Wafer tool clamp

Abstract

The utility model relates to the technical field of wafer processing, and discloses a wafer work fixture comprising a placing disc, the top of the placing disc is fixedly connected with a control arc plate, the outer surface of the control arc plate is provided with an opening, the outer surface of the control arc plate is fixedly connected with an adjusting support plate, the top of the adjusting support plate is fixedly connected with a motor, and the top of the adjusting support plate is fixedly connected with a rotating shaft. The output end of the motor is fixedly connected with a rotating shaft, the other end of the rotating shaft is fixedly connected with a gear, and the outer surface of the gear is connected with a toothed plate in an engaged mode. The wafer placing device has the following advantages and effects that a worker places a wafer on the placing disc and pushes the wafer from one side, then the driving motor controls the rotating shaft to rotate to drive the gear to be combined with the outer surface of the gear to be in meshed connection with the toothed plate, the gear rotates to drive the toothed plate to be pushed on the sliding frame, and the clamping pushing frame clamps and fixes the outer side of the wafer; and the flexibility of the whole device is improved, adjustment is convenient, and the working efficiency of the whole device is improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing technology, and in particular to a wafer tooling fixture. Background Technology

[0002] Thin film deposition is one of the key processes in wafer fabrication. Wafers are held in place within the chamber of a film deposition machine using fixtures to deposit the desired material. Wafer fixtures are typically used to hold the wafer in place to prevent it from slipping during rotation or flipping.

[0003] According to Chinese Patent Publication No. CN218110576U, a tooling fixture for fixing wafers is provided, relating to the field of wafer processing technology. It includes an upper tray and a lower tray that movably engages with the upper tray. At least one of the upper and lower trays has a recessed surface forming a first groove, and the other has a protruding surface forming a flange. The upper and lower trays are connected by an adjustment mechanism. The first groove and the flange enclose a limiting space for constraining the wafer. The adjustment mechanism can adjust the size of the limiting space at least along the axial direction of the upper or lower tray. This tooling fixture for fixing wafers provided by this utility model can adjust the size of the limiting space, that is, it can flexibly adjust when constraining wafers of different thicknesses, avoiding wafer slippage in subsequent processes.

[0004] The aforementioned patent has the effect of flexibly adjusting when constraining wafers of different thicknesses. However, the clamping, placement and pushing / removing methods of the wafers are not flexible enough, the clamping range is relatively limited, and the pressing and fixing method of the wafers is not convenient and quick enough. Utility Model Content

[0005] The purpose of this invention is to provide a wafer fixture that is easy to place, has enhanced clamping and fixing, is easy to push and release, has enhanced downward pressure and fixing, and has expanded the adjustment range.

[0006] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a wafer tooling fixture, including a placement tray and a slide, a control arc plate is fixedly connected to the top of the placement tray, an opening is opened on the outer surface of the control arc plate, an adjusting support plate is fixedly connected to the outer surface of the control arc plate, a motor is fixedly connected to the top of the adjusting support plate, a rotating shaft is fixedly connected to the output end of the motor, a gear is fixedly connected to the other end of the rotating shaft, a toothed plate is meshed with the outer surface of the gear, a slide is slidably connected to the bottom of the toothed plate, the bottom of the slide is fixedly connected to the top of the adjusting support plate, and a clamping pusher is fixedly connected to the other end of the toothed plate.

[0007] By adopting the above technical solution, the staff places the disc on the placement tray and pushes it in from one side. Then, the drive motor controls the rotating shaft to rotate, which drives the gear to mesh with the toothed plate on the outer surface of the gear. The rotation of the gear drives the toothed plate to push on the slide, so that the clamping pusher clamps and fixes the disc on the outside. This improves the flexibility of the overall device, makes it easier to adjust, improves the working efficiency of the overall device, and saves labor costs and working time.

[0008] A further feature of this invention is that a fixing plate is fixedly connected to the outer surface of the control arc plate, and a cylinder is fixedly connected to the top of the fixing plate.

[0009] By adopting the above technical solution, the fixing plate strengthens the fixation and connection of the cylinder.

[0010] A further feature of this invention is that a telescopic rod is fixedly connected to the output end of the cylinder, and a through-hole is provided on the inner wall of the control arc plate.

[0011] By adopting the above technical solution, the staff drives the cylinder to move the telescopic rod for extension and retraction adjustment.

[0012] A further feature of this invention is that a push block is fixedly connected to the other end of the telescopic rod through the opening.

