Vacuum sealing device

Abstract

The utility model discloses a vacuum sealing device. The vacuum sealing device comprises a vacuum cylinder and a sealing assembly. The vacuum cylinder is provided with an avoiding groove. The sealing assembly comprises a cover body and a flexible sealing component. The cover body covers the receding groove in a buckled mode, a vacuum cavity is defined by the cover body and the inner wall face of the receding groove, the flexible sealing component is installed at the position of a connecting gap between the cover body and the vacuum cylinder, the connecting gap is communicated with the vacuum cavity, and the flexible sealing component can generate flexible deformation between a first form and a second form. When the air pressure of the vacuum cavity is not smaller than the external air pressure of the vacuum cylinder, the flexible sealing part is located in the first form, and when the air pressure of the vacuum cavity is smaller than the external air pressure of the vacuum cylinder, the air pressure difference exists between the air pressure and the external air pressure. The flexible sealing part deforms from the first form to the second form under the action of the air pressure difference. The problem that in the prior art, a fastener is adopted to achieve sealing, and installation operation is complex is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum technology, in particular to a vacuum sealing device. BACKGROUND

[0002] In the field of vacuum technology, traditional vacuum sealing methods mostly rely on fasteners to achieve reliable sealing effect. For example, KF flanges usually need to be fastened with clamps, and the KF flanges are pressed by the clamps to make the sealing surfaces tightly fit, so as to prevent gas leakage and maintain the vacuum environment. ISO-F flanges and CF flanges mainly rely on bolts or screws for fastening operation, and the flange connection parts are pressed tightly by the pre-tightening force of the bolts or screws to ensure the sealing performance of the sealing interface. These traditional sealing methods need to rely on fasteners to achieve reliable sealing effect, but the installation process of the fasteners is relatively complicated, and the fasteners need to be tightened accurately to achieve the appropriate sealing pressure. The loosening or damage of the fasteners can cause sealing failure. CONTENT OF THE UTILITY MODEL

[0003] The main purpose of the present application is to provide a vacuum sealing device to solve the problem of complicated installation operation of fasteners for sealing in the prior art mentioned in the background.

[0004] According to one aspect of the present application, a vacuum sealing device is provided, comprising:

[0005] A vacuum cylinder is provided with a relief groove;

[0006] A sealing assembly includes a cover and a flexible sealing component, the cover is buckled on the relief groove and forms a vacuum cavity with the inner wall surface of the relief groove, the flexible sealing component is installed at the connecting gap between the cover and the vacuum cylinder, the connecting gap is communicated with the vacuum cavity, the flexible sealing component can be flexibly deformed between a first mode and a second mode, the second mode is a mode capable of sealing the connecting gap relative to the first mode, the flexible sealing component is in the first mode when the air pressure of the vacuum cavity is not less than the air pressure outside the vacuum cylinder, and the flexible sealing component is deformed from the first mode to the second mode under the action of the air pressure difference when the air pressure of the vacuum cavity is less than the air pressure outside the vacuum cylinder to have an air pressure difference with the outside air pressure.

[0007] Further, the cover is at least partially inserted into the relief groove, and the flexible sealing component comprises:

[0008] A first seal is located between the cover and the inner wall of the escape groove, and a groove is formed on the side of the first seal away from the inner wall of the escape groove, the groove extends along the circumferential direction of the escape groove and communicates with the vacuum cavity, and the size of the side of the first seal away from the inner wall of the escape groove is greater than the size of the side of the first seal close to the inner wall of the escape groove.

[0009] Wherein, along the axial direction of the escape groove, the inner walls of the opposite sides of the groove have a first position where they are close to each other under the action of the air pressure difference and a second position where they are away from each other when the air pressure difference is removed, the first seal is in the second form when the inner walls of the opposite sides of the groove are in the first position, the first seal is in the first form when the inner walls of the opposite sides of the groove are in the second position, and the first seal is pressed between the inner wall of the escape groove and the cover during the switching of the inner walls of the opposite sides of the groove from the second position to the first position.

[0010] Further, the first seal comprises an annular sealing ring, which is arranged between the inner wall of the escape groove and the cover along the axial direction of the escape groove, and the groove is arranged on the side of the annular sealing ring away from the inner wall of the escape groove and extends along the circumferential direction of the annular sealing ring.

