Adsorption device and transfer mechanism

Abstract

The utility model relates to the field of photovoltaic solar substrate production, in particular to an adsorption device and a transferring mechanism, and aims to solve the problem that when an existing transferring mechanism transfers a substrate, suction cup marks are likely to be generated or the substrate is likely to be crushed. In order to achieve the purpose, the adsorption device comprises a suction rod, a vacuum suction nozzle and a supporting structure, an air source channel is formed in the suction rod, the vacuum suction nozzle is arranged at the bottom end of the suction rod and communicates with the air source channel, the suction rod is arranged on the supporting structure in a vertically movable mode, and the supporting structure is used for supporting the suction rod; the adsorption device is arranged to only overcome the gravity of the suction rod when the suction rod moves upwards relative to the supporting structure. According to the arrangement mode, the substrate is only subjected to the action of the gravity of the suction rod, it is guaranteed that the vacuum suction nozzle making contact with the substrate does not press the substrate, the effect of weakening or avoiding sucker marks can be achieved, and the substrate is prevented from being crushed.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photovoltaic solar substrate production, and particularly provides an adsorption device and a transfer mechanism. BACKGROUND

[0002] In the photovoltaic industry, substrates such as silicon wafers are core components for manufacturing solar cells, and their transfer is usually performed by an adsorption device with a suction nozzle. When multiple substrates need to be processed simultaneously, multiple adsorption devices are arranged to achieve synchronous operation. In this process, it is necessary to ensure that each suction nozzle achieves an ideal state when it contacts the substrate, i.e., neither pressing the substrate nor leaving a gap. However, in actual production, differences in the levelness of the carrier plate, the levelness of the material taking / discharging platform, and the levelness between suction nozzles will affect the contact effect of the suction nozzle and the substrate, resulting in adsorption failure or damage to the substrate. To solve these problems, multiple point adjustments need to be set during automated debugging to calibrate the relative positions of the suction nozzle and the substrate, but it is still impossible to avoid the situation where the suction nozzle presses the substrate to produce a suction cup mark or even crushes the substrate.

[0003] Correspondingly, there is a need in the art for a new adsorption device and transfer mechanism to solve the above problems. SUMMARY

[0004] The present application aims to solve the above technical problems, i.e., to solve the problem that the existing transfer mechanism is prone to produce a suction cup mark or crush the substrate when transferring the substrate.

[0005] The present application provides an adsorption device, comprising: a suction rod, a gas supply channel being provided in the suction rod; a vacuum suction nozzle, the vacuum suction nozzle being provided at the bottom end of the suction rod and being in communication with the gas supply channel; a support structure, the suction rod being movably arranged on the support structure in an up-down direction, the support structure being used for supporting the suction rod, and the adsorption device being arranged to only overcome the gravity of the suction rod when the suction rod moves upward relative to the support structure.

[0006] In an optional technical solution of the above adsorption device, the support structure comprises a fixed member and an elastic member, the suction rod is movably arranged on the fixed member in an up-down direction, the elastic member is connected with the fixed member and the suction rod, and the elastic member is used for supporting the suction rod to provide an upward elastic force to the suction rod.

[0007] In an optional technical solution of the above adsorption device, the fixed member is arranged as a sleeve, the sleeve has a ring-shaped top cover and a ring-shaped bottom cover, the suction rod is arranged in the sleeve by penetrating through the bottom cover and the top cover, the outer wall of the suction rod has a connecting portion, and the elastic member is arranged between the connecting portion and the bottom cover.

[0008] In an optional technical solution of the adsorption device, the fixing member is a sleeve, the sleeve has a ring-shaped top cover and a ring-shaped bottom cover, the adsorption rod is arranged in the sleeve through the bottom cover and the top cover, the outer wall of the adsorption rod has a connecting portion, and the elastic member is arranged between the connecting portion and the top cover.

