Vertical continuous furnace multi-rod goods shelf structure with frame

Abstract

The utility model belongs to the field of vacuum coating, and particularly relates to a multi-rod goods shelf structure of a vertical continuous furnace with a frame, which comprises an upper support, a lower support and a frame, and is characterized in that the upper support is provided with a driving position for an external conveying driving structure to drive the upper support to move in a coating cavity; a lower bracket; two ends of the connecting rod are respectively fixed with the upper bracket and the lower bracket; the bearing assembly comprises a feeding disc, a discharging disc and a plurality of bearing rods used for bearing workpieces, the two ends of each bearing rod are connected with the feeding disc and the discharging disc respectively, and the feeding disc and the discharging disc are connected with the upper support and the lower support respectively. According to the utility model, the continuous moving coating requirement of the continuous furnace with a plurality of coating cavities can be met; the plurality of bearing rods can be used for bearing more workpieces for coating, so that the coating efficiency of the workpieces is higher; and based on the arrangement of the connecting rods, the stability of the goods shelf structure can be effectively improved, and the reliability of the goods shelf structure is better.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum coating, and specifically relates to a framed vertical continuous furnace multi-bar rack structure. Background Technology

[0002] Vacuum coating technology is an important branch of vacuum application technology. It involves the application of a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, and magnetron sputtering. It is a method of evaporating or sputtering metals, alloys, or compounds in a vacuum, causing them to condense and deposit on the surface of a workpiece to form a thin film. In vacuum coating, the workpiece is usually mounted on a rack, which supports the workpiece for coating within the coating chamber of the coating equipment. However, most existing racks are directly installed inside the coating chamber, which is only suitable for single-chamber coating equipment and cannot meet the continuous moving coating requirements of continuous coating equipment with multiple chambers. Utility Model Content

[0003] To address the aforementioned problems, the primary objective of this invention is to provide a framed vertical continuous furnace multi-bar rack structure that can meet the continuous moving coating requirements of a continuous furnace with multiple coating chambers.

[0004] Another objective of this invention is to provide a framed vertical continuous furnace multi-rod rack structure. This rack structure has multiple load-bearing rods, resulting in higher coating efficiency for workpieces. Furthermore, the rack structure is more stable and has better reliability.

[0005] To achieve the above objectives, the technical solution of this utility model is as follows.

[0006] A framed vertical continuous furnace multi-bar rack structure includes:

[0007] The upper support is provided with a drive position for an external conveying drive structure to move within the coating cavity;

[0008] Lower support;

[0009] A connecting rod, the two ends of which are fixed to the upper bracket and the lower bracket, respectively;

[0010] The support assembly includes an upper loading tray, an lower loading tray, and multiple support rods for supporting workpieces. Both ends of the multiple support rods are connected to the upper loading tray and the lower loading tray, respectively. The upper loading tray and the lower loading tray are connected to the upper support and the lower support, respectively.

[0011] In this rack structure, during coating processing, the external conveying drive structure inside the coating chamber can drive the rack structure to vertically convey the coating between the coating chambers via the drive position of the upper support, thereby meeting the continuous moving coating requirements of a continuous furnace with multiple coating chambers. Furthermore, based on the arrangement of the support assembly including multiple support rods between the upper and lower supports, more workpieces can be carried for coating, resulting in higher coating efficiency. Moreover, the connection rods can effectively improve the stability of the rack structure, making the rack structure more reliable.

[0012] Furthermore, there are two connecting rods, one end of each connecting rod is fixed to both ends of the lower bracket, and the other end of each connecting rod is fixed to the upper bracket. The load-bearing component is located between the two connecting rods.

[0013] Furthermore, the supporting component also includes a rotating rod, one end of which is connected to the feeding tray, and the other end of which is rotatably connected to the upper support, with the other end of the rotating rod extending through the upper side of the upper support to form a rotation drive end.

