Contact separation type friction nanometer generator and air purification device

By designing a three-layer dielectric layer and a shared electrode layer, and combining it with nanofiber membranes prepared by electrospinning technology, the output efficiency and energy utilization of triboelectric nanogenerators are improved. This solves the problem of low efficiency of contact-separated triboelectric nanogenerators in a single vibration cycle, making it suitable for air purification and wearable products.

CN223798140UActive Publication Date: 2026-01-13CHONGQING NORMAL UNIVERSITY
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Patent Information

Application Number
CN202423286749.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-31
Publication Date
2026-01-13
Estimated Expiration
2034-12-31

AI Technical Summary

Technical Problem

Existing contact-separated triboelectric nanogenerators have low output efficiency in a single vibration cycle, and the application of high-performance materials is costly.

Method used

The design employs a three-layer dielectric layer and a shared electrode layer to integrate two contact-separated TENGs into one TENG. The output efficiency is improved through two contact and separation cycles, and a nanofiber membrane prepared by electrospinning technology is used to increase the specific surface area.

Benefits of technology

It outputs twice the amount of charge in the same amount of time compared to traditional contact-separated TENGs, reducing costs and improving energy efficiency, making it suitable for wearable products and air purification devices.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a contact separation type friction nanometer generator and an air purification device. The contact separation type friction nanometer generator comprises a dielectric assembly and an electrode assembly. The dielectric component comprises a first dielectric layer, two second dielectric layers and a third dielectric layer which are sequentially arranged from top to bottom; the electrode assembly comprises a first electrode layer, a second electrode layer and a third electrode layer, the first dielectric layer is arranged on the lower surface of the first electrode layer, and the third dielectric layer is arranged on the upper surface of the third electrode layer. The two second dielectric layers are respectively arranged on the upper surface and the lower surface of the second electrode layer and are respectively opposite to the first dielectric layer and the third dielectric layer; the first electrode layer is electrically connected with the second electrode layer, and the third electrode layer is electrically connected with the second electrode layer. According to the utility model, the contact-separation frequency of the friction nanometer generator is improved in a low-cost manner, so that the output performance of the friction nanometer generator is improved.
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Description

Technical Field

[0001] This utility model relates to the field of triboelectric nanogenerator and air purification technology, and in particular to a contact-separation triboelectric nanogenerator and air purification device. Background Technology

[0002] Triboelectric nanogenerators (TENGs) can harvest energy from nature and convert mechanical energy into electrical energy to achieve self-powered operation. At the same time, TENGs are small in size and easy to move, and can be used in a variety of scenarios. However, the contact-separated TENGs currently in use generally consist of only one set of positive and negative electrode films (a typical contact-separated TENG generally consists of two dielectric layers for friction, two electrode layers for current conduction, and a connected load). In a single "vibration" cycle, the positive and negative electrode films only complete one "approach-contact-distance" process, and there is still considerable room for improvement in the output efficiency of the device.

[0003] Existing research indicates that optimizing the mechanical design and material selection of triboelectric energies (TENGs) can improve output performance. For example, using high-performance dielectric materials, such as metal-organic framework (MOF)-derived nanoporous carbon materials, can increase the output power density of TENGs. Furthermore, adding an additional charge transport layer between the triboelectric layer and the charge trapping layer can further suppress surface charge decay and increase output charge density. However, all of the above approaches suffer from the challenge of high application costs.

[0004] The aforementioned technical issues need to be addressed. Utility Model Content

[0005] In view of this, the purpose of this utility model is to provide a contact-separation triboelectric nanogenerator and an air purification device using the triboelectric nanogenerator, so as to improve the contact-separation frequency of the triboelectric nanogenerator in a low-cost manner, thereby improving its output performance.

[0006] To achieve the above objectives, on the one hand, this utility model provides a contact-separated triboelectric nanogenerator, including a dielectric component and an electrode component;

[0007] The dielectric component includes a first dielectric layer, two second dielectric layers and a third dielectric layer arranged sequentially from top to bottom;

[0008] The electrode assembly includes a first electrode layer, a second electrode layer and a third electrode layer. The first dielectric layer is disposed on the lower surface of the first electrode layer, the third dielectric layer is disposed on the upper surface of the third electrode layer, and two second dielectric layers are respectively disposed on the upper and lower surfaces of the second electrode layer and are respectively disposed opposite to the first dielectric layer and the third dielectric layer.

