Hollow cathode Hall ion source structure

Abstract

The utility model provides a hollow cathode Hall ion source structure, which comprises a hollow cathode and an anode seat, the hollow cathode comprises a box body and a cathode cylinder, the middle part of the cathode cylinder is provided with a tantalum tube, the input end of the tantalum tube is connected with the output end of a gas path pipe through a first clamping sleeve joint, and the output end of the gas path pipe is connected with the anode seat through a second clamping sleeve joint. The output end of the tantalum tube is aligned with the transmitting end of the cathode tube; argon is introduced to the input end of the gas circuit tube, the second electrifying tube, the second connecting plate, the gas circuit tube and the cathode tube form a circuit loop, argon collides with hot electrons of the tantalum tube to generate ionization and form plasmas, the plasmas accelerate to move towards the anode along magnetic lines to form ion beams due to the constraint of a magnetic field, the ionization evaporation height is increased, and the ionization evaporation efficiency is improved. And the tantalum tube has corrosion resistance, so that ablation and loss of the surface of the cathode cannot be caused by collision of electrons and argon, and the service life of the hollow cathode is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of ion source auxiliary coating, more specifically, hollow cathode hall ion source structure is related to. BACKGROUND

[0002] Hollow Cathode Hall lon Source is a commonly used ion source, widely used in ion beam technology, mass spectrometry and ion implantation fields. It generates plasma in the hollow cathode, so that ions can be generated and accelerated to realize the generation of ion beam.

[0003] Hollow Cathode Hall lon Source is composed of cathode, anode and magnetic field, the cathode is hollow, filled with working gas, usually inert gas such as argon, the anode is usually a metal ring, used to accelerate the generated ions, and the magnetic field is generated by placing magnets or electromagnetic coils around the ion source, its role is to limit the diffusion of plasma, and guide the ion to accelerate to the anode. When the cathode is connected with enough current, the electron will collide with the working gas, produce ionization, form plasma, and these ionized working gas ions will be constrained by the magnetic field, forming a stable ion cloud. The ion cloud will move along the magnetic force line under the action of the magnetic field, and form an ion beam.

[0004] Hollow Cathode Hall lon Source has many advantages. First, it can produce high-quality ion beam, because the formation of plasma and the acceleration of ion beam are carried out in vacuum environment, so the ion beam is almost not affected by the collision and diffusion of gas molecules, thus ensuring the collimation and stability of the ion beam. Secondly, the working pressure of Hollow Cathode Hall lon Source is relatively low, usually in the range of 10^-3 to 10^-6 Torr, which is conducive to reducing the gas interference between the ion source and other equipment. In addition, Hollow Cathode Hall lon Source also has high ion yield and long service life, which can meet most experimental and application requirements.

[0005] Prior art CN 217361492 U discloses a low pollution hollow cathode hall ion source sub source, which is located at the lower end face of the reflector plate and adopts a high thermal conductivity metal gas distributor, which is in direct contact with a cold water plate made of high thermal conductivity metal material, and the reflector plate, the gas distributor and the cold water plate are directly combined together and in a neutral state in terms of electric potential. Even if the ion source works at 1KW power for a long time, there is almost no sputtering phenomenon of the reflector plate, effectively avoiding the influence of ion source material sputtering on film forming quality, and greatly widening the use range of hollow cathode hall source.

[0006] But through its drawings can be seen, the cathode components box in the above-mentioned technology is a whole, easy to cause electric shock danger, and the cathode components and the anode components are connected through multiple connecting pieces, having instability. Content of the utility model

[0007] Therefore, in order to solve the above problems, the utility model provides a hollow cathode Hall ion source structure, two connecting plates that are staggered up and down are arranged to be electrified to form a loop, insulation blocks 26 are arranged on the inverted L-shaped horizontal plate of the second connecting plate 24 and the inverted L-shaped horizontal plate of the second connecting plate 24 and the top of the first connecting plate 21, the bottom of the first connecting block 213 and the third connecting block 214, so that the box 2 is not easy to cause electric shock, and the base assembly 4 is integrally formed, so that the connection between the hollow cathode 1 and the anode is stable.

