Water cooling device for high-temperature diffusion oxidation furnace

Abstract

The water cooling device comprises a furnace door front cover, a sealing piece and a furnace door rear cover, the sealing piece is fixed on the outer side of the front end of the furnace door front cover, the furnace door rear cover is fixed at the rear end of the furnace door front cover, and furnace door paddle cylinder flanges are arranged on the left side and the right side of the rear end of the furnace door rear cover. A circle of closed boss is fixed to the outer side in the furnace door front cover, an unclosed boss is fixed to the position, located on the inner side of the closed boss, in the furnace door front cover, and protruding rings are fixed to the left side and the right side in the furnace door front cover. The closed boss is arranged on the outer side of the interior of the furnace door front cover, the water channel is arranged between the closed boss and the inner wall of the furnace door front cover, the non-closed boss is arranged on the inner side of the closed boss, and the air channel is arranged between the closed boss and the non-closed boss, so that water can be input into the water channel for cooling; in addition, air with the temperature lower than that of the water can be introduced into the air channel, and therefore the effect of cooling the sealing ring can be guaranteed and improved through heat exchange between the air and the water.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of diffusion furnace, concretely to a water cooling device for high temperature diffusion oxidation furnace. BACKGROUND

[0002] The high temperature diffusion oxidation furnace is called diffusion furnace, which is a kind of equipment for semiconductor manufacturing, mainly used for oxidation and diffusion treatment of semiconductor materials under high temperature conditions, at present, in order to ensure the sealing property of the diffusion furnace, a sealing ring is usually arranged on the furnace door, and the sealing effect of the furnace door will directly affect the stability of the temperature in the furnace, thereby affecting the quality of the silicon wafer.

[0003] Now the diffusion furnace process environment has certain particularity, the furnace tube temperature is very high during the diffusion process, the sealing ring is in high temperature environment for a long time, which will accelerate the aging and cause the sealing failure, and even affect the function of the diffusion furnace and the quality of the silicon wafer, therefore, the furnace door is provided with a water cooling function, for example, the utility model discloses a kind of water cooling furnace door and diffusion furnace in patent document number CN220437124U, the water cooling furnace door of this diffusion furnace in actual use process, by the water into water channel and flows to sealing ring cooling, such water in flow heat exchange to the latter half, temperature rises, it will affect the effect of sealing ring cooling. UTILITY MODEL CONTENTS

[0004] The utility model aims at overcoming the defects of prior art, and provides a kind of water cooling device for high temperature diffusion oxidation furnace, to solve the problems raised in the above background.

[0005] A kind of water cooling device for high temperature diffusion oxidation furnace, including furnace door front cover, sealing element and furnace door rear cover, the sealing element is fixed at furnace door front cover front end outer side, the furnace door rear cover is fixed at furnace door front cover rear end, the left and right sides of the rear end of the furnace door rear cover are equipped with furnace door paddle cylinder flange, the inside of the furnace door front cover is fixed with a closed boss, the inside of the furnace door front cover and located in the inside of closed boss is fixed with not closed boss, the left and right sides of the inside of the furnace door front cover are fixed with convex ring, the convex ring is located in the inside of not closed boss, the furnace door paddle cylinder flange and convex ring one to one, the lower part between the convex ring and closed boss is fixed with separation boss, the separation boss is located between the first end and the last end of closed boss, the left and right sides of the lower side of the front end of the furnace door rear cover are respectively fixed with water inlet valve and water outlet valve, the upper side of the water inlet valve is equipped with air inlet valve, the upper side of the water outlet valve is equipped with air outlet valve, the air inlet valve and air outlet valve are fixed with furnace door rear cover.

[0006] Further, the water channel is separated between the outer wall of the closed boss and the inner wall of the furnace door front cover, and the water inlet valve and the water outlet valve are communicated with the water channel.

[0007] Further, the closed boss inner wall and the un-closed boss outer wall are spaced by an air channel, and the air inlet valve and the air outlet valve are communicated with the air channel.

