Visual monitoring device for atomic layer deposition reaction cavity

Abstract

The embodiment of the utility model discloses a visual monitoring device for an atomic layer deposition reaction cavity, and relates to the technical field of atomic layer deposition. The function of observing the reaction can be realized by simply modifying the existing atomic layer deposition reaction device, so that the reaction process of the atomic layer deposition reaction can be monitored in real time. The device is simple enough in structure, easy to use, low in implementation cost and low in transformation difficulty.

Description

Technical Field

[0001] This utility model relates to the field of atomic layer deposition technology, and in particular to a visual monitoring device for an atomic layer deposition reaction chamber. Background Technology

[0002] In recent years, with the rapid development of integrated circuit and semiconductor equipment manufacturing technologies, atomic layer deposition (ALD) technology has received widespread attention. During ALD, a complete chemical reaction is broken down into two half-reactions. The first half-reaction terminates only after all surface active sites are completely consumed, followed by the second half-reaction. This self-limiting chemical reaction mechanism not only allows for precise control of film thickness but also maintains good film uniformity on substrates with complex morphologies. Furthermore, due to its insensitivity to precursor overload, this technology exhibits extremely high repeatability. Therefore, ALD technology is of significant importance in the fields of integrated circuits, semiconductors, and sensors.

[0003] Atomic layer deposition (ALD) reactions typically occur in high-temperature, sealed vacuum, and corrosive environments, making real-time monitoring of the reaction process within the reaction chamber difficult. Therefore, it is necessary to design observation devices based on existing ALD apparatuses to achieve real-time monitoring of the ALD reaction process. Simultaneously, this observation device needs to be structurally simple and easy to use, thereby improving durability and avoiding excessive modification costs. Utility Model Content

[0004] The present invention provides a visual monitoring device for an atomic layer deposition reaction chamber, which is simple and easy to use. It can be easily modified based on existing atomic layer deposition reaction devices, and has low cost and low modification difficulty.

[0005] To achieve the above objectives, the embodiments of this utility model adopt the following technical solutions:

[0006] A visual monitoring device for an atomic layer deposition reaction chamber, the atomic layer deposition reaction chamber comprising: a reaction chamber (8) and a heating device (9) enclosing the reaction chamber (8); the visual monitoring device comprising: a motion feed module and a visual monitoring module;

[0007] The motion feed module includes: an X-axis component (1), a Y-axis component (2), and a Z-axis support platform (3), wherein the X-axis component (1) is mounted on the Z-axis support platform (3) and achieves precise movement control through rigid connection technology; the X-axis component (1) consists of a base and a column, wherein the column is perpendicular to the base, and the Y-axis component (2) is mounted on the column;

[0008] The Z-axis support platform (3) is mounted on the guide rail so that the Z-axis support platform (3) can move along the guide rail direction;

[0009] The visual monitoring module includes: a camera probe (4) and a display screen (5). The Y-axis component (2) extends a cantilever in the horizontal direction. The camera probe (4) is mounted on the cantilever of the Y-axis component (2). The shooting direction of the camera probe (4) is towards the reaction chamber (8).

[0010] The camera probe (4) is connected to the display screen (5) via a data cable.

[0011] The visual monitoring device for the atomic layer deposition (ALD) reaction chamber provided in this embodiment can be easily modified from existing ALD reaction devices to achieve the function of observing the reaction, thereby enabling real-time monitoring of the ALD reaction process. The device has a simple and easy-to-use structure, low implementation cost, and low modification difficulty. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0013] Figure 1 A schematic diagram of the device architecture provided for an embodiment of this utility model. Detailed Implementation

[0014] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The embodiments of this utility model will be described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model. Those skilled in the art will understand that, unless specifically stated otherwise, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms. It should be further understood that the word “comprising” as used in the specification of this utility model means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. It should be understood that when we say that an element is “connected” or “coupled” to another element, it can be directly connected or coupled to the other element, or there may be intermediate elements. Furthermore, “connected” or “coupled” as used herein can include wireless connections or couplings. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items. It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the meaning consistent with their meaning in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless defined as herein.