[0008] The hollow cathode Hall ion source structure comprises a hollow cathode 1 and an anode seat 5, one side of the hollow cathode 1 is connected with the anode seat 5 through a base assembly 4, the hollow cathode 1 comprises a box body 2 and a cathode cylinder 3, the cathode cylinder 3 is connected above the box body 2, the box body 2 comprises a first connecting plate 21, a second connecting plate 24 and a cover plate 27, characterized in that: the first connecting plate 21 and the second connecting plate 24 are arranged in an upper and lower staggered manner, the cover plate 27 is arranged on the two sides of the first connecting plate 21 and the second connecting plate 24, the bottom of the first connecting plate 21 is provided with a first opening 211, the input end of a first current pipe 22 is connected through the first opening 211, the output end of the first current pipe 22 is connected with the shell 51 of the cathode cylinder 3 through a first connecting block 213, the bottom of the first connecting plate 21 is also provided with a second opening 212, the input end of a second current pipe 23 is connected through the second opening 212, the output end of the second current pipe 23 is connected with one end of the second connecting plate 24 through a second connecting block 241, so that the second connecting plate 24 is electrified, the second connecting plate 24 is in an inverted L shape, a gap is arranged between the vertical plate of the inverted L shape of the second connecting plate 24 and one end of the first connecting plate 21, and a gap is arranged between the horizontal plate of the inverted L shape of the second connecting plate 24 and the top of the first connecting plate 21, so that the electric charge carried by the second connecting plate 24 is insulated from the first connecting plate 21, and electric shock is not easy to occur; the bottom of the first connecting plate 21 is also provided with a third opening, the input end of a gas path pipe 25 is connected through the third opening, the output end of the gas path pipe 25 is connected to the inside of the cathode cylinder 3 through the second connecting plate 24, so that the gas path pipe 25 and the cathode cylinder 3 are electrified; a tantalum tube 32 is arranged in the middle of the cathode cylinder 3, the input end of the tantalum tube 32 is connected with the output end of the gas path pipe 25 through a first clamping sleeve joint 33, and the output end of the tantalum tube 32 is aligned with the emission end of the cathode cylinder 3; argon gas is introduced into the input end of the gas path pipe 25, the second current pipe 23, the second connecting plate 24, the gas path pipe 25 and the cathode cylinder 3 form a circuit loop, the argon gas collides with the hot electrons of the tantalum tube 32 to generate ionization and form plasma, the plasma moves along the magnetic force line to form an ion beam due to the constraint of the magnetic field, the height of ion evaporation is increased, the film coating is more uniform, the tantalum tube 32 has corrosion resistance, the collision between the electrons and the argon gas will not cause ablation and loss of the cathode surface, and the service life of the hollow cathode 1 is prolonged.

[0009] Further, the horizontal plate of the inverted L shape of the second connecting plate 24 and the top of the first connecting plate 21 are connected through the first connecting block 213 and the third connecting block 214, the top of the first connecting block 213 and the third connecting block 214 is connected with the cathode cylinder 3, and the bottom of the first connecting block 213 is connected with a wiring terminal.

[0010] Further, the cathode cylinder 3 and the inverted L-shaped horizontal plate of the second connecting plate 24, the top of the first connecting plate 21 and the bottom of the first connecting block 213 and the third connecting block 214 are all provided with insulating blocks 26.

[0011] Further, the first connecting block 213, the second connecting block 241 and the third connecting block 214 are all made of conductive material.

[0012] Further, the base assembly 4 comprises a support plate 41 and a fastening bolt 42, one end of the support plate 41 is connected to the base 59 of the anode base 5, the other end is connected to one side of the box body 2 through a fastener, the fastening bolt 42 passes through the box body 2 and is connected to the first connecting plate 21, and the support plate 41 is integrally formed.

[0013] Further, the pipe body of the gas path pipe 25 is a metal pipe.

[0014] Further, the input end of the gas path pipe 25 is provided with a second sleeve joint 251, the connection between the first connecting plate 21 and the gas path pipe 25 is provided with an insulating block 26, the connection between the gas path pipe 25 and the second connecting plate 24 is provided with a third sleeve joint 252, and the second power supply pipe 23 is powered to make the second connecting plate 24 charged, so that the gas path pipe 25 is charged, and the insulating block 26 at the connection between the first connecting plate 21 and the gas path pipe 25 makes the first connecting plate 21 not charged.

