Movable door assembly and gluing equipment

Abstract

The utility model provides a movable door assembly of gluing equipment and the gluing equipment, and relates to the technical field of semiconductor processing. The movable door assembly comprises a movable door, an air cylinder and a protective cover. The air cylinder comprises a cylinder barrel and a piston rod, a piston hole is formed in one axial end of the cylinder barrel, and the piston rod penetrates through the piston hole and is in sliding fit with the cylinder barrel. One end of the piston rod outside the cylinder barrel is connected with the movable door; a part of the protective cover is protected on the periphery of the cylinder barrel, a part of the protective cover is protected on the periphery of the part, located outside the cylinder barrel, of the piston rod, and the protective cover and the movable door are relatively fixed. According to the movable door assembly, the risk of damage of the air cylinder is reduced, the maintenance cost of the air cylinder is reduced, and the service life of the air cylinder is prolonged.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing, in particular to a moving door assembly and a glue coating device. BACKGROUND

[0002] In the process of semiconductor, coating glue on a coated object such as a wafer is a key step. In the step of coating glue on the coated object, a glue coating device is usually used to uniformly coat a layer of photoresist on the surface of the coated object. Specifically, the glue coating device has a glue coating chamber and a moving door. The glue coating chamber has a taking and placing opening. The moving door is driven to lift by a cylinder to open or close the taking and placing opening. The moving door is arranged to prevent dust and the like from entering the glue coating chamber when the glue coating operation is performed in the glue coating chamber, so as to prevent the coated object and the glue coating chamber from being contaminated by the dust, and also to avoid the developer or the photoresist in the glue coating chamber from overflowing.

[0003] In order to realize the connection between the cylinder and the moving door, a part of the piston rod of the cylinder needs to be extended from the cylinder barrel to be connected with the moving door. In this way, the part of the piston rod is exposed. In the long-term working process of the glue coating device, a small part of the developer and the photoresist will inevitably splash to the exposed piston rod. Since the developer and the photoresist are corrosive, they will chemically react with the lubricating oil on the piston rod to form sedimentary particles. Therefore, the cylinder will appear to be stuck during movement. The sticking of the cylinder not only greatly increases the risk of the handling fork of the robot for carrying the coated object being broken, but also greatly increases the risk of the cylinder being damaged, increases the maintenance cost of the cylinder, and reduces the service life of the cylinder. CONTENT OF THE UTILITY MODEL

[0004] Therefore, the present application provides a moving door assembly of a glue coating device and a glue coating device, which is beneficial to at least reduce the risk of the cylinder being damaged, improve the service life of the cylinder, reduce the maintenance cost of the cylinder, and also reduce the risk of the handling fork of the robot for carrying the coated object being broken to a certain extent.

[0005] In a first aspect, the present application provides a moving door assembly of a glue coating device, comprising: a moving door, a cylinder and a protective cover. The cylinder comprises a cylinder barrel and a piston rod. An axial end of the cylinder barrel has a piston hole, and the piston rod is arranged in the piston hole and is slidably fitted in the cylinder barrel. An end of the piston rod located outside the cylinder barrel is connected with the moving door. A part of the protective cover is protected around the outer periphery of the cylinder barrel, and a part of the protective cover is protected around the outer periphery of the part of the piston rod located outside the cylinder barrel. The protective cover is fixed relative to the moving door.

[0006] According to the moving door assembly of the gluing device, since the piston rod is slidable relative to the cylinder barrel, the length of the piston rod extending out of the cylinder barrel is elongated or shortened along with the sliding of the piston rod relative to the cylinder barrel. In the present application, regardless of whether the piston rod is elongated or shortened relative to the cylinder barrel, since the protective cover is fixed relative to the moving door, the protective cover and the moving door as a whole can be lifted along with the sliding of the piston rod. During the lifting of the protective cover, a part of the protective cover is always protected on the outer periphery of the cylinder barrel, and another part of the protective cover is always protected on the outer periphery of the part of the piston rod located outside the cylinder barrel. In this way, the part of the piston rod located outside the cylinder barrel can be protected by the protective cover. During the long-term operation of the gluing device, the developer and the photoresist can be at least partially prevented from splashing to the piston rod, so that the chemical reaction between the developer, the photoresist and the lubricating oil on the piston rod to form precipitated particles can be at least partially prevented, and then the phenomenon of the cylinder being stuck during movement can be at least partially avoided, the risk of the carrying fork of the mechanical hand for carrying the glued part being broken can be reduced, the risk of the cylinder being damaged itself can be reduced, the maintenance cost of the cylinder can be reduced, and the service life of the cylinder can be prolonged.

[0007] In a possible implementation of the first aspect of the present application, the lower end of the protective cover is provided with a flange, and the flange is folded away from the cylinder barrel.