[0015] This utility model provides a visual monitoring device for an atomic layer deposition reaction chamber, such as... Figure 1 As shown, it includes:

[0016] The atomic layer deposition reaction chamber comprises: a reaction chamber (8) and a heating device (9) that surrounds the reaction chamber (8); the visual monitoring device comprises: a motion feed module and a visual monitoring module;

[0017] The motion feed module includes: an X-axis component (1), a Y-axis component (2), and a Z-axis support platform (3), wherein the X-axis component (1) is mounted on the Z-axis support platform (3) and achieves precise movement control through rigid connection technology; the X-axis component (1) consists of a base and a column.

[0018] The column is perpendicular to the base, and the Y-axis component (2) is mounted on the column; the Z-axis support platform (3) is mounted on the guide rail so that the Z-axis support platform (3) can move along the guide rail direction; the visual monitoring module includes: a camera probe (4) and a display screen (5), the Y-axis component (2) extends a cantilever in the horizontal direction, the camera probe (4) is mounted on the cantilever of the Y-axis component (2), and the shooting direction of the camera probe (4) is towards the reaction chamber (8); the camera probe (4) is connected to the display screen (5) through a data cable.

[0019] In this embodiment, the motion feed module consists of components on the X, Y, and Z axes. Specifically, the X-axis component is built on the Z-axis support platform, achieving precise linear movement relative to the Z-axis through a rigid connection. The Y-axis component is located above the X-axis support platform, achieving precise linear movement in the Y-axis direction through a rigid connection. The movement of the Z-axis support platform is based on a guide rail system, providing a stable trajectory for the slider and ensuring the accuracy of its linear motion. The two ends of the reaction chamber (8) are sealed by an inlet flange (6) and an outlet flange (7).

[0020] Specifically, the components of the atomic layer deposition reaction chamber also include: a sample tank (10), a pneumatic valve I (11) and a pneumatic valve II (12); the sample tank (10) is placed inside the reaction chamber (8), the first gas guide pipe and the second gas guide pipe are connected to the reaction chamber (8), and the pneumatic valve I (11) and the pneumatic valve II (12) are respectively installed on the first gas guide pipe and the second gas guide pipe.

[0021] The X-axis component (1) includes: an X-axis guide rail (1-1), an X-axis slider (1-2), an X-axis transmission component (1-3), an X-axis motor (1-4), and an X-axis transmission system (1-5). The X-axis motor (1-4) is connected to the X-axis transmission system (1-5) via a coupling, thereby driving the transmission system; the X-axis transmission system (1-5) uses a gear and rack mechanism to realize the movement of the X-axis slider (1-2). The X-axis slider (1-2) can move on the X-axis guide rail (1-1), which provides a stable motion trajectory for the X-axis slider.

[0022] The X-axis slider (1-2) and the X-axis transmission component (1-3) are connected by a connecting rod or a threaded rod. The X-axis guide rail (1-1) is used to guide the X-axis slider (1-2) to slide along the X-axis direction. The movement of the X-axis transmission component (1-3) is driven by the movement of the X-axis slider (1-2). The two are connected by a gear transmission mechanism.

[0023] The rotation of the gears in the X-axis motor (1-4) directly acts on the gears in the X-axis slider (1-2), thereby driving the X-axis slider (1-2) to move along the guide rail. The interaction and cooperation of the above components together constitute a complete X-axis motion control system, thus achieving high-precision positioning and motion functions. The driving methods for the Y-axis and Z-axis are similar.

[0024] The Y-axis component (2) includes: a Y-axis guide rail (2-1), a Y-axis slider (2-2), a Y-axis servo motor (2-3), a Y-axis transmission device (2-4), and a Y-axis bracket (2-5). The Y-axis guide rail (2-1) adopts a linear guide rail design and is fixed to the base of the Y-axis bracket (2-5). The Y-axis slider (2-2) fits tightly with the Y-axis guide rail (2-1) to facilitate smooth movement; the Y-axis guide rail (2-1) is made of high-strength material to withstand the load applied by the Y-axis slider (2-2) and other components. The movement of the Y-axis slider (2-2) is driven by the Y-axis servo motor (2-3), which converts the rotational motion into the linear motion of the slider through the Y-axis transmission device (2-4); the Y-axis transmission device (2-4) and the Y-axis slider (2-2) are connected by a ball screw drive, and the linear displacement of the Y-axis slider (2-2) along the Y-axis is achieved by rotating the ball screw. In the Y-axis component, the guide rail and slider form the basic structure, while the drive unit provides power and the transmission unit is responsible for motion conversion. The coordinated work of these components enables the camera probe to move precisely in the Y-axis direction.