[0015] Further, the cathode cylinder 3 comprises a hollow shell, both ends of the hollow shell are provided with fixing blocks 31, the tantalum pipe 32 is arranged on the center line of the hollow shell, and the gas path pipe 25 passes through the fixing block 31 at one end of the hollow shell and is connected to the input end of the tantalum pipe 32 through a first sleeve joint 33.

[0016] Further, the anode seat 5 comprises a shell 51, a pole shoe 52, an anode module 53, a heat transfer plate 56, a water cooling plate 57, a magnet 58, a base 59, the shell 51 is a hollow chamber, the shell 51 is clamped with the base 59, the magnet 58 is installed at the center of the base 59, the middle part of the magnet 58 is provided with a gas path, the water cooling plate 57 is arranged above the magnet 58, the heat transfer plate 56, the anode module 53 and the pole shoe 52 are sequentially arranged above the water cooling plate 57, the gas distribution chamber 54 is arranged between the anode module 53 and the heat transfer plate 56, the gas distributor 55 is arranged in the gas distribution chamber 54, the gas distributor 55 is connected above the heat transfer plate 56, the periphery of the gas distributor 55 and the inner wall of the gas distribution chamber 54 form a uniform gas channel, the middle part of the heat transfer plate 56 is provided with an air inlet 561 and a plurality of gas flow channels 562, the air inlet 561 is arranged at the center of the heat transfer plate 56, the working gas enters the air inlet 561 from the gas path and uniformly flows to the plurality of gas flow channels 562, and then flows upward from the gas flow channels 562 to the uniform gas channel, and finally collides with the ion beam of the hollow cathode 1.

[0017] Further, the heat transfer plate 56 is made of ceramic material, which is used to insulate the water cooling plate 57 and the anode module 53.

[0018] The utility model discloses a hollow cathode hall ion source structure, including hollow cathode 1 and anode seat 5, one side of hollow cathode 1 is connected with anode seat 5 through base assembly 4, hollow cathode 1 includes box 2 and cathode cylinder 3, cathode cylinder 3 is connected in the top of box 2, box 2 includes first connecting plate 21, second connecting plate 24, baffle 27, its characterized in that: first connecting plate 21 and second connecting plate 24 are set up in the upside and downside staggered, baffle 27 is covered in the both sides of first connecting plate 21 and second connecting plate 24, the bottom of first connecting plate 21 is equipped with first aperture 211, and the input end of first electrifying pipe 22 is connected through first through hole, and the output end of first electrifying pipe 22 is communicated with the shell 51 of cathode cylinder 3 through first connecting block 213, the bottom of first connecting plate 21 is equipped with second aperture 212 still, and the input end of second electrifying pipe 23 is connected through second aperture 212, and the output end of second electrifying pipe 23 is connected with one end of second connecting plate 24 through second connecting block 241, so that second connecting plate 24 is electrified, and second connecting plate 24 is inverted L type, and the clearance is equipped between the vertical board of inverted L type of second connecting plate 24 and one end of first connecting plate 21, and the clearance is equipped between the horizontal board of inverted L type of second connecting plate 24 and the top of first connecting plate 21, for making the charge of second connecting plate 24 and first connecting plate 21 isolated, and not easy to cause electric shock, the bottom of first connecting plate 21 is equipped with third aperture still, and the input end of gas path pipe 25 is connected, and the output end of gas path pipe 25 is connected to the inside of cathode cylinder 3 through second connecting plate 24, so that gas path pipe 25, cathode cylinder 3 are electrified, the middle part of cathode cylinder 3 is equipped with tantalum tube 32, the input end of tantalum tube 32 is connected with the output end of gas path pipe 25 through first sleeve joint 33, and the output end of tantalum tube 32 is aligned with the emission end of cathode cylinder 3, argon is led to the input end of gas path pipe 25, second electrifying pipe 23, second connecting plate 24 and gas path pipe 25, cathode cylinder 3 form circuit loop, and the thermal electron of tantalum tube 32 collides with argon, and ionization occurs, and plasma is formed, and the ion beam is formed along the magnetic force line to the anode accelerated movement due to the constraint of magnetic field, and the height of ion evaporation is increased, so that the coating is more uniform, and the tantalum tube 32 has corrosion resistance, so that the collision of electron and argon will not cause the ablation and loss of cathode surface, prolongs the life of hollow cathode 1. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is whole structural drawing of hollow cathode hall ion source structure of the utility model.

