Internal and external trigger control excimer laser output system

Abstract

The utility model discloses an internal and external trigger control excimer laser output system, which comprises a central control system, a high-voltage switch trigger, a high-voltage generator, a high-voltage switch and a laser generating unit, the central control system comprises a single-chip microcomputer, a charging signal generation circuit, an external trigger signal generator, a central control power supply VCC and switches S1-S4. The single-chip microcomputer is connected with the high-voltage switch trigger through a switch S4 to transmit an internal trigger light emitting signal, controls the charging signal generation circuit to be connected with the high-voltage generator through a switch S2 to transmit an internal trigger charging signal, and is connected with the high-voltage generator to transmit a high-voltage flat top signal. An external trigger signal generator is connected with a high-voltage switch trigger through a switch S1 to transmit an external trigger light emitting signal, a central control power supply VCC is connected with a high-voltage generator through a switch S3 to transmit an external trigger charging signal, an internal trigger or external trigger light emitting mode of the laser generating unit is realized by connecting different switches, and control disorder is avoided.

Description

[Technical Field]

[0001] This utility model relates to the field of high voltage switch control technology, and in particular to an internal and external trigger control excimer laser output system. [Background Technology]

[0002] Excimer lasers require operation under high voltage conditions. High-voltage switches such as IGBTs and hydrogen thyristors are two typical switches used in high-voltage circuits. During the conduction process, these high-voltage switches couple tens to thousands of volts of spike interference voltage into the trigger terminal. This spike interference voltage can interfere with and damage low-voltage components in the trigger circuit. Meanwhile, utility model patent CN111416272B discloses a triggering and protection circuit for an excimer laser high-voltage switch, capable of generating a trigger signal for the high-voltage switch and resisting high-voltage spike pulse interference, enabling the high-voltage switch to operate stably for a long time. However, this triggering and protection circuit suffers from a disordered trigger control mode, causing both the energy storage device of the laser generating unit and the high-voltage switch to bear a long high-voltage loading time when the laser generating unit generates laser light, thus shortening the lifespan of the energy storage device and the high-voltage switch. [Utility Model Content]

[0003] This invention overcomes the shortcomings of the prior art and provides an internal and external trigger control excimer laser output system. It selects a mutually exclusive internal triggering mode that charges and discharges instantly and an external triggering mode that continuously applies high voltage according to the usage requirements, so as to avoid the need for long-term high voltage application when the energy storage device and the high voltage switch are working due to the disorder of the trigger control mode.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] An internal and external trigger control excimer laser output system, characterized in that it includes a central control system, a high-voltage switch trigger, a high-voltage generator, a high-voltage switch, and a laser generation unit;

[0006] The grounding terminal of the high-voltage switch trigger is connected to the grounding terminal of the high-voltage switch, and the control output terminal of the high-voltage switch trigger is connected to the trigger terminal of the high-voltage switch.

[0007] The output terminal of the high voltage generator is connected to the collector end of the high voltage switch and the laser generating unit, respectively. The laser generating unit is used to generate laser light.

[0008] The central control system includes a microcontroller, a charging signal generation circuit, an external trigger signal generator, a central control power supply VCC, switches S1, S2, S3, and S4;

[0009] The microcontroller is used to generate the internal trigger light emission signal, the charging signal generation circuit drive signal, and the high voltage flat top signal. The charging signal generation circuit is used to generate the internal trigger charging signal, the external trigger signal generator is used to generate the external trigger light emission signal, and the central control power supply VCC is used to generate the external trigger charging signal.

[0010] The microcontroller's internal trigger output optical signal is connected to one end of switch S4, and the other end of switch S4 is connected to the high-voltage switch trigger.

[0011] The microcontroller's charging signal generation circuit drive signal output terminal is connected to the charging signal generation circuit, the charging signal generation circuit output terminal is connected to one end of switch S2, and the other end of switch S2 is connected to the high voltage generator.

