Silane explosion-proof reaction kettle

Abstract

The utility model discloses a silane explosion-proof reaction kettle, the top of a kettle body is provided with an overhead magnetic stirring unit, one side of the overhead magnetic stirring unit is provided with an explosion-proof pressure relief unit, the explosion-proof pressure relief unit comprises a pressure relief valve and a rupture disk, and the other side of the overhead magnetic stirring unit is provided with a feeding pipe; a material / impurity outlet communicated with an inner cavity of the kettle body is formed in the bottom of the kettle body, and a heating jacket is arranged on the outer side of the kettle body; the pressure relief capability of the reaction kettle is enhanced through the novel rupture disk, and the sealing performance of the reaction kettle is improved, so that silane leakage or contact with air is more effectively prevented, the structural form of the stirrer is innovated, the reaction kettle can simultaneously adapt to various different requirements of high shearing, high viscosity or mixing and the like, a wider fluid area is covered, dead zones are reduced, and the service life of the reaction kettle is prolonged. Through the efficient stirring effect, the local temperature gradient is eliminated, uniform distribution of heat is ensured, and finally, the temperature control capability of silane is further improved through accurate matching of the heating jacket and the thermometer.

Description

TECHNICAL FIELD

[0001] The utility model relates to a reaction kettle, especially a silane explosion-proof reaction kettle. BACKGROUND

[0002] Silane is a kind of gas with high activity and high risk, which is easy to form explosive mixture with air, so it must be isolated from oxygen and moisture in the reaction kettle to prevent accidental explosion. Silane has different effects in different processing fields. For example, in the semiconductor industry, silane is mainly used to prepare silicon film on the wafer surface. In order to ensure the smoothness and standardization of the preparation process, the reaction kettle for the preparation of semiconductor silane needs to provide a vacuum environment and accurately control the decomposition rate and deposition uniformity of silane. In the field of chemical products, the preparation of silane coupling agent needs to avoid the interference of moisture to ensure the stable combination of organic-inorganic interface. However, no matter which field it is applied to, the reaction kettle must have good explosion-proof performance.

[0003] The explosion-proof performance of silane reaction kettle on the market is generally poor, and most of them are general reaction kettles of conventional design, which replace air by injecting inert gas to prevent silane explosion. However, since temperature has a great influence on the stability of silane, the temperature control ability of the existing general reaction kettle of conventional design is limited, which is easy to cause uneven heat transfer and safety hazards to silane processing, and it is also difficult to achieve uniform stirring. In addition, the pressure relief capacity of the reaction kettle and its pipeline is also quite limited. SUMMARY

[0004] In order to solve the above technical problems, the utility model provides a silane explosion-proof reaction kettle.

[0005] In order to solve the above technical problems, the utility model adopts the technical scheme of: a silane explosion-proof reaction kettle, comprising a kettle body formed with an inner cavity, a top-mounted magnetic stirring unit penetrating the kettle body inside and outside is arranged on the top of the kettle body, an explosion-proof pressure relief unit communicating with the inner cavity of the kettle body is arranged on one side of the top-mounted magnetic stirring unit, the explosion-proof pressure relief unit comprises a pressure relief valve and a bursting disc, a feeding pipe communicating with the inner cavity of the kettle body is arranged on the other side of the top-mounted magnetic stirring unit, a discharging / mixing port communicating with the inner cavity of the kettle body is arranged on the bottom of the kettle body, and a heating jacket is arranged on the outside of the kettle body.

[0006] The top-mounted magnetic stirring unit comprises a stirrer in the inner cavity of the kettle body, and the stirrer comprises a stirring shaft, an anchor paddle, a screw paddle, an outer spiral belt paddle and an inner spiral belt paddle are arranged on the stirring shaft.

[0007] The bursting disc comprises a pressure-bearing mounting frame and a notched diaphragm inside the pressure-bearing mounting frame.

[0008] Further, the rupture disc and the explosion-proof pressure relief unit are connected in series, and the rupture disc is located upstream of the pressure relief of the explosion-proof pressure relief unit.