[0013] By adopting the above technical solution, after processing is completed, the operator uses a cylinder to control the telescopic rod to push the pusher block, thereby pushing the disc apart, improving the flexibility of the overall device, making the overall device easy to adjust, improving the working efficiency of the overall device, saving labor costs and working time, and improving the convenience of the overall device.

[0014] A further feature of this invention is that an anti-slip pad is fixedly connected to the inner wall of the clamping pusher, and a slide rod is fixedly connected to the top of the clamping pusher.

[0015] By adopting the above technical solution, the anti-slip pad enhances the stability of clamping and the protection of the disc, preventing the disc from slipping and wearing out.

[0016] A further feature of this invention is that a vertical plate is fixedly connected to the top of the clamping pusher, and a sliding groove is provided on the outer surface of the vertical plate.

[0017] By adopting the above technical solution, the slide facilitates the adjustment of the second toothed plate and improves flexibility.

[0018] A further feature of this invention is that a second motor is fixedly connected to the outer surface of the upright plate, a second rotating shaft is fixedly connected to the output end of the second motor, and a second gear is fixedly connected to the other end of the second rotating shaft.

[0019] By adopting the above technical solution, the staff drives the second motor to control the second gear and drive the second gear to rotate.

[0020] A further feature of this invention is that a second toothed plate is slidably connected to the inner wall of the groove, and the outer surface of the second gear meshes with the inner wall of the second toothed plate.

[0021] By adopting the above technical solution, the second gear is controlled to slide on the inner wall of the groove by meshing with the outer surface of the second gear and the inner wall of the second gear plate.

[0022] A further feature of this invention is that a pressure frame is fixedly connected to the bottom end of the second toothed plate, and a collar is fixedly connected to the outer surface of the pressure frame.

[0023] By adopting the above technical solution, the height of the second toothed plate is adjusted to control the pressure frame to press down and fix the disc.

[0024] A further feature of this invention is that the inner wall of the collar is slidably connected to the slide rod, and an anti-slip layer is fixedly connected to the bottom of the pressure frame.

[0025] By adopting the above technical solution, the inner wall of the collar slides against the slide rod, which enhances the stability of the second toothed plate during adjustment. The anti-slip layer strengthens the fixation of the circular piece, improves the overall working efficiency of the device, enhances the convenience of the device, strengthens the flexibility of the device, and saves labor costs and working time.

[0026] The beneficial effects of this utility model are:

[0027] This invention, through the coordinated arrangement of a placement plate, control arc plate, opening, adjusting support plate, motor, rotating shaft, gear, toothed plate, slide, and clamping pusher, allows the operator to place a disc on the placement plate and push it in from one side. The motor then drives the rotating shaft to rotate, engaging the gear with the toothed plate on its outer surface. The rotation of the gear causes the toothed plate to push against the slide, clamping the disc and securing it to the outside. This enhances the flexibility and adjustability of the overall device, improves its efficiency, and saves labor and time. The operator also uses a cylinder to extend and retract the telescopic rod. After processing, the operator uses the cylinder to push the pusher, releasing the disc. The anti-slip pad enhances the stability of the clamping and protects the disc, preventing slippage and wear.

[0028] This invention, through the cooperative arrangement of a sliding rod, a vertical plate, a sliding groove, a second motor, a second gear, and a second toothed plate, enables the operator to drive the second motor to control the second gear to rotate during use. The outer surface of the second gear meshes with the inner wall of the second toothed plate, controlling the second toothed plate to slide within the sliding groove. Adjusting the height of the second toothed plate controls the pressure frame to press and fix the circular piece. The inner wall of the collar slides against the sliding rod, enhancing the stability of the second toothed plate during adjustment. The anti-slip layer further strengthens the fixation of the circular piece, improving the overall working efficiency, convenience, and flexibility of the device, while saving labor costs and working time. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the structure of this utility model;

[0031] Figure 2 This is a top view of the placement tray of this utility model;

[0032] Figure 3 This is a front view structural diagram of the clamping pusher of this utility model;

[0033] Figure 4 This is a side view of the vertical plate of this utility model.

