Slicing mechanism for silicon carbide processing

Abstract

The utility model discloses a slicing mechanism for silicon carbide processing. The slicing mechanism for silicon carbide processing comprises a cutting structure, an intermittent rollback assembly and an auxiliary cooling assembly. In order to solve the problem that in the prior art, when ordinary cutting equipment is used for cutting silicon carbide, due to continuous cutting, temperature rise is caused at the cutting position, and slice deformation or thermal stress cracks are generated, the intermittent rollback assembly is designed, and through the arrangement of the intermittent rollback assembly, the temperature rise of the cutting position can be reduced during cutting; the cutting circular knife intermittently retreats, so that rapid temperature rise caused by continuous contact friction between the cutting circular knife and silicon carbide can be avoided, the temperature of the section position can be controlled, deformation and cracks caused by the temperature are avoided, and an auxiliary cooling assembly is further designed; and through the auxiliary cooling assembly, automatic air injection can be conducted when the cutting structure retreats, and the auxiliary cooling function is achieved.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of silicon carbide slicing, in particular to a slicing mechanism for silicon carbide processing. BACKGROUND

[0002] Silicon carbide is an important inorganic non-metallic material, which has excellent properties such as high hardness, high wear resistance and high thermal stability. These properties make silicon carbide have a wide range of applications in industrial production. However, during the slicing process of silicon carbide, cracks are easily generated on the wafer surface and subsurface, which reduces the wafer fracture strength and increases the wafer breakage rate, thereby increasing the manufacturing cost.

[0003] In the prior art patent document "CN214644907U A slicing device for silicon carbide processing", a slicing device is disclosed. Although the slicing device in the technical solution can perform slicing processing on silicon carbide, during the cutting process of the cutting knife, continuous cutting will cause the cutting knife to continuously contact the cutting surface of the silicon carbide, thereby causing the problem of slicing deformation or thermal stress cracking caused by temperature rise at the cutting position.

[0004] That is, the prior art has the following technical problems: the ordinary slicing device causes the problem of slicing deformation or thermal stress cracking caused by temperature rise at the cutting position during continuous cutting. Therefore, the slicing mechanism for silicon carbide processing is proposed to solve the above problems. SUMMARY

[0005] In this embodiment, the slicing mechanism for silicon carbide processing is provided to solve the problem of slicing deformation or thermal stress cracking caused by temperature rise at the cutting position during continuous cutting of the ordinary slicing device in the prior art.

[0006] According to one aspect of the application, a slicing mechanism for silicon carbide processing is provided, which comprises:

[0007] A cutting structure is arranged at one end of a movement driving assembly, the movement driving assembly is fixedly arranged at the upper surface of a fixed base, the cutting structure is used for cutting processing of silicon carbide, and the movement driving assembly is used for driving the cutting structure to move.

[0008] An intermittent back-off assembly is fixedly arranged at one end of the movement driving assembly, the intermittent back-off assembly is arranged at the side of the cutting structure, and the intermittent back-off assembly is connected with the cutting structure. The cutting structure is used for driving the cutting structure to perform back-and-forth movement.

[0009] An auxiliary cooling assembly is fixedly arranged at both sides of the intermittent back-off assembly, and the auxiliary cooling assembly is used for automatically assisting air cooling in the gap of the back-off of the cutting structure.

[0010] Further, the mobile driving assembly comprises fixed guide rods, an upper fixing frame, a mobile base, a driving cylinder, a fixed arm and lateral frames, both of the fixed guide rods are fixedly arranged at the upper surface of the fixed base, the upper fixing frame is fixedly connected between the top ends of the two fixed guide rods, and both of the fixed guide rods penetrate through the mobile base and are in sliding fit with the mobile base.

[0011] Further, the upper surface of the upper fixing frame is fixedly provided with the driving cylinder, the bottom end of the driving cylinder is fixedly connected with the upper surface of the mobile base, the mobile base is fixedly connected with the fixed arm, and the front ends of both sides of the fixed arm are fixedly connected with the lateral frames.

[0012] Further, the cutting structure comprises a fixed plate frame, mobile guide rods, a cutting circular knife and a cutting motor, the upper surfaces of both sides of the fixed plate frame are fixedly connected with the mobile guide rods, both of the mobile guide rods penetrate through the lateral frames and are in sliding fit with the lateral frames, the bottom surface of the fixed plate frame is rotatably connected with the cutting circular knife, the side wall of the fixed plate frame is fixedly installed with the cutting motor, and the output shaft of the cutting motor is fixedly connected with the cutting circular knife.

