PVD (Physical Vapor Deposition) rotating target maintenance jig

Abstract

The utility model discloses a PVD (Physical Vapor Deposition) rotating target maintenance jig which comprises a cooling water inlet joint and a cooling water drainage joint which are connected with a PVD rotating target, the cooling water inlet joint is connected with an air joint through an air inlet ball valve, and the cooling water drainage joint is connected with a cooling water drainage ball valve. According to the utility model, the drainage pressure and the water flow can be effectively controlled by controlling the flow of the cooling water drainage ball valve, so that the pressure relief pressure and the drainage pressure are effectively controlled. According to the PVD rotating target, a circulating gas path can be built inside and outside the PVD rotating target, compressed gas can be guided into the PVD rotating target to purge residual water in the target cylinder, and water in the target cylinder is accelerated to be discharged, so that the maintenance time is saved, and the maintenance efficiency is improved. According to the PVD rotating target maintenance tool, the PVD rotating target pressure relief and drainage and pressure maintaining detection tools are integrated, so that different maintenance items of PVD rotating target maintenance can be completed by the same tool, the tool is easy to arrange, and the space utilization rate and the storage and carrying convenience are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to magnetron sputtering coating technical field more specifically, it relates to a kind of PVD rotary target maintenance tool. BACKGROUND

[0002] In the magnetron sputtering coating technical field, the maintenance and replacement of PVD rotary target is an important content to ensure the long-term, safe, stable and continuous operation of process system, and the process of disassembling rotary target needs to discharge gas pressure and drain water in the target fixing part, target cylinder, and the sealing of target cylinder needs to be detected after maintaining and replacing target material, i.e. pressure maintaining, to determine that the pressure in the sealed target cylinder changes within a controllable range within a certain time. Currently, there is no special gauge for rotary target maintenance, and the pressure relief and drainage and pressure maintaining devices used are relatively simple and independent. When discharging pressure, it is usually only connected to the water outlet end of the target cylinder with a water pipe for operation, and when maintaining pressure, it is usually only connected to the water inlet end of the target cylinder with a pressure gauge and then introduced with appropriate compressed gas for operation. Based on the existing maintenance devices and corresponding working methods, the following disadvantages may occur: the discharge pressure cannot be controlled smoothly, the water pipe is easily jumped and shaken, the maintenance personnel is injured, and the water is splashed everywhere due to excessive water flow pressure; the maintenance efficiency is low; the residual water in the target cylinder cannot be completely discharged; the devices are scattered and independent, which is not conducive to regularity. Therefore, it is necessary to design a special tool for PVD rotary target maintenance. Utility model patent No. CN221882952U discloses a mold leak detection equipment, but the application scenario and the technical problems solved by the utility model determine that it is not suitable for the maintenance of PVD rotary target. UTILITY MODEL CONTENT

[0003] The existing PVD rotary target maintenance device cannot control the discharge pressure smoothly, the maintenance efficiency is low, the residual water in the target cylinder cannot be completely discharged, and the devices for different maintenance items are scattered and independent, which is not conducive to regularity. In order to overcome these defects, the utility model provides a PVD rotary target maintenance tool, which can effectively control the discharge pressure and drainage pressure, improve the maintenance efficiency, and improve the integration of PVD rotary target maintenance tool, which is conducive to the regularity of the tool.

[0004] The utility model discloses a technical scheme: a PVD rotary target maintenance tool, including the cooling water inlet joint and the cooling water drainage joint who is connected with the PVD rotary target, the cooling water inlet joint is connected with a gas connector through an inlet ball valve, and a cooling water drainage ball valve is connected to the cooling water drainage joint. When the PVD rotary target maintenance is carried out, the cooling water pipe connected to the PVD rotary target is removed, and then the cooling water inlet joint and the cooling water drainage joint of the PVD rotary target maintenance tool are connected to the water inlet and the water outlet of the rotary target respectively, and the target cylinder is depressurized and drained by controlling the cooling water drainage ball valve, so that the pressure relief pressure and the drainage pressure are effectively controlled. By controlling the inlet ball valve to introduce compressed gas from the gas connector to blow the residual water in the target cylinder, the maintenance time can be shortened to improve the maintenance efficiency. After replacing the target material or completing the target cylinder maintenance, the compressed gas is continuously introduced into the target cylinder through the gas connector, the cooling water drainage ball valve is closed after reaching the required pressure, and then whether the pressure in the target cylinder is maintained within the required range is observed within a certain period of time, so that the detection of the pressure maintaining effect of the target cylinder is realized.