[0009] The pressure-bearing mounting bracket of the rupture disc is located at the root of the explosion-proof pressure relief unit, and a plurality of sealing rings are wound on the outer periphery of the pressure-bearing mounting bracket, and the plurality of sealing rings are in contact with the inner wall of the shell of the explosion-proof pressure relief unit.

[0010] Further, a pressure relief well is formed in the pressure-bearing mounting bracket, the pressure relief well is a hexagonal passage, and a notched diaphragm is arranged in the pressure relief well, and the convex surface of the notched diaphragm faces the inner cavity of the kettle body.

[0011] Further, the top-mounted magnetic stirring unit is located at the center of the kettle body, and the top-mounted magnetic stirring unit comprises a sealing cover seated at the opening of the kettle body, and a chamber is formed in the middle of the sealing cover;

[0012] An outer magnetic steel is arranged in the chamber space above the waist of the sealing cover, and a sealing barrier sleeve is arranged in the outer magnetic steel, the outer magnetic steel and the sealing barrier sleeve are matched in shape, and an inner magnetic steel is arranged in the sealing barrier sleeve and magnetically coupled with the outer magnetic steel.

[0013] Further, the lower end of the sealing barrier sleeve extends radially to form a ring-shaped platform, and the sealing barrier sleeve is connected to the sealing cover by bolts at the platform position.

[0014] Further, the lower part of the inner magnetic steel is connected with a transmission shaft, and sealing spacer rings are arranged on the outer periphery of the upper end and the lower end of the transmission shaft, and the lower free end of the transmission shaft is also connected with the stirring shaft of the stirrer.

[0015] Further, the stirring shaft is vertically arranged, and a plurality of short connecting rods are arranged on the stirring shaft from top to bottom, two short connecting rods with their axes located on the same straight line are arranged at the same horizontal level, and a long connecting rod coaxially extending outward is connected to each short connecting rod through a flange.

[0016] Further, the number of anchor propellers is two, and the two anchor propellers are respectively located on the two lowermost long connecting rods.

[0017] The screw blades are spirally arranged on the stirring shaft from top to bottom.

[0018] The number of outer spiral belt blades is two, and the two outer spiral belt blades are spirally arranged on the edge ends of the two uppermost long connecting rods from top to bottom.

[0019] The number of inner spiral belt blades is two, and the two inner spiral belt blades are spirally arranged from top to bottom at the middle positions of the two uppermost long connecting rods.

[0020] Further, the heating jacket is arranged in the form of surrounding the kettle body outside a circle, and the heating jacket is provided with the first uniform heating medium discharge port and the second uniform heating medium discharge port at the same horizontal height.

[0021] Further, the kettle body is further provided with a temperature table, the kettle body is in contact with the ground through the supporting leg, and the discharge / mixed port is provided with a stop valve.

[0022] A silane explosion-proof reaction kettle, by a new type of rupture disc, enhances the pressure relief capacity of the reaction kettle, and improves the sealing performance, thereby more effectively preventing silane leakage or contact with air, the structure of the innovative stirrer can simultaneously adapt to high shear, high viscosity or mixing and other different needs, covers a wider range of fluid areas, reduces dead zones, through efficient stirring effect, eliminates local temperature gradient, ensures uniform distribution of heat, finally, through the precise cooperation of the heating jacket and the temperature table, we further improve the temperature control capacity of silane. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is a cross-sectional structure schematic view of the utility model.

[0024] Figure 2 It is a structure schematic view of the rupture disc of the utility model.

[0025] Figure 3 It is Figure 1 It is a structure enlarged view of A in the middle.

[0026] Figure 4 It is a structure schematic view of the stirrer of the utility model.

[0027] Figure 5 It is a top view of the stirrer of the utility model.