[0014] Furthermore, the supporting assembly also includes a sun gear and multiple planetary gears, all of which are rotatably mounted in the feeding tray. The multiple planetary gears are arranged around the sun gear to mesh with it. One end of each of the multiple supporting rods extends into the feeding tray to connect with the multiple planetary gears respectively. The unloading tray is also provided with a limiting rod to restrict the rotation of the sun gear. One end of the limiting rod passes through the unloading tray to connect with the lower support, and the other end of the limiting rod extends into the feeding tray to connect with the sun gear.

[0015] Furthermore, the bearing assembly also includes a transmission sleeve rod, the two ends of which are connected to the upper and lower feeding trays respectively, and the transmission sleeve rod is rotatably sleeved on the outside of the limiting rod.

[0016] Furthermore, the upper side of the upper support is also provided with a positioning part for positioning the shelf structure.

[0017] Furthermore, the positioning part is provided with a shelf positioning groove.

[0018] Furthermore, the transmission sleeve rod is rotatably connected to the upper bracket via a rotary bearing.

[0019] Furthermore, the rotary drive end is provided with two or more drive protrusions.

[0020] Furthermore, the rotary drive end is also provided with a rotary positioning groove, and two or more drive protrusions are located on both sides of the rotary positioning groove.

[0021] Furthermore, the drive position is a drive slot located on the left or right side of the upper bracket.

[0022] Furthermore, the number of drive slots is two or more.

[0023] Furthermore, the upper or lower support is provided with a guide component for guiding the movement of the shelf structure.

[0024] Furthermore, the guide assembly includes multiple guide bearings, which are rotatably mounted on the upper side of the upper bracket.

[0025] The beneficial effects of this utility model are as follows: In this rack structure, during the coating process, the external conveying drive structure inside the coating cavity can drive the rack structure to vertically convey the coating between the coating cavities through the drive position of the upper support, thereby meeting the continuous moving coating requirements of a continuous furnace with multiple coating cavities; and based on the arrangement of the bearing assembly including multiple bearing rods between the upper and lower supports, more workpieces can be carried for coating through these multiple bearing rods, resulting in higher coating efficiency; and based on the arrangement of the connecting rods, the stability of the rack structure can also be effectively improved, making the rack structure more reliable. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of this utility model.

[0027] Figure 2 This is a cross-sectional view of the present invention.

[0028] Icon labels:

[0029] 1. Upper support frame; 11. Drive slot; 12. Positioning unit; 13. Shelf positioning slot;

[0030] 2. Lower support;

[0031] 3. Connecting rod;

[0032] 4. Loading component; 41. Feeding tray; 42. Discharging tray; 43. Loading rod; 44. Rotating rod; 441. Rotation drive end; 442. Drive protrusion; 443. Rotation positioning groove; 45. Sun gear; 46. Planetary gear; 47. Limiting rod; 48. Transmission sleeve rod;

[0033] 5. Guide assembly; 51. Guide bearing. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0035] See Figure 1-2 This embodiment provides a framed vertical continuous furnace multi-bar rack structure, including:

[0036] The upper support 1 is provided with a drive position for an external conveying drive structure to move within the coating cavity.

[0037] Lower bracket 2;

[0038] Connecting rod 3, with its two ends fixed to upper bracket 1 and lower bracket 2 respectively;

[0039] The bearing assembly 4 is disposed between the upper support 1 and the lower support 2. The bearing assembly 4 includes an upper loading plate 41, an unloading plate 42 and multiple bearing rods 43 for supporting the workpiece. The upper and lower ends of the multiple bearing rods 43 are respectively connected to the upper loading plate 41 and the unloading plate 42. The upper loading plate 41 and the unloading plate 42 are respectively connected to the upper support 1 and the lower support 2.

[0040] In this rack structure, during coating processing, the external conveying drive structure inside the coating cavity can drive the rack structure to vertically convey the coating between the coating cavities via the drive position of the upper support 1, thereby meeting the continuous moving coating requirements of a continuous furnace with multiple coating cavities. Furthermore, based on the arrangement of the bearing assembly 4, which includes multiple bearing rods 43, between the upper support 1 and the lower support 2, more workpieces can be carried for coating, resulting in higher coating efficiency. Moreover, the arrangement of the connecting rod 3 can effectively improve the stability of the rack structure, making the rack structure more reliable.

