Semiconductor spraying disc convenient to clean

Abstract

The utility model discloses a semiconductor spray tray convenient to clean, which relates to the field of semiconductor spray trays, and comprises a spray tray main body, the top of the spray tray main body is fixedly connected with a mounting sleeve, a threaded hole is formed in the mounting sleeve, the top of the spray tray main body is fixedly connected with an insertion pipe, and the insertion pipe is fixedly connected with the spray tray main body. A liquid injection pipe is installed on the outer wall of the insertion pipe, a fixing frame is fixedly connected to the outer wall of the liquid injection pipe, a bolt is installed in the fixing frame, and by rotating the bolt, the bolt can be moved out of a threaded hole, limiting of the installation sleeve is relieved, the spraying disc body is pulled downwards, and the insertion pipe is moved out of the liquid injection pipe. The outer wall of the spraying disc main body is fixedly connected with an aluminum oxide coating, the high temperature resistance of the spraying disc main body can be improved, the outer wall of the aluminum oxide coating is fixedly connected with a PTFE coating, the corrosion resistance of the spraying disc main body can be improved, and the spraying disc main body can be conveniently detached and cleaned; therefore, the service life of the spraying disc main body is prolonged.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor spray trays, specifically a semiconductor spray tray that is easy to clean. Background Technology

[0002] Semiconductor spray trays are a key piece of equipment in the semiconductor manufacturing process, primarily used for liquid spraying. Their principle is to uniformly disperse liquids (such as chemical reagents, cleaning solutions, etc.) into small droplets through an internal channel system and spray them onto the surface of the semiconductor wafer. It's like a precision spray head, but with a more complex structure and function, aiming to achieve efficient and uniform liquid treatment of semiconductor materials. Currently, semiconductor spray trays are often fixedly connected to spray pipes, which is inconvenient when cleaning is required. Therefore, a semiconductor spray tray that is easy to clean is needed.

[0003] Existing semiconductor spray trays are inconvenient to disassemble and clean during use. If residual chemical reagents, impurities, and other substances are not cleaned thoroughly and promptly after use, they will pose a serious risk of contamination to subsequent production processes. Furthermore, the current spray trays have poor corrosion resistance. Therefore, there is an urgent need for a semiconductor spray tray that is easy to clean. Utility Model Content

[0004] Therefore, the purpose of this utility model is to provide a semiconductor spray plate that is easy to clean, so as to solve the problems of existing semiconductor spray plates being inconvenient to disassemble and clean and having poor corrosion resistance on the surface of the spray plate.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a semiconductor spray tray that is easy to clean, comprising a spray tray body, an mounting sleeve fixedly connected to the top of the spray tray body, a threaded hole provided inside the mounting sleeve, an insertion tube fixedly connected to the top of the spray tray body, an injection tube installed on the outer wall of the insertion tube, a fixing frame fixedly connected to the outer wall of the injection tube, and bolts installed inside the fixing frame.

[0006] The inner wall of the injection tube is equipped with a first sealing ring, and the inner wall of the injection tube is equipped with a second sealing ring.

[0007] An alumina coating is fixedly connected to the outer wall of the spray disc body, and a PTFE coating is fixedly connected to the outer wall of the alumina coating.

[0008] Preferably, the fixing frame is movably connected to the bolt, and the fixing frame is arranged in a ring around the central axis of the injection tube.

[0009] Preferably, the bolt is threadedly connected to the mounting sleeve through a threaded hole, and the insertion tube is engaged with the injection tube.

[0010] Preferably, the first sealing ring engages with the insertion tube, and the first sealing ring and the second sealing ring are arranged parallel to each other.

[0011] Preferably, the second sealing ring engages with the insertion tube, and the insertion tube has a slotted design.

[0012] Preferably, the spray disc body is in close contact with the alumina coating, and the alumina coating is in close contact with the PTFE coating.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This utility model, through the setting of a spray plate body, mounting sleeve, threaded hole, insertion tube, liquid injection tube and bolt, allows the bolt to be moved out of the threaded hole by rotating the bolt, thereby releasing the mounting sleeve from its limit and pulling the spray plate body downward to move the insertion tube out of the main liquid injection tube. This facilitates the disassembly and cleaning of the spray plate body and prevents chemical reagents from remaining in the spray plate body.

[0015] 2. This utility model, through the setting of a spray plate body, insertion tube, injection tube, first sealing ring and second sealing ring, by moving the spray plate body, the insertion tube is inserted into the injection tube, and the first sealing ring and second sealing ring are respectively driven into the groove opened inside the insertion tube, thereby improving the sealing performance of the connection between the insertion tube and the injection tube.

[0016] 3. This utility model, through the setting of a spray tray body, an alumina coating, and a PTFE coating, with the alumina coating fixedly connected to the outer wall of the spray tray body, can improve the high temperature resistance of the spray tray body, and with the PTFE coating fixedly connected to the outer wall of the alumina coating, can improve the corrosion resistance of the spray tray body, thereby extending the service life of the spray tray body. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0018] Figure 2 This is a schematic diagram showing the structural breakdown of this utility model;

[0019] Figure 3 This is a three-dimensional view of the injection tube of this utility model;

[0020] Figure 4 This is a three-dimensional sectional view of the PTFE coating of this utility model.