[0008] In a possible implementation of the first aspect of the present application, the included angle between the flange and the protective cover is greater than or equal to 45° and less than or equal to 60°, and / or the width of the flange is greater than or equal to 1 cm and less than or equal to 1.7 cm.

[0009] In a possible implementation of the first aspect of the present application, the outer peripheral wall of the cylinder barrel is provided with a gas joint, the gas joint is located on the lower side of the flange, and in the circumferential direction of the cylinder barrel, the gas joint is located between the two ends of the flange.

[0010] In a possible implementation of the first aspect of the present application, the gas joint and the flange are both two, the two gas joints are distributed at intervals in the circumferential direction of the cylinder barrel, and the two flanges are distributed at intervals in the circumferential direction of the cylinder barrel; each gas joint corresponds to one flange; in the circumferential direction of the cylinder barrel, the two flanges are spaced apart between the ends adjacent to each other to form a drain port, and the two flanges are inclined in the direction away from each other and towards the moving door.

[0011] In a possible implementation of the first aspect of the present application, the end of the flange away from the protective cover is located between the end of the gas joint away from the cylinder barrel and the outer peripheral surface of the protective cover.

[0012] In a possible implementation of the first aspect of the present application, the mobile door assembly comprises: a first connecting seat, the first connecting seat comprising a first part and a second part; the first part is located on one axial side of the cylinder and connected with the piston rod; the second part is located on a side of the first part opposite to the cylinder, and is connected with one end of the first part in the width direction to form a step, a part of the mobile door is located on a side of a step surface of the step and connected with the second part; wherein the part of the first connecting seat between the mobile door and the piston rod is a protected part, and the protective cover also protects the outside of the protected part.

[0013] In a possible implementation of the first aspect of the present application, the protective cover has a first connecting hole, the second part has a second connecting hole, and an end of the mobile door close to the first part has a third connecting hole; the first connecting hole, the second connecting hole and the third connecting hole are opposite and detachably connected through the connecting piece.

[0014] In a possible implementation of the first aspect of the present application, the surface of the second part facing the mobile door has a groove, and the second connecting hole is located at the groove wall of the groove; the mobile door comprises a door body and a connecting lug, the door body is used for opening or closing the taking and placing opening, and the connecting lug is connected with an edge of the door body close to the first part, and the connecting lug has the third connecting hole; the protective cover comprises a connecting plate, the connecting plate has the first connecting hole, and the connecting plate and the connecting lug are both located in the groove.

[0015] In a possible implementation of the first aspect of the present application, the shape of the protective cover is similar to the shape of the part covered by the protective cover in the mobile door assembly.

[0016] In a possible implementation of the first aspect of the present application, the mobile door assembly comprises a second connecting seat; the second connecting seat is fixedly connected with the piston rod, and the protective cover is detachably connected with the mobile door and the second connecting seat respectively.

[0017] In a possible implementation of the first aspect of the present application, the mobile door assembly comprises a second connecting seat; the second connecting seat is fixedly connected with the piston rod, and the protective cover is detachably connected with the mobile door and the second connecting seat respectively.

[0018] The technical effects of the second aspect of the present application can refer to the technical effects of the first aspect of the present application, which will not be repeated here.

[0019] In a possible implementation of the second aspect, the flange in any of the above technical solutions is arranged on the wall plate of the protective cover facing the object. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 The schematic diagram of the glue coating equipment provided by some embodiments of the present application is shown.

[0021] Figure 2 for a moving door assembly according to Figure 1 FIG. 7 is a perspective view of a moving door assembly in a gluing apparatus according to

[0022] Figure 3 for a moving door assembly according to Figure 2 FIG. 8 is an exploded view of a moving door assembly according to

[0023] Figure 4 for a moving door assembly according to Figure 2 and Figure 3 FIG. 9 is a matching diagram of a first connecting seat, a second connecting seat and a cylinder according to

[0024] Figure 5 for a moving door assembly according to Figure 2 and Figure 3 FIG. 10 is a matching diagram of a moving door and a first connecting seat according to

[0025] Figure 6 for a moving door assembly according to Figure 2 and Figure 3 FIG. 11 is a perspective view of a moving door according to

[0026] Figure 7 for a moving door assembly according to Figure 3 FIG. 12 is an enlarged view of a portion circled at A in FIG. 11.

[0027] Figure 8 for a moving door assembly according to Figure 3 FIG. 13 is an enlarged view of a portion circled at B in FIG. 11.