[0011] Further, along the axial direction of the escape groove, the longitudinal section of the annular sealing ring is a trapezoidal surface; and / or, along the axial direction of the annular sealing ring, the maximum width of the groove is A, the maximum width of the side of the annular sealing ring away from the inner wall of the escape groove is B, and A < 1 / 3B.

[0012] Further, along the axial direction of the escape groove, the groove has a first width, and the first width gradually decreases in the direction close to the inner wall of the escape groove.

[0013] Further, the cover comprises:

[0014] A covering portion, along the axial direction of the escape groove, the projection outer contour of the escape groove is located within the projection outer contour of the covering portion;

[0015] An extension portion, the extension portion is protruded on the side of the covering portion close to the escape groove, the extension portion is arranged in the escape groove and forms the vacuum cavity together with the inner wall of the escape groove, the annular sealing ring is arranged on the outer side wall of the extension portion and between the outer side wall of the extension portion and the inner wall of the escape groove, and a connecting channel is arranged in the extension portion, the connecting channel communicates between the groove and the vacuum cavity.

[0016] Further, an outer side wall of the extension part is provided with a first mounting groove along the circumferential direction of the annular sealing ring, the first mounting groove extends annularly along the circumferential direction of the annular sealing ring, and the annular sealing ring is mounted in the first mounting groove.

[0017] Further, when the inner wall surfaces of the opposite sides of the groove are located at the second position, the maximum width of the groove is A and the maximum width of the connecting channel is d along the axial direction of the annular sealing ring, and A>d.

[0018] Further, the connecting channel includes a plurality of connecting channels which are arranged at intervals along the circumferential direction of the extension part, and / or the intervals between adjacent two connecting channels are equal.

[0019] Further, the covering part is provided with a second mounting groove on the side close to the top surface of the vacuum cylinder along the axial direction of the avoiding groove, the second mounting groove is arranged around the axial direction of the avoiding groove, and the sealing assembly further includes:

[0020] A second sealing member which is matched with the second mounting groove and is mounted in the second mounting groove, and the side of the second sealing member away from the bottom of the second mounting groove abuts against the vacuum cylinder.

[0021] In the present application, the flexible sealing member at the connecting gap between the cover and the vacuum cylinder can be deformed under the action of the air pressure difference by buckling the cover on the avoiding groove of the vacuum cylinder, so that the flexible sealing member can seal the connecting gap and realize the sealed connection between the cover and the vacuum cylinder. When installing the vacuum sealing device, only the flexible sealing member needs to be installed at the connecting gap between the cover and the vacuum cylinder, the cover is buckled on the avoiding groove, and the vacuum cavity is then vacuumized, so that the air pressure in the vacuum cavity is less than the air pressure outside the vacuum cylinder to have an air pressure difference. The cover can be naturally sealed and connected to the vacuum cylinder under the action of the air pressure difference, realizing the sealed connection between the cover and the vacuum cylinder. In the process of installing the vacuum sealing device, no fasteners such as clamps, bolts or screws are needed, and no fasteners need to be precisely tightened to achieve a suitable sealing pressure, greatly reducing the installation difficulty of the vacuum sealing device and making the installation operation simpler. BRIEF DESCRIPTION OF DRAWINGS

[0022] The drawings described herein are used to provide further understanding of the present application, and form a part of the present application. The illustrative embodiments of the present application and their descriptions serve to explain the present application, and do not constitute an improper limitation on the present application. In the drawings:

[0023] Figure 1 The structure of the vacuum sealing device disclosed in the present application is shown in the schematic view;

[0024] Figure 2A sectional view of a vacuum sealing device disclosed in the present application;

[0025] Figure 3 A Figure 2 An enlarged view at P in the middle;

[0026] Figure 4 A partial schematic view of an annular sealing ring disclosed in the present application;

[0027] Figure 5 A structural schematic view of a sealing assembly disclosed in the present application;

[0028] Figure 6 A structural schematic view of a cover disclosed in the present application;

[0029] Figure 7 A structural schematic view of a vacuum cylinder disclosed in the present application.