[0020] Figure 2 It is sectional structure drawing of hollow cathode hall ion source structure of the utility model.

[0021] Figure 3The utility model discloses a hollow cathode hall ion source structure's elevation view.

[0022] Figure 4 The utility model discloses a hollow cathode hall ion source structure's internal partial structure drawing.

[0023] Figure 5 The utility model discloses a hollow cathode hall ion source structure's heat transfer plate's structure diagram.

[0024] Main element symbol explanation

[0025] Hollow cathode 1, box 2, first connecting plate 21, first opening 211, second opening 212, first connecting block 213, third connecting block 214, first electrifying pipe 22, second electrifying pipe 23, second connecting plate 24, second connecting block 241, gas path pipe 25, second sleeve joint 251, third sleeve joint 252, insulating block 26, cover plate 27, cathode cylinder 3, fixed block 31, tantalum tube 32, first sleeve joint 33, base assembly 4, support plate 41, fastening bolt 42, anode seat 5, shell 51, pole shoe 52, anode module 53, gas uniform chamber 54, gas distributor 55, heat transfer plate 56, gas inlet 561, gas flow channel 562, water cooling plate 57, magnet 58, base 59.

[0026] The following specific embodiments will be further explained in conjunction with the above-mentioned drawings. Specific embodiments Example 1:

[0027] The utility model provides a hollow cathode hall ion source structure, including hollow cathode 1 and anode seat 5, one side of hollow cathode 1 is connected with anode seat 5 through base assembly 4, and hollow cathode 1 includes box 2 and cathode cylinder 3, and cathode cylinder 3 is connected above box 2, and box 2 includes first connecting plate 21, second connecting plate 24, cover plate 27, it is characterized by: first connecting plate 21 and second connecting plate 24 are arranged upside down, and cover plate 27 is covered in the two sides of first connecting plate 21 and second connecting plate 24, the bottom of first connecting plate 21 is equipped with first opening 211, and the input end of first electric tube 22 is connected through first through hole, and the output end of first electric tube 22 is communicated with the shell 51 of cathode cylinder 3 through first connecting block 213, the bottom of first connecting plate 21 is also equipped with second opening 212, and the input end of second electric tube 23 is connected through second opening 212, and the output end of second electric tube 23 is connected with one end of second connecting plate 24 through second connecting block 241, so that second connecting plate 24 is electrified, and second connecting plate 24 is inverted L type, and the clearance is arranged between the vertical plate of inverted L type of second connecting plate 24 and one end of first connecting plate 21, and the clearance is arranged between the horizontal plate of inverted L type of second connecting plate 24 and the top of first connecting plate 21, so that the charge of second connecting plate 24 is isolated with first connecting plate 21, and it is not easy to cause electric shock, the bottom of first connecting plate 21 is also equipped with third opening, and the input end of gas path pipe 25 is connected, and the output end of gas path pipe 25 is connected to the inside of cathode cylinder 3 through second connecting plate 24, so that gas path pipe 25 and cathode cylinder 3 are electrified, the middle part of cathode cylinder 3 is equipped with tantalum tube 32, and the input end of tantalum tube 32 is connected with the output end of gas path pipe 25 through first sleeve joint 33, and the output end of tantalum tube 32 is aligned with the emission end of cathode cylinder 3, and argon is introduced into the input end of gas path pipe 25, and second electric tube 23, second connecting plate 24 and gas path pipe 25, cathode cylinder 3 form circuit loop, and the hot electron of tantalum tube 32 collides with argon, and ionization occurs, and plasma is formed, and the ion beam is formed by the acceleration movement of plasma along the magnetic force line to the anode under the constraint of magnetic field, and the height of ion evaporation is increased, so that the film is more uniform, and tantalum tube 32 has corrosion resistance, so that the collision of electron and argon will not cause the ablation and loss of cathode surface, and the service life of hollow cathode 1 is prolonged.