[0013] Further, the intermittent back-off assembly comprises a fixed foot stand, a rotating disc, a servo motor, a connecting arm and a reciprocating rod, the fixed foot stand is fixedly arranged at the upper surface of the fixed arm, and the upper end side wall of the fixed foot stand is rotatably connected with the rotating disc.

[0014] Further, the other side wall of the fixed foot stand is fixedly connected with the servo motor, and the output shaft of the servo motor is fixedly connected with the rotating disc.

[0015] Further, one end of the connecting arm is rotatably connected with the side wall of the rotating disc, the other end of the connecting arm is rotatably connected with the reciprocating rod, the reciprocating rod penetrates through the fixed arm and is in sliding fit with the fixed arm, and the bottom end of the reciprocating rod is fixedly connected with the upper surface of the fixed plate frame.

[0016] Further, the auxiliary cooling assembly comprises a fixed pipe, a nozzle, a supporting plate, a turnover plate, a connecting barrel, a mobile piston, a guide rod, an air inlet pipe, an output hose and a return spring, the fixed pipe is fixedly arranged at the side position of the fixed plate frame, and the bottom end of the fixed pipe is fixedly connected with the nozzle.

[0017] Further, the support plate is fixedly arranged at the upper surface of the transverse frame, a turnover plate is rotatably connected to the top end of the support plate, one side of the turnover plate is in contact with the top end of the moving guide rod, the connecting cylinder is rotatably connected between one end of the transverse frame, a moving piston is slidably connected in the inner cavity of the connecting cylinder, one end of the guide rod is fixedly connected to the upper surface of the moving piston, the other end of the guide rod extends through the upper wall of the inner cavity of the connecting cylinder and extends out of the wall, and the top end of the guide rod is rotatably connected to one end of the turnover plate.

[0018] Further, one end of the reset spring is fixedly connected to the bottom surface of the moving piston, the other end of the reset spring is fixedly connected between the bottom wall of the inner cavity of the connecting cylinder, the air inlet pipe is fixedly connected at the bottom side position of the inner cavity of the connecting cylinder, the input check valve is fixedly installed at the air inlet pipe, one end of the output hose is fixedly connected at the bottom side position of the inner cavity of the connecting cylinder, the other end of the output hose extends to the fixed pipe and is fixedly connected between the fixed pipe, and the output check valve is installed at the output hose.

[0019] Through the above technical solutions of the present application, in order to solve the problem of slice deformation or thermal stress cracking caused by continuous cutting and heating at the cutting position when the ordinary cutting equipment is used for cutting silicon carbide in the prior art, the intermittent retreat assembly is designed, through the setting of the intermittent retreat assembly, the cutting circular knife can be intermittently retreated during cutting, which can avoid the rapid heating caused by the continuous contact and friction of the cutting circular knife with the silicon carbide, thereby facilitating the control of the temperature at the cutting surface position and avoiding deformation and cracks caused by temperature, and further, the auxiliary cooling assembly is designed, through the auxiliary cooling assembly, automatic air injection can be performed during the gap of the retreat of the cutting structure, the function of auxiliary cooling is realized, no additional power source is needed, it is convenient to use, and the problem of rapid heating at the silicon carbide cutting surface is effectively avoided. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creating any creative labor.

[0021] Figure 1 The structure schematic view of the cutting structure of one embodiment of the present application;

[0022] Figure 2 The overall structure schematic view of one embodiment of the present application;

[0023] Figure 3A structure schematic view of the side of an embodiment of the present application;

[0024] Figure 4 A structure schematic view of the side of a cutting structure of an embodiment of the present application;

[0025] Figure 5 A structure schematic view of an auxiliary cooling assembly of an embodiment of the present application;

[0026] Figure 6 A structure schematic view of the inside of a connecting cylinder of an embodiment of the present application.

[0027] In the figure:

[0028] A fixed base 1;

[0029] A moving drive assembly 2, a fixed guide rod 201, an upper fixed frame 202, a moving seat 203, a drive cylinder 204, a fixed arm 205, a transverse frame 206;

[0030] A cutting structure 3, a fixed plate frame 301, a moving guide rod 302, a cutting circular knife 303, a cutting motor 304;

[0031] An intermittent back-off assembly 4, a fixed foot support 401, a rotating disc 402, a servo motor 403, a connecting arm 404, a reciprocating rod 405;

[0032] An auxiliary cooling assembly 5, a fixed tube 501, a nozzle 502, a support plate 503, a turnover plate 504, a connecting cylinder 505, a moving piston 506, a guide rod 507, an air inlet pipe 508, an output hose 509, a return spring 510. DETAILED DESCRIPTION

[0033] In order to make the person in the art better understand the present application scheme, the technical scheme in the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by the person in the art without creative labor should belong to the protection scope of the present application.