[0034] In the diagram: 1. Placement plate; 2. Control arc plate; 3. Opening; 4. Adjustment support plate; 5. Motor; 6. Rotating shaft; 7. Gear; 8. Tooth plate; 9. Slide; 10. Clamping pusher; 11. Fixing plate; 12. Cylinder; 13. Telescopic rod; 14. Through hole; 15. Push block; 16. Anti-slip pad; 17. Slide rod; 18. Vertical plate; 19. Slide groove; 20. Second motor; 21. Second gear; 22. Second tooth plate; 23. Pressure frame; 24. Collar; 25. Anti-slip layer. Detailed Implementation

[0035] The technical solution of this utility model will now be clearly and completely described with reference to specific embodiments. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0036] Reference Figure 1-4A wafer fixture includes a placement tray 1 and a slide 19. A control arc plate 2 is fixedly connected to the top of the placement tray 1. An opening 3 is formed on the outer surface of the control arc plate 2. An adjusting support plate 4 is fixedly connected to the outer surface of the control arc plate 2. A motor 5 is fixedly connected to the top of the adjusting support plate 4. A rotating shaft 6 is fixedly connected to the output end of the motor 5. A gear 7 is fixedly connected to the other end of the rotating shaft 6. A toothed plate 8 is meshed with the outer surface of the gear 7. A slide 9 is slidably connected to the bottom of the toothed plate 8. The bottom of the slide 9 is fixedly connected to the top of the adjusting support plate 4. A clamping pusher 10 is fixedly connected to the other end of the toothed plate 8. A fixing plate 11 is fixedly connected to the outer surface of the control arc plate 2. A cylinder 12 is fixedly connected to the top of the fixing plate 11. A telescopic mechanism is fixedly connected to the output end of the cylinder 12. Rod 13: The operator places the disc on the placement tray 1 and pushes it in from one side. Then, the drive motor 5 controls the rotating shaft 6 to rotate, driving the gear 7. The outer surface of the gear 7 meshes with the toothed plate 8, causing the gear 7 to rotate and push the toothed plate 8 onto the slide 9. This causes the clamping pusher 10 to clamp and fix the disc on the outside, improving the flexibility of the overall device, facilitating adjustment, increasing the overall efficiency of the device, and saving labor costs and working time. The operator drives the cylinder 12 to extend and retract the telescopic rod 13. After processing, the operator uses the cylinder 12 to control the telescopic rod 13 to push the pusher 15, disengaging the disc. This improves the flexibility of the overall device, makes it easy to adjust, increases the overall efficiency of the device, and saves labor costs and working time. During operation, to improve the overall convenience of the device, the anti-slip pad 16 enhances the stability of the clamping and the protection of the disc, preventing the disc from slipping and wearing out. The inner wall of the control arc plate 2 is provided with a through-hole 14. The other end of the telescopic rod 13 passes through the through-hole 14 and is fixedly connected to a push block 15. The inner wall of the clamping push frame 10 is fixedly connected to the anti-slip pad 16. The top of the clamping push frame 10 is fixedly connected to a slide rod 17. The top of the clamping push frame 10 is fixedly connected to a vertical plate 18. The outer surface of the vertical plate 18 has a sliding groove 19. The outer surface of the vertical plate 18 is fixedly connected to a second motor 20. The output end of the second motor 20 is fixedly connected to a second rotating shaft. The other end of the second rotating shaft is fixedly connected to a second gear 21. The inner wall of the sliding groove 19 is slidably connected to a second toothed plate 22. The outer surface of the second toothed plate 21 meshes with the inner wall of the second toothed plate 22. A pressure frame 23 is fixedly connected to the bottom end of the second toothed plate 22. A collar 24 is fixedly connected to the outer surface of the pressure frame 23. The inner wall of the collar 24 is slidably connected to the slide rod 17. An anti-slip layer 25 is fixedly connected to the bottom of the pressure frame 23. The operator drives the second motor 20 to control the second gear 21 to rotate. The outer surface of the second gear 21 meshes with the inner wall of the second toothed plate 22, controlling the second toothed plate 22 to slide on the inner wall of the slide groove 19. By adjusting the height of the second toothed plate 22, the pressure frame 23 is controlled to press down and fix the disc. The inner wall of the collar 24 is slidably connected to the slide rod 17, enhancing the stability of the second toothed plate 22 during adjustment. The anti-slip layer 25 strengthens the fixation of the disc.Improve the overall efficiency, convenience, and flexibility of the device, while saving labor costs and working time.