[0012] The high-voltage flat-top signal output terminal of the microcontroller is connected to the high-voltage generator;

[0013] An external trigger signal generator is connected to one end of switch S1, and the other end of switch S1 is connected to a high-voltage switch trigger.

[0014] The central control power supply VCC is connected to one end of switch S3, and the other end of switch S3 is connected to the high voltage generator.

[0015] The excimer laser output system with internal and external trigger control described above is characterized in that: switches S1-S4 are all electronic switches and constitute a multiplexer;

[0016] The central control system also includes a multi-way switch selector drive circuit;

[0017] The microcontroller is also used to generate multiplexer drive signals. The output terminal of the microcontroller's multiplexer drive signal is connected to the multiplexer drive circuit, the control terminal of switch S1, and the control terminal of switch S3, respectively.

[0018] The drive terminals of the multiplexer selector drive circuit are connected to the control terminals of switch S2 and switch S4, respectively.

[0019] The excimer laser output system with internal and external trigger control described above is characterized in that: the multiplexer drive circuit includes a transistor Q2, the collector of transistor Q2 is connected to one end of resistor R4, the control terminal of switch S4, and the control terminal of switch S2 respectively, the other end of resistor R4 is connected to the central control power supply VCC, the base of transistor Q2 is connected to the control terminal of switch S1, the control terminal of switch S3, and the multiplexer drive signal output terminal of the microcontroller through resistor R5 respectively, and the emitter of transistor Q2 is grounded.

[0020] The excimer laser output system with internal and external trigger control as described above is characterized in that: it further includes a touch screen, which is used to generate internal trigger control signals or external trigger control signals, and the control signal output terminal of the touch screen is connected to a microcontroller to enable the central control system to be set to internal trigger control or external trigger control.

[0021] The excimer laser output system with internal and external triggering control as described above is characterized in that it further includes fiber optic head FB1 and fiber optic head FB4.

[0022] One end of switch S4 is connected to the fiber optic head FB4, which is located at one of the input ends of the high-voltage switch trigger, via the fourth fiber optic line. The fourth fiber optic line is used to transmit the internal trigger output optical signal generated by the microcontroller to the high-voltage switch trigger.

[0023] One end of switch S1 is connected to the fiber optic head FB1 located at the other input end of the high-voltage switch trigger via a first fiber optic line. The first fiber optic line is used to transmit the external trigger output optical signal generated by the external trigger signal generator to the high-voltage switch trigger.

[0024] The excimer laser output system with internal and external triggering control as described above is characterized in that it further includes fiber optic connectors FB11 and FB41.

[0025] The fourth fiber optic cable is connected to the fiber optic connector FB41 located at one end of switch S4.

[0026] The first optical fiber is connected to the optical fiber head FB11 located at one end of the switch S1.

[0027] The excimer laser output system with internal and external triggering control as described above is characterized by further including fiber optic head FB2 and fiber optic head FB3;

[0028] The connection terminals of switches S2 and S3 are connected to the fiber optic head FB2 located at one of the input terminals of the high voltage generator via a second fiber optic cable. The second fiber optic cable is used to transmit the internal trigger charging signal generated by the charging signal generation circuit or the external trigger charging signal generated by the central control power supply VCC to the high voltage generator.

[0029] The high-voltage flat-top signal output terminal of the microcontroller is connected to the fiber optic connector FB3 located at another input terminal of the high-voltage generator via a third fiber optic cable. The third fiber optic cable is used to transmit the high-voltage flat-top signal generated by the microcontroller to the high-voltage generator.

[0030] The excimer laser output system with internal and external triggering control as described above is characterized in that it further includes fiber optic connectors FB21 and FB31.

[0031] The second optical fiber is connected to the optical fiber head FB21 located at the connection end of switch S2 and switch S3.

[0032] The third fiber optic cable is connected to the fiber optic connector FB31 located at the high-voltage flat-top signal output end of the microcontroller.