[0034] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above drawings are used to distinguish similar objects, and do not necessarily have to describe a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not have to be limited to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0035] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not intended to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0036] In addition, in addition to indicating the orientation or positional relationship, the above-mentioned part of the terms can also be used to represent other meanings, for example, the term "upper" can also be used to represent a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.

[0037] In addition, the terms "mount", "set", "provided with", "connected", "connected", "sleeved" should be broadly understood. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0038] Please refer to Figures 1-6 As shown in the drawings, the silicon carbide machining slicing mechanism comprises:

[0039] A cutting structure 3 is provided at one end of a movement driving assembly 2 fixedly arranged at the upper surface of the fixed base 1, and the cutting structure 3 is used for cutting and machining silicon carbide, and the movement driving assembly 2 is used for driving the cutting structure 3 to move;

[0040] An intermittent back-off assembly 4 is fixedly arranged at one end of the movement driving assembly 2, is arranged at the square position of the cutting structure 3, is connected between the intermittent back-off assembly 4 and the cutting structure 3, and is used to drive the cutting structure 3 to perform back-off reciprocating movement.

[0041] An auxiliary cooling assembly 5 is fixedly arranged at both sides of the intermittent back-off assembly 4, and is used to automatically assist air jet cooling during the gap of the back-off of the cutting structure 3.

[0042] Through the above technical scheme, the intermittent back-off assembly 4 is arranged, so that the cutting circular knife 303 can perform intermittent back-off during cutting, and the rapid heating caused by continuous contact and friction of the cutting circular knife 303 with silicon carbide can be avoided, thereby being beneficial to controlling the temperature at the cutting surface position and avoiding deformation and cracks caused by the temperature. Further, the auxiliary cooling assembly 5 is designed, the auxiliary cooling assembly 5 can automatically jet air during the gap of the back-off of the cutting structure 3, and the function of auxiliary cooling is realized. No additional power source is needed, and the use is convenient. The problem of rapid heating of the silicon carbide cutting surface is effectively avoided.

[0043] The movement driving assembly 2 comprises two fixed guide rods 201, an upper fixed frame 202, a movement seat 203, a driving cylinder 204, a fixed arm 205, and a transverse frame 206. The two fixed guide rods 201 are fixedly arranged at the upper surface of the fixed base 1. The top ends of the two fixed guide rods 201 are fixedly connected with the upper fixed frame 202. The two fixed guide rods 201 are both penetrated through the movement seat 203 and are in sliding fit with the movement seat 203.

[0044] The upper surface of the upper fixed frame 202 is fixedly provided with the driving cylinder 204. The bottom end of the driving cylinder 204 is fixedly connected with the upper surface of the movement seat 203. The movement seat 203 is fixedly connected with the fixed arm 205. The front ends of the two sides of the fixed arm 205 are fixedly connected with the transverse frame 206. Through the working of the driving cylinder 204, the movement seat 203 can be pushed to move, and the movement function of the fixed arm 205 is realized. Through the movement of the fixed arm 205, the cutting structure 3 can be driven to move, and the function of moving cutting is realized.

[0045] The cutting structure 3 comprises a fixed plate frame 301, a moving guide rod 302, a cutting circular knife 303 and a cutting motor 304, the moving guide rod 302 is fixedly connected to the upper surface of the fixed plate frame 301 on both sides, the two moving guide rods 302 are respectively penetrated through the two transverse frames 206 and are in sliding fit with the transverse frames 206, the cutting circular knife 303 is rotatably connected to the bottom surface of the fixed plate frame 301, and the cutting motor 304 is fixedly installed on the side wall of the fixed plate frame 301, and the output shaft of the cutting motor 304 is fixedly connected with the cutting circular knife 303, through the working of the cutting motor 304, the cutting circular knife 303 can be driven to rotate, and the cutting function is realized.

[0046] The intermittent retreat assembly 4 comprises a fixed foot support 401, a rotating disc 402, a servo motor 403, a connecting arm 404 and a reciprocating rod 405, the fixed foot support 401 is fixedly arranged at the upper surface of the fixed arm 205, and the rotating disc 402 is rotatably connected to the upper end side wall of the fixed foot support 401.

[0047] The servo motor 403 is fixedly connected to the other side wall of the fixed foot support 401, and the output shaft of the servo motor 403 is fixedly connected with the rotating disc 402, through the working of the servo motor 403, the rotating disc 402 can be driven to rotate.