[0008] Further, the handle of the water inlet valve and the handle of the air inlet valve, and the handle of the water outlet valve and the handle of the air outlet valve are rotationally connected by a connecting rod.

[0009] Further, the connecting rods are connected by a connecting shaft.

[0010] Further, the partition boss is in a "7" shape.

[0011] The utility model discloses beneficial effects: through setting up the closed boss in the inside outside of furnace door front cover, make the closed boss and the water channel between furnace door front cover inner wall interval, and the un-closed boss is set up in the inside of closed boss, and the air channel is spaced between the closed boss and the un-closed boss, can be inputted into the air of temperature than the temperature of water still low in the air channel while cooling through the water, in this way, can pass through air and water heat exchange, to reach guarantee the effect of improving the cooling of sealing ring. BRIEF DESCRIPTION OF DRAWINGS

[0012] The accompanying drawings, which are incorporated herein and constitute part of the specification, illustrate embodiments of the present disclosure and, together with the description, further serve to explain the principles of the present disclosure and to enable a skilled in the relevant art to make and use the present disclosure.

[0013] Figure 1 It is overall front view schematic drawing of the utility model;

[0014] Figure 2 It is overall rear view schematic drawing of the utility model;

[0015] Figure 3 It is furnace door front cover rear view schematic drawing of the utility model;

[0016] Figure 4 It is A partial enlarged view of the utility model; Figure 2

[0017] In the drawing: 1-furnace door front cover, 2-sealing element, 3-furnace door rear cover, 4-furnace door rear cover flange, 5-closed boss, 6-water channel, 7-un-closed boss, 8-partition boss, 9-convex ring, 10-water inlet valve, 11-water outlet valve, 12-air inlet valve, 13-air outlet valve, 14-connecting rod, 15-connecting shaft, 16-air channel. DETAILED DESCRIPTION

[0018] ​Clearly, the described embodiments are merely a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0019] Please refer to Figures 1-4 The utility model provides a water cooling device for high temperature diffusion oxidation furnace, including furnace door front cover 1, sealing element 2 and furnace door rear cover 3, sealing element 2 is fixed in furnace door front cover 1 front end outside, furnace door rear cover 3 is fixed in furnace door front cover 1 rear end, both sides of furnace door rear cover 3 rear end are equipped with furnace door paddle cylinder flange 4, furnace door front cover 1 inside outside is fixed with a circle closed boss 5, and the water channel 6 is spaced between the outer wall of closed boss 5 and the inner wall of furnace door front cover 1, the unsealed boss 7 is fixed in the inside of closed boss 5 in furnace door front cover 1, the convex ring 9 is fixed in the left and right sides of furnace door front cover 1, the convex ring 9 is located in the inside of unsealed boss 7, the convex ring 9 lower part is fixed with the partition boss 8 between closed boss 5, the partition boss 8 is " 7 " type structure, and the partition boss 8 is located between the first end and the terminal end of closed boss 5, the water inlet valve 10 and the water outlet valve 11 are respectively fixed through the lower side of furnace door rear cover 3 front end, and the water inlet valve 10 and the water outlet valve 11 are communicated with water channel 6, by water inlet valve 10, water can be introduced into water channel 6, and clockwise flow to the water outlet valve 11, and then discharge from the water outlet valve 11, so that the outer periphery sealing element 2 can be cooled;

[0020] The water inlet valve 10 is provided with the air inlet valve 12, the water outlet valve 11 is provided with the air outlet valve 13, the air inlet valve 12 and the air outlet valve 13 are fixed through the furnace door rear cover 3, the air channel 16 is spaced between the inner wall of closed boss 5 and the outer wall of unsealed boss 7, the air inlet valve 12 and the air outlet valve 13 are communicated with air channel 16, the air inlet valve 12 is used to introduce the air with the temperature lower than the temperature of water, so that the air enters air channel 16 and flows in the clockwise direction to be blocked by partition boss 8, then enters the middle of furnace door front cover 1 inside, and finally flows to the air outlet valve 13 in the counterclockwise direction, so that the water can be cooled by the heat exchange between the low-temperature air and the water to ensure the cooling effect of the sealing element 2.

