Reusable high-purity helium recovery device

Abstract

The utility model relates to the field of high-purity gas recycling, in particular to a reusable high-purity helium recovery device. Comprising a pneumatic diaphragm valve, a filter, a recovery tank, a one-way reciprocating pump and a helium tank which are arranged along the flow direction of high-purity helium, the pneumatic diaphragm valve is used for controlling the pressure of the recovery tank; the filter is used for filtering solid particles in high-purity helium; the recovery tank is used for recovering high-purity helium, and the one-way reciprocating pump is used for compressing and pressurizing the high-purity helium in the recovery tank and filling the high-purity helium into a helium bottle. According to the nitrogen trifluoride production pipeline recycling device, the recycling device capable of recycling the high-purity helium is connected in the nitrogen trifluoride production pipeline, waste of the high-purity helium is reduced through repeated use, the production cost requirement can be lowered, the cleanliness of the production pipeline can be guaranteed through the recycled high-purity helium, and the production quality is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of high -purity gas recycling, specifically related to a kind of reusable high-purity helium recovery device. BACKGROUND

[0002] Nitrogen trifluoride is a colorless, odorless, stable gas at room temperature, a strong oxidizing agent, nitrogen trifluoride is an excellent plasma etching gas in microelectronics industry, it is cracked into active fluorine ions during ion etching, these fluorine ions have excellent etching rate and selectivity (to silicon oxide and silicon) on silicon and tungsten compounds, it leaves no residue on the surface of the etched material during etching, it is a very good cleaning agent, and it is widely used in chip manufacturing and high-energy lasers. Nitrogen trifluoride has very excellent etching rate and selectivity, and leaves no residue on the surface of the etched material, and is also a good cleaning agent. With the development of nanotechnology and the large-scale development of electronic industry, its demand will increase.

[0003] However, during the preparation of nitrogen trifluoride, inert gas is needed to replace and pressurize the entire reaction pipeline system to remove air in the entire reaction pipeline system. The commonly used gas is high-purity helium. For example, a high-purity helium recovery system for compressor commissioning is disclosed in Chinese patent CN220038170U, which mainly recovers and reuses the high-purity helium for commissioning by using the existing high-purity helium commissioning system of the diaphragm compressor. However, the price of diaphragm compressor is usually high, and the equipment is relatively complex, which increases the initial investment cost. If high-purity helium is recovered in the field of nitrogen trifluoride preparation, not only the cost cannot be saved, but also the equipment cost may cause a loss.

[0004] In summary, it is urgent to develop a high-purity helium recovery device that can effectively recover and utilize high-purity helium and reduce investment cost. UTILITY MODEL CONTENT

[0005] In view of the technical problem that high-purity helium used for purifying and pressurizing the reaction pipeline system cannot be effectively recovered and utilized before the preparation of nitrogen trifluoride, the utility model provides a reusable high-purity helium recovery device, which can effectively recover and utilize high-purity helium and reduce investment cost. The technical scheme of the utility model is as follows:

[0006] A reusable high-purity helium recovery device, comprising a pneumatic diaphragm valve, a filter, a recovery tank, a one-way reciprocating pump and a helium cylinder connected in sequence along the flow direction of high-purity helium.

[0007] The pneumatic diaphragm valve is used for controlling the pressure of the recovery tank; the filter is used for filtering solid particles in the high-purity helium; the recovery tank is used for recovering the high-purity helium; and the one-way reciprocating pump is used for compressing and pressurizing the high-purity helium from the recovery tank to fill the helium cylinder.

[0008] Preferably, the pneumatic diaphragm valve controls the pressure of the recovery tank to be -0.1-0.3 MPa.

[0009] Preferably, the filter is a 3-nanometer filter.

[0010] Preferably, the recovery tank is a middle-in middle-out recovery tank.

[0011] Preferably, the air suction port of the one-way reciprocating pump is communicated with the air outlet of the recovery tank, the air discharge port of the one-way reciprocating pump is communicated with the helium cylinder inlet, and the one-way reciprocating pump is an oil-gas separation one-way reciprocating pump.

[0012] Preferably, a recovery valve for recovering the high-purity helium is arranged on the pipeline communicated with the helium cylinder, and the helium cylinder and the recovery valve are connected in series and then connected to the one-way reciprocating pump.

[0013] Preferably, the number of the helium cylinders is not less than two, and the helium cylinders are connected in parallel, and when the pressure of one of the helium cylinders exceeds 7 MPa, the one-way reciprocating pump is switched to another helium cylinder for filling.

[0014] Preferably, the high-purity helium recovery device is further provided with a reaction pipeline system requiring high-purity helium to replace air, the air outlet of the reaction pipeline system is communicated with the pneumatic diaphragm valve, and the air inlet of the reaction pipeline system is communicated with the helium cylinder.

[0015] Preferably, a gas valve and a pressure reducer are arranged between the helium cylinder and the reaction pipeline system, and the gas valve and the helium cylinder are connected in series and then connected to the pressure reducer.

