Filtering and dust removing device of grinding and falling machine

Abstract

The utility model provides a filtering and dust removing device of a grinding and falling machine, and relates to the field of semiconductor and generic semiconductor material processing. The filtering and dust removing device of the grinding and reversing machine comprises a fan, a dust removing device and a dust removing device, the filter box is provided with an air inlet pipe, an air outlet pipe and a partition plate arranged inside; the air inlet pipe is communicated with the machining end of the grinding and reversing machine, and the air outlet pipe is communicated with an air inlet of the fan; wherein one end, in the filter box, of the air inlet pipe extends into the filtrate below the partition plate, and one end, in the filter box, of the air outlet pipe is located above the partition plate; the partition plate can prevent bubbles generated in the filtrate from passing through; the silicon powder filtering device is simple in structure, convenient to use and capable of efficiently filtering and removing silicon powder generated in the machining process of the grinding-down machine and reducing dust pollution to the working environment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor and semiconductor material processing, specifically a dust removal device for a mill. Background Technology

[0002] Semiconductors and related materials can be efficiently processed using grinding and chamfering machines. These machines are combined processing tools that can simultaneously perform squaring, grinding, rounding, or chamfering on monocrystalline silicon. For example, the TN-MS1000 integrated squaring and grinding machine developed by Tiantong Rijin Precision Technology Co., Ltd. features a single clamping operation for both squaring and chamfering, a dual-sided squaring processing mode, fully automatic edge adjustment, a built-in grinding wheel dressing device, and cleaning and drying functions. These features reduce silicon loss and costs, and decrease overall processing allowance.

[0003] When processing monocrystalline silicon using a mill, a large amount of silicon dust is generated, affecting the on-site working environment. Current technology typically involves installing an exhaust dust removal system in the processing plant, with the silicon dust entering the system through its exhaust vents. However, handling silicon dust through an exhaust system is a large-scale project, complex to construct, difficult to maintain, and costly. Utility Model Content

[0004] This invention addresses the problems of existing methods for treating silicon powder by installing exhaust systems, which involve large engineering work, complex construction, difficult maintenance, and high costs. It provides a mill filtration and dust removal device that is simple in structure, easy to use, and can improve dust removal efficiency.

[0005] The technical solution adopted in this utility model is:

[0006] A mill dust removal and filtration device, comprising:

[0007] The fan has an air inlet and an exhaust outlet; and

[0008] The filter box has an air inlet pipe, an air outlet pipe, and an internal partition; the air inlet pipe is connected to the processing end of the grinding machine, and the air outlet pipe is connected to the air inlet of the blower.

[0009] The air inlet pipe extends into the filtrate below the partition at one end inside the filter box, and the air outlet pipe is located above the partition at one end inside the filter box. The partition can block air bubbles generated in the filtrate from passing through. The air outlet pipe is vertically arranged.

[0010] Furthermore, the partition has a multi-layered mesh structure.

[0011] Furthermore, an inlet is provided on the side wall of the filter box; and an outlet is provided at the bottom of the filter box.

[0012] Furthermore, both the inlet and outlet are equipped with manual valves at the ends of the filter box located outside the filter box.

[0013] Furthermore, a spray head is provided on one end of the water inlet that extends into the filter box.

[0014] Furthermore, a baffle plate is provided at the bottom of the box body, and the bottom of the baffle plate is directly opposite the water outlet.

[0015] Furthermore, there are two intake pipes, with one end of each intake pipe extending into the housing and positioned close to the two side walls of the baffle plate.

[0016] Furthermore, the two air intake pipes are respectively connected to both sides of the grinding end of the mill.

[0017] Furthermore, the exhaust pipe is located between the two intake pipes.

[0018] Furthermore, the filter box is provided with a first observation window and a second observation window on its side; the first observation window faces the upper chamber of the inner partition of the filter box and is located below the air outlet pipe; the second observation window faces the lower chamber of the inner partition of the filter box.

