Laser coating equipment
By using laser coating equipment to achieve sputtering deposition of target materials in small devices with the help of laser reflection devices, the problem of large size and high cost of magnetron sputtering equipment is solved. This provides an efficient and low-cost thin film preparation solution that is suitable for small laboratories and coating needs of different materials.
Patent Information
- Application Number
- CN202520092921.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-15
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2035-01-15
AI Technical Summary
Existing magnetron sputtering equipment for thin film deposition is bulky and expensive, making it unsuitable for small-scale experimental applications. Furthermore, it lacks high deposition precision and cannot achieve selective area deposition.
Laser coating equipment is used, which emits a laser through a laser generator and reflects the laser through a reflector to irradiate the target material. The target material molecules are sputtered onto the substrate to form a thin film. The equipment has a simple structure and small size, making it suitable for small laboratories. Furthermore, by controlling the laser parameters and the target material, thin films with different functions can be prepared.
It achieves efficient thin film deposition in small equipment, reduces the difficulty of coating, improves the quality and applicability of thin films, and is suitable for materials of different materials and thicknesses. The coating process is carried out in a vacuum environment to avoid the introduction of impurities.
Smart Images
Figure CN223837539U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of material coating equipment technology, specifically providing a laser coating equipment. Background Technology
[0002] With the development of high-efficiency photovoltaic cells, PVD technology is becoming increasingly widely used due to its efficient and high-quality film deposition method. Currently, magnetron sputtering is the primary method used. This method utilizes the collisions between electrons and argon atoms as electrons fly towards the substrate under the influence of an electric field, ionizing them to produce argon ions. These argon ions are accelerated towards the cathode target under the influence of the electric field and bombard the target surface with high energy, causing the target material to be sputtered. In the sputtered particles, neutral target atoms or molecules are deposited on the substrate to form a thin film.
[0003] In existing magnetron sputtering techniques, a powerful electromagnetic field is required to control the ionization and deflection of argon atoms, which often necessitates large equipment, making it unsuitable for small-scale experiments. Furthermore, the control precision of the electromagnetic field is not high, allowing only frontal deposition and preventing precise selective deposition of specific areas. The film formation process also requires strict conditions and consumes expensive rare gases, resulting in high costs for magnetron sputtering.
[0004] Accordingly, a new technical solution is needed in this field to solve the above-mentioned technical problems. Utility Model Content
[0005] The present invention aims to solve the above-mentioned technical problems to at least a certain extent, namely, to solve the problems that existing magnetron sputtering methods for thin film deposition have large equipment size, high cost, and are not suitable for small-scale test occasions.
[0006] In a first aspect, the present invention provides a laser coating equipment, the laser coating equipment comprising a housing, a laser generating device, and a first fixing device, a second fixing device, and a reflecting device disposed within the housing; the first fixing device and the second fixing device are arranged vertically at intervals, and the reflecting device is located on the side of the second fixing device away from the first fixing device; the first fixing device is used to clamp and fix a target material, the second fixing device is used to clamp and fix a substrate to be coated, the laser generating device is arranged toward the reflecting device to emit laser light toward the reflecting device, and the reflecting device is configured to receive the laser light and reflect the laser light so that the reflected laser light passes through the substrate to be coated and irradiates the target material.
[0007] In the preferred embodiment of the laser coating equipment described above, the first fixing device is located above the second fixing device, and the reflective device is located below the second fixing device.
[0008] In the preferred embodiment of the laser coating equipment described above, the reflecting device includes a plurality of mirror groups spaced apart along the width direction of the substrate to be coated. Each mirror group includes a linear moving mechanism, a mirror base, and a mirror. The mirror is used to receive the laser and reflect it. The linear moving mechanism is connected to the housing. The mirror base is mounted on the linear moving mechanism. The mirror is mounted on the mirror base and can rotate relative to the mirror base to adjust the reflection angle of the mirror. The linear moving mechanism is configured to drive the mirror base and the mirror to move along the length direction of the substrate to be coated, so as to change the reflection position of the mirror in the length direction of the substrate to be coated.