[0009] The first electrode layer and the second electrode layer are electrically connected, as are the third electrode layer and the second electrode layer.

[0010] As a further improvement to the technical solution of this utility model, the first dielectric layer, the second dielectric layer and the third dielectric layer are all nanofiber membranes prepared by electrospinning technology.

[0011] As a further improvement to the technical solution of this utility model, the first dielectric layer and / or the third dielectric layer are polyvinylidene fluoride thin film structures.

[0012] As a further improvement to the technical solution of this utility model, the second dielectric layer is a polyamide thin film structure.

[0013] As a further improvement to the technical solution of this utility model, the contact-separated triboelectric nanogenerator also includes a support; the support includes an upper support plate, a lower support plate, and a connecting column connecting the upper support plate and the lower support plate; the first electrode layer is fixed to the lower end face of the upper support plate, the third electrode layer is fixed to the upper end face of the lower support plate, and the left and right ends of the second electrode layer are connected to the connecting column.

[0014] On the other hand, this utility model also provides an air purification device, comprising:

[0015] Carbon fiber, after acquiring an electric charge, undergoes a corona discharge on its surface, generating negative air ions.

[0016] A contact-separated triboelectric nanogenerator, comprising dielectric and electrode components, provides charge to carbon fibers; and

[0017] A drive mechanism is used to drive the corresponding dielectric components to make contact and separate.

[0018] The dielectric component includes a first dielectric layer, two second dielectric layers, and a third dielectric layer arranged sequentially from top to bottom; the electrode component includes a first electrode layer, a second electrode layer, and a third electrode layer, the first dielectric layer being disposed on the lower surface of the first electrode layer, the third dielectric layer being disposed on the upper surface of the third electrode layer, and the two second dielectric layers being disposed on the upper and lower surfaces of the second electrode layer respectively and being disposed opposite to the first dielectric layer and the third dielectric layer respectively; the first electrode layer and the second electrode layer are electrically connected and connected to the driving circuit of the carbon fiber.

[0019] As a further improvement to the technical solution of this utility model, the first dielectric layer, the second dielectric layer and the third dielectric layer are all nanofiber membranes prepared by electrospinning technology.

[0020] As a further improvement to the technical solution of this utility model, the first dielectric layer and / or the third dielectric layer are polyvinylidene fluoride thin film structures; the second dielectric layer is a polyamide thin film structure.

[0021] As a further improvement to the technical solution of this utility model, the contact-separation triboelectric nanogenerator also includes a support; the support includes an upper support plate, a lower support plate, and a connecting column connecting the upper support plate and the lower support plate; the first electrode layer is fixed to the lower end face of the upper support plate, and the carbon fiber is fixed to the upper end face of the upper support plate; the third electrode layer is fixed to the upper end face of the lower support plate, and the left and right ends of the second electrode layer are connected to the connecting column.

[0022] As a further improvement to the technical solution of this utility model, the driving mechanism is a fan structure, which drives the second dielectric layer to move toward the first dielectric layer or the third dielectric layer by conveying gas.

[0023] Compared with the prior art, the present invention has the following beneficial technical effects:

[0024] This invention provides a contact-separation triboelectric nanogenerator (TENG) that integrates two contact-separation TENGs into one TENG by sharing an electrode layer, thereby improving output efficiency. Specifically, by connecting two second dielectric layers to the same second electrode layer, one second dielectric layer and the first dielectric layer form a first contact-separation TENG, and the other second dielectric layer and the first dielectric layer form a second contact-separation TENG. During a single up-and-down "vibration" cycle of the middle second electrode layer, the device contacts and separates from the first and third dielectric layers respectively, thus completing two output cycles. In the same amount of time, the device can output twice the charge of a traditional contact-separation TENG, resulting in higher energy utilization and greater economic benefits. In summary, this triboelectric nanogenerator improves the contact-separation frequency of the triboelectric nanogenerator at a lower cost, thereby improving its output performance.