[0005] Preferably, the cooling water inlet joint is connected with a three-way connector, the inlet ball valve is connected to the three-way connector, and a pressure gauge is connected to the three-way connector through a fluid pipe. The three-way connector integrates the compressed gas input function and the pressure monitoring function on the cooling water inlet joint, and the pressure gauge can directly monitor the pressure change in the target cylinder, ensuring the accuracy of the pressure maintaining detection result.

[0006] Preferably, the fluid pipe is provided with a pressure gauge buffer coil section. The pressure gauge buffer coil section can prolong the fluid path, avoid the gas flowing along the straight path too fast, slow down the instantaneous pressure impact of the gas, ensure the stability of the pressure gauge reading, and make the pressure maintaining detection result more accurate.

[0007] Preferably, the cooling water drainage ball valve is provided with a flow control handle. The flow control handle is used for adjusting the valve opening degree, and the valve opening degree can be gradually adjusted through the flow control handle to control the drainage flow, so that the pressure relief process is smoothly carried out at an appropriate rate, and the water pipe is prevented from being shaken to hurt people or the water in the target is prevented from being splashed.

[0008] Preferably, the cooling water inlet joint and the cooling water drainage joint are stainless steel parts. The cooling water inlet joint and the cooling water drainage joint made of stainless steel have higher corrosion resistance and mechanical strength, can effectively resist the chemical corrosion of the cooling water containing additives, and avoid leakage caused by corrosion of the joint. Meanwhile, under the high-pressure environment in the PVD rotary target, the cooling water inlet joint and the cooling water drainage joint made of stainless steel have stronger stress bearing capacity, and can better prevent deformation and explosion.

[0009] As preferred, the cooling water inlet joint and the cooling water outlet joint are connected through a flexible connecting piece. The flexible connecting piece not only connects the cooling water inlet joint and the cooling water outlet joint together, but also allows the cooling water inlet joint and the cooling water outlet joint to adjust the relative position, so as to better adapt to the interface spacing of different types of PVD rotary targets and improve the universality of the jig.

[0010] As preferred, the flexible connecting piece is a tension spring.

[0011] As an alternative, the flexible connecting piece is a chain.

[0012] The beneficial effects of the utility model are:

[0013] The pressure relief and the drainage pressure are stably controlled. The utility model can effectively control the drainage pressure and the water flow size by controlling the flow size of the cooling water drainage ball valve, so as to effectively control the pressure relief pressure and the drainage pressure, and avoid causing the water pipe to swing and hurt people.

[0014] The maintenance efficiency of the PVD rotary target is improved. The utility model can construct a flow-through air path inside and outside the PVD rotary target, can introduce compressed gas into the PVD rotary target to blow off residual moisture in the target cylinder, and can accelerate the moisture discharge in the target cylinder, so as to save the maintenance time and improve the maintenance efficiency.

[0015] The PVD rotary target maintenance jig is regular. The utility model integrates the PVD rotary target pressure relief drainage and pressure detection appliances, so that the same jig can complete different maintenance projects of the PVD rotary target maintenance, is beneficial to the regularity of the jig, improves the space utilization rate, and improves the convenience of storage and carrying. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a use state schematic view of the utility model.

[0017] In the figure, 1 is a gas joint, 2 is a first stainless steel reducing union, 3 is a cooling water inlet joint, 4 is an air inlet ball valve, 5 is a flexible connecting piece, 6 is a three-way connecting head, 7 is a flow control handle, 8 is a cooling water drainage ball valve, 9 is a second stainless steel reducing union, 10 is a cooling water outlet joint, 11 is a pressure gauge buffer coil pipe section, 12 is a pressure gauge, and 13 is a fluid pipe. DETAILED DESCRIPTION

[0018] The utility model will be further described in combination with the specific embodiments of the drawings.