[0009] In the preferred embodiment of the laser coating equipment described above, the reflecting device further includes a linear motor. The stator of the linear motor is mounted on the bottom wall of the housing and extends along the width direction of the substrate to be coated. A plurality of linear moving mechanisms are respectively mounted on a plurality of moving parts of the linear motor, and the plurality of moving parts are spaced apart along the width direction of the substrate to be coated.
[0010] In the preferred embodiment of the laser coating equipment described above, the laser generating device includes a plurality of laser generators, the number of which is the same as the number of reflectors, wherein each laser generator is positioned facing one of the reflectors so as to be able to emit laser light toward the reflector.
[0011] In the preferred embodiment of the laser coating equipment described above, the laser generator is located outside the housing, and the housing has a transparent window on the side closest to the laser generator, so that the laser from the laser generator can shine through the transparent window onto the corresponding reflector.
[0012] In the preferred embodiment of the laser coating equipment described above, the laser coating equipment further includes a first vertical moving mechanism installed inside the housing, the first fixing device being connected to the first vertical moving mechanism, and the first vertical moving mechanism being configured to drive the first fixing device to move in the vertical direction; and / or, the laser coating equipment further includes a second vertical moving mechanism installed inside the housing, the second fixing device being connected to the second vertical moving mechanism, and the second vertical moving mechanism being configured to drive the second fixing device to move in the vertical direction.
[0013] In the preferred embodiment of the laser coating equipment described above, the first fixing device and the second fixing device are spaced apart by a first gap, which is 10cm to 20cm.
[0014] In the preferred embodiment of the laser coating equipment described above, the reflective device and the second fixing device are spaced apart by a second distance, which is 10cm to 20cm.
[0015] In the preferred embodiment of the laser coating equipment described above, the housing is provided with an air outlet, which is connected to a vacuum pump via a vacuum tube.
[0016] In the case of adopting the above-mentioned preferred technical solution, the laser coating equipment of this utility model includes a housing, a laser generating device, and a first fixing device, a second fixing device, and a reflecting device disposed in the housing. The first fixing device is used to clamp and fix the target material, the second fixing device is used to clamp and fix the substrate to be coated, the laser generating device is used to emit laser light toward the reflecting device, and the reflecting device is used to reflect the laser light emitted by the laser generating device and make the reflected laser light pass through the substrate to be coated and irradiate the target material. The light pressure and instantaneous high heat of the laser light impact the target material, causing the material molecules of the target material to be sputtered onto the surface of the substrate to be coated, forming the desired thin film. The equipment has a simple structure, small size, is easy to assemble and use, and has low cost, making it suitable for small-scale experimental occasions. In addition, by controlling the parameters of the laser light emitted by the laser generating device and changing the material of the target material, different functional thin films can be prepared, with a wide range of applications and convenient operation.
[0017] Furthermore, the first fixing device is located above the second fixing device, and the reflector is located below the second fixing device. This arrangement allows the target material to be positioned above the substrate to be coated, and the reflector to reflect the laser onto the target material from below. As a result, the material molecules of the target material can be deposited more smoothly onto the substrate to be coated under the influence of gravity and the Earth's gravity during sputtering under the action of laser energy, which can effectively reduce the coating difficulty and improve the quality of the thin film.
[0018] Furthermore, the reflecting device includes multiple mirror groups spaced apart along the width direction of the substrate to be coated. Each mirror group includes a linear moving mechanism, a mirror mount, and a mirror. The mirror is mounted on the mirror mount, and the mirror mount is mounted on the linear moving mechanism. The linear moving mechanism can drive the mirror mount and the mirror to move along the length direction of the substrate to be coated, thereby changing the reflection position of the mirror in the length direction of the substrate. In this arrangement, the linear moving mechanism can drive the mirror to move along the length direction of the substrate to be coated, thereby changing the position of laser sputtering. In addition, the multiple mirrors correspond to different positions in the width direction of the substrate to be coated, and thus, by cooperating with multiple mirror groups, coating can be performed on specific areas of the substrate to be coated, effectively controlling the shape, size, and position of the coating.