[0033] The excimer laser output system with internal and external trigger control as described above is characterized in that: the high-voltage switch is a thyristor, and the high-voltage switch trigger is a thyristor trigger.

[0034] The excimer laser output system with internal and external triggering control, as described above, is characterized in that: the laser generating unit includes an energy storage capacitor Cs, an inductor Ls, a discharge capacitor Cd, a cathode electrode, and an anode electrode;

[0035] The output terminal of the high voltage generator is connected to one end of the energy storage capacitor Cs. The other end of the energy storage capacitor Cs is connected to one end of the inductor Ls, one end of the discharge capacitor Cd, and the cathode electrode, respectively. The other end of the inductor Ls, the other end of the discharge capacitor Cd, and the anode electrode are grounded.

[0036] The beneficial effects of this utility model are:

[0037] 1. This utility model can set switches S4 and S2 in the multi-channel switch selector to be connected to realize the internal triggering mode of instant charging and discharging of the laser generating unit, or set switches S1 and S3 in the multi-channel switch selector to be connected to realize the external triggering mode of continuous laser output of the laser generating unit. The internal triggering mode and the external triggering mode are mutually exclusive, avoiding the need for long-term high voltage loading when the energy storage device and the high voltage switch are working due to control disorder. At the same time, the triggering mode can be selected according to the actual use requirements, thereby increasing the scope of application.

[0038] 2. The internal triggering method of this utility model adopts the instant charging and discharging mode of the energy storage device of the laser generating unit and the high-voltage switch. The signal generated by the central control system controls the generation of laser light pulses, which effectively reduces the time of high voltage loading on the energy storage capacitor and the high-voltage switch, and extends the life of the energy storage capacitor and the high-voltage switch.

[0039] 3. The external triggering method of this utility model adopts the energy storage device of the laser generating unit and the high voltage switch to continuously load the high voltage mode. The external triggering generates an optical triggering signal, which controls the triggering and conduction of the high voltage switch, thereby enabling the laser to produce low-jitter laser output. The laser can be configured as an amplifier. [Image Description]

[0040] Figure 1 This is a circuit diagram of the high-voltage switch of this utility model, which is a thyristor.

[0041] Figure 2 This diagram illustrates the relationship between the states of each device and each signal in the internal triggering method of this utility model.

[0042] Figure 3This is a waveform diagram showing the delay between the falling edge of the optical trigger signal generated by the internal triggering method and the laser in this utility model.

[0043] Figure 4 This diagram illustrates the relationship between the states of each device and the signals in the external triggering method of this invention.

[0044] Figure 5 This is a waveform diagram showing the delay between the rising edge of the external trigger signal generated by the external trigger and the laser in the external triggering method of this utility model.

[0045] Figure 6 These are laser pulse signals measured at different voltages under the same trigger signal in the external triggering method of this utility model;

[0046] Figure 7 This table compares the delay time between the rising edge of the light trigger signal and the laser beam under different voltages in the external triggering method of this utility model. [Detailed Implementation]

[0047] The technical solutions in the embodiments of this utility model will now be clearly and completely described in conjunction with the accompanying drawings.

[0048] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of this utility model are only used to explain the relative positional relationship and movement of the components in a specific posture (as shown in the attached figure). If the specific posture changes, the directional indication will also change accordingly. Furthermore, descriptions involving "preferred," "second-best," etc., in this utility model are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined as "preferred" or "second-best" may explicitly or implicitly include at least one of those features.

[0049] like Figure 1 As shown, an excimer laser output system with internal and external trigger control includes a central control system, a high-voltage switch trigger, a high-voltage generator, a high-voltage switch, a laser generating unit, and fiber optic connectors FB1, FB2, FB3, and FB4. The high-voltage switch is a thyristor, and the high-voltage switch trigger is a thyristor trigger. The laser generating unit includes an energy storage capacitor Cs, an inductor Ls, a discharge capacitor Cd, a cathode electrode, and an anode electrode.