[0009] In an optional technical solution of the adsorption device, the support structure is a sleeve, the sleeve has a ring-shaped top cover and a ring-shaped bottom cover, the adsorption rod is arranged in the sleeve through the bottom cover and the top cover, the outer wall of the adsorption rod has a connecting portion, and the connecting portion abuts against the bottom cover.

[0010] In an optional technical solution of the adsorption device, a rolling member is arranged on the inner wall of the sleeve, and the rolling member is in rolling connection with the outer wall of the adsorption rod.

[0011] In an optional technical solution of the adsorption device, the rolling member is a ball, a containing groove is arranged on the vertical surface of the bottom cover, and the ball is arranged in the containing groove.

[0012] In an optional technical solution of the adsorption device, the rolling member is a ball, a containing groove is arranged on the vertical surface of the top cover, and the ball is arranged in the containing groove.

[0013] In another aspect, the application further provides a transfer mechanism, which comprises a carrier frame, a fixing plate and a plurality of adsorption devices as described in any one of the above embodiments, the fixing plate is connected with each support structure, the carrier frame has a plurality of carrier grooves, each carrier groove is used for loading a substrate, each adsorption device is arranged to correspond to each carrier groove one by one, and each adsorption device is used for adsorbing the substrate in the corresponding carrier groove.

[0014] In an optional technical solution of the transfer mechanism, the transfer mechanism further comprises a mechanical arm, and the mechanical arm is used for moving the fixing plate.

[0015] The skilled in the art can understand that the adsorption device of the application comprises a suction rod, a vacuum suction nozzle and a support structure, the suction rod is internally provided with an air source channel, the vacuum suction nozzle is arranged at the bottom end of the suction rod and communicates with the air source channel, the suction rod is movably arranged on the support structure, and the support structure is used for supporting the suction rod. The adsorption device is arranged to only overcome the gravity of the suction rod when the suction rod moves upward relative to the support structure. In the initial state, the support structure supports the suction rod and bears the gravity of the suction rod, and the suction rod is in a relatively static state relative to the support structure. At the same time when the vacuum suction nozzle of a part of the adsorption device contacts the corresponding substrate, due to the flatness of the carrier frame placing platform or the flatness of the carrier frame itself, the positions of the remaining substrates are relatively high, so that the substrate at the position with a higher height causes the corresponding suction rod to move upward relative to the support structure. Since the suction rod only overcomes its own gravity when moving upward relative to the support structure, the support structure does not provide additional resistance to the upward movement of the suction rod, so as to ensure that the vacuum suction nozzle in contact with the substrate does not press the substrate. In this case, the vacuum suction nozzle can be used to perform vacuum suction on the substrate, so as to weaken or avoid the generation of suction disc marks. BRIEF DESCRIPTION OF DRAWINGS

[0016] The preferred embodiments of the application will be described below with reference to the accompanying drawings, in which:

[0017] Figure 1 is a structural schematic view of a transfer mechanism of the application;

[0018] Figure 2 is a structural schematic view of an adsorption device of the transfer mechanism of the application in an initial state;

[0019] Figure 3 is a structural schematic view of the adsorption device of the transfer mechanism of the application in a state of contacting a substrate;

[0020] Figure 4 is a structural schematic view of another embodiment of the adsorption device of the transfer mechanism of the application;

[0021] Figure 5 is a partial structural schematic view of the adsorption device of the transfer mechanism of the application.

[0022] BRIEF DESCRIPTION OF DRAWINGS

[0023] 1-adsorption device; 11-suction rod; 111-connection part; 12-vacuum suction nozzle; 13-support structure; 131-sleeve; 1311-top cover; 1312-bottom cover; 1313-receiving groove; 132-elastic member; 14-rolling member; 2-carrier frame; 3-fixing plate. DETAILED DESCRIPTION

[0024] The preferred embodiments of the present application will be described below with reference to the accompanying drawings. Those skilled in the art will appreciate that the embodiments are only used to explain the technical principles of the present application, and are not intended to limit the scope of protection of the present application. Those skilled in the art can make adjustments to them as needed in order to adapt to specific application occasions.