[0037] In this invention, the coordinated arrangement of the placement plate 1, control arc plate 2, opening 3, adjusting support plate 4, motor 5, rotating shaft 6, gear 7, toothed plate 8, slide 9, and clamping pusher 10 allows the operator to place a circular piece on the placement plate 1 and push it in from one side. The motor 5 then drives the rotating shaft 6 to rotate, engaging the gear 7 with the toothed plate 8 on its outer surface. The rotation of the gear 7 causes the toothed plate 8 to push against the slide 9, thus clamping and fixing the circular piece to the outside of the clamping pusher 10. This enhances the flexibility and adjustability of the overall device, improves its efficiency, and saves labor costs and time. The operator also drives the cylinder 12 to extend and retract the telescopic rod 13. After processing, the operator uses the cylinder 12 to control the telescopic rod 13 to push the pusher 15, disengaging the circular piece. This further enhances the flexibility and adjustability of the overall device, improving its efficiency. This device saves labor costs and working time, improves the overall convenience of the device, and enhances the stability of clamping and the protection of the disc, preventing the disc from slipping and wearing out. Through the cooperative arrangement between the slide rod 17, the upright plate 18, the slide groove 19, the second motor 20, the second gear 21, and the second toothed plate 22, the device allows the operator to drive the second motor 20 to control the second gear 21 to rotate. The outer surface of the second gear 21 meshes with the inner wall of the second toothed plate 22, controlling the second toothed plate 22 to slide on the inner wall of the slide groove 19. By adjusting the height of the second toothed plate 22, the pressure frame 23 is controlled to press down and fix the disc. The inner wall of the collar 24 slides with the slide rod 17, enhancing the stability of the second toothed plate 22 during adjustment. The anti-slip layer 25 strengthens the fixation of the disc, improving the overall efficiency, convenience, and flexibility of the device, and saving labor costs and working time.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wafer fixture, comprising a placement tray (1) and a slide (19), characterized in that: The top of the placement plate (1) is fixedly connected to a control arc plate (2), the outer surface of the control arc plate (2) is provided with an opening (3), the outer surface of the control arc plate (2) is fixedly connected to an adjustment support plate (4), the top of the adjustment support plate (4) is fixedly connected to a motor (5), the output end of the motor (5) is fixedly connected to a rotating shaft (6), the other end of the rotating shaft (6) is fixedly connected to a gear (7), the outer surface of the gear (7) is meshed with a toothed plate (8), the bottom of the toothed plate (8) is slidably connected to a slide (9), the bottom of the slide (9) is fixedly connected to the top of the adjustment support plate (4), and the other end of the toothed plate (8) is fixedly connected to a clamping pusher (10).

2. The wafer fixture according to claim 1, characterized in that: A fixing plate (11) is fixedly connected to the outer surface of the control arc plate (2), and a cylinder (12) is fixedly connected to the top of the fixing plate (11).

3. A wafer fixture according to claim 2, characterized in that: The output end of the cylinder (12) is fixedly connected to a telescopic rod (13), and the inner wall of the control arc plate (2) is provided with a through hole (14).

4. A wafer fixture according to claim 3, characterized in that: The other end of the telescopic rod (13) is fixedly connected to the push block (15) through the through-hole (14).

5. A wafer fixture according to claim 1, characterized in that: The inner wall of the clamping pusher (10) is fixedly connected with an anti-slip pad (16), and the top of the clamping pusher (10) is fixedly connected with a slide rod (17).

6. A wafer fixture according to claim 5, characterized in that: The top of the clamping pusher (10) is fixedly connected to a vertical plate (18), and the outer surface of the vertical plate (18) is provided with a sliding groove (19).

7. A wafer fixture according to claim 6, characterized in that: The outer surface of the upright plate (18) is fixedly connected to a second motor (20), the output end of the second motor (20) is fixedly connected to a second rotating shaft, and the other end of the second rotating shaft is fixedly connected to a second gear (21).

8. A wafer fixture according to claim 7, characterized in that: The inner wall of the groove (19) is slidably connected to a second toothed plate (22), and the outer surface of the second gear (21) meshes with the inner wall of the second toothed plate (22).

9. A wafer fixture according to claim 8, characterized in that: The bottom end of the second toothed plate (22) is fixedly connected to a pressure frame (23), and a collar (24) is fixedly connected to the outer surface of the pressure frame (23).

10. A wafer fixture according to claim 9, characterized in that: The inner wall of the collar (24) is slidably connected to the slide rod (17), and the bottom of the pressure frame (23) is fixedly connected with an anti-slip layer (25).

Images