensor and array type pressure detection device's explosion map of shell and contact membrane.

[0021] Figure 3 It is a kind of flexible pressure sensor and array type pressure detection device's explosion map of device membrane internal structure.

[0022] Figure 4 It is a kind of flexible pressure sensor and array type pressure detection device's sectional view of pressure sensor array.

[0023] Figure 5 It is a kind of flexible pressure sensor and array type pressure detection device's explosion map of pressure sensor array internal structure.

[0024] In the drawing: 1, shell; 2, flexible substrate; 3, pressure sensor array; 4, elastic base; 5, conductive layer; 6, encapsulation layer; 7, temperature sensor; 8, humidity sensor; 9, contact film; 10, lower compressible resistance layer; 11, upper compressible resistance layer; 12, heat dissipation layer; 13, connecting port. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the utility model will be described below with reference to the drawings in the embodiments of the utility model. The described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0026] Embodiment 1

[0027] Please refer to Figures 1-5 The utility model discloses a kind of flexible pressure sensor and array type pressure detection device, including shell 1, flexible substrate 2 is fixedly connected in the bottom of shell 1, flexible substrate 2 uses flexible circuit board as substrate, improve the flexibility of pressure sensor array 3, and sensor mounting position is reserved on substrate, pressure sensor array 3 is fixed by conductive glue or welding, flexible substrate 2 top is fixedly connected with pressure sensor array 3;Pressure sensor array 3 is composed of multiple pressure sensors, array type distribution is shown, improve the sensitivity of detection device, and the spacing between pressure sensor is 1mm-10mm, anti-fracture component is arranged in the cavity of pressure sensor array 3, anti-fracture component includes the elastic base 4 that is fixedly connected to the bottom of pressure sensor array 3, the conductive layer 5 that is arranged on the top of elastic base 4 and the encapsulation layer 6 that is arranged on the top of conductive layer 5, anti-fracture component is made of elastic base 4, conductive layer 5 and encapsulation layer 6, and the flexibility of pressure sensor array 3 is improved by anti-fracture component;Optimization component is arranged in the cavity of shell 1, optimization component includes temperature sensor 7 and humidity sensor 8 that are fixedly connected to the top of flexible substrate 2, temperature sensor 7 monitors environmental temperature in real time, and temperature data is transmitted to signal processing unit, according to preset temperature-resistance relationship model, pressure signal is compensated, and the error caused by temperature is eliminated, humidity sensor 8 monitors environmental humidity in real time, and humidity data is transmitted to signal processing unit, according to preset humidity-resistance relationship model, pressure signal is compensated, and the error caused by humidity is eliminated, and contact film 9 is fixedly connected to the top of shell 1, contact film 9 is contacted with the element to be detected, facilitate pressure detection, and the detection accuracy of pressure sensor array 3 is optimized by optimization component.

[0028] Embodiment 2

[0029] Please refer to Figures 1-5On the basis of embodiment 1, the lower compressible resistance layer 10 is fixedly connected on the top of the elastic substrate 4, the lower compressible resistance layer 10 is fixedly connected on the bottom of the conductive layer 5, the upper compressible resistance layer 11 is fixedly connected on the bottom of the packaging layer 6, the lower compressible resistance layer 10 is arranged between the elastic substrate 4 and the conductive layer 5, and the upper compressible resistance layer 11 is arranged between the conductive layer 5 and the packaging layer 6, so that the sensitivity is improved, the sensor presents different response characteristics under different pressures, the lower compressible resistance layer 10 is fixedly connected on the bottom of the upper compressible resistance layer 11, the elastic substrate 4 is connected with the conductive layer 5 through the lower compressible resistance layer 10, and the conductive layer 5 is connected with the packaging layer 6 through the upper compressible resistance layer 11, so that the external pressure is uniformly transmitted to the conductive layer 5 through the lower compressible resistance layer 10 and the upper compressible resistance layer 11, the accurate detection of the pressure signal is ensured, the deformation occurs under the micro pressure, and therefore the sensitivity of the sensor is improved significantly, the elastic substrate 4 is made of PDMS material and has a thickness of 0.1mm-1mm, the conductive layer 5 is a patterned carbon nanotube film and has a thickness of 10nm-1μm, the packaging layer 6 is made of PDMS material and has a thickness of 0.05mm-0.5mm, the packaging layer 6 can completely cover the conductive layer 5 and is seamlessly bonded with the elastic substrate 4, the heat dissipation layer 12 is arranged on the bottom of the shell 1, the heat dissipation layer 12 can prevent the pressure sensor array 3 from overheating after long-time work, the heat dissipation layer 12 is provided with heat dissipation holes on the surface, and the connecting ports 13 are arranged on the two sides of the packaging layer 6 and used for connecting external equipment, and the material of the contact film 9 is TPU film.

