Detection device

Abstract

The utility model provides a detection device. The detection device comprises a first device which moves along a first direction relative to a to-be-detected surface; the movement of the first device in the first direction is related to the flatness of the surface to be detected; the detection circuit is used for transmitting a first signal to a first device, receiving a second signal from the first device and outputting a third signal based on the second signal; wherein the first device and the detection circuit have a preset initial distance in a first direction, the preset initial distance is set based on an effective detection distance of the detection circuit, and the third signal has a first level and a second level representing the distance of the first device relative to the detection circuit. The first level is used for representing that the distance of the first device relative to the detection circuit in the first direction is smaller than the preset initial distance, and the second level is used for representing that the distance of the first device relative to the detection circuit in the first direction is not smaller than the preset initial distance.

Description

Technical Field

[0001] This disclosure relates to the field of integrated circuit manufacturing technology, and in particular to a testing device. Background Technology

[0002] Chemical mechanical polishing (CMP) is an indispensable step in integrated circuit manufacturing. The fit between the polishing pad and the polishing platform is a key factor affecting the effectiveness of CMP.

[0003] However, relying solely on manual inspection of the fit between the grinding pad and the grinding platform is usually insufficient to detect minute fit defects such as air bubbles.

[0004] Therefore, accurately detecting the fit between the grinding pad and the grinding platform has become a challenge. Utility Model Content

[0005] To address the aforementioned technical problems, this disclosure provides a testing device that can accurately detect the flatness of the surface to be tested, providing a basis for improving the adhesion between the polishing pad and the polishing platform, thereby improving the yield of semiconductor devices.

[0006] This disclosure provides a detection device, including:

[0007] A first device that moves along a first direction relative to the surface to be tested; wherein the movement of the first device along the first direction is related to the flatness of the surface to be tested;

[0008] The detection circuit transmits a first signal to the first device, receives a second signal from the first device, and outputs a third signal based on the second signal.

[0009] The first device and the detection circuit have a preset initial distance in a first direction. The preset initial distance is set based on the effective detection distance of the detection circuit. The third signal has a first level and a second level that characterize the distance between the first device and the detection circuit. The first level is used to characterize that the distance between the first device and the detection circuit in the first direction is less than the preset initial distance, and the second level is used to characterize that the distance between the first device and the detection circuit in the first direction is not less than the preset initial distance.

[0010] Optionally, the first device includes:

[0011] link;

[0012] At least one slider is provided with a channel through which the slider passes on the connecting rod, the channel allowing the slider to move relative to the surface to be detected along the first direction.

[0013] Optionally, the first device includes a plurality of sliders;

[0014] The detection circuit transmits a first signal to each slider and receives a second signal from each slider, and outputs a third signal based on the second signal.

[0015] Optionally, the slider and the connecting rod are detachably connected.

[0016] Optionally, the surface to be tested is an abrasive pad; the first device satisfies one or more of the following:

[0017] The surface material of the abrasive pad has a hardness greater than or equal to a preset hardness, and the slider is made of a metal material;

[0018] The surface material of the abrasive pad has a hardness lower than the preset hardness, and the slider is made of polytetrafluoroethylene.

[0019] Optionally, a limiting groove is provided on the connecting rod, the limiting groove being configured to confine the slider within a first interval in a second direction; wherein the second direction is perpendicular to the first direction.

[0020] Optionally, the detection circuit includes: a plurality of detectors, each detector corresponding one-to-one with one of the plurality of sliders, the detectors comprising:

[0021] A transmitter that sends a first signal to the corresponding slider;

[0022] A receiver that receives a second signal from the slider and outputs a third signal based on the second signal;

[0023] The transmitter and the receiver are located on the same side of the slider away from the surface to be detected.

[0024] Optionally, the detection circuit includes a diffuse reflection grating.

[0025] Optionally, the detection device further includes:

[0026] A voltage regulator electrically coupled to the detection circuit, which outputs different driving voltages based on the first level or the second level;

[0027] An indicator electrically coupled to the voltage regulator changes the display state based on different drive voltages; the display state characterizes the detection result of the detection circuit.