[0050] In this case, the input terminal of the thyristor trigger is connected to fiber optic connectors FB1 and FB4, which are used to receive external triggering light-emitting signals and internal triggering light-emitting signals, respectively; the input terminal of the high-voltage generator is connected to fiber optic connectors FB2 and FB3, which are used to receive charging signals and power charging high-voltage flat-top signals, respectively.

[0051] In this case, the central control system is used to generate internally triggered optical signals, externally triggered optical signals, charging signals, and high-voltage flat-top signals. For example... Figure 1 As shown, the central control system includes a microcontroller, a charging signal generation circuit, an external trigger signal generator, a central control power supply VCC, a multiplexer selector drive circuit, switches S1, S2, S3, and S4. Switches S1-S4 are all electronic switches and together form a multiplexer selector.

[0052] One end of switch S4 in the central control system is connected to fiber optic head FB4, which is located at one of the input ends of the high-voltage switch trigger, via a fourth fiber optic cable. The fourth fiber optic cable is used to transmit the internal trigger output optical signal generated by the microcontroller to the high-voltage switch trigger.

[0053] One end of the switch S1 in the central control system is connected to the fiber optic head FB1 located at the other input end of the high-voltage switch trigger via the first fiber optic line. The first fiber optic line is used to transmit the external trigger output light signal generated by the external trigger signal generator to the high-voltage switch trigger.

[0054] The connection terminals of switches S2 and S3 in the central control system are connected to the fiber optic head FB2 located at one of the input terminals of the high voltage generator via a second fiber optic cable. The second fiber optic cable is used to transmit the internal trigger charging signal generated by the charging signal generation circuit or the external trigger charging signal generated by the central control power supply VCC to the high voltage generator.

[0055] The high-voltage flat-top signal output terminal of the microcontroller in the central control system is connected to the fiber optic connector FB3 located at another input terminal of the high-voltage generator via a third fiber optic cable. The third fiber optic cable is used to transmit the high-voltage flat-top signal generated by the microcontroller to the high-voltage generator.

[0056] like Figure 1-3 As shown, when the internal trigger mode is selected, the microcontroller in the central control system controls the multiplexer selector to connect switches S4 and S2, and disconnect switches S1 and S3, through the multiplexer selector drive circuit. At this time, the microcontroller controls the charging signal generator circuit to transmit the internal trigger charging signal to the high-voltage generator through switch S2 of the multiplexer and the second optical fiber. Simultaneously, the microcontroller transmits the internal trigger light emission signal to the thyristor through switch S4 of the multiplexer and the fourth optical fiber, and transmits the power charging high-voltage flat-top signal to the high-voltage generator through the third optical fiber. When the high-voltage generator receives the control signals from the second and third optical fibers, it generates high voltage and charges the energy storage capacitor Cs. The high-voltage state of the energy storage capacitor Cs is as follows: Figure 2As shown, at the falling edge of the internal trigger charging signal, the microcontroller sends an internal trigger light emission signal. The thyristor trigger generates a negative bias positive pulse signal, triggering the thyristor to conduct, thus enabling the subsequent laser to produce laser light. Through internal triggering, actual measurements show that the delay between the rising edge of the charging signal and the laser emission is approximately 20.00346 ms, with jitter of several hundred µs. The delay between the falling edge of the charging signal and the laser emission is approximately 3.46 µs, with jitter of 200 ns. This effectively reduces the time that high voltage is applied to the energy storage capacitor and thyristor, extending their lifespan.