[0030] The working principle of the utility model is as follows: when pressure detection is carried out, the external pressure acts on the contact film 9 on the top of the shell 1, the contact film 9 is made of TPU film material and has good flexibility and pressure transmission performance, the contact film 9 uniformly transmits the external pressure to the internal pressure sensor array 3, the pressure sensor array 3 is composed of a plurality of pressure sensors and is distributed in an array, each pressure sensor is internally provided with a rupture-resistant assembly, including an elastic substrate 4, a conductive layer 5 and a packaging layer 6, when the pressure is transmitted to the sensor, the elastic substrate 4 deforms, causing the resistance of the conductive layer 5 to change, the conductive layer 5 is made of a patterned carbon nanotube film and has good conductivity and flexibility, when the resistance of the conductive layer 5 changes, the sensor generates a corresponding electric signal, the electric signal is transmitted to a signal processing unit through the circuit on the flexible substrate 2, the signal processing unit amplifies, filters and digitizes the electric signal, and generates a digital signal proportional to the pressure size.

[0031] The device is internally provided with a temperature sensor 7 and a humidity sensor 8 for monitoring the ambient temperature and humidity in real time, the temperature sensor 7 and the humidity sensor 8 transmit the environmental data to a signal processing unit, and the signal processing unit compensates the pressure signal according to a preset temperature-resistance relationship model and humidity-resistance relationship model, and eliminates the interference of environmental factors on the detection result.

[0032] The bottom of the shell 1 is provided with a heat dissipation layer 12, the surface of the heat dissipation layer is provided with heat dissipation holes, for dissipating the heat generated by the pressure sensor array 3 during the working process, preventing overheating from affecting the performance of the sensor, the encapsulation layer 6 completely covers the conductive layer 5 and the elastic substrate 4, preventing the sensor from being eroded by the external environment, and protecting the sensor from mechanical damage.

[0033] The above only describes certain exemplary embodiments of the present application by way of illustration, without doubt, for those skilled in the art, without departing from the spirit and scope of the present application, the described embodiments can be modified in various ways. Therefore, the above drawings and description are illustrative in nature and should not be construed as limiting the scope of protection of the present application.

Claims

1. A flexible pressure sensor and arrayed pressure detection device comprising a housing (1), characterized in that: The bottom of the shell (1) is fixedly connected with a flexible substrate (2), and the top of the flexible substrate (2) is fixedly connected with a pressure sensor array (3). The pressure sensor array (3) is provided with a fracture-resistant assembly in the cavity, the fracture-resistant assembly comprises an elastic substrate (4) fixedly connected to the bottom of the pressure sensor array (3), a conductive layer (5) arranged on the top of the elastic substrate (4), and an encapsulation layer (6) arranged on the top of the conductive layer (5), the fracture-resistant assembly is composed of the elastic substrate (4), the conductive layer (5) and the encapsulation layer (6), and the fracture-resistant assembly is used to improve the flexibility of the pressure sensor array (3). The cavity of the shell (1) is provided with an optimization assembly, the optimization assembly comprises a temperature sensor (7) and a humidity sensor (8) fixedly connected to the inner top of the flexible substrate (2), and a contact film (9) fixedly connected to the top of the shell (1), and the optimization assembly is used to optimize the detection accuracy of the pressure sensor array (3). 2.The flexible pressure sensor and array-type pressure detection device according to claim 1, wherein: The top of the elastic substrate (4) is fixedly connected with a lower compressible resistance layer (10), and the top of the lower compressible resistance layer (10) is fixedly connected with the bottom of the conductive layer (5). 3.The flexible pressure sensor and array-type pressure detection device according to claim 1, wherein: The bottom of the encapsulation layer (6) is fixedly connected with an upper compressible resistance layer (11), and the bottom of the upper compressible resistance layer (11) is fixedly connected with the top of the conductive layer (5). 4.The flexible pressure sensor and array-type pressure detection device according to claim 1, wherein: The elastic substrate (4) is made of PDMS material, and has a thickness of 0.1mm-1mm, the conductive layer (5) is a patterned carbon nanotube film, and has a thickness of 10nm-1μm, and the encapsulation layer (6) is made of PDMS material, and has a thickness of 0.05mm-0.5mm. 5.The flexible pressure sensor and array-type pressure detection device according to claim 1, wherein: The bottom of the shell (1) is provided with a heat dissipation layer (12), and the surface of the heat dissipation layer (12) is provided with heat dissipation holes. 6.The flexible pressure sensor and array-type pressure detection device according to claim 1, wherein: The two sides of the encapsulation layer (6) are provided with connecting ports (13) for connecting external devices.

7. The flexible pressure sensor and arrayed pressure detection device of claim 1, wherein: The material of the contact film (9) is TPU film, and the contact film (9) is used for directly contacting external pressure and transmitting the pressure to the internal sensor array.

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