Automatic lifting device of atomic deposition coating equipment

Abstract

The utility model discloses an automatic lifting device of atomic deposition coating equipment, which comprises a supporting seat, the inner wall of the supporting seat is fixedly connected with fixing plates at equal intervals, the top of each fixing plate is rotatably connected with a worm gear, the inside of the supporting seat is symmetrically and fixedly connected with limiting rods, and the outer sides of the limiting rods are slidably connected with sliding plates. The top of the sliding plate is fixedly connected with lead screws at equal intervals. The utility model relates to the technical field of lifting devices, in particular to an automatic lifting device for atomic deposition coating equipment, which realizes the function of adjusting the height of the atomic deposition coating equipment during use by arranging a driving motor, a rotating shaft, a driving bevel gear, a driven bevel gear, a worm, a worm gear, a screw rod, a connecting block and a placing plate. The device can be suitable for different working environments, and the applicability is better; by arranging the placing plate, the side plate, the bidirectional screw rod, the adjusting block and the clamping plate, the function of auxiliary fixing of the atomic deposition coating equipment is realized, and the stability effect of the atomic deposition coating equipment during use can be enhanced.

Description

TECHNICAL FIELD

[0001] The utility model relates to lifting device technical field, concretely is atomic deposition coating equipment automatic lifting device. BACKGROUND

[0002] Atomic layer deposition coating equipment is an advanced coating technology for chemical, material science and semiconductor manufacturing field. It passes through gas phase precursor and reactant pulse alternation and passes into the reaction cavity, and the surface chemical reaction occurs on the substrate, forms the thin film. This technology can control the thickness, component, appearance and structure of thin film on nanometer scale through self-limiting precursor alternative saturation reaction.

[0003] In the actual use process, after completing deposition coating, the limiting piece is removed from the position of the substrate holder on the rack, and then the transfer assembly is started, that is, the carrying plate is driven to move away from the rack. With the movement of the carrying plate, the substrate holder can be taken out of the cavity, and the substrate on the substrate holder can be taken out or installed. In the above process, the staff manually carries the substrate holder, improves the convenience of carrying the substrate holder, and reduces the safety risk of carrying.

[0004] The above-mentioned patent realizes the function of assisting the atomic deposition coating equipment to use, but the height of the above-mentioned atomic layer deposition coating equipment is fixed during use, and the height of the equipment cannot be adjusted according to the actual demand, which is not convenient for application in different working environments, and the application effect of the equipment is poor, and the use is not convenient. Therefore, we propose an atomic deposition coating equipment automatic lifting device. Utility model content

[0005] In view of the defects of the prior art, the utility model provides an atomic deposition coating equipment automatic lifting device, which solves the problem that the height of the atomic layer deposition coating equipment is fixed during use, and the height of the equipment cannot be adjusted according to the actual demand, which is not convenient for application in different working environments, and the application effect of the equipment is poor.

[0006] To achieve the above purpose, the utility model realizes the following technical scheme:

[0007] The utility model provides an automatic lifting device of atomic deposition coating equipment, including support seat, the inner wall equidistance fixedly connected with fixed plate of support seat, the top rotationally connected with worm wheel of fixed plate, the inside fixed connection of support seat symmetry limit rod, the outside slide of limit rod is connected with slide plate, the top equidistance fixedly connected with lead screw of slide plate, the lead screw is screwed with worm wheel, one end of lead screw is fixedly connected with connecting block, the top fixedly connected with placing plate of connecting block, the top symmetry slide of placing plate is connected with clamping plate, the outside of clamping plate is equipped with antiskid soft pad, when using, because the threaded connection between lead screw and worm wheel, the movement of lead screw can be driven by the rotation of worm wheel, the movement of lead screw can be positioned by the setting of slide plate and limit rod, prevent from producing deviation, lead screw drives placing plate to move through connecting block, the height of atomic deposition coating equipment can be adjusted through the movement of placing plate, so as to be applicable to different working environment, the auxiliary clamping of atomic deposition coating equipment can be carried out through two groups of clamping plates, and the stability effect when using atomic deposition coating equipment is enhanced.