[0025] It should be noted that in the description of the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or detachably connected, or integrally connected; it can be directly connected, or indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. In addition, the terms "up", "down" and the like indicating the direction or position relationship of the terms are based on the direction or position relationship shown in the drawings, which is only for the convenience of description, and does not indicate or imply that the device or element must have a specific orientation, be constructed in a specific orientation, and therefore cannot be understood as a limitation on the present application. However, the up-down direction of the adsorption device in the working state of the adsorption substrate is based on the direction of gravity.

[0026] The adsorption device of the conventional substrate transfer system usually includes a support structure, a connecting rod and a spring, the connecting rod is movably arranged on the support structure, and the two ends of the spring are respectively connected with the connecting structure on the outer wall of the connecting rod and the top end of the support structure. When the adsorption device is used to adsorb the substrate, the support structure is usually pressed down so that the spring is compressed, the elastic force of the spring is used to provide the downward pressure of the connecting rod, and then the substrate is adsorbed by the suction nozzle, but the spring will also bring the suction nozzle mark to the substrate when providing the downward pressure, and even cause the substrate to be damaged.

[0027] In order to solve the problem that the existing transfer mechanism is easy to produce suction cup mark or crush the substrate when transferring the substrate, the present application provides an adsorption device of a transfer mechanism. In order to facilitate understanding, first, the transfer mechanism of the present application is introduced.

[0028] As Figures 1 to 5As shown, the transfer mechanism of the present application comprises a carrier frame 2, a fixed plate 3, a mechanical arm (not shown in the figure) and the adsorption devices 1, the mechanical arm is used to move the fixed plate 3, the fixed plate 3 is connected with each adsorption device 1 to move each adsorption device 1 by moving the fixed plate 3. Among them, the carrier frame 2 has a plurality of carrier grooves, each carrier groove is used to load a substrate, each adsorption device 1 is arranged to correspond to each carrier groove one by one, so that each adsorption device 1 can adsorb the substrate in the corresponding carrier groove. Among them, the substrate can be a solar cell silicon wafer or a gallium nitride (GaN) substrate, etc. Since the specific structure of the carrier frame 2 is relatively well-known, the present application will not make a detailed introduction. In addition, in order to facilitate the installation of the adsorption device 1, a plurality of holes or slots for installing and fixing the adsorption device 1 can be arranged on the fixed plate 3, and these holes or slots are arranged according to the positions of the carrier grooves, so as to facilitate the one-to-one correspondence between the adsorption device 1 and the carrier groove. In addition, it should be noted that the fixed plate 3 of the present application can be integrally formed or assembled by a plurality of support frames, and the specific structure of the present application is not limited, as long as each adsorption device 1 can be fixed together.

[0029] The adsorption device 1 of the present application will be briefly introduced below.

[0030] Referring to Figure 2 and Figure 3 , the adsorption device 1 of the present application comprises a suction rod 11, a vacuum nozzle 12 and a support structure 13, the suction rod 11 is provided with a gas source channel, the vacuum nozzle 12 is arranged at the bottom end of the suction rod 11 and communicates with the gas source channel, the suction rod 11 is movably arranged on the support structure 13, the support structure 13 is used to support the suction rod 11, and the adsorption device is arranged to only overcome the gravity of the suction rod 11 when the suction rod 11 moves relative to the support structure 13.