[0025] The air purification device provided by this utility model, since it uses the aforementioned contact separation triboelectric nanogenerator, naturally also possesses the aforementioned beneficial effects.

[0026] Advantages of the present invention in additional aspects will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0027] Figure 1 A schematic diagram of the structure of a contact-separation triboelectric nanogenerator provided by this utility model;

[0028] Figure 2A schematic diagram illustrating the working principle of a contact-separation triboelectric nanogenerator provided by this utility model;

[0029] Figure 3 A schematic diagram of the structure of an air purification device provided by this utility model;

[0030] Figure 4 A schematic diagram illustrating the working principle of an air purification device provided by this utility model. Detailed Implementation

[0031] The technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings.

[0032] Example 1

[0033] like Figure 1 As shown: This embodiment provides a contact-separated triboelectric nanogenerator, which includes a dielectric component and an electrode component, and its power generation principle is the same as that of the prior art.

[0034] The dielectric component includes a first dielectric layer 11, two second dielectric layers 12, and a third dielectric layer 13 arranged sequentially from top to bottom; "top" and "bottom" are used interchangeably. Figure 1 The directions shown are for reference.

[0035] The electrode assembly includes a first electrode layer 21, a second electrode layer 22, and a third electrode layer 23, each of which can be an aluminum plate structure; the first dielectric layer 11 is disposed on the lower surface of the first electrode layer 21, the third dielectric layer 13 is disposed on the upper surface of the third electrode layer 23, and the two second dielectric layers 12 are respectively disposed on the upper and lower surfaces of the second electrode layer 22 and are respectively disposed opposite to the first dielectric layer 11 and the third dielectric layer 13; the first electrode layer 21 and the second electrode layer 22 are electrically connected to each other and the third electrode layer 23 and the second electrode layer 22 respectively (connected to a load or short circuit via wires).

[0036] This embodiment provides a contact-separation triboelectric nanogenerator (TENG) that integrates two contact-separation TENGs into one TENG by sharing an electrode layer, thereby improving output efficiency. Specifically, by connecting two second dielectric layers 12 to the same second electrode layer 22, one second dielectric layer 12 and the first dielectric layer 11 form a first contact-separation TENG, and the other second dielectric layer 12 and the first dielectric layer 11 form a second contact-separation TENG. During a single up-and-down "vibration" cycle of the middle second electrode layer 22, the TENG contacts and separates from the first dielectric layer 11 and the third dielectric layer 13, respectively, thus completing two output cycles. In the same amount of time, the device can output twice the charge of a traditional contact-separation TENG, resulting in higher energy utilization and greater economic benefits. In summary, this triboelectric nanogenerator improves the contact-separation frequency of the triboelectric nanogenerator at a lower cost, thereby improving its output performance.

[0037] This embodiment provides a contact-separation triboelectric nanogenerator, the overall principle of which is as follows: Figure 2 As shown, in state I, the upper second dielectric layer 12 is in contact with the first dielectric layer 11, and two charges are transferred from the second electrode layer 22 to the first electrode layer 21. At the same time, two charges in the third electrode layer 23 are transferred to the second electrode layer 22 through an external circuit. In state II, the second electrode layer 22 and the second dielectric layer 12 move downward as a whole, and two electrons are transferred from the first electrode layer 21 to the second electrode layer 22 through an external circuit. At the same time, two electrons in the second electrode layer 22 are transferred to the third electrode layer 23. In state IIII, the lower second dielectric layer 12 is in contact with the third dielectric layer 13, and two electrons are transferred from the first electrode layer 21 to the second electrode layer 22 through an external circuit. At the same time, two electrons in the second electrode layer 22 are transferred to the third electrode layer 23. In state IV, the second electrode layer 22 and the second dielectric layer 12 move upward as a whole, and two charges are transferred from the second electrode layer 22 to the first electrode layer 21. At the same time, two charges in the lower third electrode layer 23 are transferred to the second electrode layer 22 through an external circuit.

[0038] The overall movement of the second electrode layer 22 and the second dielectric layer 12 can be achieved through existing driving structures, such as wind power, as long as their periodic movement can generate electricity.