[0008] Preferably, the bottom of the placing plate is fixedly connected with a connecting rod, and the connecting rod is slidably connected with the support seat. The movement of the placing plate can be limited by the multiple connecting rods, thereby enhancing the stability of the placing plate during movement.

[0009] Preferably, the inside of the support seat is fixedly connected with support blocks at equal intervals, and a worm is rotatably connected between the two support blocks for cooperation with the worm wheel. The rotation of the worm drives the rotation of the worm wheel.

[0010] Preferably, the inside of the support seat is fixedly connected with fixed blocks at equal intervals, and a rotating shaft is rotatably connected between the fixed blocks and the support seat. The outside of the rotating shaft is fixedly connected with a driving bevel gear at equal intervals. One end of the worm is fixedly connected with a driven bevel gear for cooperation with the driving bevel gear. The rotation of the rotating shaft drives the rotation of the driving bevel gear, and the driving bevel gear drives the rotation of the worm through the driven bevel gear.

[0011] Preferably, the outside of the support seat is fixedly connected with a driving motor, and the output end of the driving motor is fixedly connected with the rotating shaft. The rotation of the rotating shaft is driven by the driving motor.

[0012] Preferably, the top of the placing plate is fixedly connected with a side plate. The inside of the side plate is symmetrically slidably connected with adjusting blocks. The clamping plates are fixedly connected with the adjusting blocks. The inside of the side plate is rotatably connected with a bidirectional lead screw. The adjusting blocks are threadedly connected with the bidirectional lead screw. One end of the bidirectional lead screw is fixedly connected with a handle. The rotation of the bidirectional lead screw is driven by the handle. The movement of the adjusting blocks is driven by the rotation of the bidirectional lead screw. The clamping plates are moved by the adjusting blocks.

[0013] The utility model provides an atomic deposition coating equipment automatic elevating gear, has the following beneficial effects compared with prior art:

[0014] 1、 the atomic deposition coating equipment automatic elevating gear, through setting up drive motor, pivot, driving bevel gear, driven bevel gear, worm, worm wheel, screw rod, connecting block and placing plate realizes the function that adjusts the height when using atomic deposition coating equipment, can be applicable to different working environment, and the suitability is better.

[0015] 2、 the atomic deposition coating equipment automatic elevating gear, through setting up placing plate, side plate, bidirectional screw rod, adjusting block and clamping plate realizes the function that assists fixed atomic deposition coating equipment, can enhance the stable effect when using atomic deposition coating equipment, convenient to use. DRAWINGS

[0016] Fig. 1 It is the structure schematic drawing of the utility model,

[0017] Fig. 2 It is the structure schematic drawing of the utility model placing plate,

[0018] Fig. 3 It is the internal structure schematic drawing of the utility model support seat,

[0019] Fig. 4 It is the structure schematic drawing of the utility model sliding plate.

[0020] In the drawing: 1, support seat, 2, placing plate, 3, drive motor, 4, side plate, 5, clamping plate, 6, connecting rod, 7, adjusting block, 8, bidirectional screw rod, 9, connecting block, 10, sliding plate, 11, driving bevel gear, 12, pivot, 13, screw rod, 14, limit rod, 15, fixed block, 16, worm wheel, 17, driven bevel gear, 18, worm, 19, support block, 20, fixed plate. DETAILED DESCRIPTION

[0021] The technical scheme in the utility model embodiment will be described clearly and completely below in conjunction with the drawings in the utility model embodiment, and obviously, the described embodiment is only a part of the embodiment of the utility model, not all the embodiment. Based on the embodiment in the utility model, all other embodiments obtained by the ordinary skill in the art without making creative labor belong to the range of the utility model protection.