[0028] Optionally, the voltage regulator includes:

[0029] The power supply that powers the indicator;

[0030] A processor that controls the power supply to output different drive voltages based on a first level or a second level.

[0031] Optionally, the indicator includes an LED light.

[0032] The detection apparatus provided in this disclosure includes a first device and a detection circuit that move relative to a surface to be detected along a first direction. The first device can move relative to the surface to be detected along the first direction, and the movement of the first device along the first direction is related to the flatness of the surface to be detected. The detection circuit can transmit a first signal to the first device, receive a second signal from the first device, and output a third signal based on the second signal. The first device and the detection circuit have a preset initial distance in the first direction. The third signal has a first level indicating that the distance between the first device and the detection circuit in the first direction is less than the preset initial distance, and a second level indicating that the distance between the first device and the detection circuit in the first direction is not less than the preset initial distance. Since the first device and the detection circuit have a preset initial distance in the first direction, by comparing the distance between the first device and the detection circuit in the first direction with the preset initial distance, the movement of the first device relative to the surface to be detected along the first direction can be reflected, and thus the flatness of the surface to be detected can be reflected. Therefore, these detection devices can accurately detect the flatness of the surface to be detected, providing a basis for improving the adhesion between the polishing pad and the polishing platform, thereby improving the yield of semiconductor devices. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0034] Figure 1 A structural example diagram of a detection device consistent with some embodiments of this disclosure is shown.

[0035] Figure 2 A structural example diagram of a first device consistent with some embodiments of this disclosure is shown.

[0036] Figure 3 An example diagram of a link structure consistent with some embodiments of this disclosure is shown.

[0037] Figure 4An example diagram of the structure of a slider consistent with some embodiments of this disclosure is shown.

[0038] Figure 5 A structural example diagram of a detection circuit consistent with some embodiments of this disclosure is shown.

[0039] Figure 6 A structural example diagram of another detection device consistent with some embodiments of this disclosure is shown.

[0040] Figure 7 A structural example diagram of a voltage regulator consistent with some embodiments of this disclosure is shown.

[0041] Figure 8 A structural example diagram of another detection device consistent with some embodiments of this disclosure is shown. Detailed Implementation

[0042] As described in the background section, relying solely on manual inspection of the fit between the grinding pad and the grinding platform is usually insufficient to detect minute fit defects such as air bubbles.

[0043] To address the aforementioned problems, embodiments of this disclosure provide several detection devices. These detection devices include a first device that moves relative to a surface to be detected along a first direction and a detection circuit. The first device can move relative to the surface to be detected along the first direction, and the movement of the first device along the first direction is related to the flatness of the surface to be detected. The detection circuit can transmit a first signal to the first device, receive a second signal from the first device, and output a third signal based on the second signal. The first device and the detection circuit have a preset initial distance in the first direction. The third signal has a first level indicating that the distance between the first device and the detection circuit in the first direction is less than the preset initial distance, and a second level indicating that the distance between the first device and the detection circuit in the first direction is not less than the preset initial distance. Since the first device and the detection circuit have a preset initial distance in the first direction, by comparing the distance between the first device and the detection circuit in the first direction with the preset initial distance, the movement of the first device relative to the surface to be detected along the first direction can be reflected, thereby reflecting the flatness of the surface to be detected. Therefore, these detection devices can accurately detect the flatness of the surface to be detected, providing a basis for improving the adhesion between the polishing pad and the polishing platform, thereby improving the yield of semiconductor devices.

[0044] To enable those skilled in the art to better understand and implement the embodiments of this disclosure, the concepts, schemes, principles, and advantages of the embodiments of this disclosure are described in detail below with reference to the accompanying drawings and through specific application examples.