[0028] The horizontal plate of the inverted L-shaped second connecting plate 24 is connected to the top of the first connecting plate 21 through the first connecting block 213 and the third connecting block 214, the top of the first connecting block 213 and the third connecting block 214 is connected to the cathode cylinder 3, and the bottom of the first connecting block 213 is connected to the terminal.

[0029] The cathode cylinder 3 and the inverted L-shaped horizontal plate of the second connecting plate 24, the top of the first connecting plate 21 and the bottom of the first and third connecting blocks 213 and 214 are all provided with insulating blocks 26.

[0030] The first, second and third connecting blocks 213, 241 and 214 are all made of conductive material.

[0031] The base assembly 4 comprises a support plate 41 and a fastening bolt 42, one end of the support plate 41 is connected to the base 59 of the anode base 5, the other end is connected to one side of the box body 2 through a fastener, the fastening bolt 42 passes through the box body 2 and is connected to the first connecting plate 21, and the support plate 41 is integrally formed.

[0032] The pipe body of the gas path pipe 25 is a metal pipe.

[0033] The input end of the gas path pipe 25 is provided with a second sleeve joint 251, the connection between the first connecting plate 21 and the gas path pipe 25 is provided with an insulating block 26, the connection between the gas path pipe 25 and the second connecting plate 24 is provided with a third sleeve joint 252, and the second power supply pipe 23 is electrified to make the second connecting plate 24 electrified, so that the gas path pipe 25 is electrified, and the insulating block 26 at the connection between the first connecting plate 21 and the gas path pipe 25 makes the first connecting plate 21 not electrified.

[0034] The cathode cylinder 3 comprises a hollow shell, both ends of the hollow shell are provided with fixing blocks 31, the tantalum pipe 32 is arranged on the center line of the hollow shell, and the gas path pipe 25 passes through the fixing block 31 at one end of the hollow shell and is connected to the input end of the tantalum pipe 32 through a first sleeve joint 33.

[0035] The anode base 5 comprises an outer shell 51, an electrode shoe 52, an anode module 53, a heat transfer plate 56, a water cooling plate 57, a magnet 58 and a base 59, the outer shell 51 is a hollow chamber, the outer shell 51 is clamped with the base 59, the magnet 58 is installed at the center of the base 59, the magnet 58 is provided with a gas path in the middle, the water cooling plate 57 is arranged above the magnet 58, the heat transfer plate 56, the anode module 53 and the electrode shoe 52 are sequentially arranged above the water cooling plate 57, the gas distribution chamber 54 is arranged between the anode module 53 and the heat transfer plate 56, the gas distributor 55 is arranged in the gas distribution chamber 54, the gas distributor 55 is connected above the heat transfer plate 56, the gas distributor 55 is surrounded by the gas distribution chamber 54, the heat transfer plate 56 is provided with an air inlet 561 and a plurality of gas flow channels 562 in the middle, the air inlet 561 is arranged at the center of the heat transfer plate 56, the working gas uniformly flows to the plurality of gas flow channels 562 from the air inlet 561 after entering the air inlet 561 from the gas path, flows upward from the gas flow channels 562 to the gas distribution chamber, and finally collides with the ion beam of the hollow cathode 1.

[0036] The heat transfer plate 56 is made of ceramic material and is used to insulate the water cooling plate 57 and the anode module 53.