[0041] In this embodiment, there are two connecting rods 3. One end of each connecting rod 3 is fixed to both ends of the lower bracket 2, and the other end of each connecting rod 3 is fixed to the upper bracket 1. The load-bearing component 4 is located between the two connecting rods 3. The arrangement of these two connecting rods 3 can improve the structural stability between the upper bracket 1 and the lower bracket 2.

[0042] In this embodiment, the support assembly 4 further includes a rotating rod 44. One end of the rotating rod 44 is connected to the loading tray 41, and the other end of the rotating rod 44 is rotatably connected to the upper support 1. The other end of the rotating rod 44 extends through the upper side of the upper support 1 to form a rotation drive end 441. The external rotation drive structure inside the coating cavity can drive the support assembly 4 to rotate through the rotation drive end 441 to perform rotational coating on the workpiece on the support rod 43.

[0043] In this embodiment, the supporting component 4 further includes a sun gear 45 and a plurality of planetary gears 46. The sun gear 45 and the plurality of planetary gears 46 are rotatably disposed in the feeding tray 41. The plurality of planetary gears 46 are arranged around the sun gear 45 to mesh with the sun gear 45. One end of the plurality of supporting rods 43 extends into the feeding tray 41 to be connected to the plurality of planetary gears 46 respectively. The unloading tray 42 is also provided with a limiting rod 47 to restrict the rotation of the sun gear 45. One end of the limiting rod 47 passes through the unloading tray 42 to be connected to the lower support 2, and the other end of the limiting rod 47 extends into the feeding tray 41 to be connected to the sun gear 45. When the rotary drive end 441 is driven to rotate by the external rotary drive structure, it will drive the loading plate 41 to rotate. At this time, the sun gear 45 is limited by the limiting rod 47 and cannot rotate, so the sun gear 45 will not rotate with the loading plate 41. Furthermore, when the loading plate 41 rotates, it drives multiple planetary gears 46 and the unloading plate 42 to rotate. When the planetary gears 46 rotate, they mesh around the sun gear 45 to drive the bearing rod 43 to revolve around its axis and rotate on its own axis, thereby improving the coating effect of the workpiece on the bearing rod 43. Specifically, the limiting rod 47 can be a square rod or a rod with flat ends, or the two ends can be fixed to the sun gear 45 and the lower bracket 2 by other fixing structures to limit the rotation of the sun gear 45, so that the sun gear 45 does not rotate when the loading plate 41 rotates.

[0044] In this embodiment, the bearing assembly further includes a transmission sleeve 48, with its two ends connected to the upper feeding plate 41 and the lower feeding plate 42 respectively, and the transmission sleeve 48 is rotatably sleeved on the outside of the limiting rod 47. The transmission sleeve 48 allows the lower feeding plate 42 to rotate more stably when the upper feeding plate 41 rotates.

[0045] In this embodiment, a positioning part 12 is also provided on the upper side of the upper support 1 to position the shelf structure. With the positioning part 12 provided, when the shelf structure moves into the corresponding coating cavity for coating, the external positioning structure inside the coating cavity can use the positioning part 12 to position the shelf structure, so as to ensure that the shelf structure is located in the correct coating position and to ensure that the shelf is stable during coating.

[0046] In this embodiment, the positioning part 12 is provided with a shelf positioning groove 13. The external positioning structure can be positioned by inserting into the shelf positioning groove 13.

[0047] In this embodiment, the transmission sleeve 48 is rotatably connected to the upper bracket 1 via a rotary bearing.

[0048] In this embodiment, the rotary drive end 441 is provided with two or more drive protrusions 442. The external rotary drive structure can drive the rotation of the rotary drive end 441 through these two or more drive protrusions 442.

[0049] In this embodiment, a rotary positioning groove 443 is also provided on the rotary drive end 441, and two or more drive protrusions 442 are respectively located on both sides of the rotary positioning groove 443. The rotary positioning groove 443 is provided to facilitate the external rotary drive structure to extend into the rotary positioning groove 443 to drive the rotary drive end 441 to rotate.