[0016] Preferably, the pressure of the reaction pipeline system is controlled to be 0.5-1 MPa by the pressure reducer.

[0017] The high-purity helium recovery device has the following beneficial effects:

[0018] The recovery device connected in the nitrogen trifluoride production pipeline can realize the repeated use of high-purity helium, the high-purity helium discharged from the reaction pipeline system is pressurized and filled by the one-way reciprocating pump, and then returned to the reaction pipeline system, so that the high-purity helium can be reused, the waste of high-purity helium is reduced, the production cost is reduced, the cleanliness of the production pipeline can be ensured by the reused high-purity helium, and the production quality is improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings used in the specific embodiments or the prior art description. In all the drawings, similar elements or parts are generally identified by similar reference signs. In the drawings, the elements or parts are not necessarily drawn according to the actual proportions.

[0020] Figure 1 The application provides a reusable high-purity helium recovery device.

[0021] The drawings are explained as follows: 1, a pneumatic diaphragm valve; 2, a filter; 3, a recovery tank; 4, a one-way reciprocating pump; 5, a recovery valve; 6, a helium cylinder; 7, a gas valve; 8, a pressure reducer; 9, a reaction pipeline system. Specific embodiments

[0022] In order to further illustrate the technical means and effects adopted by the present application to achieve the predetermined technical purposes, the specific embodiments, structures, features and functions according to the present application will be described in detail below in combination with the drawings and preferred embodiments.

[0023] Embodiments

[0024] A reusable high-purity helium recovery device, comprising a pneumatic diaphragm valve 1, a filter 2, a recovery tank 3, a one-way reciprocating pump 4 and a helium cylinder 6 arranged along the flow direction of high-purity helium;

[0025] The pneumatic diaphragm valve 1 is used for the pressure of the recovery tank 3, and the pneumatic diaphragm valve 1 can control the pressure of the recovery tank 3 to be-0.1-0.3 MPa, so as to prevent overpressure events caused by excessively high pressure. In the present embodiment, the type of the pneumatic diaphragm valve is M8.1V MT 2V1 I / M.

[0026] The filter 2 is used for filtering small particles in the production process and air dust after the production pipeline is opened, so as to maintain the purity of high-purity helium and prevent internal leakage and damage of the valves. The filter 2 is a 3-nanometer filter.

[0027] The recovery tank 3 is used for recovering high-purity helium. The recovery tank 3 is a middle-in middle-out recovery tank 3. This design reduces fluid resistance and realizes uniform distribution of gas, improves gas transmission and storage efficiency, and at the same time, maintains pressure balance and reduces airflow impact, enhances the stability of the system and the service life of the tank body. The recovery tank 3 stores the high-purity helium in the reaction pipeline system 9, and realizes production transition.

[0028] The one-way reciprocating pump 4 is used for compressing and pressurizing the high-purity helium from the recovery tank 3 to the helium cylinder 6 to provide a delivery capacity; the suction port of the one-way reciprocating pump 4 is communicated with the gas outlet of the recovery tank 3, and the exhaust port of the one-way reciprocating pump 4 is communicated with the inlet of the helium cylinder 6; the one-way reciprocating pump 4 is an oil-gas separation one-way reciprocating pump 4, which can completely avoid oil leakage into the pipeline to cause high-purity helium and production pollution; the pipeline communicated with the one-way reciprocating pump 4 and the helium cylinder 6 is provided with a recovery valve 5 for recovering high-purity helium, and the recovery valve 5 is used for switching the helium cylinder 6 and can also avoid the reaction pipeline being empty and polluted.

[0029] The number of the helium cylinders 6 is not less than two, and one recovery valve 5 is connected in series with each helium cylinder; finally, the helium cylinders 6 are connected in parallel to the exhaust port of the one-way reciprocating pump; when the pressure of one of the helium cylinders 6 exceeds 7 MPa, the recovery valve 5 is switched to another helium cylinder 6 for charging.

[0030] The high-purity helium recovery device further comprises a reaction pipeline system 9 requiring high-purity helium to replace air, the gas outlet of the reaction pipeline system 9 is communicated with the pneumatic diaphragm valve 1, and the gas inlet of the reaction pipeline system 9 is communicated with the helium cylinder 6. The gas valve 7 and the pressure reducer 8 are arranged between the helium cylinder 6 and the reaction pipeline system 9, the gas outlet of the helium cylinder is connected in series with the gas valve 7 and finally connected into the pressure reducer 8; the pressure of the reaction pipeline system 9 is controlled at 0.5-1 MPa by the pressure reducer 8.

[0031] The device implementation principle is that before preparing nitrogen trifluoride, high-purity helium with a pressure of 0.5-1 MPa is required to pressurize and replace the air in the entire reaction pipeline system 9 to avoid affecting the purity of the nitrogen trifluoride or the reaction process.

