Mechanical arm for wafer conveying

Abstract

The utility model discloses a mechanical arm for wafer transmission. The mechanical arm comprises a U-shaped support frame. The movable arm is movably and horizontally moved on one side of the supporting frame, and a conveying assembly is connected between the supporting frame and the movable arm and used for driving the movable arm; an electric push rod is installed at the tail end of the movable arm, a connecting frame is arranged at the output end of the bottom of the electric push rod, a fixing block is installed at the bottom of the connecting frame, multiple sets of side plates are annularly arranged on the side wall of the fixing block at equal intervals, clamping jaws are movably arranged at the bottoms of the side plates, and a driving groove is formed in the fixing block; and a driving assembly is arranged in the driving groove and used for driving the clamping jaw, and a suction cup is installed on the bottom wall of the fixing block. The utility model belongs to the technical field of wafer processing, and particularly relates to a mechanical arm for wafer transmission.

Description

TECHNICAL FIELD

[0001] The utility model belongs to wafer processing technical field, specifically point to a kind of mechanical arm for wafer conveying. BACKGROUND

[0002] In the field of semiconductor manufacturing, as the core production raw material, the stability and safety of wafer conveying link is crucial.

[0003] Currently, wafer conveying mechanical arm is widely used in various production processes, however, the existing mechanical arm is fixed to the wafer structure more dependent on single fixed mode, once part of the assembly failure, such as jaw mechanical parts wear, vacuum leakage or electrostatic adsorption circuit failure, etc., it can not effectively maintain the stable fixation of wafer, it is very likely to cause wafer to fall in the conveying process, as a precision and expensive semiconductor base material, once falling damaged, not only will cause direct economic loss, but also may affect the efficiency of the whole production line due to production interruption, resulting in subsequent production link delay, greatly increase production cost. SUMMARY

[0004] The technical problem to be solved by the utility model is that the existing mechanical arm is single in wafer fixing structure, which is easy to cause wafer to fall due to partial structure failure, resulting in wafer damage.

[0005] In order to realize the above function, the technical scheme adopted by the utility model is as follows: a kind of mechanical arm for wafer conveying, including the support frame of U type setting;

[0006] Further comprising movable arm that moves in the side of support frame, connecting transmission assembly between support frame and movable arm, for driving movable arm;

[0007] The end of movable arm is provided with electric push rod, the bottom output end of electric push rod is provided with connecting frame, the bottom of connecting frame is provided with fixed block, a plurality of side plates are arranged on the side wall of fixed block in ring shape at equal intervals, the bottom of side plate is movably provided with jaw, the inside of fixed block is provided with driving groove, driving assembly is arranged in driving groove, for driving jaw, the bottom wall of fixed block is provided with suction cup.

[0008] Further, the connecting frame is composed of connecting block and a plurality of connecting rods, the connecting rods are fixedly connected to the bottom of the connecting block, and the fixed block is installed at the bottom end of the plurality of connecting rods.

[0009] Further, the transmission assembly includes a conveying groove and a lead screw, the conveying groove is formed in the side wall of the support frame, the movable arm is slidingly arranged on the conveying groove, the lead screw is rotatably arranged in the conveying groove and threadedly connected to the movable arm, and the lead screw is rotatably connected to the motor installed on the support frame at one end.

[0010] Further, the driving assembly comprises a driving shaft and a sliding groove, the driving shaft is rotationally arranged in the driving groove, the top end of the driving shaft is rotationally connected with a motor arranged on the top wall of the fixed block, a conical gear one is fixedly connected on the driving shaft, the sliding groove is arranged on the bottom wall of the side plate, the clamping jaw is slidingly arranged in the sliding groove, a lead screw two is rotationally arranged in the sliding groove and is threadedly connected with the clamping jaw, one end of the lead screw two penetrates through the side wall of the sliding groove and is connected with a conical gear two rotationally arranged in the driving groove, and the conical gear one is engaged with the conical gear two.

[0011] As preferred, the inner side of the clamping jaw is glued with a gasket made of silica gel.