[0025] In the preferred embodiment, the Y-axis guide rail (2-1) is made of chromium bearing steel GCr15.

[0026] The Z-axis support platform (3) includes: a Z-axis guide rail (3-1), a Z-axis slider (3-2), a Z-axis servo motor (3-3), and a Z-axis transmission device (3-4). The Z-axis slider (3-2) is in close contact with the Z-axis guide rail (3-1) to facilitate linear motion along the Z-axis guide rail (3-1). The Z-axis servo motor (3-3) serves as the driving source for Z-axis motion, transmitting power to the Z-axis slider (3-2) via the Z-axis transmission device (3-4). The Z-axis transmission device (3-4) uses a ball screw to drive the Z-axis slider (3-2) to move precisely along the Z-axis guide rail (3-1). The coordinated operation of these components enables precise displacement of the camera probe in the Z-axis direction.

[0027] In this embodiment, the components involving electric drive and electronic signals can all be existing equipment on the market. For example, the X-axis guide rail (1-1), Y-axis guide rail (2-1) and Z-axis guide rail (3-1) are HG20 linear guide rails from Wuxi Ruida Hengke Electromechanical Co., Ltd.

[0028] The X-axis slider (1-2), Y-axis slider (2-2), and Z-axis slider (3-2) are model HGW20CC (flange block) from Wuxi Ruida Hengke Electromechanical Co., Ltd.

[0029] The X-axis motor (1-4), Y-axis servo motor (2-3), and Z-axis servo motor (3-3) are Chuangwei 57 stepper motors from Changzhou Quanjin Electric Machinery Factory; the X-axis transmission system (1-5) and X-axis transmission components (1-3) are both transmission systems from Wenzhou Youge Transmission Machinery Equipment Co., Ltd., and the transmission components (1-3) can also be 1.5-die precision milled helical racks 17*17*1000 quenched and blackened from the same company.

[0030] The Y-axis transmission device (2-4) and Z-axis transmission device (3-4) are SFU1204_4 ball screws from Zhejiang Jingjiu Bearing Industry Co., Ltd.

[0031] The camera probe (4) is a D415 tracking camera, and the display screen (5) is a BenQ PD2705Q display.

[0032] It should be noted that all devices involving electronic information technology in this embodiment, such as the camera probe (4), the display screen (5), and the controller for controlling the XYZ axis servo motors, can adopt existing technologies and can be purchased directly from the market. The specific usage methods of these products are also provided by the product manufacturers with corresponding instruction manuals, programming instructions, etc., which are all existing technologies, and this embodiment directly utilizes these existing technologies. For example, by using the general control scheme provided by the servo motor manufacturer, the movement of the camera on the guide rail can achieve displacement of the Y axis, and the use of the bracket allows displacement of the Z axis and ensures its stable fixation. Adjusting the lower part of the X-axis component can achieve displacement of the X axis. That is, the movement and positioning control of the camera in the three-dimensional coordinate system can be achieved by using existing technical means. The motor drives the XYZ axis to perform linear motion, while the guide rail and slider undertake the task of supporting and guiding the movement of the camera probe to ensure its smooth displacement in three-dimensional space. The control of the XYZ axis enables the camera to be positioned in the three-dimensional coordinate system, ensuring that it can move accurately to the predetermined position. During the movement, the camera continuously shoots and transmits these images to the display screen in real time.

[0033] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to interchangeably. Each embodiment focuses on its differences from other embodiments. The above descriptions are merely specific implementations of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A visual monitoring device for an atomic layer deposition reaction chamber, characterized in that, The atomic layer deposition reaction chamber comprises: a reaction chamber (8) and a heating device (9) that surrounds the reaction chamber (8); the visual monitoring device comprises: a motion feed module and a visual monitoring module; The motion feed module includes: an X-axis component (1), a Y-axis component (2), and a Z-axis support platform (3), wherein the X-axis component (1) is mounted on the Z-axis support platform (3) and achieves precise movement control through rigid connection technology; the X-axis component (1) consists of a base and a column, wherein the column is perpendicular to the base and the Y-axis component (2) is mounted on the column; The Z-axis support platform (3) is mounted on the guide rail so that the Z-axis support platform (3) can move along the direction of the guide rail; The visual monitoring module includes: a camera probe (4) and a display screen (5). The Y-axis component (2) extends a cantilever in the horizontal direction. The camera probe (4) is mounted on the cantilever of the Y-axis component (2). The shooting direction of the camera probe (4) is towards the reaction chamber (8). The camera probe (4) is connected to the display screen (5) via a data cable.