[0019] The beneficial effects of this utility model are:

[0020] 1. This utility model provides negative pressure to the filter box by setting up a fan, which directly draws the gas containing silicon powder around the processing end of the grinding machine into the filter box. The silicon powder is filtered out and the air bubbles are removed by the filtrate and the baffle, respectively. This achieves direct, simple and efficient dust removal at the grinding machine processing site, which solves the problems of large workload, complicated construction and difficult maintenance, and high cost of the existing technology of handling silicon powder by installing a ventilation system. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a three-dimensional schematic diagram of the dust removal device according to Embodiment 1 of this utility model;

[0023] Figure 2 This is a front view of the dust removal device according to Embodiment 1 of this utility model;

[0024] Figure 3This is a perspective view of the dust removal device according to Embodiment 1 of this utility model;

[0025] Figure 4 This is a top view of the dust removal device according to Embodiment 1 of this utility model;

[0026] Figure 5 This is a perspective view of the dust removal device according to Embodiment 2 of this utility model.

[0027] Attached reference numerals: 100-fan, 110-air inlet, 120-exhaust outlet;

[0028] 200-Filter box, 210-Inlet pipe, 220-Outlet pipe, 230-Baffle, 240-Box body, 242-Water inlet, 244-Water outlet, 246-First observation window, 248-Second observation window, 250-Baffle plate;

[0029] 300 - Mounting bracket. Detailed Implementation

[0030] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0031] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this invention.

[0032] The embodiments of the utility model will now be described in detail with reference to the accompanying drawings. Example 1

[0033] In existing technologies, the overall ventilation and dust removal system for a grinding mill processing plant involving monocrystalline silicon materials is a large-scale project with complex construction, difficult maintenance, and high costs. To facilitate use and maintenance, this embodiment provides a grinding mill filtration and dust removal device for direct connection to the grinding mill processing end for ventilation and filtration. This device has a simple structure, is easy to use, and can efficiently filter and remove silicon powder generated during the grinding process, reducing dust pollution in the working environment. Please refer to [link to relevant documentation]. Figures 1-4The dust removal and filtration device for this mill mainly includes: a fan 100 and a filter box 200.

[0034] The blower 100 provides negative pressure, allowing air from the grinding end of the mill to enter the filter box 200 for filtration. For example... Figure 1 , Figure 2 As shown in the diagram, the fan 100 in this embodiment uses a 750W centrifugal fan. During operation, the airflow enters the blade space axially from the fan, and then, driven by the impeller, rotates with it while simultaneously gaining energy due to inertia, leaving the impeller radially. It performs work using the generated centrifugal force, effectively handling dust- or particulate-containing gases. This makes it suitable for dust collection and treatment systems, and the centrifugal fan is low-noise, making it suitable for installation at work sites. In this embodiment, the fan 100 has an inlet 110 and an outlet 120. The inlet 110 is used to connect to the filter box 200 to provide negative pressure, and the outlet 120 is used to discharge the filtered gas.

[0035] Filter box 200 is used for filtering dust-laden gases (mainly silica powder). For example... Figure 2 , Figure 3As shown, the main body of the filter box 200 is a sealed box 240. An inlet pipe 210 and an outlet pipe 220, connecting the inside of the box 240, are provided on the top surface of the box 240. The inlet pipe 210 is vertically positioned, with one end connected to the inside of the box 240 and the other end connected to the grinding mill's processing end via another pipe, thus directly collecting dust-laden gas. The outlet pipe 220 is also vertically positioned, with one end connected to the inside of the box 240 and the other end connected to the air inlet 110 of the ventilator 100, creating negative pressure inside the box 240. Additionally, a partition 230 is provided inside the box 240, located in the middle. Filter liquid is stored below the partition 230 inside the box 240; the filter liquid is used to adsorb silica powder from the collected gas. In this design, the inlet pipe 210 extends into the housing 240, passing through the partition 230 and into the filter liquid below the partition 230. This ensures that all gas entering the housing 240 is first adsorbed and purified by the filter liquid. The outlet pipe 220 extends into the housing 240, located above the partition 230. After the gas passes through the filter liquid to remove impurities such as silicon powder, it exits the housing 240 through the outlet pipe 220 and enters the fan 100, before being discharged through the exhaust port 120 of the fan 100. In this embodiment, the partition 230 is a multi-layered mesh structure composed of multiple layers of overlapping steel wire mesh. During the process of gas entering the filter liquid below, a large number of bubbles are generated in the filter liquid. These bubbles easily enter the outlet pipe 220 with the rising gas, thereby carrying away the silicon powder adhering to the surface of the bubbles from the housing 240 of the filter box 200, resulting in incomplete dust removal and reduced dust removal efficiency. By setting a multi-layer mesh structure partition 230, the air bubbles are squeezed and broken by the multi-layer wire mesh when passing through the partition, leaving the silicon powder below the partition, thus preventing the air bubbles from carrying out the silicon powder and improving the dust removal efficiency of the filter device in this embodiment.