[0045] Figure 1A structural example diagram of a detection apparatus consistent with some embodiments of this disclosure is shown. In some embodiments, reference is made to... Figure 1 The detection device T may include:

[0046] A first device T1 moves along a first direction relative to the surface to be tested; wherein the movement of the first device T1 along the first direction is related to the flatness of the surface to be tested.

[0047] In some embodiments, if the surface to be detected is uneven, the first device moves in a first direction; if the surface to be detected is flat, the first device does not move.

[0048] For example, the surface to be tested can be a polishing pad. During chemical mechanical polishing (CMP), it is necessary to detect the adhesion between the polishing pad and the polishing platform. When there is an abnormal adhesion between the polishing pad and the polishing platform, such as the presence of air bubbles, the surface to be tested is uneven, and the first device moves along the first direction under the influence of the air bubbles. When there is no abnormal adhesion between the polishing pad and the polishing platform, such as when they are perfectly adhered, the surface to be tested is flat, and the first device does not move.

[0049] The detection circuit T2 transmits a first signal to the first device T1 and receives a second signal from the first device T1, and outputs a third signal based on the second signal.

[0050] In some embodiments, the first direction may be a direction perpendicular to the surface to be detected.

[0051] In some embodiments, the first device T1 and the detection circuit T2 may have a preset initial distance in a first direction.

[0052] In some embodiments, the preset initial distance between the first device T1 and the detection circuit T2 in the first direction can be determined based on the effective detection distance of the detection circuit T2.

[0053] For example, if the effective detection distance of the detection circuit T2 is [d1cm, d2cm], then the preset initial distance between the first device T1 and the detection circuit T2 in the first direction can be d1cm.

[0054] In some embodiments, the preset initial distance between the first device T1 and the detection circuit T2 in the first direction can be determined based on the effective detection distance of the detection circuit T2 and the type of the surface to be detected.

[0055] For example, in some embodiments, the surface to be detected can be a polishing pad, the surface of which has contact points with the surface of the workpiece being polished, and these contact points have a certain size. In this embodiment, to avoid the influence of the contact points on the surface of the polishing pad on the detection results, the initial distance between the first device T1 and the detection circuit T2 in the first direction can be (d1+dx) cm. Here, dx can be determined based on the size of the contact points. For example, based on the size of the contact points, dx can be set to 1 cm.

[0056] By using the above embodiments, the influence of the protrusions on the surface to be tested on the test results can be avoided, thereby further improving the accuracy of the test results of the testing device.

[0057] In some embodiments, the third signal may have a first level and a second level representing the distance between the first device T1 and the detection circuit T2. The first level may be used to represent that the distance between the first device T1 and the detection circuit T2 in a first direction is less than a preset initial distance. The second level may be used to represent that the distance between the first device T1 and the detection circuit T2 in the first direction is not less than the preset initial distance.

[0058] For example, the first level can include logic "0", and the second level can include logic "1".

[0059] In some embodiments, the first device may include a connecting rod and at least one slider. The slider is provided with a channel through which it passes on the connecting rod, the channel allowing the slider to move relative to the surface to be detected along a first direction.

[0060] In some embodiments, the first device may include a connecting rod and a plurality of sliders. The detection circuit transmits a first signal to each slider, receives a second signal from each slider, and outputs a third signal based on the second signal.

[0061] For example, Figure 2 A structural example diagram of a first device consistent with some embodiments of this disclosure is shown. (Refer to...) Figure 2 The first device T1 may include:

[0062] Connecting rod T11.

[0063] In some embodiments, a limiting groove may be provided on the connecting rod T11, which can limit the slider within a first interval in the second direction.

[0064] In some embodiments, the second direction may be perpendicular to the first direction. For example, the first direction may be a direction perpendicular to the surface to be detected, and the second direction may be a direction horizontal to the surface to be detected.

[0065] For example, Figure 3 A structural example diagram of a link consistent with some embodiments of this disclosure is shown. (Refer to...) Figure 3 A limiting groove T111 can be provided on the connecting rod T11. The limiting groove T111 can limit the slider within the first interval d in the second direction.