[0028] Reference signs:

[0029] 100, a gluing apparatus;

[0030] 1, a gluing cabin; 11, a taking and placing opening;

[0031] 2, a carrying object;

[0032] 3, a moving door assembly; 31, a moving door; 311, a door body; 312, a connecting ear; 3121, a first ear part; 3122, a second ear part; 313, a third connecting hole; 32, a protective cover; 321, a first connecting hole; 33, a cylinder; 331, a cylinder barrel; 3311, a piston hole; 332, a piston rod; 34, a flange; 341, a discharge opening; 35, a gas joint; 36, a first connecting seat; 361, a first part; 362, a second part; 3621, a second connecting hole; 3622, a groove; 37, a second connecting seat; 371, a first connecting part; 372, a second connecting part; DETAILED DESCRIPTION

[0033] In the embodiments of the present application, the term "exemplary" or "for example" is used to indicate an example, an illustration, or a description. Any embodiment or design solution described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or superior to other embodiments or design solutions. In fact, the term "exemplary" or "for example" is used to present related concepts in a specific manner.

[0034] In the embodiments of the present application, the terms "first", "second" are used only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features.

[0035] In the description of the embodiments of the present application, the term "at least one" refers to one or more, and "multiple" refers to two or more. "At least one of the following (one)" or the like refers to any combination of these items, including any combination of single item (one) or multiple items. For example, at least one of a, b, or c can represent a, b, c, a-b, a-c, b-c, or a-b-c, where a, b, and c can be single or multiple.

[0036] In the description of the embodiments of the present application, the term "and / or" refers to and covers any and all possible combinations of one or more of the associated listed items. The term "and / or" is a description of the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B can represent the existence of A alone, the existence of A and B at the same time, and the existence of B alone. In addition, the character " / " in the present application generally represents that the front and rear associated objects are in an "or" relationship.

[0037] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting" should be understood in a broad sense, for example, "connecting" can be detachable connection, or can be non-detachable connection; can be direct connection, or indirect connection through intermediate medium.

[0038] The present application will be described in detail below with reference to the accompanying drawings.

[0039] Please refer to Figure 1 , the gluing equipment 100 includes a gluing cabin 1, a carrying object 2 and a moving door assembly 3.

[0040] The gluing cabin 1 has a taking and placing opening 11. The shape of the taking and placing opening 11 includes but is not limited to a circle, a rectangle or a special shape.

[0041] The carrier 2 is located in the glue applying chamber 1. In this way, a coated piece such as a wafer can be placed on the carrier 2 in the glue applying chamber 1 through the access opening 11 so as to apply glue on the coated piece on the carrier 2, or the coated piece with a glue layer applied thereon can be taken out of the glue applying chamber 1 through the access opening 11.

[0042] For example, the carrier 2 is rotatably arranged in the glue applying chamber 1. In this way, when the coated piece is placed on the carrier 2, the glue applied on the coated piece can flow to the edge of the coated piece by the combined action of centrifugal force, gravity, surface tension, etc. during the rotation of the coated piece with the carrier 2, so as to improve the glue applying effect. Of course, the present application is not limited thereto, and in other embodiments, the carrier 2 can also be fixed relative to the glue applying chamber 1.

[0043] It is worth mentioning that since the carrier 2 and the moving door assembly 3 are located inside the glue applying chamber 1, when the coated piece is placed on the carrier 2 or taken out of the glue applying chamber 1, the moving door assembly 3 can be used to open or close the access opening 11. Figure 1 is shown by a dashed line.

[0044] Please refer to Figure 2 and Figure 3 , the moving door assembly 3 includes a moving door 31, a cylinder 33 and a protective cover 32.

[0045] The moving door 31 is connected to the glue applying chamber 1 to open or close the access opening 11.

[0046] In this way, when the coated piece needs to be placed on the carrier 2 in the glue applying chamber 1 or taken out of the glue applying chamber 1, the moving door 31 can be opened to facilitate the taking and placing of the coated piece.

[0047] When the coated piece is subjected to the glue applying operation in the glue applying chamber 1 or the glue applying device 100 is not working, the moving door 31 can close the access opening 11, so as to prevent dust, etc. from entering the glue applying chamber 1, to prevent the coated piece and the glue applying chamber 1 from being contaminated by dust, and also to avoid the overflow of the developing solution or the photoresist in the glue applying chamber 1 when the glue applying operation is performed in the glue applying chamber 1.

[0048] In order to facilitate the lifting of the moving door 31, please refer to Figure 2 and Figure 3 , the cylinder 33 is connected to the moving door 31, and the cylinder 33 is used to drive the moving door 31 to lift.

[0049] Specifically, please refer to Figure 3 , the cylinder 33 includes a cylinder barrel 331 and a piston rod 332. The cylinder barrel 331 has a piston hole 3311 at one axial end. In the specific example shown in Figure 3 , the axial direction of the cylinder barrel 331 is the upward and downward direction (i.e. the direction of gravity).