[0019] Furthermore, the reflective device also includes a linear motor. The stator of the linear motor extends along the width direction of the substrate to be coated. Multiple linear moving mechanisms are respectively installed on multiple moving parts of the linear motor. By setting the linear motor, the position of each moving part in the width direction of the substrate to be coated can be adjusted, thereby adjusting the position of the reflector in the width direction of the substrate to be coated. This allows it to be used on substrates of different widths, improving the applicability of the equipment.
[0020] Furthermore, the laser generating device includes multiple laser generators, the same number as the reflectors, with each laser generator facing a reflector so as to emit laser light to its corresponding reflector. Each reflector is equipped with one laser generator, and the laser light in the sputtering area corresponding to each reflector can be controlled by adjusting the parameters of the laser generator, thereby improving ease of use.
[0021] Furthermore, mounting the laser generator on the outside of the enclosure facilitates vacuuming of the enclosure during the coating process, allows for easy installation of the laser generator outside the enclosure, and effectively reduces the volume inside the enclosure, making assembly and use easier.
[0022] Furthermore, by setting a first vertical moving mechanism to drive the first fixed device to move in the vertical direction, the height of the first fixed device can be adjusted, thereby adjusting the distance between the target material and the substrate to be coated, which helps the equipment to be used for coating materials of different materials and thicknesses.
[0023] Furthermore, by setting a second vertical moving mechanism to drive the second fixing device to move in the vertical direction, the height position of the second fixing device can be adjusted, thereby adjusting the distance between the target material and the substrate to be coated, which helps the equipment to be used for coating materials of different materials and thicknesses.
[0024] Furthermore, an air outlet is provided on the chamber, which is connected to a vacuum pump via a vacuum tube. This configuration allows the vacuum pump to evacuate the chamber, enabling the coating process to be carried out in a vacuum environment. This avoids introducing impurity particles during the coating process, thereby ensuring the performance of the coated layer. Attached Figure Description
[0025] The preferred embodiments of this utility model are described below with reference to the accompanying drawings, in which:
[0026] Figure 1 This is a three-dimensional structural diagram of the laser coating equipment of this utility model. Figure 1 ;
[0027] Figure 2 This is a three-dimensional structural diagram of the laser coating equipment of this utility model. Figure 2 ;
[0028] Figure 3 This is a front view of the laser coating equipment of this utility model;
[0029] Figure 4 yes Figure 3 A cross-sectional view along the AA direction;
[0030] Figure 5 yes Figure 3 Cross-sectional view along the BB direction;
[0031] Figure 6 This is a three-dimensional structural diagram of the laser coating equipment of this utility model after the top wall is hidden;
[0032] Figure 7 This is a three-dimensional structural diagram of the reflective device of this utility model.
[0033] List of reference numerals in the attached diagram:
[0034] 1. Enclosure; 11. Transparent window; 12. Air vent; 13. Door;
[0035] 2. Laser generating device; 21. Laser generator; 22. Adjustment mechanism;
[0036] 3. First fixing device;
[0037] 4. Second fixing device;
[0038] 5. Reflecting device; 51. Reflecting mirror assembly; 511. Linear movement mechanism; 512. Mirror mount; 513. Reflecting mirror; 52. Linear motor; 521. Stator; 522. Mover;
[0039] 6. First vertical moving mechanism;
[0040] 7. Second vertical moving mechanism. Detailed Implementation
[0041] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.
[0042] It should be noted that in the description of this utility model, terms such as "upper," "lower," "inner," and "outer," which indicate direction or positional relationship, are based on the direction or positional relationship shown in the accompanying drawings. This is merely for ease of description and does not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0043] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "setting," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0044] In view of the problems mentioned in the background art, the magnetron sputtering method for thin film deposition requires large equipment size, high cost and is not suitable for small experimental occasions. This application provides a laser coating equipment, which uses laser to irradiate the target material to sputter and deposit the target material onto the substrate to be coated. It has a simple structure, small size and low cost.