[0048] One end of the connecting arm 404 is rotatably connected to the side wall of the rotating disc 402, the other end of the connecting arm 404 is rotatably connected with the reciprocating rod 405, the reciprocating rod 405 is penetrated through the fixed arm 205 and is in sliding fit with the fixed arm 205, and the bottom end of the reciprocating rod 405 is fixedly connected with the upper surface of the fixed plate frame 301, through the rotation of the rotating disc 402, one end of the connecting arm 404 can be driven to move in a ring shape, so that the reciprocating rod 405 is driven to move up and down, when the reciprocating rod 405 moves up, the cutting circular knife 303 can be driven to move up, the function of retreat is realized, through the retreat of the cutting circular knife 303, the rapid heating phenomenon caused by continuous contact and friction with the cutting surface during cutting can be avoided, through intermittent retreat, the phenomenon of over-high temperature is avoided, and it is especially suitable for slicing processing of silicon carbide;

[0049] The auxiliary cooling assembly 5 comprises a fixed pipe 501, a nozzle 502, a supporting plate 503, a turnover plate 504, a connecting barrel 505, a moving piston 506, a guide rod 507, an air inlet pipe 508, an output hose 509 and a reset spring 510, the fixed pipe 501 is fixedly arranged at the side position of the fixed plate frame 301, and the nozzle 502 is fixedly connected to the bottom end of the fixed pipe 501.

[0050] The support plate 503 is fixedly arranged at the upper surface of the transverse frame 206, a top end of the support plate 503 is rotationally connected with a turnover plate 504, one side of the turnover plate 504 is in contact with a top end of the moving guide rod 302, a connecting cylinder 505 is arranged at one end of the transverse frame 206 and rotationally connected with the transverse frame 206, a moving piston 506 is slidingly connected in the inner cavity of the connecting cylinder 505, one end of a guide rod 507 is fixedly connected with the upper surface of the moving piston 506, the other end of the guide rod 507 penetrates through the upper wall of the inner cavity of the connecting cylinder 505 and extends out of the wall, and a top end of the guide rod 507 is rotationally connected with one end of the turnover plate 504;

[0051] One end of a reset spring 510 is fixedly connected with the bottom surface of the moving piston 506, the other end of the reset spring 510 is fixedly connected between the inner cavity bottom wall of the connecting cylinder 505, an air inlet pipe 508 is fixedly connected at the bottom side position of the inner cavity of the connecting cylinder 505, an input check valve is fixedly arranged at the air inlet pipe 508, one end of an output hose 509 is fixedly connected at the bottom side position of the inner cavity of the connecting cylinder 505, the other end of the output hose 509 extends to the fixed pipe 501 and is fixedly connected with the fixed pipe 501, and an output check valve is arranged at the output hose 509. Through the technical solution, when the cutting circular knife 303 retreats, the cutting circular knife 303 is temporarily separated from the silicon carbide, at the same time, the upward movement of the moving guide rod 302 can push the turnover plate 504 to turn over, so that the other end of the turnover plate 504 pushes the guide rod 507 to move, so that the guide rod 507 drives the moving piston 506 to move downward in the inner cavity of the connecting cylinder 505, so that the gas in the inner cavity of the connecting cylinder 505 can be output through the output hose 509, transported to the fixed pipe 501, and sprayed through the nozzle 502, to form an air flow to automatically spray the cutting surface of the silicon carbide, to achieve the beneficial effect of auxiliary cooling, and without the need of an additional power source, effectively reducing the temperature of the silicon carbide cutting surface, avoiding the warping and cracking of the cutting piece due to the temperature rise.

[0052] The above merely describes the preferred embodiments of the present application and is not used to limit the present application. For those skilled in the art, the present application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A slicing mechanism for processing silicon carbide, characterized by: The silicon carbide processing slicing mechanism comprises: A cutting structure (3) is arranged at one end of a movement driving assembly (2) fixedly arranged at the upper surface of a fixed base (1), and is used for cutting processing of silicon carbide; the movement driving assembly (2) is used for driving the cutting structure (3) to move; An intermittent back-off assembly (4) is fixedly arranged at one end of the movement driving assembly (2), is arranged at the side of the cutting structure (3), is connected between the cutting structure (3) and the cutting structure (3), and is used for driving the cutting structure (3) to move back and forth; An auxiliary cooling assembly (5) is fixedly arranged at both sides of the intermittent back-off assembly (4), and is used for automatically assisting air cooling in the gap of the cutting structure (3) back-off.