[0050] The piston rod 332 is arranged in the piston hole 3311 and is slidably fitted in the cylinder barrel 331.

[0051] The end (i.e., the upper end) of the piston rod 332 outside the cylinder barrel 331 is connected to the moving door 31. In this way, when the piston rod 332 slides relative to the cylinder barrel 331 due to the change of the air pressure in the cylinder barrel 331, the moving door 31 can be driven to move up and down.

[0052] In the related art, a protective cover is arranged on the outer periphery of the cylinder barrel 331 to protect the cylinder barrel 331. However, the protective cover can only protect the outer periphery of the cylinder barrel and cannot protect the part of the piston rod 332 outside the cylinder barrel 331, so that the part of the piston rod 332 is exposed. In the long-term working process of the coating device 100, a small amount of developing solution and photoresist will inevitably splash on the exposed piston rod 332. Since the developing solution and the photoresist are corrosive, they will chemically react with the lubricating oil on the piston rod 332 to form sedimentary particles. Therefore, the air cylinder 33 will appear to be stuck during movement. The sticking of the air cylinder 33 not only greatly increases the risk of the handling fork of the robot for carrying the coated parts being broken, but also greatly increases the risk of the air cylinder 33 being damaged. The maintenance cost of the air cylinder 33 is increased, and the service life of the air cylinder 33 is reduced.

[0053] In the present application, please continue to refer to Figure 2 and Figure 3 , a part of the protective cover 32 protects the outer periphery of the cylinder barrel 331, and a part of the protective cover 32 protects the outer periphery of the part of the piston rod 332 outside the cylinder barrel 331. Moreover, the protective cover 32 is fixed relative to the moving door 31.

[0054] Specifically, since the piston rod 332 is slidable relative to the cylinder barrel 331, the length of the piston rod 332 extending out of the cylinder barrel 331 is elongated or shortened as the piston rod 332 slides relative to the cylinder barrel 331, and in this application, regardless of whether the piston rod 332 is elongated or shortened relative to the cylinder barrel 331, since the protective cover 32 is fixed relative to the moving door 31, the protective cover 32 and the moving door 31 as a whole can be lifted and lowered as the piston rod 332 slides. During the lifting and lowering of the protective cover 32, the protective cover 32 is always partially protected from the outer periphery of the cylinder barrel 331 and partially protected from the outer periphery of the part of the piston rod 332 located outside the cylinder barrel 331. In this way, the part of the piston rod 332 located outside the cylinder barrel 331 can be protected by the protective cover 32, and during the long-term operation of the glue coating device 100, the developer and photoresist can be at least partially prevented from splashing onto the piston rod 332, thereby at least partially preventing the developer and photoresist from chemically reacting with the lubricating oil on the piston rod 332 to form precipitated particles, and further at least partially preventing the air cylinder 33 from jamming during movement, reducing the risk of the fork of the robot arm carrying the coated part being broken, reducing the risk of damage to the air cylinder 33 itself, reducing the maintenance cost of the air cylinder 33, and prolonging the service life of the air cylinder 33.

[0055] It should be noted that "the protective cover 32 is fixed relative to the moving door 31" means that the two can be directly fixed together or indirectly fixed together, as long as they are relatively stationary.

[0056] In some embodiments of the present application, please refer to Figure 3 and Figure 4 The moving door assembly 3 further comprises a first connecting seat 36. The first connecting seat 36 comprises a first part 361 and a second part 362.

[0057] The shape of the first part 361 includes but is not limited to rectangular block, square block, circular block or special-shaped block.

[0058] The first part 361 is located on the axial side of the cylinder barrel 331 and connected with the piston rod 332.

[0059] The shape of the second part 362 includes but is not limited to rectangular block, square block, circular block or special-shaped block.

[0060] The second part 362 is located on the side of the first part 361 opposite to the cylinder barrel 331, and the second part 362 is connected with one end of the first part 361 in the width direction to form a step.

[0061] Please refer to Figure 5The second part 362 is connected to the first part 361.

[0062] In this way, the mobile door 31 and the first part 361 are aligned in the lifting direction of the mobile door 31, that is, the mobile door 31 and the first part 361 are overlapped in the lifting direction of the mobile door 31, so that the size of the mobile door assembly 3 in the width direction of the first part 361 can be reduced, which provides an advantage for optimizing the space layout in the glue coating cabin 1.