[0045] Specifically, please also refer to Figures 1 to 6 The laser coating equipment of this utility model includes a housing 1, a laser generating device 2, and a first fixing device 3, a second fixing device 4, and a reflecting device 5 disposed in the housing 1.
[0046] The first fixing device 3 and the second fixing device 4 are arranged at intervals along the vertical direction, and the reflective device 5 is located on the side of the second fixing device 4 away from the first fixing device 3.
[0047] The first fixing device 3 is used to clamp and fix the target material (not shown in the figure) so as to fix the target material. The second fixing device 4 is used to clamp and fix the substrate to be coated (not shown in the figure) so as to fix the substrate to be coated. The target material and the laser generating device 2 are arranged towards the reflecting device 5 so as to be able to emit laser towards the reflecting device 5. The reflecting device 5 is configured to receive the laser and reflect the laser so that the reflected laser passes through the substrate to be coated and irradiates the target material.
[0048] In this invention, the laser generating device 2 emits a laser beam to the reflecting device 5. The reflecting device 5 receives and reflects the laser beam, which passes through the substrate to be coated and irradiates the target material. The laser's light pressure and instantaneous high heat impact the target material, causing the target material molecules to sputter onto the surface of the substrate near the target, depositing the desired thin film. This laser coating equipment uses controlled laser to irradiate the target material for sputtering coating. Compared to magnetron sputtering, this equipment is smaller and less expensive, making it suitable for small-scale laboratory coating applications. Furthermore, by controlling the parameters of the laser emitted by the laser generating device 2 and changing the target material, different functional thin films can be prepared. It is easy to operate and has a wide range of applications.
[0049] In a preferred embodiment, please refer to Figure 4 The first fixing device 3 is located above the second fixing device 4, and the reflective device 5 is located below the second fixing device 4.
[0050] The first fixing device 3 is positioned above the second fixing device 4, and the reflector 5 is positioned below the second fixing device 4. This arrangement allows the target material to be positioned above the substrate to be coated, and the reflector 5 reflects the laser light onto the target material from below. As a result, the material molecules of the target material can be deposited more smoothly onto the substrate to be coated under the influence of gravity and the Earth's gravity during sputtering under the action of laser energy. This can effectively reduce the coating difficulty and improve the quality of the thin film.
[0051] It should be noted that this utility model does not impose any restrictions on the specific structure of the first fixing device 3, as long as the first fixing device 3 can clamp and fix the target material. In practical applications, those skilled in the art can set the specific structure of the first fixing device 3 according to the actual situation. For example, the first fixing device 3 can be set as a mechanical gripper, or the first fixing device 3 can be set as two opposing grippers, etc. Adjustments and changes to the structure of the first fixing device 3 do not deviate from the basic principles of this utility model and should be limited to the protection scope of this utility model.
[0052] It should be noted that this utility model does not impose any restrictions on the specific structure of the second fixing device 4, as long as the second fixing device 4 can clamp and fix the substrate to be coated. In practical applications, those skilled in the art can set the specific structure of the second fixing device 4 according to the actual situation. For example, the second fixing device 4 can be set as a mechanical gripper, or as two opposing grippers, etc. Adjustments and changes to the structure of the second fixing device 4 do not deviate from the basic principles of this utility model and should be limited to the protection scope of this utility model.
[0053] In a preferred embodiment, please also refer to Figure 4 , Figure 6 and Figure 7 The reflecting device 5 includes a plurality of mirror groups 51 spaced apart along the width direction of the substrate to be coated. Each mirror group 51 includes a linear moving mechanism 511, a mirror base 512, and a mirror 513. The mirror 513 is used to receive laser light and reflect it, so as to receive the laser light emitted by the laser emitting device and reflect it to the target material. The linear moving mechanism 511 is connected to the housing 1. The mirror base 512 is mounted on the linear moving mechanism 511. The mirror 513 is mounted on the mirror base 512 and can rotate relative to the mirror base 512 to adjust the reflection angle of the mirror 513. The linear moving mechanism 511 is configured to drive the mirror base 512 and the mirror 513 to move along the length direction of the substrate to be coated, so as to change the reflection position of the mirror 513 in the length direction of the substrate to be coated.