[0019] Embodiment 1:

[0020] As Figure 1As shown, a PVD rotary target maintenance tool includes a gas connector 1, a cooling water inlet connector 3, a cooling water outlet connector 10, a three-way connector 6, an air inlet ball valve 4, a cooling water outlet ball valve 8, and a pressure gauge 12. The gas connector 1 is connected to one end of the air inlet ball valve 4, and the other end of the air inlet ball valve 4 is connected to one interface of the three-way connector 6. The remaining two interfaces of the three-way connector 6 are respectively used to connect the cooling water inlet connector 3 and the pressure gauge 12. The cooling water inlet connector 3 is connected to the three-way connector 6 through a first stainless steel variable-diameter union 2, so that the cooling water inlet connector 3 and the three-way connector 6 can be connected to form a sealed pipeline even if the diameters are different. The pressure gauge 12 is connected to the three-way connector 6 through a fluid pipe 13. The fluid pipe 13 is provided with a spiral pressure gauge buffer coil section 11 in the middle. The pressure gauge buffer coil section 11 can effectively buffer the impact of airflow on the pressure gauge 12, protect the pressure gauge 12 from damage, prolong the service life of the pressure gauge 12, and ensure the detection accuracy of the pressure gauge 12. The cooling water outlet connector 10 is connected to the cooling water outlet ball valve 8 through a second stainless steel variable-diameter union 9, so that the cooling water outlet connector 10 and the cooling water outlet ball valve 8 can be connected to form a sealed pipeline even if the diameters are different. The cooling water inlet connector 3 and the cooling water outlet connector 10 are both quick connectors. The cooling water inlet connector 3 and the cooling water outlet connector 10 are made of high-quality stainless steel materials to cope with the corrosive environment and high-temperature conditions that may be encountered in the PVD process. The gas connector 1 is also a quick connector. The cooling water outlet ball valve 8 is provided with a flow control handle 7. By adjusting the position of the flow control handle, the operator can accurately control the drainage flow, discharge speed, and discharge pressure of the cooling water, thereby achieving fine adjustment of the cooling water circulation system. The cooling water inlet connector 3 and the cooling water outlet connector 10 are connected by a flexible connecting piece 5. In this embodiment, the flexible connecting piece 5 is a tension spring that can connect the cooling water inlet connector 3 and the cooling water outlet connector 10 together and allow the cooling water inlet connector 3 and the cooling water outlet connector 10 to adjust the relative position, thereby compensating for the positional deviation of the two connectors to a certain extent.

[0021] When the PVD rotating target is maintained, the original cooling water pipe connected to the inlet and outlet of the PVD rotating target is first disassembled, the PVD rotating target maintenance tool is connected to the PVD rotating target, the cooling water inlet joint 3 is connected to the water inlet of the PVD rotating target, the cooling water outlet joint 10 is connected to the water outlet, and the soft pipe connected to the cooling water outlet joint 10 is used for drainage. First, the pressure is released and the water is drained, the flow control handle 7 is slowly rotated, and the cooling water outlet ball valve 8 is gradually opened. The flow control handle 9 can accurately adjust the opening of the cooling water outlet ball valve 8, and the opening of the cooling water outlet ball valve 8 is controlled to an appropriate degree to smoothly control the pressure and the drainage pressure, so that the water in the PVD rotating target is stably discharged, the pressure is moderate, and the drainage soft pipe does not appear to swing. During the drainage process, the water discharge condition in the target cylinder is judged by observing the state of the water flow. If it is found that the water flow speed is slow, the opening of the cooling water outlet ball valve 8 can be appropriately increased to ensure that the water in the PVD rotating target cylinder can be discharged as much as possible. When it is observed that the water flow is significantly reduced, and further increasing the opening of the cooling water outlet ball valve 8 is ineffective, residual water blowing is started. The specific method is to open the inlet ball valve 4 and introduce compressed gas into the target cylinder through the gas joint 1. The compressed gas flows in the target cylinder and effectively acts on each corner of the target cylinder, thereby blowing out the residual water. After completing the residual water blowing, the pressure test can be performed. The specific method is to close the cooling water outlet ball valve 8, keep the inlet ball valve 4 open, continue to introduce compressed gas into the target cylinder, and closely observe the reading of the pressure gauge 12. When the pressure reaches the set value required by the pressure test, the inlet ball valve 2 is closed, and then the timing is started. Within a certain period of time, such as 20 minutes, the change of the reading of the pressure gauge 12 is observed. If the pressure remains within the required range, it indicates that the sealing performance of the target cylinder is good; if the pressure decreases significantly, the sealing parts of the target cylinder need to be checked to find and repair the leakage point.