[0030] Among the above drawings, the following reference signs are included:

[0031] 10, vacuum cylinder; 11, avoiding groove; 21, cover; 211, covering part; 2111, second mounting groove; 212, extending part; 2121, connecting passage; 2122, first mounting groove; 22, flexible sealing part; 221, first sealing member; 2211, groove; 222, second sealing member. DETAILED DESCRIPTION

[0032] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0033] It should be noted that the terms used herein are only for describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form unless the context clearly indicates otherwise, and it should also be understood that when the terms "comprise" and / or "include" are used in the specification, there is a presence of a feature, step, operation, device, component and / or combinations thereof.

[0034] The relative arrangement of parts and steps, numerical expressions, and numerical values set forth in the examples herein are not meant to limit the scope of the present application unless otherwise specifically indicated. It is to be understood that the use of the terms approximately, about, generally, and similar terms in relation to a value refers to a range of values that are close to the value in question, such that the range of values is within a reasonable amount of error that is acceptable for a particular application. Also, it is to be understood that the use of relational terms such as first, second, top, bottom, upper, lower, and the like are used solely to distinguish one from another, without necessarily implying an essential or structural superiority or inferiority, and that the terms are interchangeable under appropriate circumstances. The disclosure of all patents, patent applications, articles, other publications, and things herein mentioned are hereby incorporated by reference in their entirety.

[0035] As shown in Figures 1 to 7 The present application provides a vacuum sealing device. The vacuum sealing device comprises a vacuum cylinder 10 and a sealing assembly. The vacuum cylinder 10 is provided with a relief groove 11. The sealing assembly comprises a cover 21 and a flexible sealing member 22. The cover 21 is buckled on the relief groove 11 and forms a vacuum cavity with the inner wall surface of the relief groove 11. The flexible sealing member 22 is installed at the connecting gap between the cover 21 and the vacuum cylinder 10, and the connecting gap is communicated with the vacuum cavity. The flexible sealing member 22 can be flexibly deformed between a first mode and a second mode. The second mode is a mode capable of sealing the connecting gap relative to the first mode. The flexible sealing member 22 is in the first mode when the air pressure of the vacuum cavity is not less than the external air pressure of the vacuum cylinder 10. When the air pressure of the vacuum cavity is less than the external air pressure of the vacuum cylinder 10 to have an air pressure difference with the external air pressure, the flexible sealing member 22 is deformed from the first mode to the second mode under the action of the air pressure difference.

[0036] In the present embodiment, the cover 21 is buckled on the relief groove 11 of the vacuum cylinder 10, so that the flexible sealing member at the connecting gap between the cover 21 and the vacuum cylinder 10 can be deformed under the action of the air pressure difference, so as to enable the flexible sealing member to seal the connecting gap and realize the sealing connection between the cover 21 and the vacuum cylinder 10. When the vacuum sealing device is installed, only the flexible sealing member 22 needs to be installed at the connecting gap between the cover 21 and the vacuum cylinder 10, the cover 21 needs to be buckled on the relief groove 11, and then the vacuum cavity needs to be vacuumized, so that the air pressure of the vacuum cavity is less than the external air pressure of the vacuum cylinder 10 to have an air pressure difference with the external air pressure. The cover 21 can be naturally sealed and connected to the vacuum cylinder 10 under the action of the air pressure difference, so as to realize the sealing connection between the cover 21 and the vacuum cylinder 10. In the process of the installation operation of the vacuum sealing device, no fastener such as a clamp, a bolt or a screw is needed, and no fastener needs to be accurately tightened to achieve a suitable sealing pressure. Therefore, the installation difficulty of the vacuum sealing device is greatly reduced, and the installation operation is more simple.