[0057] like Figure 4-7 As shown, when the external trigger mode is selected, the microcontroller in the central control system controls the multiplexer selector to connect switches S1 and S3, and disconnect switches S4 and S2, through the multiplexer selector drive circuit. At this time, the external trigger charging signal generated by the central control power supply VCC is transmitted to the high-voltage generator via switch S3 of the multiplexer and the second optical fiber line, providing a continuous external trigger charging signal. The microcontroller transmits the power charging high-voltage flat-top signal to the high-voltage generator via the third optical fiber line. When the high-voltage generator receives the control signals from the second and third optical fibers lines, it generates high voltage and continuously charges the energy storage capacitor Cs. The high-voltage state of the energy storage capacitor Cs is as follows: Figure 4 As shown, the external trigger signal generated by the external trigger signal generator is transmitted to the thyristor trigger via switch S1 of the multiplexer and the first optical fiber line, triggering the output light signal. Upon receiving this signal, the thyristor trigger turns on the thyristor, thereby enabling the subsequent laser to generate laser light. The laser output pulse signal is emitted approximately 706–726 ns after a delay between the external trigger signal and the laser output pulse signal. The laser pulse width is approximately 11–12 ns, with jitter less than 2 ns, achieving low-jitter laser output.

[0058] This external trigger control method provides low jitter control of the trigger signal and the laser pulse. Using this control method, the laser can be configured as an amplifier. After frequency doubling by a solid-state laser, a high-quality, narrow-linewidth seed light is generated and then injected into the amplifier for amplification, thereby obtaining a narrow-linewidth excimer laser in the tens of millijoules range.

[0059] like Figure 1As shown, an excimer laser output system with internal and external trigger control also includes a touchscreen. The touchscreen generates internal or external trigger control signals. The touchscreen's control signal output is connected to a microcontroller to set the central control system to internal or external trigger control. The principle is that the touchscreen selects the laser's internal or external trigger control mode by controlling the microcontroller's RA5 port to output a high or low level. When the RA5 port outputs 5V, switches S1 and S3 of the multiplexer are closed, while switches S4 and S2 are open, selecting the external trigger control mode. When the RA5 port outputs 0V, switches S1 and S3 of the multiplexer are open, while switches S4 and S2 are closed, selecting the internal trigger control mode. In this case, the internal and external trigger control modes are mutually exclusive, avoiding control malfunctions and extending the laser's lifespan.

[0060] The above are merely preferred embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structural transformations made based on the inventive concept of this utility model and the contents of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are included within the patent protection scope of this utility model.

Claims

1. An excimer laser output system with internal and external triggering control, characterized in that: It includes a central control system, a high-voltage switch trigger, a high-voltage generator, a high-voltage switch, and a laser generation unit; The grounding terminal of the high-voltage switch trigger is connected to the grounding terminal of the high-voltage switch, and the control output terminal of the high-voltage switch trigger is connected to the trigger terminal of the high-voltage switch. The output terminal of the high voltage generator is connected to the collector end of the high voltage switch and the laser generating unit, respectively. The laser generating unit is used to generate laser light. The central control system includes a microcontroller, a charging signal generation circuit, an external trigger signal generator, a central control power supply VCC, switches S1, S2, S3, and S4; The microcontroller is used to generate the internal trigger light emission signal, the charging signal generation circuit drive signal, and the high voltage flat top signal. The charging signal generation circuit is used to generate the internal trigger charging signal, the external trigger signal generator is used to generate the external trigger light emission signal, and the central control power supply VCC is used to generate the external trigger charging signal. The microcontroller's internal trigger output optical signal is connected to one end of switch S4, and the other end of switch S4 is connected to the high-voltage switch trigger. The microcontroller's charging signal generation circuit drive signal output terminal is connected to the charging signal generation circuit, the charging signal generation circuit output terminal is connected to one end of switch S2, and the other end of switch S2 is connected to the high voltage generator. The high-voltage flat-top signal output terminal of the microcontroller is connected to the high-voltage generator; An external trigger signal generator is connected to one end of switch S1, and the other end of switch S1 is connected to a high-voltage switch trigger. The central control power supply VCC is connected to one end of switch S3, and the other end of switch S3 is connected to the high voltage generator.