[0022] Example 2:

[0023] The utility model provides a PVD rotary target maintenance tool, including gas joint 1, cooling water inlet joint 3, cooling water drainage joint 10, three -way connector 6, gas ball valve 4, cooling water drainage ball valve 8 and pressure gauge 12, gas joint 1 is connected in gas ball valve 4 one end, and the other end of gas ball valve 4 is connected with the interface of three -way connector 6, and the remaining two interfaces of three -way connector 6 are used to connect cooling water inlet joint 3 and pressure gauge 12 respectively, and cooling water inlet joint 3 is connected with three -way connector 6 through first stainless steel different diameter pair of thread joint 2, so that cooling water inlet joint 3 and three -way connector 6 can be connected to form airtight pipeline even if the diameter is different, and pressure gauge 12 is connected with three -way connector 6 through a section of fluid pipe 13, and the middle part of fluid pipe 13 is equipped with spiral pressure gauge buffer coil section 11, and pressure gauge buffer coil section 11 can effectively buffer the impact of airflow on pressure gauge 12, protect pressure gauge 12 from being damaged, prolong the service life of pressure gauge 12, and guarantee the detection accuracy of pressure gauge 12. The utility model discloses a PVD rotary target maintenance tool, including gas joint 1, cooling water inlet joint 3, cooling water drainage joint 10, three -way connector 6, gas ball valve 4, cooling water drainage ball valve 8 and pressure gauge 12, gas joint 1 is connected in gas ball valve 4 one end, and the other end of gas ball valve 4 is connected with the interface of three -way connector 6, and the remaining two interfaces of three -way connector 6 are used to connect cooling water inlet joint 3 and pressure gauge 12 respectively, and cooling water inlet joint 3 is connected with three -way connector 6 through first stainless steel different diameter pair of thread joint 2, so that cooling water inlet joint 3 and three -way connector 6 can be connected to form airtight pipeline even if the diameter is different, and pressure gauge 12 is connected with three -way connector 6 through a section of fluid pipe 13, and the middle part of fluid pipe 13 is equipped with spiral pressure gauge buffer coil section 11, and pressure gauge buffer coil section 11 can effectively buffer the impact of airflow on pressure gauge 12, protect pressure gauge 12 from being damaged, prolong the service life of pressure gauge 12, and guarantee the detection accuracy of pressure gauge 12. The utility model discloses a PVD rotary target maintenance tool, including gas joint 1, cooling water inlet joint 3, cooling water drainage joint 10, three -way connector 6, gas ball valve 4, cooling water drainage ball valve 8 and pressure gauge 12, gas joint 1 is connected in gas ball valve 4 one end, and the other end of gas ball valve 4 is connected with the interface of three -way connector 6, and the remaining two interfaces of three -way connector 6 are used to connect cooling water inlet joint 3 and pressure gauge 12 respectively, and cooling water inlet joint 3 is connected with three -way connector 6 through first stainless steel different diameter pair of thread joint 2, so that cooling water inlet joint 3 and three -way connector 6 can be connected to form airtight pipeline even if the diameter is different, and pressure gauge 12 is connected with three -way connector 6 through a section of fluid pipe 13, and the middle part of fluid pipe 13 is equipped with spiral pressure gauge buffer coil section 11, and pressure gauge buffer coil section 11 can effectively buffer the impact of airflow on pressure gauge 12, protect pressure gauge 12 from being damaged, prolong the service life of pressure gauge 12, and guarantee the detection accuracy of pressure gauge 12.