[0037] Compared with traditional vacuum sealing methods, such as KF flange, ISO-F flange and CF flange, the vacuum sealing device of the present application does not need to use fasteners such as clamps, bolts or screws during installation. The installation process of these fasteners requires precise operation, such as precisely tightening the fasteners to achieve the appropriate sealing pressure. The vacuum sealing device of the present application does not rely on fasteners and can effectively prevent the occurrence of sealing failure caused by loosening or damage of the fasteners. The vacuum sealing device only needs to control the air pressure of the vacuum cavity to be less than the external air pressure of the vacuum cylinder 10 to deform the flexible sealing member 22 from the first form to the second form, so as to achieve good vacuum sealing effect, which can effectively reduce the risk of sealing failure caused by external factors (such as loosening of fasteners due to vibration). In addition, the vacuum sealing device is more convenient to overhaul and maintain. Since the sealing assembly does not include complex fasteners, it is relatively easy to disassemble the cover 21 and check the flexible sealing member 22. Compared with the traditional sealing method, which needs to disassemble multiple fasteners and pay attention to the storage and reinstallation sequence of the fasteners, the maintenance process of the vacuum sealing device is more convenient, and the maintenance and reinstallation can be completed faster.

[0038] Further, the cover 21 is at least partially inserted into the avoiding groove 11. The flexible sealing member 22 comprises a first sealing piece 221. The first sealing piece 221 is located between the cover 21 and the inner wall surface of the avoiding groove 11. The side of the first sealing piece 221 away from the inner wall surface of the avoiding groove 11 is provided with a groove 2211. The groove 2211 extends along the circumference of the avoiding groove 11 and communicates with the vacuum cavity. The size of the side of the first sealing piece 221 away from the inner wall surface of the avoiding groove 11 is greater than the size of the side of the first sealing piece 221 close to the inner wall surface of the avoiding groove 11.

[0039] The inner wall surfaces on the opposite sides of the groove 2211 have a first position in which they are close to each other under the action of the air pressure difference and a second position in which they are away from each other when the air pressure difference is removed, along the axial direction of the avoidance groove 11. The first sealing element 221 is in the second form when the inner wall surfaces on the opposite sides of the groove 2211 are in the first position. The first sealing element 221 is in the first form when the inner wall surfaces on the opposite sides of the groove 2211 are in the second position. The first sealing element 221 is pressed to abut between the inner wall surface of the avoidance groove 11 and the cover body 21 in the process of switching the inner wall surfaces on the opposite sides of the groove 2211 from the second position to the first position. When the air pressure in the vacuum cavity is less than the air pressure outside the vacuum cylinder 10 to have an air pressure difference with the outside air pressure, the vacuum cavity is in a negative pressure state, the inner wall surfaces on the opposite sides of the groove 2211 are close to each other under the action of the air pressure difference, the first sealing element 221 is deformed in the direction of approaching the inner wall surface of the avoidance groove 11, the width of the first sealing element 221 (the distance between the side of the first sealing element 221 close to the inner wall surface of the avoidance groove 11 and the side away from the inner wall surface of the avoidance groove 11) is increased, the first sealing element 221 abuts against the inner wall surface of the avoidance groove 11, thereby sealing the connecting gap between the cover body 21 and the vacuum cylinder 10, and ensuring the stability of the vacuum environment. When the air pressure difference is removed, the inner wall surfaces on the opposite sides of the groove 2211 return to the second position away from each other, and the first sealing element 221 returns to the first form. At this time, the operator can easily detach the cover body 21 away from the vacuum cylinder 10. When the air pressure difference is removed, the first sealing element 221 returns to the first form, and is ready for the next deformation from the first form to the second form. By controlling the air pressure in the vacuum cavity, the cover body 21 can be quickly vacuum sealed on the vacuum cylinder 10 or detached from the vacuum cylinder 10, greatly reducing the installation operation and difficulty of the vacuum sealing device. In addition, the application adjusts the sealing function by providing the groove 2211 on the first sealing element 221, without adding too many complex auxiliary sealing structures or fastening devices, reducing the occupied space of the sealing assembly, enabling the vacuum sealing device to realize efficient sealing function in a relatively compact space, and making the structure of the vacuum sealing device more simple and compact, which is conducive to installation and application in a vacuum equipment with limited space.