[0022] Please refer to Figs. 1 to 4 The utility model provides a kind of technical scheme:

[0023] The utility model provides an automatic lifting device of atomic deposition coating equipment, including support seat 1, the inner wall equidistance fixed connection of support seat 1 has fixed plate 20, the top rotation of fixed plate 20 is connected with worm wheel 16, the inside symmetry fixed connection of support seat 1 has limit rod 14, the outside sliding of limit rod 14 is connected with sliding plate 10, the top equidistance fixed connection of sliding plate 10 has lead screw 13, and lead screw 13 is threadedly connected with worm wheel 16, and one end of lead screw 13 is fixedly connected with connecting block 9, and the top of connecting block 9 is fixedly connected with placing plate 2, and the top symmetry sliding of placing plate 2 is connected with clamping plate 5, and the outside of clamping plate 5 is equipped with antiskid cushion;When using, because the threaded connection between lead screw 13 and worm wheel 16, the rotation of worm wheel 16 can drive lead screw 13 to move, the setting of sliding plate 10 and limit rod 14 can limit the movement of lead screw 13, prevent from producing deviation, and lead screw 13 drives placing plate 2 to move through connecting block 9, and the height of atomic deposition coating equipment can be adjusted through the movement of placing plate 2, to be applicable to different working environment, and the atomic deposition coating equipment can be assisted clamping and fixed through the clamping plate 5 of two groups, and the stability effect when using atomic deposition coating equipment is enhanced.

[0024] Further, the bottom of the placing plate 2 is fixedly connected with the connecting rod 6, and the connecting rod 6 is slidably connected with the support seat 1. The setting of multiple connecting rods 6 can limit the movement of the placing plate 2, and the stability of the placing plate 2 during movement is enhanced.

[0025] Further, the inside of the support seat 1 is fixedly connected with the support block 19, and the worm 18 cooperating with the worm wheel 16 is rotatably connected between the two support blocks 19. The rotation of the worm 18 drives the worm wheel 16 to rotate.

[0026] Further, the inside of the support seat 1 is fixedly connected with the fixed block 15, and the shaft 12 is rotatably connected between the fixed block 15 and the support seat 1. The outside of the shaft 12 is fixedly connected with the driving bevel gear 11, and the end of the worm 18 is fixedly connected with the driven bevel gear 17 cooperating with the driving bevel gear 11. The rotation of the shaft 12 drives the driving bevel gear 11 to rotate, and the driving bevel gear 11 drives the worm 18 to rotate through the driven bevel gear 17.

[0027] Further, the outside of the support seat 1 is fixedly connected with the driving motor 3, and the output end of the driving motor 3 is fixedly connected with the shaft 12. The driving motor 3 drives the shaft 12 to rotate.

[0028] Further, the top of the placing plate 2 is fixedly connected with a side plate 4, the inside of the side plate 4 is symmetrically and slidably connected with an adjusting block 7, the clamping plate 5 is fixedly connected with the adjusting block 7, the inside of the side plate 4 is rotatably connected with a bidirectional screw rod 8, the adjusting block 7 is threadedly connected with the bidirectional screw rod 8, one end of the bidirectional screw rod 8 is fixedly connected with a handle, the handle drives the bidirectional screw rod 8 to rotate, the rotation of the bidirectional screw rod 8 drives the adjusting block 7 to move, and the adjusting block 7 drives the clamping plate 5 to move.