[0039] In this embodiment, the first dielectric layer 11, the second dielectric layer 12, and the third dielectric layer 13 are all nanofiber films prepared using electrospinning technology. The principle of electrospinning is the same as that of existing technologies and will not be described in detail here. Electrospinning technology can obtain friction materials with suitable thickness, which can greatly extend the life of the device while taking into account the output efficiency. At the same time, the spun film has a larger specific surface area and a larger effective friction area, which further improves the output efficiency of the device. By selecting the friction material with the most suitable thickness, the problems of insufficient mechanical strength of the film leading to plastic deformation and low device output caused by insufficient induced charge on the back electrode of the thick film are avoided.

[0040] Specifically, the first dielectric layer 11 and the third dielectric layer 13 can be polyvinylidene fluoride (PVDF) thin film structures, possessing excellent mechanical properties, biocompatibility, and dielectric strength. PVDF fiber membranes prepared by electrospinning have good breathability, making them an ideal choice for wearable products. PVDF can be polarized under high voltage to obtain a β-crystalline phase, exhibiting good piezoelectric properties.

[0041] The second dielectric layer 12 can be a polyamide (PA) film structure; PA has good electrospinning properties, and the diameter of electrospun PA nanofibers can usually be 80-200nm, which is relatively fine among electrospinning materials. This extremely small fiber diameter gives PA nanofiber membranes smaller pore size, larger specific surface area and adsorption performance, giving PA nanofiber filter materials great performance advantages in high-precision filtration.

[0042] In this embodiment, the contact-separated triboelectric nanogenerator further includes a support; the support includes an upper support plate 31, a lower support plate 32, and a connecting column 33 connecting the upper support plate 31 and the lower support plate 32; the first electrode layer 21 is fixed to the lower end face of the upper support plate 31, the third electrode layer 23 is fixed to the upper end face of the lower support plate 32, and the left and right ends of the second electrode layer 22 are connected to the connecting column 33.

[0043] The bracket as a whole can be made of acrylic material; the upper support plate 31 and the lower support plate 32 can be symmetrical; through holes can be opened in the second electrode layer 22 and the second dielectric layer 12 for the connecting post 33 to pass through, thereby realizing its positioning and effectively preventing it from deviating from the movement path.

[0044] Example 2

[0045] This embodiment provides an air purification device, such as... Figure 3 As shown, it includes:

[0046] 4. Carbon fiber, after acquiring an electric charge, undergoes a corona phenomenon on its surface, generating negative air ions 5.

[0047] The contact-separated triboelectric nanogenerator shown in Example 1 includes a dielectric component and an electrode component, which provide charge to the carbon fiber 4. The TENG can generate a high voltage, and when connected to the carbon fiber 4, it can effectively convert the output charge into negative air ions. These negative ions can remove particulate matter from the air, oxidize and decompose volatile organic compounds, and inhibit bacteria, thereby purifying the air.

[0048] And a drive mechanism 6, used to drive the corresponding dielectric components to make contact and separate.

[0049] The dielectric assembly includes a first dielectric layer 11, two second dielectric layers 12, and a third dielectric layer 13 arranged sequentially from top to bottom; the electrode assembly includes a first electrode layer 21, a second electrode layer 22, and a third electrode layer 23. The first dielectric layer 11 is disposed on the lower surface of the first electrode layer 21, and the third dielectric layer 13 is disposed on the upper surface of the third electrode layer 23. The two second dielectric layers 12 are respectively disposed on the upper and lower surfaces of the second electrode layer 22 and are respectively disposed opposite to the first dielectric layer 11 and the third dielectric layer 13; the first electrode layer 21 and the second electrode layer 22 are electrically connected to each other and connected to the driving circuit of the carbon fiber 4.

[0050] This contact-separation triboelectric nanogenerator integrates two contact-separation TENGs into one TENG by sharing an electrode layer to improve output efficiency. Specifically, by connecting two second dielectric layers 12 to the same second electrode layer 22, one second dielectric layer 12 and the first dielectric layer 11 form a first contact-separation TENG, and the other second dielectric layer 12 and the first dielectric layer 11 form a second contact-separation TENG. During a single up-and-down "vibration" cycle of the middle second electrode layer 22, it contacts and separates from the first dielectric layer 11 and the third dielectric layer 13 respectively, thereby completing two output cycles. In the same amount of time, the device can output twice the charge of a traditional contact-separation TENG, resulting in higher energy utilization and greater economic benefits. In summary, this triboelectric nanogenerator improves the contact-separation frequency of the triboelectric nanogenerator at a lower cost, thereby improving its output performance.