[0021] The hand wheel of the water inlet valve 10 and the hand wheel of the air inlet valve 12, the hand wheel of the water outlet valve 11 and the hand wheel of the air outlet valve 13 are rotationally connected with connecting rods 14, when the water inlet valve 10 and the air inlet valve 12 need to be opened, the hand wheels of the water inlet valve 10 and the air inlet valve 12, the hand wheels of the water outlet valve 11 and the air outlet valve 13 can be simultaneously rotated by pinching the two connecting rods 14, so as to simultaneously open the water inlet valve 10 and the air inlet valve 12, the water outlet valve 11 and the air outlet valve 13.

[0022] The connecting rods 14 are connected with a connecting shaft 15, by pinching the connecting shaft 15, the two connecting rods 14 can be simultaneously pulled, so as to conveniently simultaneously open the water inlet valve 10, the air inlet valve 12, the water outlet valve 11 and the air outlet valve 13.

[0023] The above is only the preferred embodiment of the present application, it should be pointed out that, for those skilled in the technical field, without departing from the principles of the present application, can make a number of improvements and refinements, these improvements and refinements should also be considered as the protection scope of the present application.

Claims

1. A water cooling device for high temperature diffusion oxidation furnace, comprising a furnace door front cover (1), a sealing element (2) and a furnace door rear cover (3), the sealing element (2) is fixed on the outer side of the front end of the furnace door front cover (1), the furnace door rear cover (3) is fixed on the rear end of the furnace door front cover (1), and the left and right sides of the rear end of the furnace door rear cover (3) are provided with furnace door paddle cylinder flanges (4), characterized in that: a closed boss (5) is fixed on the outer side of the inside of the furnace door front cover (1), an unclosed boss (7) is fixed on the inside of the furnace door front cover (1) and located inside the closed boss (5), a convex ring (9) is fixed on the left and right sides of the inside of the furnace door front cover (1), the convex ring (9) is located inside the unclosed boss (7), the furnace door paddle cylinder flanges (4) correspond to the convex rings (9) one by one, a partition boss (8) is fixed between the lower part of the convex ring (9) and the closed boss (5), the partition boss (8) is located between the first end and the last end of the closed boss (5), and water inlet valves (10) and water outlet valves (11) are respectively fixed on the left and right sides of the lower side of the front end of the furnace door rear cover (3) and penetrate the furnace door rear cover (3), air inlet valves (12) are arranged above the water inlet valves (10), air outlet valves (13) are arranged above the water outlet valves (11), and the air inlet valves (12) and the air outlet valves (13) penetrate the furnace door rear cover (3). The outer wall of the closed boss (5) and the inner wall of the furnace door front cover (1) are spaced apart by a water channel (6), and the water inlet valves (10) and the water outlet valves (11) communicate with the water channel (6).

2. A water cooling device for a high temperature diffusion oxidation furnace according to claim 1, characterized in that: The inner wall of the closed boss (5) and the outer wall of the unclosed boss (7) are spaced apart by an air channel (16), and the air inlet valves (12) and the air outlet valves (13) communicate with the air channel (16).

3. A water cooling device for a high temperature diffusion oxidation furnace according to claim 1, characterized in that: A connecting rod (14) is rotatably connected between the hand wheels of the water inlet valves (10) and the air inlet valves (12) and between the hand wheels of the water outlet valves (11) and the air outlet valves (13).

4. A water cooling device for a high temperature diffusion oxidation furnace according to claim 1, characterized in that: Connecting shafts (15) are connected between the connecting rods (14).

5. A water cooling device for a high temperature diffusion oxidation furnace according to claim 4, characterized in that: The partition boss (8) has a "7" shaped structure.

6. A water cooling device for a high temperature diffusion oxidation furnace according to claim 1, characterized in that: ​

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