[0031] When the mechanical arm drives the fixed plate 3 to lift, so that the adsorption device 1 is in the initial state of not contacting the substrate, the support structure 13 will support the suction rod 11 and bear the gravity of the suction rod 11, and the suction rod 11 is in a relatively static state relative to the support structure 13. At the same time, a part of the vacuum nozzles 12 of the adsorption devices 1 contact the corresponding substrates, due to the flatness of the carrier frame 2 platform or the flatness of the carrier frame 2 itself, the positions of the remaining substrates will be relatively high, so that the substrates at the higher positions will cause the corresponding suction rods 11 to move upward relative to the support structure 13, since the suction rod 11 only overcomes its own gravity when it moves upward relative to the support structure 13, the support structure 13 does not provide additional resistance to the upward movement of the suction rod 11, and the original downward elastic force is cancelled, which can ensure that the vacuum nozzles 12 in contact with the substrates do not press the substrates. In this case, the vacuum suction of the substrates through the vacuum nozzles 12 can weaken or avoid the generation of suction disc marks.

[0032] It should be noted that the above setting mode of the present application is also applicable to the case where the horizontal degrees of the adsorption devices 1 are inconsistent. In this case, the adsorption device 1 at the lower position first contacts the substrate, and there is a gap between the adsorption device 1 at the higher position and the substrate. When the adsorption device 1 at the higher position moves downward to contact the substrate, the adsorption rod 11 at the lower position moves upward relative to the support structure 13. Since the adsorption rod 11 only needs to overcome its own gravity when moving upward relative to the support structure 13, and the support structure 13 does not provide additional resistance to the upward movement of the adsorption rod 11, the original downward elastic force is cancelled, and the vacuum suction nozzle 12 in contact with the substrate is not pressed against the substrate.

[0033] The following describes two specific embodiments of the adsorption device 1 of the present application.

[0034] Embodiment One

[0035] The adsorption device 1 includes an adsorption rod 11, a vacuum suction nozzle 12, a sleeve 131, and an elastic member 132. The adsorption rod 11 is provided with a gas source channel, the vacuum suction nozzle 12 is arranged at the bottom end of the adsorption rod 11 and communicates with the gas source channel, the sleeve 131 has a ring-shaped top cover 1311 and a ring-shaped bottom cover 1312, the outer wall of the sleeve 131 is connected to the fixed plate 3, the adsorption rod 11 passes through the bottom cover 1312 and the top cover 1311 and is arranged in the sleeve 131, and the adsorption rod 11 can move up and down in the sleeve 131, the outer wall of the adsorption rod 11 has a connecting portion 111, and the elastic member 132 is arranged between the connecting portion 111 and the bottom cover 1312. The elastic member 132 is used to support the adsorption rod 11 to bear the weight of the adsorption rod 11 and provide an upward elastic force to the adsorption rod 11. Specifically, the elastic member 132 can be a spring, a spring piece, or a rubber pad, etc. When the elastic member 132 is a spring, it can be sleeved on the adsorption rod 11. However, this is not a limitation, and multiple elastic members 132 can also be provided, each of which is arranged around the adsorption rod 11 and between the connecting portion 111 and the bottom cover 1312, etc., as long as the elastic member 132 can provide an upward elastic force to the adsorption rod 11, and the present application does not limit the arrangement mode thereof. In addition, the gas source channel can be connected to an external vacuum pump or compressor through a pipeline to generate a vacuum or airflow, thereby helping to complete the adsorption and release processes.

[0036] In terms of the structure of the sleeve 131, the hole of the annular top cover 1311 and the hole of the annular bottom cover 1312 jointly limit the suction rod 11, so that the suction rod 11 can only move up and down, avoiding left and right shaking. As for the connection between the hole of the annular top cover 1311, the hole of the annular bottom cover 1312 and the suction rod 11, there are many possibilities. For example, they can be directly connected with the suction rod 11, and the limitation of the suction rod 11 can be realized by fitting; or there can be a certain gap between them, which can ensure the smooth up and down movement of the suction rod 11 while still effectively restricting its left and right shaking. Among them, the annular top cover 1311 of the sleeve 131, the annular bottom cover 1312 of the sleeve 131 and the rest of the sleeve 131 can be integrally formed, or connected by welding or bonding, etc. The specific connection method is not limited in this application.