[0066] By using the above embodiment, since the connecting rod is provided with a limiting groove, the limiting groove can limit the slider to the first interval in the second direction, thereby avoiding mutual interference between the sliders, thus further improving the accuracy of the detection results of the detection device.

[0067] Multiple sliders T12 are provided with channels. The sliders T12 are connected to the connecting rod T11 through the channels. The channels allow the sliders T12 to move relative to the surface to be detected along a first direction.

[0068] During the detection process, the detection circuit sends a first signal to each slider T12 and receives a second signal from each slider T12, and outputs a third signal based on the second signal.

[0069] In some embodiments, some sliders T12 may move relative to the surface to be detected along a first direction, while some sliders T12 may not move.

[0070] For example, Figure 4 A structural example diagram of a slider consistent with some embodiments of this disclosure is shown. (Refer to...) Figure 4 The slider T12 is equipped with channel T121. (Refer to the reference...) Figure 2 The slider T12 is mounted on the connecting rod T11 through the channel T121, which allows the slider T12 to move relative to the surface to be detected along the first direction.

[0071] In some embodiments, the slider T12 can be a cuboid without sharp edges. For example, the slider T12 can be a cuboid with a length of 3cm, a width of 4cm, and a height of 5cm without sharp edges.

[0072] It is understood that the embodiments disclosed herein do not impose specific limitations on the number, material, shape, etc., of the sliders. The above embodiments are merely illustrative. Those skilled in the art can make settings according to the actual application scenario of the detection device. For example, in some embodiments, the slider can be a cube without sharp edges. For example, in some embodiments, the first device may include a slider.

[0073] In some embodiments, channel T121 may be a rectangular hole.

[0074] It is understood that the embodiments disclosed herein do not impose specific limitations on the channel, as long as the slider can pass through the channel and be mounted on the connecting rod, and the channel allows the slider to move relative to the surface to be detected along the first direction.

[0075] In some embodiments, the slider T12 and the connecting rod T11 are detachably connected.

[0076] With the above embodiment, since the slider and the connecting rod are detachably connected, it is convenient to replace the slider. Thus, when the slider is worn, the accuracy of the detection device can be ensured by replacing the slider.

[0077] In some embodiments, the surface to be tested can be an abrasive pad.

[0078] For example, in chemical mechanical polishing (CMP), it is necessary to check the fit between the polishing pad and the polishing platform.

[0079] In some embodiments, when the surface material of the abrasive pad has a hardness greater than or equal to a preset hardness, the slider can be made of a metal material.

[0080] For example, a preset hardness can be set based on the Shore D hardness value range. The smaller the hardness value, the softer the material; the larger the hardness value, the harder the material.

[0081] In some embodiments, when the surface material of the abrasive pad has a hardness less than a preset hardness, the slider material can be polytetrafluoroethylene.

[0082] By using the above embodiments, sliders made of different materials are set according to the hardness of the surface material of the grinding pad, which can not only reduce the probability of damage to the surface of the grinding pad, but also further improve the accuracy of the detection device.

[0083] In some embodiments, the detection circuit may include a plurality of detectors, each corresponding to one of the plurality of sliders. Each detector may include a transmitter that emits a first signal to the corresponding slider and a receiver that receives a second signal from the slider and outputs a third signal based on the second signal. The transmitter and the receiver are located on the same side of the slider away from the surface to be detected.

[0084] In some embodiments, the plurality of detectors correspond one-to-one with the plurality of sliders, meaning that the number of detectors and sliders are equal, and the projection range of the first signal emitted by one detector corresponds to one slider.

[0085] For example, Figure 5 A structural example diagram of a detection circuit consistent with some embodiments of this disclosure is shown. In some embodiments, reference is made to... Figure 5 and in conjunction with reference Figure 2 The first device T1 includes multiple sliders T12, and the detection circuit T2 may include multiple detectors T21 to T2N. Detectors T21 to T2N correspond one-to-one with sliders T12, where N represents the number of detectors, which is the same as the number of sliders T12. For example, detector T21 may include:

[0086] Transmitter T211 sends the first signal to the corresponding slider T12.