[0037] The utility model discloses a hollow cathode hall ion source structure, including hollow cathode 1 and anode seat 5, one side of hollow cathode 1 is connected with anode seat 5 through base assembly 4, hollow cathode 1 includes box 2 and cathode cylinder 3, cathode cylinder 3 is connected in the top of box 2, box 2 includes first connecting plate 21, second connecting plate 24, cover plate 27, its characterized in that: first connecting plate 21 and second connecting plate 24 are set up in the upside and downside staggered, cover plate 27 is covered first connecting plate 21 and second connecting plate 24's both sides, the bottom of first connecting plate 21 is equipped with first aperture 211, and the input end of first electric pipe 22 is connected through first through hole, and the output end of first electric pipe 22 is communicated with the shell 51 of cathode cylinder 3 through first connecting block 213, the bottom of first connecting plate 21 is also equipped with second aperture 212, and the input end of second electric pipe 23 is connected through second aperture 212, and the output end of second electric pipe 23 is connected with one end of second connecting plate 24 through second connecting block 241, so that second connecting plate 24 is electrified, second connecting plate 24 is inverted L type, and the vertical board between inverted L type of second connecting plate 24 and one end of first connecting plate 21 is equipped with gap, and the horizontal board between inverted L type of second connecting plate 24 and the top of first connecting plate 21 is equipped with gap, so that the charge of second connecting plate 24 is isolated with first connecting plate 21, and it is not easy to cause electric shock, the bottom of first connecting plate 21 is also equipped with third aperture, and the input end of gas path pipe 25 is connected, and the output end of gas path pipe 25 is connected to the inside of cathode cylinder 3 through second connecting plate 24, so that gas path pipe 25, cathode cylinder 3 are electrified, the middle part of cathode cylinder 3 is equipped with tantalum tube 32, the input end of tantalum tube 32 is connected with the output end of gas path pipe 25 through first sleeve joint 33, and the output end of tantalum tube 32 is aligned with the emission end of cathode cylinder 3, argon is led to the input end of gas path pipe 25, second electric pipe 23, second connecting plate 24 and gas path pipe 25, cathode cylinder 3 form circuit loop, and the hot electron of tantalum tube 32 collides with argon, and ionization occurs, and plasma is formed, and the ion beam is formed along the magnetic force line to the anode under the constraint of magnetic field, the height of ion evaporation is increased, the plating film is more uniform, and the tantalum tube 32 has corrosion resistance, so that the collision of electron and argon does not cause the ablation and loss of cathode surface, and the service life of hollow cathode 1 is prolonged.

[0038] The above-described embodiments only express several implementation manners of the utility model, the description is more specific and detailed, but can not therefore be understood as the limitation of the utility model patent range. It should be pointed out that for ordinary skilled person in the art, without departing from the utility model concept, several deformations and improvements can be made, which belong to the protection range of the utility model. Therefore, the protection range of the utility model patent should be subject to the appended claims.

Claims

1. A hollow cathode Hall ion source structure, comprising a hollow cathode (1) and an anode seat (5), one side of the hollow cathode (1) being connected with the anode seat (5) through a base assembly (4), the hollow cathode (1) comprising a box body (2) and a cathode cylinder (3), the cathode cylinder (3) being connected above the box body (2), the box body (2) comprising a first connecting plate (21), a second connecting plate (24) and a cover plate (27), characterized in that: The first connecting plate (21) and the second connecting plate (24) are arranged in an up-down staggered manner, the cover plate (27) is arranged on both sides of the first connecting plate (21) and the second connecting plate (24), the bottom of the first connecting plate (21) is provided with a first opening (211) for connecting the input end of the first current-carrying pipe (22), the output end of the first current-carrying pipe (22) is connected to the shell (51) of the cathode cylinder (3) through a first connecting block (213), the bottom of the first connecting plate (21) is also provided with a second opening (212) for connecting the input end of the second current-carrying pipe (23), the output end of the second current-carrying pipe (23) is connected to one end of the second connecting plate (24) through a second connecting block (241), so that the second connecting plate (24) is electrified, the second connecting plate (24) is in an inverted L shape, a gap is arranged between the vertical plate of the inverted L shape of the second connecting plate (24) and one end of the first connecting plate (21), and a gap is arranged between the horizontal plate of the inverted L shape of the second connecting plate (24) and the top of the first connecting plate (21), so that the electric charge carried by the second connecting plate (24) is insulated from the first connecting plate (21), and electric shock is not easy to occur; the bottom of the first connecting plate (21) is also provided with a third opening, the third opening is connected to the input end of the gas path pipe (25), the output end of the gas path pipe (25) penetrates through the second connecting plate (24) and is connected to the inside of the cathode cylinder (3), so that the gas path pipe (25) and the cathode cylinder (3) are electrified; the middle of the cathode cylinder (3) is provided with a tantalum tube (32), the input end of the tantalum tube (32) is connected to the output end of the gas path pipe (25) through a first clamping sleeve joint (33), and the output end of the tantalum tube (32) is aligned with the emission end of the cathode cylinder (3); argon gas is introduced into the input end of the gas path pipe (25), the second current-carrying pipe (23), the second connecting plate (24), the gas path pipe (25) and the cathode cylinder (3) form a circuit loop, the argon gas collides with the hot electrons of the tantalum tube (32), ionization occurs, plasma is formed, the plasma moves along the magnetic field lines to form an ion beam due to the constraint of the magnetic field, the ionization evaporation height is increased, and the tantalum tube (32) has corrosion resistance.