[0037] In terms of the structure of the suction rod 11, the connecting part 111 of the suction rod 11 and the rest of the suction rod 11 can be integrally formed, or connected by welding or bonding, etc. The specific setting method is not limited in this application. Among them, the connecting part 111 can be annular structure and the diameter is larger than the inner ring diameter of the annular top cover 1311 and the annular bottom cover 1312, so that when the elastic element 132 is a compression spring, it can be compressed along the axial direction to effectively provide elastic force, in addition, this kind of setting method can also avoid the suction rod 11 from coming out. It should be noted that the specific form of the connecting part 111 is not unique, and the shape of the connecting part 111 can also be replaced by a strip or a point-shaped protrusion, etc. These adjustments do not deviate from the principles of the present application and are within the scope of the present application.

[0038] In actual work process, when the mechanical arm drives the fixed plate 3 to lift, so that the suction device 1 is in the initial state of not contacting the substrate, the elastic element 132 is compressed due to the gravity of the suction rod 11, at this time the elastic element 132 will generate an upward elastic force on the suction rod 11, and this elastic force can just offset the gravity of the suction rod 11.

[0039] In the substrate loading and unloading operation, multiple suction devices 1 are used to complete the work of taking and placing the substrate. However, due to the flatness problem of the substrate placing platform of the carrier frame 2 or the poor flatness of the carrier frame 2 itself, the levelness of the substrate on the carrier frame 2 is inconsistent. In addition, the levelness between multiple suction devices 1 is also difficult to keep consistent. In this case, when the mechanical hand of the mechanical arm controls the suction device 1 to take and place the substrate by moving the fixed plate 3, the phenomenon that an individual vacuum nozzle 12 first contacts the substrate while the remaining vacuum nozzles 12 are still at a distance from the substrate may occur. In order to ensure that all vacuum nozzles 12 can contact the corresponding substrate, thereby ensuring that there is no vacuum leakage during the suction process, the mechanical arm needs to drive the fixed plate 3 to continue to press down. At this time, the suction rod 11 that first contacts the substrate will move upward relative to the sleeve 131, and under the action of the upward elastic force of the elastic member 132, the force that the substrate receives when it contacts the suction rod 11 will be significantly reduced compared to the weight of the suction rod 11. In this way, the downward pressure that the substrate bears is reduced, thereby effectively reducing the probability of vacuum nozzle 12 printing and reducing the difficulty of adjusting the machine. It should be noted that as long as the levelness error between the carrier frame 2 and the vacuum nozzle 12 is within the allowable movement range of the suction device 1, the phenomenon of suction cup printing and suction leakage can be avoided, and the smooth progress of the substrate taking and placing work can be ensured.

[0040] It should be noted that although the present application is introduced by arranging the elastic member 132 between the connecting portion 111 and the bottom cover 1312, this is not intended to limit the protection scope of the present application. As long as the elastic member 132 can support the suction rod 11 and provide an upward elastic force to the suction rod 11, the arrangement manner can be adjusted. For example, the elastic member 132 is arranged between the connecting portion 111 and the top cover 1311. In this case, when the suction device 1 is in the initial state of not contacting the substrate, the elastic member 132 is stretched due to the weight of the suction rod 11, thereby providing an upward elastic force to the suction rod 11. These adjustments do not deviate from the principles of the present application and are within the protection scope of the present application.

[0041] As an alternative embodiment, although the present application is introduced by using the sleeve 131 as a fixing member, this is not intended to limit the protection scope of the present application. The specific form of the fixing member can be adjusted, as long as the suction rod 11 is movably arranged on the fixing member, and the fixing member can directly support the suction rod 11 or support the suction rod 11 through the elastic member 132. For example, the fixing member is a vertical plate, the vertical plate is provided with a sliding groove extending in the upward and downward directions, the outer wall of the suction rod 11 is provided with a sliding rail, the sliding rail is movably arranged in the sliding groove, the vertical plate is formed with a protruding portion, and the elastic member 132 is arranged between the protruding portion and the connecting portion 111 of the suction rod 11. These adjustments do not deviate from the principles of the present application and are within the protection scope of the present application.