[0087] Receiver T212 receives a second signal from slider T12 and outputs a third signal based on the second signal.

[0088] In some embodiments, the transmitter T211 and the receiver T212 are located on the same side of the slider T12 away from the surface to be detected.

[0089] In some embodiments, transmitter T211 may include a laser. Receiver T212 may include a detector. The laser may emit a first signal toward slider T12, for example, by emitting a laser beam. The emitted laser beam is reflected by slider T12 upon encountering it. The detector may receive a second signal reflected from slider T12. The second signal is then processed to determine the distance of slider T12 relative to detection circuit T2 in a first direction. When the distance of slider T12 relative to detection circuit T2 in the first direction is less than a preset initial distance, the detector may output a first level, for example, logic "0". When the distance of slider T12 relative to detection circuit T2 in the first direction is not less than the preset initial distance, the detector may output a second level, for example, logic "1".

[0090] In some embodiments, the laser may include a semiconductor laser, a fiber laser, or other types of lasers. The above are merely examples, and this disclosure does not limit the type of laser used.

[0091] In some embodiments, the detector may include a photoelectric detection circuit.

[0092] In some embodiments, the detection circuit T2 may include a diffuse reflection grating.

[0093] In some embodiments, the detection circuit T2 may include a single-sided diffuse reflection grating.

[0094] The single-sided diffuse reflection grating integrates the light source emitter and receiver into a single unit. The light source emits infrared light towards the object, and the receiver receives the infrared light reflected back from the object. Each receiver can output a signal independently.

[0095] For example, the effective detection distance of a single-sided diffuse reflection grating is [d1cm, d2cm]. The preset initial distance between the single-sided diffuse reflection grating and the first device T1 is d1cm. During the detection process, the single-sided diffuse reflection grating emits infrared light into the first device T1. When the distance between the single-sided diffuse reflection grating and the first device T1 is less than d1cm, the single-sided diffuse reflection grating can output a first level, such as logic "0". When the distance between the single-sided diffuse reflection grating and the first device T1 is not less than d1cm, the single-sided diffuse reflection grating outputs a second level, such as logic "1".

[0096] Figure 6 A structural example diagram of another detection device consistent with some embodiments of this disclosure is shown. In some embodiments, reference is made to... Figure 6 The detection device T may also include:

[0097] A voltage regulator T3 is electrically coupled to the detection circuit T2 and outputs different drive voltages based on the first or second level.

[0098] An indicator T4, electrically coupled to a voltage regulator T3, changes its display status based on different drive voltages. The display status characterizes the detection result of the detection circuit T2.

[0099] For example, Figure 7 A structural example diagram of a voltage regulator consistent with some embodiments of this disclosure is shown. In some embodiments, reference is made to... Figure 7 The voltage regulator T3 may include:

[0100] Power supply T31 supplies power to the indicator.

[0101] Based on the first or second level, the processor T32 controls the power supply T31 to output different drive voltages.

[0102] In some embodiments, the processor T32 may include, but is not limited to, hardware circuits implemented with an application-specific integrated circuit (ASIC), a programmable logic device (PLD), a microcontroller unit (MCU), a microprocessor unit (MPU), a digital signal processor (DSP), or a central processing unit (CPU). For example, hardware circuits implemented with a PLD may include field-programmable gate arrays (FPGAs).

[0103] In some embodiments, indicator T4 may include an LED light.

[0104] For example, when the detection circuit T2 outputs a first level, the processor T32 controls the power supply T31 to output a first driving voltage. Under the drive of the first driving voltage, the LED is off, indicating that the detection circuit T2 has detected an abnormal adhesion state on the surface to be detected. When the detection circuit T2 outputs a second level, the processor T32 controls the power supply T31 to output a second driving voltage. Under the drive of the second driving voltage, the LED is lit, indicating that the detection circuit T2 is detecting or has not detected an abnormal adhesion state on the surface to be detected.