[0036] In this embodiment, the fan 100 and the filter box 200 are both mounted on the same mounting bracket 300, making the structure of the entire filtration device more stable.

[0037] One specific working method of this embodiment is as follows:

[0038] The inlet pipe 210 is connected to the processing end of the grinding machine via an external pipe. When the grinding machine is performing processing operations, the fan 100 is started to extract air. Then, a negative pressure is generated inside the housing 240 to draw the dust-laden gas around the processing end of the grinding machine into the housing 240. The dust-laden gas first enters the filter liquid in the housing 240 to adsorb and remove silicon powder, and then passes through the baffle to remove air bubbles. Then, the filtered gas enters the air inlet 110 of the fan 100 through the outlet pipe 220. Finally, the filtered and dust-removed gas is discharged back into the air from the exhaust port 120 of the fan 100.

[0039] In summary, in this embodiment, the grinding mill dust removal device provides negative pressure to the filter box 200 by setting the fan 100, directly drawing the silicon powder-containing gas around the grinding mill processing end into the filter box 200. The silicon powder is filtered out and the air bubbles are removed by the filtrate and the baffle 230, respectively. This achieves direct, simple and efficient dust removal at the grinding mill processing site, solving the problems of large workload, complex construction, difficult maintenance and high cost associated with the existing technology of handling silicon powder by installing an exhaust system.

[0040] In this embodiment, an inlet 242 and an outlet 244 are also provided on the housing 240 of the filter box 200. For example... Figure 4 As shown, the inlet 242 is located on the upper rear side of the housing 240 for introducing the filtrate. A manual valve is installed on the end of the inlet 242 outside the housing 240 to control its opening, closing, and flow rate. Preferably, a spray head (not shown) can be installed on the end of the inlet 242 that extends into the housing 240 to flush the inner wall of the housing 240 with the pressurized filtrate, reducing the adhesion and accumulation of silica powder and thus extending the cleaning cycle of the housing 240. The outlet 244 is located at the bottom of the housing 240 for periodically discharging the filtrate and silica powder. Furthermore, a baffle plate 250 is installed at the bottom of the housing 240. The baffle plate 250 has a V-shaped cross-section, with its bottom facing the outlet 244 below. When the housing 240 discharges the filtrate, the filtrate passes through the V-shaped baffle plate 250, and the filtrate washes against the two side walls of the baffle plate during the discharge process, carrying away more of the silica powder accumulated at the bottom of the housing 240, reducing the adhesion and accumulation of silica powder inside the housing 240, thereby extending the opening and cleaning cycle of the housing 240.

[0041] In this embodiment, a first observation window 246 (upper) and a second observation window 248 (lower) are also provided on the front side of the housing 240. The first observation window 246 faces the chamber inside the housing 240 located above the partition 230, and is used to observe the silicon powder adhesion in the upper chamber for timely cleaning. Furthermore, to avoid the relatively long air inlet pipe 210 inside the housing 240 obstructing the view through the first observation window 246, the first observation window 246 is positioned directly below the relatively short air outlet pipe 220 inside the housing 240. On the other hand, the second observation window 248 faces the chamber inside the housing 240 located below the partition 230, and is used to observe the silicon powder adhesion in the lower chamber and the amount of silicon powder accumulation in the filtrate, for timely cleaning and filtrate replacement. Since the air inlet pipe 210 in the lower chamber has a limited length and will not completely obstruct the view, the width of the second observation window 248 is greater than that of the first observation window 246, so as to better observe the overall silicon powder accumulation in the lower chamber.