2. The hollow cathode Hall ion source structure of claim 1, wherein: The horizontal plate of the inverted L shape of the second connecting plate (24) and the top of the first connecting plate (21) are connected through a first connecting block (213) and a third connecting block (214), the top of the first connecting block (213) and the third connecting block (214) is connected to the cathode cylinder (3), and the bottom of the first connecting block (213) is connected to a wiring terminal.

3. The hollow cathode Hall ion source structure of claim 1, wherein: The cathode cylinder (3), the horizontal plate of the inverted L shape of the second connecting plate (24), the horizontal plate of the inverted L shape of the second connecting plate (24) and the top of the first connecting plate (21), and the top of the first connecting plate (21) and the bottom of the first connecting block (213) and the third connecting block (214) are all provided with an insulating block (26).

4. The hollow cathode Hall ion source structure of claim 1, wherein: The first connecting block (213), the second connecting block (241) and the third connecting block (214) are all made of conductive material.

5. The hollow cathode Hall ion source structure as described in claim 1, characterized in that: The base assembly (4) comprises a support plate (41) and a fastening bolt (42), one end of the support plate (41) is connected with the base (59) of the anode seat (5), the other end is connected with one side of the box (2) through a fastener, the fastening bolt (42) passes through the box (2) and is connected with the first connecting plate (21), and the support plate (41) is integrally formed.

6. The hollow cathode Hall ion source structure of claim 1, wherein: The pipe body of the gas path pipe (25) is a metal pipe.

7. The hollow cathode Hall ion source structure of claim 1, wherein: The input end of the gas path pipe (25) is provided with a second clamping sleeve joint (251), the connecting position of the first connecting plate (21) and the gas path pipe (25) is provided with an insulating block (26), the connecting position of the gas path pipe (25) and the second connecting plate (24) is provided with a third clamping sleeve joint (252), and the second power supply pipe (23) is electrified to make the second connecting plate (24) electrified, so that the gas path pipe (25) is electrified, and the insulating block (26) at the connecting position of the first connecting plate (21) and the gas path pipe (25) makes the first connecting plate (21) not electrified.

8. The hollow cathode Hall ion source structure of claim 1, wherein: The cathode cylinder (3) comprises a hollow shell, the two ends of the hollow shell are provided with fixing blocks (31), the tantalum pipe (32) is arranged on the center line of the hollow shell, and the gas path pipe (25) passes through the fixing block (31) at one end of the hollow shell and is connected with the input end of the tantalum pipe (32) through a first clamping sleeve joint (33).

9. The hollow cathode Hall ion source structure of claim 1, wherein: The anode seat (5) comprises a shell (51), an electrode shoe (52), an anode module (53), a heat transfer plate (56), a water cooling plate (57), a magnet (58), and a base (59), the shell (51) is a hollow chamber, the shell (51) is clamped with the base (59), the magnet (58) is installed at the center of the base (59), the magnet (58) is provided with a gas path in the middle part, the water cooling plate (57) is arranged above the magnet (58), the heat transfer plate (56), the anode module (53), and the electrode shoe (52) are sequentially arranged above the water cooling plate (57), the anode module (53) and the heat transfer plate (56) are provided with a uniform gas chamber (54), the uniform gas chamber (54) is provided with a gas distributor (55), the gas distributor (55) is connected above the heat transfer plate (56), the periphery of the gas distributor (55) and the inner wall of the uniform gas chamber (54) form a uniform gas channel, the heat transfer plate (56) is provided with an air inlet (561) and a plurality of gas flow channels (562) in the middle part, the air inlet (561) is arranged at the center of the heat transfer plate (56), and working gas uniformly flows to the plurality of gas flow channels (562) after entering the air inlet (561) from the gas path, flows upward from the gas flow channels (562) to the uniform gas channel, and finally collides with the ion beam of the hollow cathode (1).

10. The hollow cathode Hall ion source structure of claim 9, wherein: The heat transfer plate (56) is made of ceramic material and is used for insulating the water cooling plate (57) and the anode module (53).

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