[0105] The magnitudes of the first and second driving voltages can be set according to the operating voltage of the LED. For example, when the voltage is between 0 and 0.8V, the LED is off, so the first driving voltage can be any value within the range of 0 to 0.8V. When the voltage is between 2 and 5V, the LED is on, so the second driving voltage can be any value within the range of 2 to 5V.

[0106] In some embodiments, the indicator T4 may include a liquid crystal display screen.

[0107] It is understood that the present disclosure does not impose specific limitations on the indicator.

[0108] It should be noted that the embodiments disclosed herein do not impose specific limitations on the correspondence between the display state of the indicator and the detection result of the detection circuit. The above embodiments are merely illustrative. In some embodiments, the off state of the LED can be used to indicate that the detection circuit T2 is detecting or has not detected an abnormal bonding state of the surface to be detected. The emitting state of the LED can be used to indicate that the detection circuit T2 has detected an abnormal bonding state of the surface to be detected.

[0109] The following specific example illustrates a method for detection using the detection apparatus of this disclosure.

[0110] Figure 8 A structural example diagram of yet another detection device consistent with some embodiments of this disclosure is shown. (Refer to...) Figure 8 The detection device T includes a first device T1, a detection circuit T2, a voltage regulator T3, and an indicator T4.

[0111] In some embodiments, the first device T1 may include a connecting rod T11 and a plurality of sliders T12. The sliders T12 are provided with channels through which they pass onto the connecting rod T11, allowing the sliders T12 to move relative to the surface S to be detected along a first direction y. The structure of the connecting rod T11 is as follows: Figure 3The description and related information, and the structure of slider T12 and its channels are referenced. Figure 4 The details and related descriptions will not be repeated here.

[0112] In some embodiments, the detection circuit T2 may include a single-sided diffuse reflection grating.

[0113] In some embodiments, the voltage regulator T3 may include a power supply T31 and a processor T32.

[0114] In some embodiments, the indicator T4 includes a plurality of LED lights T41.

[0115] In some embodiments, the LED light T41 can correspond one-to-one with the slider T12.

[0116] In some embodiments, the surface S to be tested may include an abrasive pad.

[0117] In some embodiments, the effective detection distance of the single-sided diffuse reflection grating is [2.5cm, 5cm]. In this embodiment, considering that the contact points on the surface of the polishing pad have a certain size, the preset initial distance between the first device T1 and the detection circuit T2 in the first direction y can be 2.6cm.

[0118] During the detection process, a single-sided diffuse reflection grating emits infrared light to multiple sliders T12 and receives the infrared light reflected back by the sliders T12. If a bubble S0 exists on the surface S to be detected, the diameter of the bubble S0 is typically at least 2 cm. When some sliders T12 move above the bubble S0, under the influence of the bubble S0, the portion of the sliders T12 above the bubble S0 moves along the first direction y. When the single-sided diffuse reflection grating detects that the distance between itself and the portion of the sliders T12 above the bubble S0 is less than 2.5 cm, the single-sided diffuse reflection grating can output a first level to the processor T32, for example, outputting logic "0" to the processor T32. The processor T32 controls the power supply T31 to output a first driving voltage corresponding to logic "0". Under the drive of the first driving voltage, the LED corresponding to the portion of the sliders T12 above the bubble S0 that are moving along the first direction y is turned off, indicating that an abnormal adhesion state of the surface to be detected has been detected, i.e., the bubble S0 has been detected. The portion of slider T12 located on the surface S to be tested, where there are no abnormal adhesion states such as bubbles, remains stationary. The single-sided diffuse reflection grating maintains a preset initial distance from this portion of slider T12 in the first direction y. When the single-sided diffuse reflection grating detects that the distance between itself and slider T12 is not less than 2.5cm, it outputs a second level to processor T32, for example, a logic "1". Processor T32 controls power supply T31 to output a second driving voltage corresponding to logic "1". Under the drive of the second driving voltage, the LED corresponding to the stationary slider T12 illuminates, indicating that detection is in progress or that no abnormal adhesion state on the surface to be tested has been detected.