[0012] The mechanical arm for wafer conveying provided by the utility model has the advantages that the motor and the driving shaft are arranged, the conical gear one and the conical gear two are used for conversion, a plurality of lead screws two are synchronously rotated, the movement of the clamping jaw is adjusted, the wafer is clamped, the wafer is stably fixed in cooperation with the suction disc, the equipment fault tolerance is improved, and the wafer is prevented from falling due to problems of a single fixing structure. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 The utility model provides a kind of mechanical arm for wafer conveying of overall structure Figure 1 ;

[0014] Figure 2 The utility model provides a kind of mechanical arm for wafer conveying of overall structure Figure 2 ;

[0015] Figure 3 For Figure 2 Local enlarged view in A of the middle part;

[0016] Figure 4 It is the structure diagram of section of part structure of the utility model provides a kind of mechanical arm for wafer conveying.

[0017] Wherein, 1, support frame, 2, movable arm, 3, conveying assembly, 4, electric push rod, 5, connecting frame, 6, fixed block, 7, side plate, 8, clamping jaw, 9, driving groove, 10, driving assembly, 11, suction disc, 12, connecting block, 13, connecting rod, 14, conveying groove, 15, lead screw one, 16, motor, 17, driving shaft, 18, sliding groove, 19, motor, 20, conical gear one, 21, lead screw two, 22, conical gear two, 23, gasket. DETAILED DESCRIPTION

[0018] The technical solutions of the present application will be described clearly and completely in connection with the drawings. Obviously, the described embodiments are some of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0019] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance. The present application will be further described in detail below in connection with the drawings.

[0020] As shown in Figures 1-4 The present application provides a mechanical arm for wafer conveying, which comprises a support frame 1 arranged in an inverted U shape, which is used for overall support;

[0021] Further comprising a movable arm 2 movably translating on one side of the support frame 1, a conveying assembly 3 connected between the support frame 1 and the movable arm 2, for driving the movable arm 2, the conveying assembly 3 comprising a conveying groove 14 and a lead screw 15, the conveying groove 14 being opened on the side wall of the support frame 1, the movable arm 2 being slidingly arranged on the conveying groove 14, the lead screw 15 being threadedly connected with the movable arm 2 and rotatably arranged in the conveying groove 14, one end of the lead screw 15 being shaft-connected with a motor 16 mounted on the support frame 1, starting the motor 16 to drive the lead screw 15 to rotate, the lead screw 15 driving the movable arm 2 to translate, thereby being capable of conveying and transporting the material fixed on the end of the movable arm 2;

[0022] As shown in Figures 2-4As shown, the end of the movable arm 2 is provided with an electric push rod 4, the bottom output end of the electric push rod 4 is provided with a connecting frame 5, the bottom of the connecting frame 5 is provided with a fixed block 6, the connecting frame 5 is combined by a connecting block 12 and a plurality of connecting rods 13, the connecting rods 13 are fixedly connected to the bottom of the connecting block 12, the fixed block 6 is installed at the bottom end of the plurality of connecting rods 13, a plurality of side plates 7 are arranged on the side wall of the fixed block 6 in a ring shape at equal intervals, the bottom of the side plate 7 is movably provided with a clamping jaw 8, the inner side of the clamping jaw 8 is glued with a gasket 23 made of silica gel, the gasket 23 provides buffering and protection effect, the inside of the fixed block 6 is provided with a driving groove 9, the driving groove 9 is provided with a driving assembly 10, which is used for driving the clamping jaw 8, the bottom wall of the fixed block 6 is provided with a suction cup 11, the driving assembly 10 comprises a driving shaft 17 and a sliding groove 18, the driving shaft 17 is rotatably arranged in the driving groove 9, the top end of the driving shaft 17 is rotatably provided with a motor 19 installed on the top wall of the fixed block 6, a conical gear one 20 is fixedly connected to the driving shaft 17, the sliding groove 18 is arranged on the bottom wall of the side plate 7, the clamping jaw 8 is slidably arranged in the sliding groove 18, a lead screw two 21 is rotatably arranged in the sliding groove 18 and is threadedly connected to the clamping jaw 8, one end of the lead screw two 21 penetrates through the side wall of the sliding groove 18 and is connected to a conical gear two 22 which is rotatable in the driving groove 9, the conical gear one 20 is engaged with the conical gear two 22.