[0024] When the PVD rotating target is maintained, the original cooling water pipe connected to the inlet and outlet of the PVD rotating target is first disassembled, the PVD rotating target maintenance tool is connected to the PVD rotating target, the cooling water inlet joint 3 is connected to the water inlet of the PVD rotating target, the cooling water outlet joint 10 is connected to the water outlet, and the soft pipe connected to the cooling water outlet joint 10 is used for drainage. First, the pressure is released and the water is drained, the flow control handle 7 is slowly rotated, and the cooling water drainage ball valve 8 is gradually opened. The flow control handle 9 can accurately adjust the opening of the cooling water drainage ball valve 8, and the opening of the cooling water drainage ball valve 8 is controlled to an appropriate degree to smoothly control the pressure and the drainage pressure, so that the water in the PVD rotating target is stably discharged, the pressure is moderate, and the drainage soft pipe does not appear to swing. During the drainage process, the water discharge condition in the target cylinder is judged by observing the state of the water flow. If it is found that the water flow speed is slow, the opening of the cooling water drainage ball valve 8 can be appropriately increased to ensure that the water in the PVD rotating target cylinder can be discharged as much as possible. When it is observed that the water flow is significantly reduced, and further increasing the opening of the cooling water drainage ball valve 8 is ineffective, residual water blowing is started. The specific method is to open the inlet ball valve 4 and introduce compressed gas into the target cylinder through the gas joint 1. The compressed gas flows in the target cylinder and effectively acts on each corner of the target cylinder, thereby blowing out the residual water. After completing the residual water blowing, the pressure test can be performed. The specific method is to close the cooling water drainage ball valve 8, keep the inlet ball valve 4 open, continue to introduce compressed gas into the target cylinder, and closely observe the reading of the pressure gauge 12. When the pressure reaches the set value required by the pressure test, the inlet ball valve 2 is closed, and then the timing is started. Within a certain period of time, such as 20 minutes, the change of the reading of the pressure gauge 12 is observed. If the pressure remains within the required range, it indicates that the sealing performance of the target cylinder is good; if the pressure decreases significantly, the sealing parts of the target cylinder need to be checked to find and repair the leakage point.

[0025] Example 3:

[0026] The PVD rotating target maintenance tool comprises a gas joint 1, a cooling water inlet joint 3, a cooling water outlet joint 10, a three-way connector 6, an air inlet ball valve 4, a cooling water outlet ball valve 8 and a pressure gauge 12. The gas joint 1 is connected to one end of the air inlet ball valve 4, the other end of the air inlet ball valve 4 is connected to one interface of the three-way connector 6, the other two interfaces of the three-way connector 6 are respectively used for connecting the cooling water inlet joint 3 and the pressure gauge 12, the cooling water inlet joint 3 is connected to the three-way connector 6 through a first stainless steel variable-diameter union joint 2, so that the cooling water inlet joint 3 and the three-way connector 6 can be connected to form a sealed pipeline even if the diameters are different, the pressure gauge 12 is connected to the three-way connector 6 through a fluid pipe 13, the middle part of the fluid pipe 13 is provided with a spiral pressure gauge buffer coil section 11, the pressure gauge buffer coil section 11 can effectively buffer the impact of airflow on the pressure gauge 12, protect the pressure gauge 12 from damage, prolong the service life of the pressure gauge 12, and ensure the detection accuracy of the pressure gauge 12. The cooling water outlet joint 10 is connected to the cooling water outlet ball valve 8 through a second stainless steel variable-diameter union joint 9, so that the cooling water outlet joint 10 and the cooling water outlet ball valve 8 can be connected to form a sealed pipeline even if the diameters are different. Different from example 1, in this embodiment, the cooling water inlet joint 3 and the cooling water outlet joint 10 are both connected to the cooling water pipe joint on the PVD rotating target through threads. The cooling water inlet joint 3 and the cooling water outlet joint 10 are both made of high-quality stainless steel materials to cope with the corrosive environment and high-temperature conditions that may be encountered in the PVD process. The gas joint 1 is a quick connector. The cooling water outlet ball valve 8 is provided with a flow control handle 7, by adjusting the position of the flow control handle, the operator can accurately control the drainage flow, discharge speed and discharge pressure of the cooling water, so as to realize fine adjustment of the cooling water circulation system. The cooling water inlet joint 3 and the cooling water outlet joint 10 are connected through a flexible connecting piece 5, which is a tension spring in this embodiment. The tension spring can connect the cooling water inlet joint 3 and the cooling water outlet joint 10 together, and also allows the cooling water inlet joint 3 and the cooling water outlet joint 10 to adjust the relative position, to a certain extent, to compensate for the position deviation of the two joints.