[0028] In the figure: 1, kettle body; 2, top-mounted magnetic stirring unit; 3, explosion-proof pressure relief unit; 4, feed pipe; 5, discharge / mixed port; 6, temperature table; 7, heating jacket; 8, first uniform heating medium feed port; 9, second uniform heating medium feed port; 10, first uniform heating medium discharge port; 11, second uniform heating medium discharge port; 12, stop valve; 13, supporting leg; 14, rupture disc; 15, pressure-bearing mounting frame; 16, pressure relief wellhead; 17, notched diaphragm; 18, sealing ring; 19, sealing cover; 20, outer magnetic steel; 21, sealing barrier sleeve; 22, bolt; 23, inner magnetic steel; 24, sealing barrier ring; 25, transmission shaft; 26, stirring shaft; 27, short connecting rod; 28, flange; 29, long connecting rod; 30, anchor propeller; 31, screw propeller; 32, outer spiral belt propeller; 33, inner spiral belt propeller. DETAILED DESCRIPTION

[0029] The utility model will be further explained in detail below in combination with the drawings and specific embodiments.

[0030] As Figures 1-5 The embodiment relates to a silane explosion-proof reaction kettle, compared with conventional reaction kettles on the market, the embodiment comprehensively improves the explosion-proof capability of the disclosed reaction kettle by enhancing the heat uniformity control, upgrading the pressure relief capability, and strengthening the stirring effect.

[0031] As Figure 1 As shown, the kettle body 1 is formed with an inner cavity, the top of the kettle body 1 is provided with a top-mounted magnetic stirring unit 2 penetrating the kettle body 1 on both sides, the top-mounted magnetic stirring unit 2 is used for strengthening the stirring effect of the reaction kettle, one side of the top-mounted magnetic stirring unit 2 is equipped with an explosion-proof pressure relief unit 3 communicating with the inner cavity of the kettle body 1, the explosion-proof pressure relief unit 3 is used for improving the pressure relief capability of the reaction kettle, the explosion-proof pressure relief unit 3 specifically comprises a pressure relief valve and a bursting disc 14, the other side of the top-mounted magnetic stirring unit 2 is equipped with a feeding pipe 4 communicating with the inner cavity of the kettle body 1, the feeding pipe 4 is used for adding silane raw materials into the inner cavity of the kettle body 1, the bottom of the kettle body 1 is provided with a discharge / mixed port 5 communicating with the inner cavity thereof, the outer side of the kettle body 1 is provided with a heating jacket 7, the heating jacket 7 is used for enhancing the heat uniformity control of the reaction kettle.

[0032] Preferably, as Figure 3 As shown, the top-mounted magnetic stirring unit 2 is located at the central position of the kettle body 1, the top-mounted magnetic stirring unit 2 comprises a sealing cover 19 seated at the opening of the kettle body 1, the middle part of the sealing cover 19 is formed with a cavity, the maximum diameters of the upper and lower parts of the sealing cover 19 are different, specifically, the maximum diameter of the lower half of the sealing cover 19 is larger, which is conducive to strengthening the connection stability of the top-mounted magnetic stirring unit 2 and the kettle body 1.

[0033] Further, as Figure 1 And 3 As shown, the cavity space above the waist of the sealing cover 19 is equipped with an outer magnetic steel 20, the outer magnetic steel 20 is equipped with a sealing barrier sleeve 21 inside, the shapes of the outer magnetic steel 20 and the sealing barrier sleeve 21 are matched, the inside of the sealing barrier sleeve 21 is provided with an inner magnetic steel 23 magnetically coupled with the outer magnetic steel 20, therefore, it can be understood that the stirring system adopted by the embodiment is specifically a magnetic coupling stirring, the stirring effect is better, and there is no mechanical friction, which can fundamentally eliminate the possibility of explosion of silane due to mechanical friction and ensure safety.

[0034] As Figure 3 As shown, the lower end of the sealing barrier sleeve 21 extends radially to form a ring of platform edges, the sealing barrier sleeve 21 is connected with the sealing cover 19 at the platform edge position through bolts 22, on the one hand, the installation stability of the sealing barrier sleeve 21 is ensured, on the other hand, the spacing effect of the sealing barrier sleeve 21 is ensured;

[0035] The lower part of the inner magnetic steel 23 is connected with a transmission shaft 25, and the outer periphery of the upper end and the lower end of the transmission shaft 25 is respectively provided with a sealing group spacer ring 24. Compared with the traditional form, two sealing group spacer rings 24 are arranged in the embodiment, and the blocking ability and the protection effect are stronger. The lower free end of the transmission shaft 25 is also connected with a stirring shaft 26 of a stirrer. It should be noted that the connection mode of the transmission shaft 25 and the stirring shaft 26 is prior art, and the embodiment does not limit the connection mode of the two, such as hard connection, shaft coupling connection and the like.