[0051] This embodiment provides a contact-separation triboelectric nanogenerator, the overall principle of which is as follows: Figure 2 and Figure 4As shown, in state I, the upper second dielectric layer 12 is in contact with the first dielectric layer 11, and two charges are transferred from the second electrode layer 22 to the first electrode layer 21. At the same time, two charges in the third electrode layer 23 are transferred to the second electrode layer 22 through an external circuit. In state II, the second electrode layer 22 and the second dielectric layer 12 move downward as a whole, and two electrons are transferred from the first electrode layer 21 to the second electrode layer 22 through an external circuit. At the same time, two electrons in the second electrode layer 22 are transferred to the third electrode layer 23. In state IIII, the lower second dielectric layer 12 is in contact with the third dielectric layer 13, and two electrons are transferred from the first electrode layer 21 to the second electrode layer 22 through an external circuit. At the same time, two electrons in the second electrode layer 22 are transferred to the third electrode layer 23. In state IV, the second electrode layer 22 and the second dielectric layer 12 move upward as a whole, and two charges are transferred from the second electrode layer 22 to the first electrode layer 21. At the same time, two charges in the lower third electrode layer 23 are transferred to the second electrode layer 22 through an external circuit.

[0052] The overall movement of the second electrode layer 22 and the second dielectric layer 12 can be achieved through existing driving structures, such as wind power, as long as their periodic movement can generate electricity.

[0053] In this embodiment, the first dielectric layer 11, the second dielectric layer 12, and the third dielectric layer 13 are all nanofiber films prepared using electrospinning technology. The principle of electrospinning is the same as that of existing technologies and will not be described in detail here. Electrospinning technology can obtain friction materials with suitable thickness, which can greatly extend the life of the device while taking into account the output efficiency. At the same time, the spun film has a larger specific surface area and a larger effective friction area, which further improves the output efficiency of the device. By selecting the friction material with the most suitable thickness, the problems of insufficient mechanical strength of the film leading to plastic deformation and low device output caused by insufficient induced charge on the back electrode of the thick film are avoided.

[0054] Specifically, the first dielectric layer 11 and the third dielectric layer 13 can be polyvinylidene fluoride (PVDF) thin film structures, possessing excellent mechanical properties, biocompatibility, and dielectric strength. PVDF fiber membranes prepared by electrospinning have good breathability, making them an ideal choice for wearable products. PVDF can be polarized under high voltage to obtain a β-crystalline phase, exhibiting good piezoelectric properties.

[0055] The second dielectric layer 12 can be a polyamide (PA) film structure; PA has good electrospinning properties, and the diameter of electrospun PA nanofibers can usually be 80-200nm, which is relatively fine among electrospinning materials. This extremely small fiber diameter gives PA nanofiber membranes smaller pore size, larger specific surface area and adsorption performance, giving PA nanofiber filter materials great performance advantages in high-precision filtration.

[0056] In this embodiment, the contact-separated triboelectric nanogenerator further includes a support; the support includes an upper support plate 31, a lower support plate 32, and a connecting column 33 connecting the upper support plate 31 and the lower support plate 32; the first electrode layer 21 is fixed to the lower end face of the upper support plate 31, the third electrode layer 23 is fixed to the upper end face of the lower support plate 32, and the left and right ends of the second electrode layer 22 are connected to the connecting column 33.

[0057] The bracket as a whole can be made of acrylic material; the upper support plate 31 and the lower support plate 32 can be symmetrical; through holes can be opened in the second electrode layer 22 and the second dielectric layer 12 for the connecting post 33 to pass through, thereby realizing its positioning and effectively preventing it from deviating from the movement path.

[0058] In this embodiment, the driving mechanism 6 can be a fan structure, which drives the second dielectric layer 12 to move closer to the first dielectric layer 11 or the third dielectric layer 13 by the conveyed gas (specifically, the second dielectric layer 12 can be moved up and down by the periodically flowing gas). At this time, a fixing clip 7 can be connected to the lower end of the lower support plate 32, and the air purification device can be positioned on the gas outlet side of the fan by the fixing clip 7. Of course, other reasonable driving mechanisms can also be used, as long as they can achieve the periodic movement of the second dielectric layer 12.