[0042] Example two:

[0043] Referring to Figure 4 , the adsorption device 1 comprises a suction rod 11, a vacuum nozzle 12 and a sleeve 131, the suction rod 11 is internally provided with a gas source channel, the vacuum nozzle 12 is arranged at the bottom end of the suction rod 11 and communicates with the gas source channel, the sleeve 131 has an annular top cover 1311 and an annular bottom cover 1312, the outer wall of the sleeve 131 is connected with the fixed plate 3, the suction rod 11 passes through the bottom cover 1312 and the top cover 1311 and is arranged in the sleeve 131 and can move up and down in the sleeve 131, the outer wall of the suction rod 11 is provided with a connecting portion 111, and the connecting portion 111 abuts against the bottom cover 1312. The gas source channel can be communicated with an external vacuum pump or a compressor through a pipeline, so as to generate a vacuum or an airflow, thereby helping to complete the adsorption and release process. That is, the elastic member 132 in the first embodiment is removed to become the second embodiment of the present application. Due to the levelness problem of the carrier plate frame 2, the carrier plate frame 2 placement platform or the adsorption device 1, the suction rod 11 first contacting the substrate will move upward relative to the sleeve 131, and the abutting bottom cover 1312 and the connecting portion 111 will be separated, so that the substrate is subjected to the gravity of the suction rod 11, but there is no additional resistance, so that the vacuum nozzle 12 in contact with the substrate can not press the substrate.

[0044] As a possible implementation, referring to Figure 5 , the inner wall of the sleeve 131 is provided with a rolling member 14, and the rolling member 14 is in sliding connection with the outer wall of the suction rod 11. This makes the suction rod 11 and the sleeve 131 move more smoothly when they are relatively displaced, so that smaller pressure is transmitted to the substrate, further reducing or avoiding the adsorption disc mark. Specifically, the rolling member 14 is a ball, the vertical surface of the bottom cover 1312 is provided with a containing groove 1313, the cross-sectional shape of the containing groove 1313 can be semicircular, superior arc or inferior arc, etc., a part of the ball is arranged in the containing groove 1313, and the other part is in rolling connection with the suction rod 11. In addition, the vertical surface of the top cover 1311 can also be provided with the above-mentioned containing groove 1313, and a ball is also arranged in the containing groove 1313, and the ball is in rolling connection with the corresponding position of the suction rod 11. The containing groove 1313 can be arranged on the opposite sides or the whole circumference of the vertical surface of the bottom cover 1312 and / or the top cover 1311, and a ball is arranged in each containing groove 1313. Alternatively, the containing groove 1313 can be replaced by an annular groove, and a plurality of balls are arranged in the annular groove.

[0045] It should be noted that the above-mentioned embodiments are only used to illustrate the principles of the present application and are not intended to limit the protection scope of the present application. Those skilled in the art can adjust the above-mentioned structure without departing from the principles of the present application, so that the present application can be applied to more specific application scenarios.

[0046] For example, as an alternative embodiment, the accommodating grooves 1313 for accommodating the rolling elements can be provided only on the facade of the bottom cover 1312, or only on the facade of the top cover 1311.

[0047] For example, as an alternative embodiment, the specific form of the rolling element 14 is not fixed, for example, the rolling elements can be replaced by bearings, rollers, etc.

[0048] For example, the mechanical arm can be omitted.

[0049] On the other hand, the application also provides a transfer mechanism with the above-described adsorption device 1. The transfer mechanism comprises a carrier frame 2, a fixed plate 3, a mechanical arm and the adsorption device 1, the mechanical arm is used to move the fixed plate 3, the fixed plate 3 is connected with each adsorption device 1, so as to drive each adsorption device 1 to move by moving the fixed plate 3. The carrier frame 2 has a plurality of carrier grooves, each carrier groove is used to load a substrate, and each adsorption device 1 is arranged to correspond to each carrier groove one by one, so that each adsorption device 1 can adsorb the substrate in the corresponding carrier groove.