[0036] The top magnetic stirring unit 2 includes a stirrer in the inner cavity of the kettle body 1, as shown in the figure. Figure 4 As shown in the figure, the stirrer includes a stirring shaft 26, and the stirring shaft 26 is vertically arranged. In order to strengthen the stirring effect of the embodiment, the stirring shaft 26 is provided with an anchor paddle 30, a screw paddle 31, an outer spiral belt paddle 32 and an inner spiral belt paddle 33. Through the above four different forms of paddles, different requirements such as high shear, high viscosity or mixing can be met at the same time, a wider fluid area is covered, and a dead zone is reduced. In addition, the stirrer of the embodiment can eliminate local temperature gradient through good stirring effect, and ensure uniform distribution of heat.

[0037] As shown in the figure, Figure 4 The stirring shaft 26 is provided with a plurality of short connecting rods 27 from top to bottom. Two short connecting rods 27 with the same axis are arranged on the same plane, that is, the short connecting rods 27 on the same plane are arranged in groups, and the included angle of the two corresponding short connecting rods 27 is 180°. Each short connecting rod 27 is connected with a long connecting rod 29 extending coaxially outward through a flange 28.

[0038] Preferably, the number of anchor paddles 30 is two, and the two anchor paddles 30 are respectively located on the lowermost two long connecting rods 29. The anchor paddle 30 is used to optimize the stirring effect of the silane stirring medium at the bottom of the kettle body 1. The screw paddles 31 are spirally arranged on the stirring shaft 26 from top to bottom, so as to strengthen the stirring effect near the rotating shaft of the stirring shaft 26. The number of outer spiral belt paddles 32 is two, and the two outer spiral belt paddles 32 are spirally arranged on the edge end of the uppermost two long connecting rods 2 from top to bottom, so as to strengthen the fluid area coverage. The number of inner spiral belt paddles 33 is two, and the two inner spiral belt paddles 33 are spirally arranged on the middle position of the uppermost two long connecting rods 29 from top to bottom, so as to strengthen the stirring effect of the middle part of the fluid area.

[0039] As shown in the figure, Figure 5 From the top view, the screw paddles 31 are circular, the two outer spiral belt paddles 32 are circular together, and the two inner spiral belt paddles 33 are circular together.

[0040] As shown in the figure, Figure 2As shown, the rupture disc 14 includes a pressure-bearing mounting frame 15 and a notched diaphragm 17 inside it. The notched diaphragm 17 selected in this embodiment is cross-shaped notching. In actual application scenarios, different types of notched diaphragms 17 can be replaced according to pressure standards. The rupture disc 14 is connected in series with the explosion-proof pressure relief unit 3, and the rupture disc 14 is located upstream of the pressure relief of the explosion-proof pressure relief unit 3. It should be noted that the explosion-proof pressure relief unit 3 itself is an existing pressure relief valve.

[0041] Preferably, the pressure-bearing mounting frame 15 of the rupture disc 14 is located at the root of the explosion-proof pressure relief unit 3. Compared with traditional rupture discs such as the FIKE brand, the rupture disc of this embodiment is fully built-in, has better sealing effect, and is more suitable for silane reaction kettles. Then, a plurality of sealing rings 18 are wound on the outer periphery of the pressure-bearing mounting frame 15. The plurality of sealing rings 18 are in contact with the inner wall of the housing of the explosion-proof pressure relief unit 3, thereby enhancing the installation effect of the pressure-bearing mounting frame 15 itself.