[0040] Further, the first sealing member 221 comprises an annular sealing ring. The annular sealing ring is arranged between the inner wall surface of the relief groove 11 and the cover 21 in the axial direction of the relief groove 11. The annular sealing ring can achieve continuous sealing effect in the entire circumferential direction, avoid the occurrence of sealing breakpoints, effectively prevent gas from entering the vacuum cavity, and comprehensively guarantee the sealing integrity of the vacuum cavity, so as to ensure that the vacuum cavity is in a stable vacuum environment. At the same time, the annular sealing ring can closely fit the inner wall surface of the relief groove 11 and the cover 21, so as to ensure that the sealing effect of the inner wall surface of the relief groove 11 is uniform and consistent, and effectively prevent the occurrence of local weak sealing areas caused by shape mismatch. The groove 2211 is arranged on the side of the annular sealing ring away from the inner wall surface of the relief groove 11 and extends along the circumferential direction of the annular sealing ring. When the vacuum cavity and the outside have a pressure difference, the force acting on the groove 2211 on the annular sealing ring is uniformly distributed in the entire circumferential direction. The inner wall surfaces on the opposite sides of the groove 2211 can be synchronously and uniformly switched from the second position to the first position, so as to ensure that the entire annular sealing ring can be uniformly extruded to abut between the inner wall surface of the relief groove 11 and the cover 21, and ensure that the sealing process of the vacuum sealing device is more stable and reliable. The vacuum cylinder can be provided as a cylindrical structure, one end of the vacuum cylinder is provided with the cover, the other end of the vacuum cylinder is provided with a vacuumizing device, and the vacuumizing device can change the air pressure in the vacuum cavity. The shape of the vacuum cylinder is not limited to this, and the embodiment is not limited to this.

[0041] Further, in the axial direction of the relief groove 11, the longitudinal section of the annular sealing ring is a trapezoidal surface. When the air pressure in the vacuum cavity is less than the air pressure outside the vacuum cylinder 10, the inner wall surfaces on the opposite sides of the groove 2211 approach each other, and the pressure difference will cause the part of the annular sealing ring close to the cover 21 on the upper surface in the axial direction of the relief groove 11 and the part of the annular sealing ring close to the cover 21 on the lower surface in the axial direction of the relief groove 11 to deform towards the direction of the groove 2211, so as to increase the width of the annular sealing ring (the distance between the side close to the inner wall surface of the relief groove 11 and the side away from the inner wall surface of the relief groove 11 of the annular sealing ring), and extrude the annular sealing ring to abut between the inner wall surface of the relief groove 11 and the cover 21. The trapezoidal annular sealing ring with a trapezoidal longitudinal section has good stability. When the annular sealing ring is extruded by the pressure difference, the side of the annular sealing ring close to the inner wall surface of the relief groove 11 can better fit the inner wall surface of the relief groove 11, so as to guarantee that the annular sealing ring can be stably located in the connecting gap without relative displacement, and ensure the stability of the vacuum environment of the vacuum cavity.

[0042] Further, along the axial direction of the annular sealing ring, the maximum width of the groove 2211 is A, and the maximum width of the side of the annular sealing ring away from the inner wall surface of the avoidance groove 11 is B, A < 1 / 3B. When A < 1 / 3B, after the opposite two side inner wall surfaces of the groove 2211 approach each other, the side of the annular sealing ring away from the inner wall surface of the avoidance groove 11 can also be attached to the cover body 21, so that the annular sealing ring can be tightly attached between the cover body 21 and the inner wall surface of the avoidance groove 11, and the annular sealing ring can reliably seal the connecting gap between the cover body 21 and the vacuum cylinder 10, and ensure the stability of the vacuum state of the vacuum cavity. If A > 1 / 3B, the maximum width of the groove 2211 is too large, and after the opposite two side inner wall surfaces of the groove 2211 approach each other, the side of the annular sealing ring away from the inner wall surface of the avoidance groove 11 cannot be tightly attached to the cover body 21, and the annular sealing ring cannot be stably attached between the cover body 21 and the inner wall surface of the avoidance groove 11, which can easily lead to sealing failure between the vacuum cylinder 10 and the cover body 21.