2. The visual monitoring device for an atomic layer deposition reaction chamber according to claim 1, characterized in that, The atomic layer deposition reaction chamber also includes: a sample tank (10), a pneumatic valve I (11), and a pneumatic valve II (12). The sample tank (10) is placed inside the reaction chamber (8), and the first gas guide tube and the second gas guide tube are connected to the reaction chamber (8). Pneumatic valve I (11) and pneumatic valve II (12) are respectively installed on the first gas guide tube and the second gas guide tube.

3. The visual monitoring device for an atomic layer deposition reaction chamber according to claim 1, characterized in that, The X-axis component (1) includes: X-axis guide rail (1-1), X-axis slider (1-2), X-axis transmission component (1-3), X-axis motor (1-4), and X-axis transmission system (1-5).

4. The visual monitoring device for an atomic layer deposition reaction chamber according to claim 3, characterized in that, The X-axis motor (1-4) is connected to the X-axis transmission system (1-5) via a coupling, thereby driving the transmission system; The X-axis slider (1-2) is connected to the X-axis transmission component (1-3) via a connecting rod or a threaded rod. The X-axis guide rail (1-1) is used to guide the X-axis slider (1-2) to slide along the X-axis direction. The rotation of the gears of the X-axis motor (1-4) directly acts on the gears on the X-axis slider (1-2), thereby driving the X-axis slider (1-2) to move along the guide rail.

5. The visual monitoring device for an atomic layer deposition reaction chamber according to claim 1, characterized in that, The Y-axis component (2) includes: Y-axis guide rail (2-1), Y-axis slider (2-2), Y-axis servo motor (2-3), Y-axis transmission device (2-4), and Y-axis bracket (2-5).

6. The visual monitoring device for an atomic layer deposition reaction chamber according to claim 5, characterized in that, The Y-axis guide rail (2-1) adopts a linear guide rail design and is fixed to the base of the Y-axis bracket (2-5). The Y-axis slider (2-2) is closely matched with the Y-axis guide rail (2-1) to facilitate smooth movement. The Y-axis guide rail (2-1) is made of high-strength material; The movement of the Y-axis slider (2-2) is driven by the Y-axis servo motor (2-3), which converts the rotational motion into the linear motion of the slider through the Y-axis transmission device (2-4). The Y-axis transmission device (2-4) and the Y-axis slider (2-2) are connected by a ball screw transmission. The linear displacement of the Y-axis slider (2-2) along the Y-axis is achieved by rotating the ball screw.

7. The visual monitoring device for an atomic layer deposition reaction chamber according to claim 5, characterized in that, The Y-axis guide rail (2-1) is made of chromium bearing steel GCr15.

8. The visual monitoring device for an atomic layer deposition reaction chamber according to claim 1, characterized in that, The Z-axis support platform (3) includes: Z-axis guide rail (3-1), Z-axis slider (3-2), Z-axis servo motor (3-3), and Z-axis transmission device (3-4).

9. The visual monitoring device for an atomic layer deposition reaction chamber according to claim 8, characterized in that, The Z-axis slider (3-2) is in close contact with the Z-axis guide rail (3-1) so that the Z-axis slider (3-2) can move linearly along the Z-axis guide rail (3-1); The Z-axis servo motor (3-3) serves as the driving source for Z-axis motion, and transmits power to the Z-axis slider (3-2) through the Z-axis transmission device (3-4). The Z-axis transmission device (3-4) uses a ball screw, which drives the Z-axis slider (3-2) to move precisely along the Z-axis guide rail (3-1).

10. The visual monitoring device for an atomic layer deposition reaction chamber according to any one of claims 1-9, characterized in that, The X-axis guide rail (1-1), Y-axis guide rail (2-1), and Z-axis guide rail (3-1) are all HG20 linear guide rails. The model of the X-axis slider (1-2), Y-axis slider (2-2), and Z-axis slider (3-2) is HGW20CC (flange block); The X-axis motors (1-4), Y-axis servo motors (2-3), and Z-axis servo motors (3-3) are all Chuangwei 57 stepper motors. The Y-axis transmission device (2-4) and Z-axis transmission device (3-4) are model SFU1204_4 ball screws; The camera probe (4) is a D415 tracking camera, and the display screen (5) is a BenQ PD2705Q display.

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