[0042] The pressure-bearing mounting frame 15 is provided with a pressure relief wellhead 16, which is a hexagonal passage. The notched diaphragm 17 is arranged in the pressure relief wellhead 16. The convex surface of the notched diaphragm 17 faces the inner cavity of the kettle body 1. That is, the rupture disc of this embodiment is of a reverse arch type. It should be noted that the position of the pressure relief wellhead 16 for mounting the notched diaphragm 17 is processed to adapt to the shape of the notched diaphragm 17. During processing, the pressure relief wellhead 16 and the notched diaphragm 17 are connected by edge welding. Therefore, it can be understood that the rupture disc 14 is a whole replacement structure. Compared with traditional rupture discs such as the FIKE brand, the sealing effect is better, the space thickness is thinner, and it is more suitable for series connection.

[0043] The heating jacket 7 is arranged in the form of surrounding the kettle body 1. The heating jacket 7 is provided with the first uniform heating medium outlet 10 and the second uniform heating medium outlet 11 at the same horizontal height. The heating jacket 7 is also provided with the first uniform heating medium inlet 8 and the second uniform heating medium inlet 9 at the same horizontal height. The heating jacket 7 is filled with uniform heating medium according to the display requirements, that is, the heating medium or cooling medium is added according to the requirements. Compared with the traditional heating jacket 7, the first uniform heating medium inlet 8 and the second uniform heating medium inlet 9 of this application are located above the heating jacket 7. The uniform heating medium fills faster, the temperature regulation speed is relatively faster, and it is conducive to strengthening the temperature control of silane.

[0044] As shown in the figure, Figure 1 The kettle body 1 is also provided with a temperature table 6. The connection position of the temperature table 6 is above the heating jacket 7. Therefore, the temperature table 6 can first transmit the temperature data above the kettle body 1. The back-end staff can compare the temperature data of the temperature table 6 and the heating jacket 7 according to the production specification, and then flexibly adjust the flow rate or temperature of the uniform heating medium in the heating jacket 7, thereby further strengthening the temperature control of silane.

[0045] In addition, the kettle body 1 is in contact with the ground through the supporting legs 13, and the discharge / multichannel 5 is provided with a stop valve 12.

[0046] The application discloses a silane explosion-proof reaction kettle, which enhances the pressure relief capacity of the reaction kettle through a novel rupture disc, improves the sealing performance, more effectively prevents silane leakage or contact with air, innovates the structural form of the stirrer, can simultaneously adapt to high shear, high viscosity or mixing and other various different requirements, covers a wider fluid area, reduces a dead zone, eliminates local temperature gradient through efficient stirring effect, ensures uniform heat distribution, and finally, through accurate cooperation of the heating jacket and the temperature table, the temperature control capacity of the silane is further improved.

[0047] The above embodiment is not a limitation on the present application, and the present application is not limited to the above examples, and the changes, modifications, additions or replacements made by the person skilled in the art within the technical scheme range of the present application also belong to the protection range of the present application.

Claims

1. A silane explosion-proof reaction kettle comprising a kettle body (1) formed with an inner cavity, characterized in that: The top of the kettle body (1) is provided with a top magnetic stirring unit (2) penetrating in and out of the kettle body (1), one side of the top magnetic stirring unit (2) is equipped with an explosion-proof pressure relief unit (3) communicating with the inner cavity of the kettle body (1), the explosion-proof pressure relief unit (3) includes a pressure relief valve and a bursting disc (14), the other side of the top magnetic stirring unit (2) is equipped with a feeding pipe (4) communicating with the inner cavity of the kettle body (1), the bottom of the kettle body (1) is provided with a discharge / multichannel (5) communicating with the inner cavity thereof, and the outer side of the kettle body (1) is provided with a heating jacket (7); The top magnetic stirring unit (2) includes a stirrer located in the inner cavity of the kettle body (1), and the stirrer includes a stirring shaft (26), the stirring shaft (26) is provided with an anchor propeller (30), a screw propeller (31), an outer spiral belt propeller (32) and an inner spiral belt propeller (33). The bursting disc (14) includes a pressure-bearing mounting frame (15) and a notched diaphragm (17) located in the pressure-bearing mounting frame (15).