[0043] Further, along the axial direction of the avoidance groove 11, the groove 2211 has a first width, and the first width gradually decreases in the direction close to the inner wall surface of the avoidance groove 11. When the air pressure of the vacuum cavity is less than the air pressure outside the vacuum cylinder 10, the opposite two side inner wall surfaces of the groove 2211 approach and can be attached to each other, the displacement of the opposite two side inner wall surfaces of the groove 2211 is larger, the width of the annular sealing ring (the distance between the side close to the inner wall surface of the avoidance groove 11 and the side away from the inner wall surface of the avoidance groove 11 of the annular sealing ring) is larger, the annular sealing ring has a larger elastic potential energy, and the annular sealing ring can be more tightly attached between the cover body 21 and the inner wall surface of the avoidance groove 11. The annular sealing ring can more reliably seal the connecting gap between the cover body 21 and the vacuum cylinder 10, and achieve a stronger sealing effect. In addition, such arrangement also makes the process of deforming the annular sealing ring from the first mode to the second mode more gentle, can optimize the pressure distribution of the annular sealing ring, prolong the service life of the annular sealing ring, and is more conducive to improving the sealing performance of the vacuum sealing device.

[0044] Furthermore, the cover 21 includes a covering portion 211 and an extension portion 212. Along the axial direction of the clearance groove 11, the projected outer contour of the clearance groove 11 lies within the projected outer contour of the covering portion 211. The extension portion 212 protrudes from the side of the covering portion 211 closest to the clearance groove 11. The extension portion 212 passes through the clearance groove 11 and forms a vacuum cavity with the inner wall surface of the clearance groove 11. An annular sealing ring is fitted onto the outer wall of the extension portion 212 and located between the outer wall of the extension portion 212 and the inner wall surface of the clearance groove 11. A connecting channel 2121 is provided within the extension portion 212, connecting the groove 2211 and the vacuum cavity. The extension portion 212 is embedded in the clearance groove 11, which increases the contact area between the extension portion 212 and the inner wall surface of the clearance groove 11, improving the stability of the cover 21 and ensuring that the cover 21 can maintain a stable sealed connection with the vacuum cylinder 10 for a long time. The extension 212 also provides an installation position for the first seal 221, ensuring that the first seal 221 can stably abut against the inner wall of the relief groove 11 and the outer wall of the extension 212, sealing the connection gap between the vacuum cylinder 10 and the cover 21. A connecting channel 2121 is provided within the extension 212, connecting the groove 2211 and the vacuum chamber, allowing pressure changes within the vacuum chamber to be transmitted to the groove 2211 in a timely and effective manner. This drives the inner wall surfaces of the groove 2211 on opposite sides to switch between a first position and a second position, thereby enabling the first seal 221 to accurately deform from a first form to a second form to achieve a seal. Specifically, along the radial direction of the extension 212, the connecting channel 2121 extends through the extension 212 to connect the groove 2211 and the vacuum chamber.

[0045] Furthermore, a first mounting groove 2122 is formed on the outer wall of the extension 212 along the circumference of the annular sealing ring. The first mounting groove 2122 extends in a ring shape along the circumference of the annular sealing ring, and the annular sealing ring is installed in the first mounting groove 2122. The first mounting groove 2122 provides an installation position for the annular sealing ring and has a certain installation guiding function, making it convenient for operators to accurately install the annular sealing ring into the first mounting groove 2122, further reducing the installation difficulty of the sealing assembly. The bottom of the first mounting groove 2122 is connected to the connecting channel 2121. The bottom of the first mounting groove 2122 provides support for the annular sealing ring. Under the action of air pressure difference, the annular sealing ring can abut against the bottom of the first mounting groove 2122, ensuring that the inner wall surface of the annular sealing ring near the relief groove 11 can achieve a tighter fit with the inner wall surface of the relief groove 11. It can also effectively prevent the annular sealing ring from relative displacement in the second form, ensuring that the vacuum sealing device can achieve a good vacuum sealing effect.

[0046] Furthermore, when the inner wall surfaces of the groove 2211 on both sides are in the second position, the maximum width of the groove 2211 along the axial direction of the annular sealing ring is A, and the maximum width of the connecting channel 2121 is d, where A > d. At least a portion of the side of the annular sealing ring with the groove 2211 can fit against the outer wall of the extension 212. This arrangement provides a certain support for the annular sealing ring and ensures that the groove 2211 can cover the opening of the connecting channel 2121. The inner wall surfaces of the groove 2211 on both sides can respond quickly and move closer to each other under the action of the air pressure difference, which can improve the response speed of the vacuum sealing device and ensure that the cover 21 and the vacuum cylinder 10 achieve a rapid sealing connection under the action of the air pressure difference. If A < d, the maximum width of the connecting channel 2121 will be too large, and external air will enter the vacuum chamber through the connecting channel 2121, which is not conducive to the vacuum sealing device achieving a high vacuum degree.