[0054] With the above configuration, the linear motion mechanism 511 can drive the reflector 513 to move along the length of the substrate to be coated, thereby changing the position of the laser irradiation on the target and adjusting the sputtering coating position. In addition, multiple reflectors 513 correspond to different positions in the width direction of the substrate to be coated, and multiple reflector groups 51 can cooperate to coat specific areas of the substrate to be coated, effectively controlling the position, shape and size of the coating.
[0055] It should be noted that this utility model does not impose any restrictions on the specific structure of the linear motion mechanism 511. As long as the linear motion mechanism 511 can drive the reflector 513 and the mirror base 512 to move along the length direction of the substrate to be coated, thereby changing the reflection position of the reflector 513, it is acceptable. In practical applications, those skilled in the art can set the specific structure of the linear motion mechanism 511 according to actual needs. For example, the linear motion mechanism 511 can be set as a ball screw mechanism, or as a belt drive mechanism, or as a gear and rack drive mechanism, etc. Adjustments and changes to the linear motion mechanism 511 do not deviate from the basic principles of this utility model and should be limited to the protection scope of this utility model.
[0056] In a preferred embodiment, please continue reading Figure 4 and Figure 7 The reflective device 5 also includes a linear motor 52. The stator 521 of the linear motor 52 is mounted on the bottom wall of the housing 1 and extends along the width direction of the substrate to be coated. Multiple linear moving mechanisms 511 are respectively mounted on multiple moving parts 522 of the linear motor 52. The multiple moving parts 522 are distributed at intervals along the width direction of the substrate to be coated.
[0057] The linear motor 52 includes a stator 521 and multiple movers 522. The multiple movers 522 are mounted on the stator 521 and can move relative to the stator 521 along the length direction of the stator 521, thereby adjusting the position of the movers 522 relative to the stator 521. By setting the linear motor 52, the position of the reflector 513 in the width direction of the substrate to be coated can be adjusted, so that the laser coating equipment of this utility model can be adapted to the use of substrates of different widths to be coated, thus improving the applicability of the equipment.
[0058] In a preferred embodiment, please refer to Figure 2 The laser generating device 2 includes a plurality of laser generators 21, the number of which is the same as the number of reflectors 513. Each laser generator 21 is positioned facing a reflector 513 so as to be able to emit laser light toward the reflector 513.
[0059] The laser generating device 2 includes a plurality of laser generators 21, the same number as the reflectors 513, and each laser generator 21 is positioned facing a reflector 513 so as to emit lasers to its corresponding reflector 513. Each reflector 513 is provided with a laser generator 21. The laser in the sputtering area corresponding to each reflector can be controlled by adjusting the parameters of the laser generator 21, thereby improving ease of use.
[0060] In a preferred embodiment, please continue reading Figure 2 The laser generator 21 is located outside the housing 1, and the housing 1 has a transparent window 11 on the side close to the laser generator 21. The laser from the laser generator 21 can shine through the transparent window 11 onto the corresponding reflector 513.
[0061] By mounting the laser generator 21 on the outside of the housing 1, it is convenient to vacuum the housing 1 during the coating process, and it is also convenient to install the laser generator 21 on the outside of the housing 1. The laser generator 21 does not occupy the space of the housing 1, effectively reducing the volume inside the housing 1 and making it convenient to assemble and use.
[0062] In a preferred embodiment, please continue reading Figure 2 The laser generating device 2 also includes an adjustment mechanism 22, which is mounted on the housing 1. Multiple laser generators 21 are mounted on the adjustment mechanism 22. The adjustment mechanism 22 is configured to adjust the position of each laser generator 21 along the width direction of the substrate to be coated.
[0063] By setting the adjustment mechanism 22, the position of each laser generator 21 in the width direction of the substrate to be coated can be adjusted, which helps to make each laser generator 21 work with its corresponding reflector and reduce the difficulty of coating.