[0050] After the transfer mechanism has the above-described adsorption device 1, the vacuum nozzle 12 in contact with the substrate can not press the substrate, which can weaken or avoid the adsorption disc mark, and avoid the damage of the substrate.

[0051] So far, the technical solution of the application has been described in combination with the preferred embodiments shown in the drawings, but it is easy for those skilled in the art to understand that the protection scope of the application is obviously not limited to these specific embodiments. Those skilled in the art can make equivalent changes or replacements to the related technical features without departing from the principles of the application, and the technical solutions after the changes or replacements will fall within the protection scope of the application.

Claims

1. An adsorption device, characterized by, The device comprises: a suction rod (11) with a gas source channel inside; a vacuum suction nozzle (12) arranged at the bottom end of the suction rod (11) and communicating with the gas source channel; a support structure (13) for supporting the suction rod (11) and allowing the suction rod (11) to move up and down relative to the support structure (13). The suction device is arranged to only overcome the gravity of the suction rod (11) when the suction rod (11) moves up relative to the support structure (13).

2. The suction device according to claim 1, wherein the support structure (13) comprises a fixed part and an elastic part (132), the suction rod (11) is movably arranged on the fixed part, and the elastic part (132) is connected to the fixed part and the suction rod (11) and arranged to support the suction rod (11) and provide an upward elastic force to the suction rod (11).

3. The suction device according to claim 2, wherein the fixed part is arranged as a sleeve (131) with a ring-shaped top cover (1311) and a ring-shaped bottom cover (1312), the suction rod (11) is arranged in the sleeve (131) through the bottom cover (1312) and the top cover (1311), the outer wall of the suction rod (11) has a connecting part (111), and the elastic part (132) is arranged between the connecting part (111) and the bottom cover (1312).

4. The suction device according to claim 2, wherein the fixed part is arranged as a sleeve (131) with a ring-shaped top cover (1311) and a ring-shaped bottom cover (1312), the suction rod (11) is arranged in the sleeve (131) through the bottom cover (1312) and the top cover (1311), the outer wall of the suction rod (11) has a connecting part (111), and the elastic part (132) is arranged between the connecting part (111) and the top cover (1311).

5. The suction device according to claim 1, wherein the support structure (13) is arranged as a sleeve (131) with a ring-shaped top cover (1311) and a ring-shaped bottom cover (1312), the suction rod (11) is arranged in the sleeve (131) through the bottom cover (1312) and the top cover (1311), the outer wall of the suction rod (11) has a connecting part (111), and the connecting part (111) abuts against the bottom cover (1312).

6. The suction device according to any one of claims 3 to 5, wherein a rolling part (14) is arranged on the inner wall of the sleeve (131) and in rolling connection with the outer wall of the suction rod (11).

7. The suction device according to claim 6, wherein The rolling member (14) is a ball, and the bottom cover (1312) is provided with a containing groove (1313) on the vertical surface, and the ball is arranged in the containing groove (1313).

8. The adsorption device according to claim 6, characterized in that, The rolling member (14) is a ball, and the top cover (1311) is provided with a containing groove (1313) on the vertical surface, and the ball is arranged in the containing groove (1313).

9. A transfer mechanism characterized by comprising: The substrate support device comprises a carrier frame (2), a fixed plate (3) and a plurality of adsorption devices as claimed in any one of claims 1 to 8, the fixed plate (3) is connected with each support structure (13), the carrier frame (2) has a plurality of carrier grooves, each carrier groove is used for loading a substrate, each adsorption device is arranged to correspond to each carrier groove one by one, and each adsorption device is used for adsorbing the substrate in the corresponding carrier groove.

10. The transfer mechanism according to claim 9, wherein The substrate transfer mechanism further comprises a mechanical arm, and the mechanical arm is used for moving the fixed plate (3).

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