2. The silane explosion-proof reactor of claim 1, wherein: The bursting disc (14) and the explosion-proof pressure relief unit (3) are connected in series, and the bursting disc (14) is located upstream of the pressure relief of the explosion-proof pressure relief unit (3). The pressure-bearing mounting frame (15) of the bursting disc (14) is located at the root of the explosion-proof pressure relief unit (3), a plurality of sealing rings (18) are wound on the outer periphery of the pressure-bearing mounting frame (15), and the plurality of sealing rings (18) are in contact with the inner wall of the shell of the explosion-proof pressure relief unit (3).

3. The silane explosion-proof reactor of claim 2, wherein: A pressure relief wellhead (16) is formed in the pressure-bearing mounting frame (15), the pressure relief wellhead (16) is a hexagonal channel, the notched diaphragm (17) is arranged in the pressure relief wellhead (16), and the convex surface of the notched diaphragm (17) faces the inner cavity of the kettle body (1).

4. The silane explosion-proof reactor of claim 1, wherein: The top magnetic stirring unit (2) is located at the center position of the kettle body (1), and the top magnetic stirring unit (2) includes a sealing cover (19) seated at the opening of the kettle body (1), and a chamber is formed in the middle of the sealing cover (19); An outer magnetic steel (20) is arranged in the chamber space above the waist of the sealing cover (19), an outer sealing barrier sleeve (21) is arranged in the outer magnetic steel (20), the outer magnetic steel (20) and the outer sealing barrier sleeve (21) are matched in shape, and an inner magnetic steel (23) is arranged in the inner sealing barrier sleeve (21) and magnetically coupled with the outer magnetic steel (20).

5. The silane explosion-proof reactor of claim 4, wherein: The lower end of the outer sealing barrier sleeve (21) extends radially to form a ring of ledges, and the outer sealing barrier sleeve (21) is connected with the sealing cover (19) at the ledges through bolts (22).

6. The silane explosion-proof reactor of claim 4, wherein: The lower part of the inner magnetic steel (23) is connected with a transmission shaft (25), the outer periphery of the upper end and the lower end of the transmission shaft (25) is respectively provided with a sealing group isolation ring (24), and the lower free end of the transmission shaft (25) is further connected with a stirring shaft (26) of a stirrer.

7. The silane explosion-proof reactor of claim 1, wherein: The stirring shaft (26) is vertically arranged, a plurality of short connecting rods (27) are arranged on the stirring shaft (26) from top to bottom, two short connecting rods (27) with axis located on the same straight line are arranged at the same plane height, and an outer coaxial long connecting rod (29) is connected to each short connecting rod (27) through a flange (28).

8. The silane explosion-proof reaction kettle according to claim 7, characterized in that: the number of the anchor propellers (30) is two, and the two anchor propellers (30) are respectively located on the two lowermost long connecting rods (29); the screw propellers (31) are spirally arranged on the stirring shaft (26) from top to bottom; the number of the outer spiral propellers (32) is two, and the two outer spiral propellers (32) are respectively spirally arranged from top to bottom from the edge ends of the two uppermost long connecting rods (29); the number of the inner spiral propellers (33) is two, and the two inner spiral propellers (33) are respectively spirally arranged from top to bottom from the middle positions of the two uppermost long connecting rods (29).

9. The silane explosion-proof reactor of claim 1, wherein: The heating jacket (7) is arranged in the form of surrounding the kettle body (1) in one circle, and the first uniform heating medium outlet (10) and the second uniform heating medium outlet (11) are arranged on the heating jacket (7) at the same horizontal height, and the first uniform heating medium inlet (8) and the second uniform heating medium inlet (9) are also arranged on the heating jacket (7) at the same horizontal height.

10. The silane explosion-proof reactor of claim 1, wherein: The kettle body (1) is also provided with a thermometer (6), and the kettle body (1) is in contact with the ground through the supporting legs (13), and the discharge / miscellaneous opening (5) is equipped with a stop valve (12).

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