[0063] Please continue to refer to Figure 4 , and refer back to Figure 2 The part of the first connecting seat 36 between the mobile door 31 and the piston rod 332 is a protected part 363 (i.e., the first part 361 and a part of the second part 362), and the protective cover 32 is also protected outside the protected part. In this way, the end of the protective cover 32 close to the mobile door 31 can be arranged higher than the end of the piston rod 332 close to the mobile door 31, so that the protective cover 32 can better protect the part of the piston rod 332 outside the cylinder barrel 331, further preventing the developer and photoresist from splashing onto the piston rod 332, thereby further preventing the developer and photoresist from chemically reacting with the lubricating oil on the piston rod 332 to form sedimentary particles, further avoiding the phenomenon of jamming of the air cylinder 33 during movement, further reducing the risk of the handling fork of the mechanical hand for carrying the coated part being broken, further reducing the risk of damage to the air cylinder 33 itself, further reducing the maintenance cost of the air cylinder 33, and further improving the service life of the air cylinder 33.

[0064] In some embodiments of the present application, the protective cover 32 is detachably connected to the mobile door 31. In this way, the detachable connection facilitates the disassembly and assembly of the protective cover 32, thereby facilitating the maintenance and replacement of the protective cover 32.

[0065] In some embodiments of the present application, please refer to Figure 3 , Figure 4 and Figure 5 The protective cover 32 has a first connecting hole 321, the second part 362 has a second connecting hole 3621, and the end of the mobile door 31 close to the first part 361 has a third connecting hole 313; the first connecting hole 321, the second connecting hole 3621, and the third connecting hole 313 are aligned and detachably connected by a connecting piece (not shown in the figure). In this way, the protective cover 32, the second part 362, and the mobile door 31 can share the connecting piece to achieve connection, thereby facilitating the simplification of the connection relationship of the mobile door assembly 3 and reducing the assembly cost.

[0066] For example, the first connecting hole 321, the second connecting hole 3621 and the third connecting hole 313 are threaded holes, and the connecting members are screw fasteners which are screwed into the first connecting hole 321, the second connecting hole 3621 and the third connecting hole 313.

[0067] For another example, the first connecting hole 321, the second connecting hole 3621 and the third connecting hole 313 are non-threaded holes, and the connecting members are pins which can be inserted into the first connecting hole 321, the second connecting hole 3621 and the third connecting hole 313 and are in interference fit with the first connecting hole 321, the second connecting hole 3621 and the third connecting hole 313.

[0068] Of course, it can be understood that in other embodiments, the protective cover 32 can also be fixed together with the second part 362 by the first connecting member, and the second part 362 is fixed together with the moving door 31 by the second connecting member, and the first connecting member and the second connecting member are independent structures.

[0069] In some embodiments of the present application, please continue to refer to Figure 3 , Figure 4 and Figure 5 , the surface of the second part 362 facing the moving door 31 has a groove 3622.

[0070] Please refer to Figure 3 and Figure 5 , the moving door 31 comprises a door body 311 and a connecting lug 312. The door body 311 is used to open or close the taking and placing opening 11. The connecting lug 312 is connected to the edge of the door body 311 close to the first part 361.

[0071] Please continue to refer to Figure 3 and Figure 7 , the protective cover 32 comprises a connecting plate 322. The connecting plate 322 has a first connecting hole 321.

[0072] In this way, the connecting plate 322 and the connecting lug 312 can be located in the groove 3622 and connected to the second part 362 by the connecting member, and the protective cover 32, the second part 362 and the connecting lug 312 are connected at the groove 3622, which is conducive to further improving the compactness of the moving door assembly 3.

[0073] On this basis, please continue to refer to Figure 4 , Figure 5 and Figure 6 , in the sliding direction of the piston rod 332, the groove side wall of the groove 3622 has opposite first groove wall 36221 and second groove wall 36222. The first groove wall 36221 is located on the side of the second groove wall 36222 away from the piston rod 332.

[0074] The connecting lug 312 comprises a first lug portion 3121 and a second lug portion 3122. One end of the first lug portion 3121 is connected to the edge of the door body 311 close to the first portion 361. The first lug portion 3121 is arranged in a stack with the first slot wall 36221. The second lug portion 3122 is connected to the other end of the first lug portion 3121, and the second lug portion 3122 is located between the first slot wall 36221 and the second slot wall 36222, and is arranged in a stack with the slot bottom wall of the recess 3622. The second lug portion 3122 has the third connecting hole 313 described above.

[0075] Referring to Figure 7 , the connecting plate 322 comprises a first plate segment 3221 and a second plate segment 3222. The first plate segment 3221 is arranged in a stack with the second slot wall 36222. The second plate segment 3222 is connected to the first plate segment 3221, and the second plate segment 3222 is located between the first slot wall 36221 and the second slot wall 36222, and is arranged in a stack with the slot bottom wall of the recess 3622. The second plate segment 3222 has the third connecting hole 313 described above.