[0032] The high-purity helium in the reaction pipeline system 9 enters the recovery tank 3 through the gas inlet of the recovery tank 3 through the pneumatic diaphragm valve 1 and the nano filter 2, wherein the pneumatic diaphragm valve 1 controls the pressure of the high-purity helium entering the recovery tank 3 to be-0.1-0.3 MPa, and the nano filter 2 filters the small particles in the production process and the air dust after the production pipeline is empty, so as to maintain the purity of the high-purity helium and prevent damage caused by leakage of each valve;

[0033] The high-purity helium entering the recovery tank 3 enters the pipeline through the gas outlet of the recovery tank 3, and then enters the one-way reciprocating pump 4 through the suction port of the one-way reciprocating pump 4. Under the action of the one-way reciprocating pump 4, the entering high-purity helium is pressurized, enters the helium cylinder 6 through the exhaust port of the one-way reciprocating pump 4, and when the pressure of the helium cylinder 6 exceeds 7 MPa, the gas inlet is stopped, the recovery valve 5 on the pipeline between the helium cylinder 6 and the one-way reciprocating pump 4 is closed, and another helium cylinder 6 is switched to.

[0034] The high-purity helium in the helium bottle 6 is discharged through the air valve 7 corresponding to the outlet of the helium bottle 6, and is reduced in pressure to 0.5-1 MPa through the pressure reducer 8, and then is introduced into the reaction pipeline system 9 through the gas inlet of the reaction pipeline system 9, and continues to maintain pressure and replace the air in the reaction pipeline system 9, and the cycle is repeated until the reaction requirement is reached, so that the high-purity helium is recycled, and the recovery rate of the high-purity helium is 95%, and the helium use rate is reduced by 85%.

[0035] The above is only a preferred embodiment of the present application, and does not limit the present application in any form. Although the present application has been disclosed in the preferred embodiment, it is not intended to limit the present application. Any person skilled in the art can make some changes or modifications to the equivalent embodiments within the scope of the technical solution of the present application without departing from the technical solution of the present application. Any modification, equivalent change and modification of the above embodiments, which does not depart from the technical solution of the present application, are still within the scope of the technical solution of the present application.

Claims

1. A reusable high purity helium recovery apparatus, characterized by, The device comprises a pneumatic diaphragm valve (1), a filter (2), a recovery tank (3), a one-way reciprocating pump (4) and a helium cylinder (6) connected in sequence along a high-purity helium stream. The pneumatic diaphragm valve (1) is used to control the pressure of the recovery tank (3); the filter (2) is used to filter solid particles in the high-purity helium; the recovery tank (3) is used to recover high-purity helium; and the one-way reciprocating pump (4) is used to compress and pressurize the high-purity helium from the recovery tank (3) to the helium cylinder (6).

2. The reusable high purity helium recovery apparatus of claim 1, wherein, The pneumatic diaphragm valve (1) controls the pressure of the recovery tank (3) to be -0.1-0.3 MPa.

3. The reusable high purity helium recovery apparatus of claim 1, wherein, The filter (2) is a 3-nanometer filter.

4. The reusable high purity helium recovery apparatus of claim 1, wherein, The recovery tank (3) is a middle-in middle-out recovery tank.

5. The reusable high purity helium recovery apparatus of claim 1, wherein, The air suction port of the one-way reciprocating pump (4) is in communication with the air outlet of the recovery tank (3), and the air discharge port of the one-way reciprocating pump (4) is in communication with the inlet of the helium cylinder (6); the one-way reciprocating pump (4) is an oil-gas separation one-way reciprocating pump.

6. The reusable high purity helium recovery apparatus of claim 1, wherein, A recovery valve (5) for recovering high-purity helium is arranged on the pipeline in communication between the one-way reciprocating pump (4) and the helium cylinder (6); the helium cylinder (6) and the recovery valve (5) are connected in series and then incorporated into the one-way reciprocating pump (4).

7. The reusable high purity helium recovery apparatus of claim 1, wherein, The number of the helium cylinders (6) is not less than two, and the helium cylinders (6) are connected in parallel; when the pressure of one of the helium cylinders (6) exceeds 7 MPa, the one-way reciprocating pump (4) switches to another helium cylinder (6) for charging.

8. A reusable high purity helium recovery apparatus according to claim 7, wherein, The high-purity helium recovery device is further provided with a reaction pipeline system (9) requiring high-purity helium to replace air; the air outlet of the reaction pipeline system (9) is in communication with the pneumatic diaphragm valve (1), and the air inlet of the reaction pipeline system (9) is in communication with the helium cylinder (6).

9. A reusable high purity helium recovery apparatus according to claim 8, wherein, A gas valve (7) and a pressure reducer (8) are arranged between the helium cylinder (6) and the reaction pipeline system (9); the gas valve (7) is connected in series with the helium cylinder (6) and then incorporated into the pressure reducer (8).

10. The reusable high purity helium recovery apparatus of claim 8, wherein, The pressure of the reaction pipeline system (9) is controlled by the pressure reducer (8) to be 0.5-1 MPa.

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