[0050] In this embodiment, the drive position is a drive groove 11 located on the left or right side of the upper support 1. An external conveying drive structure can extend into the drive groove 11 to drive the movement of the shelf structure.

[0051] In this embodiment, the number of drive slots 11 is two or more.

[0052] In this embodiment, the upper support 1 or the lower support 2 is provided with a guide component 5 for guiding the movement of the rack structure. The guide component 5 is provided to guide the movement of the rack structure.

[0053] In this embodiment, the guide assembly 5 includes a plurality of guide bearings 51, which are rotatably mounted on the upper side of the upper bracket 1.

[0054] It is worth noting that the specific methods of installing, fixing, or hanging workpieces on the bearing rod 43 are existing technologies and are not the design points of this utility model, so they will not be described in detail here. In addition, the structures of the above-mentioned external structures are not the structures to be protected by this utility model, so they will not be described in detail here either.

[0055] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A framed multi-bar rack structure for a vertical continuous furnace, characterized in that, include: The upper support is provided with a drive position for an external conveying drive structure to move within the coating cavity; Lower support; A connecting rod, the two ends of which are fixed to the upper bracket and the lower bracket, respectively; The support assembly includes an upper loading tray, an lower loading tray, and multiple support rods for supporting workpieces. Both ends of the multiple support rods are connected to the upper loading tray and the lower loading tray, respectively. The upper loading tray and the lower loading tray are connected to the upper support and the lower support, respectively.

2. The framed vertical continuous furnace multi-bar rack structure according to claim 1, characterized in that, The number of connecting rods is two. One end of each connecting rod is fixed to both ends of the lower bracket, and the other end of each connecting rod is fixed to the upper bracket. The load-bearing component is located between the two connecting rods.

3. The framed vertical continuous furnace multi-bar rack structure according to claim 2, characterized in that, The supporting component also includes a rotating rod, one end of which is connected to the feeding tray, and the other end of which is rotatably connected to the upper support. The other end of the rotating rod extends through the upper side of the upper support to form a rotation drive end.

4. The framed vertical continuous furnace multi-bar rack structure according to claim 3, characterized in that, The supporting assembly also includes a sun gear and multiple planetary gears, all of which are rotatably mounted in the feeding tray. The multiple planetary gears are arranged around the sun gear to mesh with it. One end of each of the multiple supporting rods extends into the feeding tray to connect with the multiple planetary gears respectively. The unloading tray is also provided with a limiting rod that restricts the rotation of the sun gear. One end of the limiting rod passes through the unloading tray to connect with the lower support, and the other end of the limiting rod extends into the feeding tray to connect with the sun gear.

5. The framed vertical continuous furnace multi-bar rack structure according to claim 4, characterized in that, The load-bearing assembly also includes a transmission sleeve rod, the two ends of which are connected to the upper and lower feed trays respectively, and the transmission sleeve rod is rotatably sleeved on the outside of the limiting rod.

6. The framed vertical continuous furnace multi-bar rack structure according to claim 1, characterized in that, The upper side of the upper support is also provided with a positioning part for positioning the shelf structure.

7. The framed vertical continuous furnace multi-bar rack structure according to claim 3, characterized in that, The rotary drive end is provided with two or more drive protrusions and rotary positioning grooves, with the two or more drive protrusions located on both sides of the rotary positioning groove.

8. The framed vertical continuous furnace multi-bar rack structure according to claim 7, characterized in that, The drive position is a drive slot located on the left or right side of the upper bracket.

9. A framed vertical continuous furnace multi-bar rack structure according to any one of claims 1-8, characterized in that, The upper or lower support is equipped with a guide component for guiding the movement of the rack structure.

10. A framed vertical continuous furnace multi-bar rack structure according to claim 9, characterized in that, The guide assembly includes multiple guide bearings, which are rotatably mounted on the upper side of the upper bracket.

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