[0076] Therefore, the structure of the connecting lug 312 and the structure of the connecting plate 322 can improve the connection reliability between the protective cover 32, the connecting lug 312 and the second portion 362.

[0077] Here, it can be understood that the structure of the second portion 362 between the first slot wall 36221 and the first portion 361 is the protected portion described above.

[0078] In some embodiments of the present application, referring back to Figure 3 and Figure 4 , the mobile door assembly 3 further comprises a second connecting seat 37. The second connecting seat 37 is fixedly connected to the piston rod 332. The protective cover 32 is detachably connected to the second connecting seat 37 in addition to being detachably connected to the mobile door 31. In this way, on the one hand, it is beneficial to improve the connection reliability of the protective cover 32, and prevent it from shaking during the lifting process of the mobile door 31, and on the other hand, the detachable connection facilitates the disassembly and assembly of the protective cover 32, thereby facilitating the maintenance and replacement of the protective cover 32.

[0079] For example, the detachable connection between the second connecting seat 37 and the protective cover 32 can be screw connection, clamping, etc.

[0080] In some embodiments of the present application, the first part 361 is connected to the piston rod 332 through the second connecting seat 37. In addition, the first part 361 and the second connecting seat 37 are detachably connected. In this way, the detachable connection of the moving door 31 and the first connecting seat 36 as a whole relative to the piston rod 332 can be achieved, so that when any one of the moving door 31 and the piston rod 332 is damaged, it can be easily disassembled and replaced without the need to replace the entire structure, thereby reducing maintenance costs.

[0081] In some specific examples, please refer to Figure 4 The second connecting seat 37 includes a first connecting part 371 and a second connecting part 372. The first connecting part 371 is located on the side of the cylinder barrel 331 adjacent to the moving door 31 and is connected to the piston rod 332. The first part 361 is connected to the piston rod 332 through the first connecting part 371.

[0082] The second connecting part 372 is located on the outer periphery of the cylinder barrel 331 and extends along the sliding direction of the piston rod 332. The second connecting part 372 is detachably connected to the protective cover 32. In this way, on the one hand, it is beneficial to improve the connection reliability of the protective cover 32, and prevent the protective cover 32 from shaking during the lifting process of the moving door 31, on the other hand, the detachable connection facilitates the disassembly and assembly of the protective cover 32, thereby facilitating the maintenance and replacement of the protective cover 32.

[0083] On this basis, for example, the second connecting part 372 and the outer peripheral wall of the cylinder barrel 331 are slidably connected through a guide structure. For example, the outer peripheral wall of the cylinder barrel 331 has a guide groove. The second connecting part 372 has a guide block. The guide block is slidably connected in the guide groove. In other embodiments, a guide block can be provided on the outer peripheral wall of the cylinder barrel 331, and a guide groove can be provided on the second connecting part 372.

[0084] In some embodiments of the present application, the shape of the protective cover 32 is similar to the shape of the part covered by the protective cover 32 in the moving door assembly 3. In this way, it is beneficial to achieve the compactness of the structure of the moving door assembly 3.

[0085] Specifically, when the moving door assembly 3 includes the first connecting seat 36, the protected part 363 is in a stepped shape, and therefore, the part of the protective cover 32 corresponding to the protected part 363 is also in a stepped shape. In this way, it is beneficial to achieve the compactness of the structure of the moving door assembly 3.

[0086] In some embodiments of the present application, please refer to Figure 8The lower end of the protective cover 32 is provided with a flange 34. The flange 34 is folded back against the cylinder barrel 331. In the long-term working process of the coating device 100, a small part of the developing solution and photoresist and the like will inevitably splash to the protective cover 32. The flange 34 is folded back against the cylinder barrel 331 at the lower end of the protective cover 32, so that the flange 34 can at least to some extent receive the developing solution and photoresist and the like splashed onto the protective cover 32, thereby at least to some extent preventing the developing solution and photoresist and the like splashed onto the protective cover 32 from continuing to drip downward along the protective cover 32 and falling onto other structures of the air cylinder 33 or the ground, thereby causing the problem of difficult cleaning.

[0087] In some further embodiments of the present application, please continue to refer to Figure 8 The included angle a between the flange 34 and the protective cover 32 is less than 90°. In this way, it is beneficial to improve the reliability of using the flange 34 to receive the developing solution and photoresist and the like splashed onto the protective cover 32, and prevent the developing solution and photoresist and the like received by the flange 34 from further dripping downward along the flange 34 and falling onto other structures of the air cylinder 33 or the ground, thereby causing the problem of difficult cleaning.

[0088] For example, the included angle a between the flange 34 and the protective cover 32 is 89°, 85°, 80°, 78°, 75°, 72°, 70°, 65°, 62°, 60°, 58°, 55°, 52°, 50°, 48°, 45°, 40°, 38°, 35°, 30°, 25° or 20°.