[0047] Furthermore, along the circumference of the extension 212, the connecting channels 2121 include a plurality of channels, which are spaced apart. The plurality of connecting channels 2121 can more quickly cause the groove 2211 to switch from the second position to the first position on opposite sides, and the annular sealing ring can more quickly deform from the first form to the second form, thereby improving the sealing response speed of the sealing assembly.

[0048] Furthermore, the spacing between two adjacent connecting channels 2121 is equal. In the circumferential direction of the extension 212, the air pressure in the vacuum chamber can be uniformly transmitted to the groove 2211. The pressure difference effect on each position of the annular sealing ring is the same, allowing the annular sealing ring to respond uniformly to the pressure difference across the entire circumference. This ensures uniformity during the transition from the first to the second form, thereby improving the overall uniformity and stability of the seal and more effectively preventing external air from entering the vacuum chamber. Simultaneously, the force on the annular sealing ring is uniform, and each part of the annular sealing ring can be evenly pressed against the vacuum cylinder 10 and the cover 21, improving the sealing effect between the vacuum cylinder 10 and the cover 21. Compared to the existing technology that uses screws or other fasteners for sealing, this application does not require precisely tightening fasteners to achieve the appropriate sealing pressure, greatly reducing the installation difficulty of the vacuum sealing device and simplifying the sealing operation.

[0049] Furthermore, along the axial direction of the clearance groove 11, a second mounting groove 2111 is provided on the side of the cover portion 211 near the top surface of the vacuum cylinder 10. The second mounting groove 2111 is arranged axially around the clearance groove 11. The sealing assembly also includes a second sealing element 222. The second sealing element 222 is adapted to and installed in the second mounting groove 2111, and the side of the second sealing element 222 away from the bottom of the second mounting groove 2111 abuts against the vacuum cylinder 10. The second mounting groove 2111, which is arranged axially around the clearance groove 11 on the side of the cover portion 211 near the top surface of the vacuum cylinder 10, and the second sealing element 222 adapted to the second mounting groove 2111, are installed, thereby forming an effective sealing barrier at the top of the vacuum cylinder 10. When the vacuum chamber is under negative pressure, the second seal 222 can tightly abut against the vacuum cylinder 10, filling the tiny gap between the cover 211 and the top surface of the vacuum cylinder 10. This greatly reduces the possibility of gas leaking into the vacuum chamber from the cover 211, further enhancing the sealing performance of the vacuum sealing device and ensuring the stability of the vacuum environment. Simultaneously, the second seal 222 and the first seal 221 form a double seal, ensuring a more reliable sealing connection between the cover 21 and the vacuum cylinder 10.

[0050] Specifically, the second seal 222 can also be configured as an annular shape, extending in a ring shape along the top surface of the vacuum cylinder 10. Correspondingly, the second mounting groove 2111 is also annular. The annular second seal 222 can achieve a continuous sealing effect in the entire circumferential direction, avoiding sealing breaks, effectively preventing gas from entering the vacuum chamber, ensuring the sealing integrity of the vacuum chamber in all aspects, and ensuring that the vacuum chamber is in a stable vacuum environment.

[0051] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0052] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this application.

[0053] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A vacuum sealing device, characterized in that, include: Vacuum cylinder (10), wherein the vacuum cylinder (10) is provided with a relief groove (11); A sealing assembly includes a cover (21) and a flexible sealing component (22). The cover (21) covers the relief groove (11) and forms a vacuum cavity with the inner wall of the relief groove (11). The flexible sealing component (22) is installed at the connection gap between the cover (21) and the vacuum cylinder (10). The connection gap is connected to the vacuum cavity. The flexible sealing component (22) can flexibly deform between a first form and a second form. The second form is a form that can seal the connection gap relative to the first form. When the air pressure of the vacuum cavity is not less than the external air pressure of the vacuum cylinder (10), the flexible sealing component (22) is located in the first form. When the air pressure of the vacuum cavity is less than the external air pressure of the vacuum cylinder (10) and there is a pressure difference with the external air pressure, the flexible sealing component (22) deforms from the first form to the second form under the action of the pressure difference.