2. The internal and external triggering control excimer laser output system according to claim 1, characterized in that: Switches S1-S4 are all electronic switches and together form a multiplexer. The central control system also includes a multi-way switch selector drive circuit; The microcontroller is also used to generate multiplexer drive signals. The output terminal of the microcontroller's multiplexer drive signal is connected to the multiplexer drive circuit, the control terminal of switch S1, and the control terminal of switch S3, respectively. The drive terminals of the multiplexer selector drive circuit are connected to the control terminals of switch S2 and switch S4, respectively.

3. The internal and external triggering control excimer laser output system according to claim 2, characterized in that: The multiplexer selector driver circuit includes a transistor Q2. The collector of transistor Q2 is connected to one end of resistor R4, the control terminal of switch S4, and the control terminal of switch S2, respectively. The other end of resistor R4 is connected to the central control power supply VCC. The base of transistor Q2 is connected to the control terminal of switch S1, the control terminal of switch S3, and the multiplexer driver signal output terminal of the microcontroller through resistor R5, respectively. The emitter of transistor Q2 is grounded.

4. The internal and external triggering control excimer laser output system according to claim 2, characterized in that: It also includes a touch screen, which is used to generate internal or external trigger control signals. The touch screen control signal output terminal is connected to the microcontroller so that the central control system is set to internal or external trigger control.

5. The internal and external triggering control excimer laser output system according to claim 1, characterized in that: It also includes fiber optic connectors FB1 and FB4; One end of switch S4 is connected to the fiber optic head FB4, which is located at one of the input ends of the high-voltage switch trigger, via the fourth fiber optic line. The fourth fiber optic line is used to transmit the internal trigger output optical signal generated by the microcontroller to the high-voltage switch trigger. One end of switch S1 is connected to the fiber optic head FB1 located at the other input end of the high-voltage switch trigger via a first fiber optic line. The first fiber optic line is used to transmit the external trigger output optical signal generated by the external trigger signal generator to the high-voltage switch trigger.

6. The internal and external triggering control excimer laser output system according to claim 5, characterized in that: It also includes fiber optic connectors FB11 and FB41; The fourth fiber optic cable is connected to the fiber optic connector FB41 located at one end of switch S4. The first optical fiber is connected to the optical fiber head FB11 located at one end of the switch S1.

7. The internal and external triggering control excimer laser output system according to claim 1, characterized in that: It also includes fiber optic connectors FB2 and FB3; The connection terminals of switches S2 and S3 are connected to the fiber optic head FB2 located at one of the input terminals of the high voltage generator via a second fiber optic cable. The second fiber optic cable is used to transmit the internal trigger charging signal generated by the charging signal generation circuit or the external trigger charging signal generated by the central control power supply VCC to the high voltage generator. The high-voltage flat-top signal output terminal of the microcontroller is connected to the fiber optic connector FB3 located at another input terminal of the high-voltage generator via a third fiber optic cable. The third fiber optic cable is used to transmit the high-voltage flat-top signal generated by the microcontroller to the high-voltage generator.

8. The internal and external triggering control excimer laser output system according to claim 7, characterized in that: It also includes fiber optic connectors FB21 and FB31; The second optical fiber is connected to the optical fiber head FB21 located at the connection end of switch S2 and switch S3. The third fiber optic cable is connected to the fiber optic connector FB31 located at the high-voltage flat-top signal output end of the microcontroller.

9. A system for controlling excimer laser output via internal and external triggering according to any one of claims 1-8, characterized in that: The high-voltage switch is a thyristor, and the high-voltage switch trigger is a thyristor trigger.

10. The internal and external triggering control excimer laser output system according to claim 8, characterized in that: The laser generating unit includes an energy storage capacitor Cs, an inductor Ls, a discharge capacitor Cd, a cathode electrode, and an anode electrode; The output terminal of the high voltage generator is connected to one end of the energy storage capacitor Cs. The other end of the energy storage capacitor Cs is connected to one end of the inductor Ls, one end of the discharge capacitor Cd, and the cathode electrode, respectively. The other end of the inductor Ls, the other end of the discharge capacitor Cd, and the anode electrode are grounded.

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