[0023] When the wafer is fixed, the suction cup 11 is connected with the vacuum adsorption structure in the prior art, the suction cup 11 is pumped to achieve the vacuum adsorption effect (the vacuum cup technology belongs to the prior art, which will not be described here), the wafer is adsorbed and fixed, at the same time, the motor 19 is started to drive the driving shaft 17 to rotate, the driving shaft 17 drives the conical gear one 20 to rotate, the conical gear one 20 drives the conical gear two 22 to rotate, thereby driving the lead screw two 21, the lead screw two 21 drives the clamping jaw 8 to move towards the middle, the wafer is fixed again by the plurality of clamping jaws 8, the fault tolerance effect of the structure is improved, and the up-down position of the wafer is adjusted by the electric push rod 4.

[0024] The above describes the utility model and its implementation, which is not limited, and the drawings shown are only one of the embodiments of the utility model, and the actual structure is not limited. In general, if the ordinary skilled person in the art is inspired, without departing from the creative purpose of the utility model, similar structure and embodiments are designed without creativity, which should belong to the protection scope of the utility model.

Claims

1. A mechanical arm for wafer conveying, comprising a support frame (1) arranged in a U shape; characterized in that: an active arm (2) is movably translated on one side of the support frame (1), a conveying assembly (3) is connected between the support frame (1) and the active arm (2) for driving the active arm (2); an electric push rod (4) is installed at the end of the active arm (2), a connecting frame (5) is arranged at the bottom output end of the electric push rod (4), a fixed block (6) is installed at the bottom of the connecting frame (5), a plurality of side plates (7) are arranged in a ring shape at equal intervals on the side wall of the fixed block (6), a clamping jaw (8) is movably arranged at the bottom of the side plate (7), a driving groove (9) is arranged in the fixed block (6), a driving assembly (10) is arranged in the driving groove (9) for driving the clamping jaw (8), and a suction disc (11) is installed on the bottom wall of the fixed block (6). The connecting frame (5) is composed of a connecting block (12) and a plurality of connecting rods (13), the connecting rods (13) are fixedly connected to the bottom of the connecting block (12), and the fixed block (6) is installed at the bottom end of the plurality of connecting rods (13). The conveying assembly (3) comprises a conveying groove (14) and a lead screw (15), the conveying groove (14) is arranged on the side wall of the support frame (1), the active arm (2) is slidably arranged in the conveying groove (14), the lead screw (15) is rotatably arranged in the conveying groove (14) and is threadedly connected to the active arm (2), and one end of the lead screw (15) is rotatably connected to a motor (16) installed on the support frame (1).

2. The mechanical arm for wafer transfer according to claim 1, wherein: The driving assembly (10) comprises a driving shaft (17) and a sliding groove (18), the driving shaft (17) is rotatably arranged in the driving groove (9), a motor (19) is rotatably connected to the top wall of the fixed block (6) and arranged at the top end of the driving shaft (17), a conical gear (20) is fixedly connected to the driving shaft (17), the sliding groove (18) is arranged on the bottom wall of the side plate (7), the clamping jaw (8) is slidably arranged in the sliding groove (18), a lead screw (21) is rotatably arranged in the sliding groove (18) and is threadedly connected to the clamping jaw (8), one end of the lead screw (21) penetrates through the side wall of the sliding groove (18) and is connected to a conical gear (22) rotatably arranged in the driving groove (9), and the conical gear (20) is engaged with the conical gear (22).

3. The mechanical arm for transferring a wafer according to claim 1, wherein: The inner side of the clamping jaw (8) is glued with a gasket (23) made of silica gel.

4. The wafer transfer robot according to claim 1, wherein: ​ 5. The wafer transfer robot according to claim 4, wherein: ​

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