[0059] The above descriptions are merely embodiments of this utility model, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of this utility model, and these should also be considered within the scope of protection of this utility model. These modifications will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application shall be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. A contact-separated triboelectric nanogenerator, comprising a dielectric component and an electrode component; characterized in that: The dielectric component includes a first dielectric layer, two second dielectric layers and a third dielectric layer arranged sequentially from top to bottom; The electrode assembly includes a first electrode layer, a second electrode layer and a third electrode layer. The first dielectric layer is disposed on the lower surface of the first electrode layer, the third dielectric layer is disposed on the upper surface of the third electrode layer, and two second dielectric layers are respectively disposed on the upper and lower surfaces of the second electrode layer and are respectively disposed opposite to the first dielectric layer and the third dielectric layer. The first electrode layer and the second electrode layer are electrically connected, as are the third electrode layer and the second electrode layer.

2. The contact-separation triboelectric nanogenerator according to claim 1, characterized in that: The first dielectric layer, the second dielectric layer, and the third dielectric layer are all nanofiber membranes prepared using electrospinning technology.

3. The contact-separation triboelectric nanogenerator according to claim 1, characterized in that: The first dielectric layer and / or the third dielectric layer are polyvinylidene fluoride thin film structures.

4. The contact-separation triboelectric nanogenerator according to claim 1, characterized in that: The second dielectric layer is a polyamide thin film structure.

5. A contact-separation triboelectric nanogenerator according to any one of claims 1 to 4, characterized in that: The contact-separation triboelectric nanogenerator also includes a support frame; The bracket includes an upper support plate, a lower support plate, and a connecting column connecting the upper support plate and the lower support plate; the first electrode layer is fixed to the lower end face of the upper support plate, the third electrode layer is fixed to the upper end face of the lower support plate, and the left and right ends of the second electrode layer are connected to the connecting column.

6. An air purification device, comprising: Carbon fiber, after acquiring an electric charge, undergoes a corona discharge on its surface, generating negative air ions. A contact-separated triboelectric nanogenerator, comprising dielectric and electrode components, provides charge to carbon fibers; as well as A drive mechanism is used to drive the corresponding dielectric components to make contact and separate. The dielectric component is characterized in that it comprises a first dielectric layer, two second dielectric layers and a third dielectric layer disposed sequentially from top to bottom; The electrode assembly includes a first electrode layer, a second electrode layer and a third electrode layer. The first dielectric layer is disposed on the lower surface of the first electrode layer, the third dielectric layer is disposed on the upper surface of the third electrode layer, and two second dielectric layers are respectively disposed on the upper and lower surfaces of the second electrode layer and are respectively disposed opposite to the first dielectric layer and the third dielectric layer. The first electrode layer and the second electrode layer, as well as the third electrode layer and the second electrode layer, are electrically connected and connected to the carbon fiber drive circuit, respectively.

7. An air purification device according to claim 6, characterized in that: The first dielectric layer, the second dielectric layer, and the third dielectric layer are all nanofiber membranes prepared using electrospinning technology.

8. An air purification device according to claim 6, characterized in that: The first dielectric layer and / or the third dielectric layer are polyvinylidene fluoride thin film structures; the second dielectric layer is a polyamide thin film structure.

9. An air purification device according to claim 6, characterized in that: The contact-separation triboelectric nanogenerator also includes a support frame. The bracket includes an upper support plate, a lower support plate, and a connecting column connecting the upper support plate and the lower support plate; the first electrode layer is fixed to the lower end face of the upper support plate, and the carbon fiber is fixed to the upper end face of the upper support plate; the third electrode layer is fixed to the upper end face of the lower support plate, and the left and right ends of the second electrode layer are connected to the connecting column.

10. An air purification device according to any one of claims 6 to 9, characterized in that: The driving mechanism is a fan structure, which drives the second dielectric layer to move closer to the first dielectric layer or the third dielectric layer by the gas it delivers.