[0027] When the PVD rotating target is maintained, the original cooling water pipe connected to the inlet and outlet of the PVD rotating target is first disassembled, the PVD rotating target maintenance tool is connected to the PVD rotating target, the cooling water inlet joint 3 is connected to the water inlet of the PVD rotating target, the cooling water outlet joint 10 is connected to the water outlet, and the soft pipe connected to the cooling water outlet joint 10 is used for drainage. First, the pressure relief drainage is performed, the flow control handle 7 is slowly rotated, and the cooling water drainage ball valve 8 is gradually opened. The flow control handle 9 can accurately adjust the opening degree of the cooling water drainage ball valve 8, and the opening degree of the cooling water drainage ball valve 8 is controlled at an appropriate degree to stably control the pressure relief pressure and the drainage pressure, so that the water in the PVD rotating target is stably discharged, the pressure is moderate, and the drainage soft pipe does not appear to swing. During the drainage process, the water discharge condition in the target cylinder is judged by observing the water flow state. If it is found that the water flow speed becomes slow, the opening degree of the cooling water drainage ball valve 8 can be appropriately increased to ensure that the water in the PVD rotating target cylinder can be discharged as much as possible. When it is observed that the water flow is significantly reduced, and further increasing the opening degree of the cooling water drainage ball valve 8 is ineffective, residual water purging is started. The specific method is to open the inlet ball valve 4 and introduce compressed gas into the target cylinder through the gas joint 1. The compressed gas flows in the target cylinder and effectively acts on each corner of the target cylinder, thereby blowing out the residual water. After completing the residual water purging, the pressure test can be performed. The specific method is to close the cooling water drainage ball valve 8, keep the inlet ball valve 4 open, continue to introduce compressed gas into the target cylinder, and closely observe the pressure gauge 12. When the pressure reaches the set value required by the pressure test, the inlet ball valve 2 is closed, and then the timing is started. Within a time period, such as 20 minutes, the pressure gauge 12 is observed. If the pressure remains within the required range, it indicates that the sealing performance of the target cylinder is good. If the pressure decreases significantly, the sealing parts of the target cylinder need to be checked to find and repair the leakage point.

Claims

1. A PVD rotary target maintenance jig, characterized by, The cooling water inlet joint (3) connected with the PVD rotating target and the cooling water outlet joint (10) are provided, the cooling water inlet joint (3) is connected with a gas joint (1) through an inlet ball valve (4), and the cooling water outlet joint (10) is connected with a cooling water outlet ball valve (8).

2. The PVD rotary target maintenance tool according to claim 1, wherein The cooling water inlet joint (3) is connected with a three-way joint (6), the inlet ball valve (4) is connected with the three-way joint (6), and the three-way joint (6) is further connected with a pressure gauge (12) through a fluid pipe (13).

3. The PVD rotary target maintenance tool according to claim 2, wherein The fluid pipe (13) is provided with a pressure gauge buffer coil section (11).

4. The PVD rotating target maintenance tool according to claim 1, wherein The cooling water outlet ball valve (8) is provided with a flow control handle.

5. The PVD rotating target maintenance tool according to claim 1, wherein, The cooling water inlet joint (3) and the cooling water outlet joint (10) are stainless steel parts.

6. The PVD rotary target maintenance jig according to any one of claims 1 to 5, characterized in that, The cooling water inlet joint (3) and the cooling water outlet joint (10) are connected through a flexible connecting piece (5).

7. The PVD rotating target maintenance tool according to claim 6, wherein The flexible connecting piece (5) is a tension spring.

8. The PVD rotating target maintenance tool according to claim 6, wherein, The flexible connecting piece (5) is a chain.

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