[0021] In the diagram: 1. Spray tray body; 2. Mounting sleeve; 3. Threaded hole; 4. Insert pipe; 5. Injection pipe; 6. Fixing bracket; 7. Bolt; 8. First sealing ring; 9. Second sealing ring; 10. Alumina coating; 11. PTFE coating. Detailed Implementation

[0022] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0023] The embodiments of this utility model will be described below based on its overall structure.

[0024] Please see Figure 1-4 A semiconductor spray tray that is easy to clean includes a spray tray body 1. A mounting sleeve 2 is fixedly connected to the top of the spray tray body 1. A threaded hole 3 is opened inside the mounting sleeve 2. An insert tube 4 is fixedly connected to the top of the spray tray body 1. An injection tube 5 is installed on the outer wall of the insert tube 4. A fixing frame 6 is fixedly connected to the outer wall of the injection tube 5. A bolt 7 is installed inside the fixing frame 6. The fixing frame 6 and the bolt 7 are movably connected. The fixing frame 6 is arranged in a ring around the central axis of the injection tube 5. The bolt 7 is threadedly connected to the mounting sleeve 2 through the threaded hole 3. The insert tube 4 and the injection tube 5 are engaged and connected, which can facilitate the disassembly and cleaning of the spray tray body 1.

[0025] Please see Figure 1-4 A semiconductor spray plate that is easy to clean has a first sealing ring 8 installed on the inner wall of the injection tube 5 and a second sealing ring 9 installed on the inner wall of the injection tube 5. The first sealing ring 8 is engaged with the insertion tube 4 and the first sealing ring 8 and the second sealing ring 9 are arranged in parallel. The second sealing ring 9 is engaged with the insertion tube 4, and the insertion tube 4 has a slotted design, which can improve the sealing performance at the connection between the insertion tube 4 and the injection tube 5.

[0026] Please see Figure 1-4 A semiconductor spray tray that is easy to clean has an alumina coating 10 fixedly connected to the outer wall of the spray tray body 1, and a PTFE coating 11 fixedly connected to the outer wall of the alumina coating 10. The spray tray body 1 and the alumina coating 10 are tightly bonded, and the alumina coating 10 and the PTFE coating 11 are also tightly bonded, which can improve the corrosion resistance of the spray tray body 1.

[0027] Working principle: During use, by rotating bolt 7, which is threadedly connected to mounting sleeve 2 through threaded hole 3, bolt 7 can be moved out of threaded hole 3, releasing mounting sleeve 2 from its limit. Pulling down spray plate body 1 moves insertion tube 4 out of main injection pipe 5, allowing cleaning of spray plate body 1. By moving spray plate body 1, insertion tube 4 is inserted into injection pipe 5, causing first sealing ring 8 and second sealing ring 9 to respectively engage in grooves opened inside insertion tube 4, making the connection and assembly of insertion tube 4 and injection pipe 5 more airtight. An alumina coating 10 is fixedly connected to the outer wall of spray plate body 1, which can improve the high temperature resistance of spray plate body 1. A PTFE coating 11 is fixedly connected to the outer wall of alumina coating 10, which can improve the corrosion resistance of spray plate body 1. This completes the use of the device. The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0028] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A semiconductor spray pan for easy cleaning, comprising a spray pan body (1), characterized in that: The top of the spray disc body (1) is fixedly connected with a mounting sleeve (2), a threaded hole (3) is formed in the mounting sleeve (2), the top of the spray disc body (1) is fixedly connected with a pipe (4), a liquid injection pipe (5) is mounted on the outer wall of the pipe (4), a fixing frame (6) is fixedly connected to the outer wall of the liquid injection pipe (5), and a bolt (7) is mounted in the fixing frame (6). A first sealing ring (8) is mounted on the inner wall of the liquid injection pipe (5), and a second sealing ring (9) is mounted on the inner wall of the liquid injection pipe (5). An alumina coating (10) is fixedly connected to the outer wall of the spray disc body (1), and a PTFE coating (11) is fixedly connected to the outer wall of the alumina coating (10).

2. The easy-to-clean semiconductor shower plate of claim 1, wherein: The fixing frame (6) is movably connected with the bolt (7), and the fixing frame (6) is arranged in a ring shape around the central axis of the liquid injection pipe (5).

3. The easy-to-clean semiconductor shower plate of claim 1, wherein: The bolt (7) is threadedly connected with the mounting sleeve (2) through the threaded hole (3), and the pipe (4) is clampedly connected with the liquid injection pipe (5).

4. The easy-to-clean semiconductor shower plate of claim 1, wherein: The first sealing ring (8) is clampedly connected with the pipe (4), and the first sealing ring (8) is arranged in parallel with the second sealing ring (9).

5. A semiconductor rinse tray according to claim 4, wherein: The second sealing ring (9) is clampedly connected with the pipe (4), and the pipe (4) is designed in a slotted manner.

6. The easy-to-clean semiconductor shower plate of claim 1, wherein: The spray disc body (1) is tightly attached to the alumina coating (10), and the alumina coating (10) is tightly attached to the PTFE coating (11).

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