[0119] It is understood that the embodiments disclosed herein do not impose specific limitations on the application scenarios of the detection device. The above embodiments are merely illustrative examples. Furthermore, when the surface to be detected is an abrasive pad, there are no specific limitations on the abnormal adhesion states that can be detected; the air bubbles in the above embodiments are merely one illustrative example of what can cause unevenness on the surface to be detected. In some embodiments, abnormal adhesion states include areas that were missed during the leveling of the abrasive pad.

[0120] It should be noted that the above embodiments can be implemented individually or in combination.

[0121] In this disclosure, unless otherwise expressly specified and limited, ordinal numbers, such as “first”, “second”, etc., are used only to distinguish and describe related objects, and should not be construed as indicating or implying the relative importance or order between related objects. Furthermore, ordinal numbers do not represent the quantity of related objects. For example, “first signal” and “second signal” can include one signal or multiple signals. “Multiple” includes two or more, and other quantifiers are similar.

[0122] While the embodiments disclosed herein are as described above, this utility model is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of this utility model; therefore, the scope of protection of this utility model should be determined by the scope defined in the claims.

Claims

1. A detection device, characterized in that, include: A first device that moves along a first direction relative to the surface to be tested; wherein the movement of the first device along the first direction is related to the flatness of the surface to be tested; The detection circuit transmits a first signal to the first device, receives a second signal from the first device, and outputs a third signal based on the second signal. The first device and the detection circuit have a preset initial distance in a first direction. The preset initial distance is set based on the effective detection distance of the detection circuit. The third signal has a first level and a second level that characterize the distance between the first device and the detection circuit. The first level is used to characterize that the distance between the first device and the detection circuit in the first direction is less than the preset initial distance, and the second level is used to characterize that the distance between the first device and the detection circuit in the first direction is not less than the preset initial distance.

2. The detection device according to claim 1, characterized in that, The first device includes: link; At least one slider is provided with a channel through which the slider passes on the connecting rod, the channel allowing the slider to move relative to the surface to be detected along the first direction.

3. The detection device according to claim 2, characterized in that, The first device includes a plurality of sliders; The detection circuit transmits a first signal to each slider and receives a second signal from each slider, and outputs a third signal based on the second signal.

4. The detection device according to claim 3, characterized in that, The slider and the connecting rod are detachably connected.

5. The detection device according to claim 4, characterized in that, The surface to be tested is an abrasive pad; the first device satisfies one or more of the following: The surface material of the abrasive pad has a hardness greater than or equal to a preset hardness, and the slider is made of a metal material; The surface material of the abrasive pad has a hardness lower than the preset hardness, and the slider is made of polytetrafluoroethylene.

6. The detection device according to claim 4, characterized in that, The connecting rod is provided with a limiting groove, which is configured to limit the slider within a first interval in a second direction; wherein the second direction is perpendicular to the first direction.

7. The detection device according to claim 3, characterized in that, The detection circuit includes: multiple detectors, each corresponding to one of the multiple sliders; the detectors include: A transmitter that sends a first signal to the corresponding slider; A receiver that receives a second signal from the slider and outputs a third signal based on the second signal; The transmitter and the receiver are located on the same side of the slider away from the surface to be detected.

8. The detection device according to claim 1, characterized in that, The detection circuit includes a diffuse reflection grating.

9. The detection device according to claim 1, characterized in that, Also includes: A voltage regulator electrically coupled to the detection circuit, which outputs different driving voltages based on the first level or the second level; An indicator electrically coupled to the voltage regulator changes the display state based on different drive voltages; the display state characterizes the detection result of the detection circuit.

10. The detection device according to claim 9, characterized in that, The voltage regulator includes: The power supply that powers the indicator; A processor that controls the power supply to output different drive voltages based on a first level or a second level.

11. The detection device according to claim 10, characterized in that, The indicator includes LED lights.

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