[0029] In use, the atomic deposition coating equipment is placed on the top of the placing plate 2 and abuts against the side plate 4, the handle at one end of the bidirectional screw rod 8 is rotated, the handle drives the bidirectional screw rod 8 to rotate, the rotation of the bidirectional screw rod 8 drives the adjusting block 7 to move, and the adjusting block 7 drives the clamping plate 5 to move, so that the atomic deposition coating equipment is clamped and fixed by the two groups of clamping plates 5, the stability of the atomic deposition coating equipment in use is enhanced, when the height of the atomic deposition coating equipment needs to be adjusted, the driving motor 3 is started, the driving motor 3 drives the driving bevel gear 11 to rotate through the rotating shaft 12, the driving bevel gear 11 drives the worm 18 to rotate through the driven bevel gear 17, and the worm 18 drives the worm wheel 16 to rotate, since the screw rod 13 is threadedly connected with the worm wheel 16, the rotation of the worm wheel 16 can drive the screw rod 13 to move, the movement of the screw rod 13 can be limited by the sliding plate 10 and the limiting rod 14, the screw rod 13 drives the placing plate 2 to move through the connecting block 9, the movement of the placing plate 2 can be limited by the multiple groups of connecting rods 6, the stability of the placing plate 2 in movement is enhanced, and the height of the atomic deposition coating equipment can be adjusted through the movement of the placing plate 2, so that the atomic deposition coating equipment is suitable for different working environments and convenient to use.

[0030] Meanwhile, the contents not described in detail in the specification all belong to the prior art known by the person skilled in the art.

[0031] It should be noted that, in the present text, relational terms such as first and second and the like can only be used to distinguish one entity or action from another entity or action, and do not necessarily require or imply that there is any such actual relationship or order between these entities or actions. Moreover, the terms "comprising", "containing" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such a process, method, article or equipment. Without more limitations. By the sentence "including a limited element, it does not exclude the existence of another identical element in the process, method, article or equipment including the element".

[0032] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An automatic lifting device for an atomic deposition coating equipment, comprising a support seat (1), characterized in that: The inner wall of the support seat (1) is equidistantly and fixedly connected with a fixed plate (20), the top of the fixed plate (20) is rotatably connected with a worm wheel (16), the inside of the support seat (1) is fixedly connected with a limiting rod (14) in a symmetrical manner, the outer side of the limiting rod (14) is slidably connected with a sliding plate (10), the top of the sliding plate (10) is equidistantly and fixedly connected with a lead screw (13), the lead screw (13) is threadedly connected with the worm wheel (16), one end of the lead screw (13) is fixedly connected with a connecting block (9), the top of the connecting block (9) is fixedly connected with a placing plate (2), the top of the placing plate (2) is slidably connected with a clamping plate (5) in a symmetrical manner, the outer side of the clamping plate (5) is provided with an antiskid soft pad.

2. The automatic lifting device of the atomic deposition coating equipment according to claim 1, characterized in that: The bottom of the placing plate (2) is fixedly connected with a connecting rod (6) in a symmetrical manner, and the connecting rod (6) is slidably connected with the support seat (1).

3. The automatic lifting device of the atomic deposition coating equipment according to claim 1, characterized in that: The inside of the support seat (1) is equidistantly and fixedly connected with a supporting block (19), and a worm (18) used in cooperation with the worm wheel (16) is rotatably connected between the two supporting blocks (19).

4. The automatic lifting device of the atomic deposition coating equipment according to claim 3, characterized in that: The inside of the support seat (1) is equidistantly and fixedly connected with a fixed block (15), a rotating shaft (12) is rotatably connected between the fixed block (15) and the support seat (1), the outer side of the rotating shaft (12) is equidistantly and fixedly connected with a driving bevel gear (11), and one end of the worm (18) is fixedly connected with a driven bevel gear (17) used in cooperation with the driving bevel gear (11).

5. The automatic lifting device of the atomic deposition coating equipment according to claim 4, characterized in that: The outer side of the support seat (1) is fixedly connected with a driving motor (3), and the output end of the driving motor (3) is fixedly connected with the rotating shaft (12).

6. The automatic lift of an atomic deposition coater apparatus according to claim 1, wherein: The top of the placing plate (2) is fixedly connected with a side plate (4), the inside of the side plate (4) is slidably connected with an adjusting block (7) in a symmetrical manner, the clamping plate (5) is fixedly connected with the adjusting block (7), the inside of the side plate (4) is rotatably connected with a bidirectional lead screw (8), the adjusting block (7) is threadedly connected with the bidirectional lead screw (8), and one end of the bidirectional lead screw (8) is fixedly connected with a handle.

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