[0042] Preferably, water is used as the filtration liquid in this embodiment, which has a good adsorption effect on silicon powder and is easy to obtain. Example 2

[0043] Based on the above embodiments, a second embodiment is provided below.

[0044] Please see Figure 5 The main difference between the second embodiment and the first embodiment lies in the provision of two air inlet pipes 210. In the second embodiment, the ends of the two air inlet pipes 210 extending into the housing 240 are respectively positioned close to the two side walls of the V-shaped baffle 250. This allows the kinetic energy of the introduced dust-laden gas to impact the two side walls of the V-shaped baffle 250 during the filtration process, reducing the amount of silicon powder and other impurities adhering to the side walls. Simultaneously, the exhaust pipe 220 is positioned between the two air inlet pipes 210, allowing the gas inside the housing 240 to flow from both sides towards the center. This prevents the gas from carrying silicon powder to the side walls of the housing 240 during the flow from one side to the other, thus avoiding dead zones where a large amount of silicon powder would adhere. Furthermore, the ends of the two air inlet pipes 210 located outside the housing 240 are respectively connected to both sides of the grinding machine's processing end for dust extraction, further improving the dust extraction effect and enhancing the working environment.

[0045] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A dust removal and filtration device for a mill, characterized in that, Include: The fan (100) has an air inlet (110) and an exhaust outlet (120); and The filter box (200) has an air inlet pipe (210), an air outlet pipe (220) and an internal partition (230); the air inlet pipe (210) is connected to the processing end of the grinding machine, and the air outlet pipe (220) is connected to the air inlet (110) of the blower (100). The air inlet pipe (210) extends into the filtrate below the partition plate (230) at one end inside the filter box (200), and the air outlet pipe (220) is located above the partition plate (230) at one end inside the filter box (200). The partition plate (230) can block air bubbles generated in the filtrate from passing through. The air outlet pipe (220) is vertically arranged at one end inside the filter box (200). The partition (230) is a multi-layer mesh structure composed of multiple layers of overlapping steel wire mesh.

2. The mill dust removal and filtration device as described in claim 1, characterized in that, The filter box (200) has an inlet (242) on its side wall and an outlet (244) at its bottom.

3. The mill dust removal and filtration device as described in claim 2, characterized in that, The inlet (242) and outlet (244) are each equipped with a manual valve at the end outside the filter box (200).

4. The mill dust removal and filtration device as described in claim 2, characterized in that, A spray head is provided on one end of the water inlet (242) that extends into the filter box (200).

5. The mill dust removal and filtration device as described in claim 2, characterized in that, The main body of the filter box (200) is a sealed box (240), and a baffle (250) is provided at the bottom of the box (240), with the bottom of the baffle (250) facing the outlet (244).

6. The mill dust removal and filtration device as described in claim 5, characterized in that, There are two air intake pipes (210), and one end of each air intake pipe (210) extends into the housing (240) and is located close to the two side walls of the baffle plate (250).

7. The mill dust removal and filtration device as described in claim 6, characterized in that, The two air inlet pipes (210) are respectively connected to both sides of the grinding end of the mill.

8. The mill dust removal and filtration device as described in claim 6, characterized in that, The exhaust pipe (220) is located between the two intake pipes (210).

9. The mill dust removal and filtration device as described in any one of claims 1-8, characterized in that, The filter box (200) is provided with a first observation window (246) and a second observation window (248) on its side; the first observation window (246) is directly opposite the upper chamber of the inner partition (230) of the filter box (200) and is located below the air outlet pipe (220); the second observation window (248) is directly opposite the lower chamber of the inner partition (230) of the filter box (200).

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