[0089] For example, the included angle between the flange 34 and the protective cover 32 is greater than or equal to 45° and less than or equal to 60°. In this way, on the one hand, the reliability of using the flange 34 to receive the developing solution and photoresist and the like splashed onto the protective cover 32 can be improved, and the developing solution and photoresist and the like received by the flange 34 can be prevented from further dripping downward along the flange 34; on the other hand, the assembly between the flange 34 and the protective cover 32 or the processing of the flange 34 can also be facilitated.

[0090] For example, the flange 34 and the protective cover 32 are an integral molded part. In this way, it is beneficial to simplify the processing technology of the flange 34 and the protective cover 32 as a whole, and reduce the manufacturing cost. Of course, the present application is not limited thereto, and in other embodiments, the flange 34 and the protective cover 32 can also be independently processed and assembled.

[0091] In some further embodiments of the present application, please continue to refer to Figure 6, the width dimension W of the flange 34 is greater than or equal to 1 cm and less than or equal to 1.7 cm. In this way, on the one hand, the flange 34 can reliably receive the developing solution and the photoresist and the like splashed onto the protective cover 32 without the width dimension W of the flange 34 being too small; on the other hand, the flange 34 can also be prevented from protruding too much from the outer peripheral surface of the protective cover 32 and interfering with the assembly of other structures of the coating device 100 without the dimension of the flange 34 being too large.

[0092] For example, the width dimension of the flange 34 is 1.1 cm, 1.2 cm, 1.3 cm, 1.4 cm, 1.5 cm or 1.6 cm.

[0093] In some specific examples of the present application, please refer back to Figure 2 The outer peripheral wall of the cylinder barrel 331 is provided with a gas joint 35. The gas joint 35 is used to connect with the gas pipe outside the cylinder barrel 331 to facilitate the introduction of gas into the cylinder barrel 331, thereby realizing the driving function of the gas cylinder 33.

[0094] The gas joint 35 is located on the lower side of the protective cover 32. In this way, the structure of the gas cylinder 33 can be reasonably optimized to prevent the gas structure from interfering with the lifting of the protective cover 32.

[0095] Please continue to refer to Figure 2 The gas joint 35 is located on the lower side of the flange 34, and in the circumferential direction of the cylinder barrel 331, the two ends of the gas joint 35 are located between the two ends of the flange 34 in the circumferential direction of the cylinder barrel 331. In this way, the developing solution and the photoresist and the like can be prevented from dripping onto the gas joint 35, thereby preventing the gas joint 35 from being corroded by the developing solution and the photoresist and the like.

[0096] In some specific examples of the present application, please continue to refer to Figure 2 There are two gas joints 35, which are spaced apart in the circumferential direction of the cylinder barrel 331. There are two flanges 34, which are spaced apart in the circumferential direction of the cylinder barrel 331. Each gas joint 35 corresponds to one flange 34; in the circumferential direction of the cylinder barrel 331, the two ends of the two flanges 34 adjacent to each other are spaced apart to form a drain 341 (as shown in Figure 8 ), and the two flanges 34 are inclined in the direction away from each other and towards the moving door 31. In this way, the drain 341 is located at the lowest point of the two flanges 34, so that the developing solution and the photoresist and the like received by the flange 34 can be discharged through the drain 341, thereby facilitating the centralized collection and centralized treatment of the developing solution and the photoresist and the like discharged from the drain 341.

[0097] In some embodiments of the present application, the end of the flange 34 away from the shield 32 is located between the end of the gas joint 35 facing away from the cylinder barrel 331 and the outer circumferential surface of the shield 32. That is, the flange 34 does not protrude from the end of the gas joint 35 facing away from the cylinder barrel 331. In this way, the arrangement of the flange 34 can be avoided to interfere with the connection between the gas joint 35 and the gas pipe.

[0098] In some embodiments of the present application, the flange 34 described above is arranged on the wall panel of the shield 32 facing the object 2. That is, the front surface of the shield 32 is provided with the flange 34. Since the developing solution and the photoresist splashed onto the surface of the shield 32 facing the object 2 are the most during the long-term operation of the coating device 100, the flange 34 described above is arranged on the wall panel of the shield 32 facing the object 2, so that the flange 34 can well receive the developing solution and the photoresist splashed onto the shield 32, and prevent the developing solution and the photoresist splashed onto the shield 32 from continuing to drip downward along the shield 32.

[0099] Of course, it can be understood that in other embodiments, in addition to arranging the flange 34 described above on the wall panel of the shield 32 facing the object 2, the flange 34 can also be arranged on the two side wall panels connected to the wall panel.