[0064] It should be noted that this utility model does not impose any restrictions on the specific structure of the adjustment mechanism 22. In practical applications, those skilled in the art can set the specific structure of the adjustment mechanism 22 according to actual needs. For example, when the laser generator 21 is small, the adjustment mechanism 22 can be configured as a second linear motor with multiple second movers, the laser generator 21 is mounted on the corresponding second mover, and the second stator of the second linear motor extends along the width direction of the substrate to be coated; or, when the laser generator 21 is large, the adjustment mechanism 22 includes multiple spaced second linear moving mechanisms, each extending along the width direction of the substrate to be coated, each second linear moving mechanism corresponding to one laser generator 21, and capable of driving its corresponding laser generator 21 to move along the width direction of the substrate to be coated. Such adjustments and changes to the specific structure of the adjustment mechanism 22 do not deviate from the basic principles of this utility model and should be limited to the protection scope of this utility model.
[0065] In a preferred embodiment, please refer to Figure 6 The laser coating equipment also includes a first vertical moving mechanism 6 installed inside the housing 1. The first fixing device 3 is connected to the first vertical moving mechanism 6, and the first vertical moving mechanism 6 is configured to drive the first fixing device 3 to move in the vertical direction.
[0066] By setting the first vertical moving mechanism 6 to drive the first fixing device 3 to move in the vertical direction, the height of the first fixing device 3 can be adjusted, thereby adjusting the distance between the target material and the substrate to be coated, which helps the equipment to be used for coating materials of different materials and thicknesses.
[0067] It should be noted that this utility model does not impose any restrictions on the specific structure of the first vertical moving mechanism 6. In practical applications, those skilled in the art can set the specific structure of the first vertical moving mechanism 6 according to actual needs, as long as the first vertical moving mechanism 6 can drive the first fixed device 3 to move in the vertical direction to change the height of the first fixed device 3. For example, the first vertical moving mechanism 6 can be set as a ball screw mechanism, or the first vertical moving mechanism 6 can be set as a linear sliding module, etc. Adjustments and changes to the specific structure of the first vertical moving mechanism 6 do not deviate from the basic principles of this utility model and should be limited to the protection scope of this utility model.
[0068] In a preferred embodiment, please continue reading Figure 6 The laser coating equipment also includes a second vertical moving mechanism 7 installed inside the housing 1. The second fixing device 4 is connected to the second vertical moving mechanism 7, and the second vertical moving mechanism 7 is configured to drive the second fixing device 4 to move in the vertical direction.
[0069] By setting a second vertical moving mechanism 7 to drive the second fixing device 4 to move in the vertical direction, the height position of the second fixing device 4 can be adjusted, thereby adjusting the distance between the target material and the substrate to be coated, which helps the equipment to be used for coating materials of different materials and thicknesses.
[0070] It should be noted that this utility model does not impose any restrictions on the specific structure of the second vertical moving mechanism 7. In practical applications, those skilled in the art can set the specific structure of the second vertical moving mechanism 7 according to actual needs, as long as the second vertical moving mechanism 7 can drive the second fixed device 4 to move in the vertical direction to change the height of the second fixed device 4. For example, the second vertical moving mechanism 7 can be set as a ball screw mechanism, or the second vertical moving mechanism 7 can be set as a linear sliding module, etc. Adjustments and changes to the specific structure of the second vertical moving mechanism 7 do not deviate from the basic principles of this utility model and should be limited to the protection scope of this utility model.
[0071] In a preferred embodiment, the first fixing device 3 and the second fixing device 4 are spaced apart by a first gap, which is 10cm to 20cm.
[0072] In a preferred embodiment, the reflective device 5 and the second fixing device 4 are spaced apart by a second distance, which is 10cm to 20cm.
[0073] In a preferred embodiment, please refer to Figure 1 The housing 1 is provided with an air outlet 12, which is connected to a vacuum pump (not shown in the figure) through a vacuum tube (not shown in the figure).
[0074] With the above setup, the vacuum pump can evacuate chamber 1, so that the coating process is carried out in a vacuum environment to avoid introducing impurity particles during the coating process, thereby ensuring the performance of the coated layer.