2. The slicing mechanism for processing silicon carbide according to claim 1, characterized by: The movement driving assembly (2) comprises two fixed guide rods (201), an upper fixed frame (202), a movement seat (203), a driving cylinder (204), a fixed arm (205) and a transverse frame (206), the two fixed guide rods (201) are fixedly arranged at the upper surface of the fixed base (1), the top ends of the two fixed guide rods (201) are fixedly connected with the upper fixed frame (202), and the two fixed guide rods (201) penetrate through the movement seat (203) and are in sliding fit with the movement seat (203).

3. The slicing mechanism for processing silicon carbide according to claim 2, characterized by: The upper surface of the upper fixed frame (202) is fixedly provided with the driving cylinder (204), the bottom end of the driving cylinder (204) is fixedly connected with the upper surface of the movement seat (203), the movement seat (203) is fixedly connected with the fixed arm (205), and the front ends of the two sides of the fixed arm (205) are fixedly connected with the transverse frame (206).

4. The slicing mechanism for processing silicon carbide according to claim 1, characterized by: The cutting structure (3) comprises a fixed plate frame (301), a movement guide rod (302), a cutting circular knife (303) and a cutting motor (304), the upper surfaces of the two sides of the fixed plate frame (301) are fixedly connected with the movement guide rods (302), the two movement guide rods (302) penetrate through the two transverse frames (206) and are in sliding fit with the transverse frames (206), the bottom surface of the fixed plate frame (301) is rotatably connected with the cutting circular knife (303), the side wall of the fixed plate frame (301) is fixedly installed with the cutting motor (304), and the output shaft tail end of the cutting motor (304) is fixedly connected with the cutting circular knife (303).

5. The slicing mechanism for processing silicon carbide according to claim 1, characterized by: The intermittent back-off assembly (4) comprises a fixed foot support (401), a rotating disc (402), a servo motor (403), a connecting arm (404) and a reciprocating rod (405), the fixed foot support (401) is fixedly arranged at the upper surface of the fixed arm (205), and the upper end side wall of the fixed foot support (401) is rotatably connected with the rotating disc (402).

6. The slicing mechanism for processing silicon carbide according to claim 5, wherein: The other side wall of the fixed foot stool (401) is fixedly connected with a servo motor (403), and the output shaft end of the servo motor (403) is fixedly connected with a rotating disc (402).

7. The slicing mechanism for processing silicon carbide according to claim 5, wherein: One end of the connecting arm (404) is rotatably connected to the side wall of the rotating disc (402), and the other end of the connecting arm (404) is rotatably connected with a reciprocating rod (405), the reciprocating rod (405) penetrates the fixed arm (205) and is in sliding fit with the fixed arm (205), and the bottom end of the reciprocating rod (405) is fixedly connected with the upper surface of the fixed plate frame (301).

8. The slicing apparatus of claim 1, wherein: The auxiliary cooling assembly (5) comprises a fixed pipe (501), a nozzle (502), a support plate (503), a turnover plate (504), a connecting barrel (505), a moving piston (506), a guide rod (507), an air inlet pipe (508), an output hose (509) and a reset spring (510), the fixed pipe (501) is fixedly arranged at the side edge of the fixed plate frame (301), and the bottom end of the fixed pipe (501) is fixedly connected with the nozzle (502).

9. The slicing mechanism for processing silicon carbide according to claim 8, wherein: The support plate (503) is fixedly arranged at the upper surface of the transverse frame (206), the top end of the support plate (503) is rotatably connected with the turnover plate (504), one side of the turnover plate (504) is in contact with the top end of the moving guide rod (302), the connecting barrel (505) is arranged at one end of the transverse frame (206) and rotatably connected with the transverse frame (206), the moving piston (506) is slidably connected in the inner cavity of the connecting barrel (505), one end of the guide rod (507) is fixedly connected to the upper surface of the moving piston (506), the other end of the guide rod (507) penetrates the inner cavity upper wall of the connecting barrel (505) and extends out of the wall, and the top end of the guide rod (507) is rotatably connected with one end of the turnover plate (504).

10. The slicing mechanism for processing silicon carbide according to claim 8, wherein: One end of the reset spring (510) is fixedly connected to the bottom surface of the moving piston (506), the other end of the reset spring (510) is fixedly connected between the inner cavity bottom wall of the connecting barrel (505), the air inlet pipe (508) is fixedly connected at the inner cavity bottom side position of the connecting barrel (505), an input check valve is fixedly installed at the air inlet pipe (508), one end of the output hose (509) is fixedly connected at the inner cavity bottom side position of the connecting barrel (505), the other end of the output hose (509) extends to the fixed pipe (501) and is fixedly connected with the fixed pipe (501), and an output check valve is installed at the output hose (509).

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