[0100] It can be understood that when the moving door assembly 3 is installed in the coating cabin 1, it is often installed against the inner wall surface of the coating cabin 1 to save space. Therefore, in some embodiments, the side of the cylinder barrel 331 close to the inner wall surface of the coating cabin 1 can not be protected by the shield 32, so that the shield 32 can be substantially open-loop-shaped in the circumferential direction of the cylinder barrel 331. Specifically, the shield 32 has an opening on the side facing the inner wall surface of the coating cabin 1, so that the cylinder barrel 331 can be close to the inner wall surface of the coating cabin 1 through the opening. For example, as shown in FIG. 1, the cylinder barrel 331 is in the shape of a cube, and the shield 32 protects three sides of the cylinder barrel 331. Figure 3

[0101] Of course, in other embodiments, the shield 32 can also protect the cylinder barrel 331 and the piston rod 332 in the entire circumferential direction of the cylinder barrel 331.

[0102] In the description of the present specification, specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner without contradicting each other.

[0103] ​It should be noted that the above examples are only used to illustrate the technical solutions of the present application, and are not intended to limit the same. Although the present application has been described in detail with reference to the foregoing examples, it should be understood by those of ordinary skill in the art that the technical solutions recorded in the foregoing examples can be modified, or some technical features thereof can be replaced by equivalent replacements. Such modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A movable door assembly of an adhesive coating device, characterized in that, include: Sliding door; A cylinder, comprising a cylinder barrel and a piston rod, wherein one axial end of the cylinder barrel has a piston hole, and the piston rod passes through the piston hole and is slidably fitted to the cylinder barrel; the end of the piston rod located outside the cylinder barrel is connected to the movable door. A protective cover, a portion of which protects the outer periphery of the cylinder and a portion of which protects the outer periphery of the portion of the piston rod located outside the cylinder, the protective cover being fixed relative to the movable door.

2. The movable door assembly of the adhesive coating equipment according to claim 1, characterized in that, The lower end of the protective cover is provided with a flange, which is folded away from the cylinder.

3. The movable door assembly of the adhesive coating equipment according to claim 2, characterized in that, The angle between the flange and the protective cover is greater than or equal to 45° and less than or equal to 60°; and / or the width of the flange is greater than or equal to 1 cm and less than or equal to 1.7 cm.

4. The movable door assembly of the adhesive coating equipment according to claim 2, characterized in that, A gas connector is provided on the outer peripheral wall of the cylinder. The gas connector is located on the lower side of the flange and is located between the two ends of the flange in the circumferential direction of the cylinder.

5. The movable door assembly of the adhesive coating equipment according to claim 4, characterized in that, There are two gas connectors and two flanges, with the two gas connectors spaced apart in the circumferential direction of the cylinder and the two flanges spaced apart in the circumferential direction of the cylinder; each gas connector corresponds to one flange. In the circumferential direction of the cylinder, the two flanges are spaced apart at their adjacent ends to form a drain port, and the two flanges are inclined toward the moving door in a direction away from each other.

6. The movable door assembly of the adhesive coating equipment according to claim 4, characterized in that, The end of the flange furthest from the protective cover is located between the end of the gas connector opposite to the cylinder and the outer peripheral surface of the protective cover.

7. The movable door assembly of the adhesive coating equipment according to any one of claims 1-6, characterized in that, include: A first connecting seat, the first connecting seat comprising a first part and a second part; The first part is located on one axial side of the cylinder and is connected to the piston rod; The second part is located on the side of the first part opposite to the cylinder, and the second part is connected to one end of the first part in the width direction to form a step. A part of the movable door is located on the side facing the step surface of the step and is connected to the second part. The portion of the first connecting seat located between the movable door and the piston rod is the protected portion, and the protective cover also protects the outside of the protected portion.

8. The movable door assembly of the adhesive coating equipment according to claim 7, characterized in that, The protective cover has a first connection hole, the second part has a second connection hole, and the end of the movable door near the first part has a third connection hole; The first connecting hole, the second connecting hole, and the third connecting hole are aligned and detachably connected by a connector.

9. The movable door assembly of the adhesive coating equipment according to claim 8, characterized in that, The second part has a groove on the surface facing the movable door, and the second connecting hole is located at the groove wall; The movable door includes a door body and a connecting lug, the connecting lug being connected to the edge of the door body near the first part, and the connecting lug having the third connecting hole; The protective cover includes a connecting plate having the first connecting hole, and both the connecting plate and the connecting lug are located within the groove.

10. An adhesive coating device, characterized in that, include: A glue-applying container, wherein the glue-applying container has an opening for loading and unloading; A container, wherein the container is located within the adhesive application chamber; The movable door assembly according to any one of claims 1-9, wherein the movable door is used to open or close the pick-up / place-out port.

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