2. The vacuum sealing device according to claim 1, characterized in that, The cover (21) is at least partially inserted into the clearance groove (11), and the flexible sealing component (22) includes: A first sealing element (221) is located between the cover (21) and the inner wall of the relief groove (11). The first sealing element (221) has a groove (2211) on the side away from the inner wall of the relief groove (11). The groove (2211) extends circumferentially along the relief groove (11) and communicates with the vacuum cavity. The size of the side of the first sealing element (221) away from the inner wall of the relief groove (11) is larger than the size of the side of the first sealing element (221) close to the inner wall of the relief groove (11). Along the axial direction of the relief groove (11), the inner wall surfaces of the groove (2211) on opposite sides have a first position where they approach each other under the action of the air pressure difference and a second position where they move away from each other when the air pressure difference is removed. When the inner wall surfaces of the groove (2211) on opposite sides are in the first position, the first seal (221) is in the second form. When the inner wall surfaces of the groove (2211) on opposite sides are in the second position, the first seal (221) is in the first form. During the process of the inner wall surfaces of the groove (2211) on opposite sides switching from the second position to the first position, the first seal (221) is squeezed to abut against the inner wall surface of the relief groove (11) and the cover (21).

3. The vacuum sealing device according to claim 2, characterized in that, The first sealing element (221) includes an annular sealing ring, which is axially disposed around the relief groove (11) between the inner wall surface of the relief groove (11) and the cover (21). The groove (2211) is disposed on the side of the annular sealing ring away from the inner wall surface of the relief groove (11) and extends circumferentially along the annular sealing ring.

4. The vacuum sealing device according to claim 3, characterized in that, Along the axial direction of the relief groove (11), the longitudinal section of the annular sealing ring is a trapezoidal surface; and / or, along the axial direction of the annular sealing ring, the maximum width of the groove (2211) is A, and the maximum width of the annular sealing ring on the side away from the inner wall surface of the relief groove (11) is B, where A < 1 / 3B.

5. The vacuum sealing device according to claim 2, characterized in that, Along the axial direction of the clearance groove (11), the groove (2211) has a first width, which gradually decreases along the direction close to the inner wall of the clearance groove (11).

6. The vacuum sealing device according to claim 3, characterized in that, The cover (21) includes: The outer contour of the cover (211) is located within the outer contour of the projection of the clearance groove (11) along the axial direction of the clearance groove (11). An extension (212) is provided on the side of the cover (211) near the relief groove (11). The extension (212) passes through the relief groove (11) and surrounds the inner wall of the relief groove (11) to form the vacuum cavity. The annular sealing ring is sleeved on the outer wall of the extension (212) and located between the outer wall of the extension (212) and the inner wall of the relief groove (11). A connecting channel (2121) is provided in the extension (212) and the connecting channel (2121) communicates between the groove (2211) and the vacuum cavity.

7. The vacuum sealing device according to claim 6, characterized in that, Along the circumference of the annular sealing ring, a first mounting groove (2122) is provided on the outer side wall of the extension (212). The first mounting groove (2122) extends in a ring shape along the circumference of the annular sealing ring, and the annular sealing ring is installed in the first mounting groove (2122).

8. The vacuum sealing device according to claim 6, characterized in that, When the inner wall surfaces of the groove (2211) on both sides are in the second position, along the axial direction of the annular sealing ring, the maximum width of the groove (2211) is A, and the maximum width of the connecting channel (2121) is d, where A > d.

9. The vacuum sealing device according to claim 6, characterized in that, Along the circumferential direction of the extension (212), the connection channel (2121) includes a plurality of channels, which are spaced apart; and / or the spacing between two adjacent connection channels (2121) is equal.

10. The vacuum sealing device according to claim 6, characterized in that, Along the axial direction of the clearance groove (11), a second mounting groove (2111) is provided on the side of the cover (211) near the top surface of the vacuum cylinder (10). The second mounting groove (2111) is arranged axially around the clearance groove (11). The sealing assembly further includes: The second seal (222) is adapted to the second mounting groove (2111) and installed in the second mounting groove (2111), and the side of the second seal (222) away from the bottom of the second mounting groove (2111) abuts against the vacuum cylinder (10).

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