[0075] In a preferred embodiment, please refer to Figure 1 The housing 1 is equipped with a switch door 13, so as to provide the target material and the substrate to be coated into the housing 1 or to remove the target material and the substrate to be coated through the switch door 13.
[0076] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.
Claims
1. A laser coating equipment, characterized in that, The laser coating equipment includes a housing (1), a laser generator (2), and a first fixing device (3), a second fixing device (4), and a reflective device (5) installed inside the housing (1); The first fixing device (3) and the second fixing device (4) are arranged at intervals in the vertical direction, and the reflective device (5) is located on the side of the second fixing device (4) away from the first fixing device (3); The first fixing device (3) is used to clamp and fix the target material, the second fixing device (4) is used to clamp and fix the substrate to be coated, the laser generating device (2) is arranged toward the reflecting device (5) to be able to emit laser toward the reflecting device (5), the reflecting device (5) is arranged to receive the laser and reflect the laser so that the reflected laser passes through the substrate to be coated and irradiates the target material.
2. The laser coating equipment according to claim 1, characterized in that, The first fixing device (3) is located above the second fixing device (4), and the reflective device (5) is located below the second fixing device (4).
3. The laser coating equipment according to claim 2, characterized in that, The reflecting device (5) includes a plurality of mirror groups (51) spaced apart along the width direction of the substrate to be coated. The reflector assembly (51) includes a linear motion mechanism (511), a mirror mount (512), and a reflector (513). The reflector (513) is used to receive the laser and reflect it. The linear motion mechanism (511) is connected to the housing (1), and the mirror mount (512) is mounted on the linear motion mechanism (511). The reflector (513) is mounted on the mirror base (512) and can rotate relative to the mirror base (512) to adjust the reflection angle of the reflector (513). The linear movement mechanism (511) is configured to drive the mirror base (512) and the reflector (513) to move along the length direction of the substrate to be coated, so as to change the reflection position of the reflector (513) in the length direction of the substrate to be coated.
4. The laser coating equipment according to claim 3, characterized in that, The reflective device (5) further includes a linear motor (52). The stator (521) of the linear motor (52) is mounted on the bottom wall of the housing (1) and extends along the width direction of the substrate to be coated. A plurality of linear moving mechanisms (511) are respectively mounted on a plurality of moving parts (522) of the linear motor (52). The plurality of moving parts (522) are spaced apart along the width direction of the substrate to be coated.
5. The laser coating equipment according to claim 3, characterized in that, The laser generating device (2) includes a plurality of laser generators (21), the number of which is the same as the number of reflectors (513), wherein each laser generator (21) is positioned facing one of the reflectors (513) so as to be able to emit laser light toward the reflector (513).
6. The laser coating equipment according to claim 5, characterized in that, The laser generator (21) is located outside the housing (1), and the housing (1) has a transparent window (11) on the side close to the laser generator (21). The laser of the laser generator (21) can shine through the transparent window (11) onto the corresponding reflector (513).
7. The laser coating equipment according to claim 1, characterized in that, The laser coating equipment also includes a first vertical moving mechanism (6) installed in the housing (1), the first fixing device (3) is connected to the first vertical moving mechanism (6), and the first vertical moving mechanism (6) is configured to drive the first fixing device (3) to move in the vertical direction; And / or, the laser coating equipment further includes a second vertical moving mechanism (7) installed in the housing (1), the second fixing device (4) is connected to the second vertical moving mechanism (7), and the second vertical moving mechanism (7) is configured to drive the second fixing device (4) to move in the vertical direction.
8. The laser coating equipment according to claim 7, characterized in that, The first fixing device (3) and the second fixing device (4) are spaced by a first gap, which is 10cm to 20cm.
9. The laser coating equipment according to claim 7, characterized in that, The reflective device (5) and the second fixing device (4) are spaced by a second distance, which is 10cm to 20cm.
10. The laser coating equipment according to any one of claims 1 to 9, characterized in that, The housing (1) is provided with an air outlet (12), which is connected to a vacuum pump through a vacuum tube.