Single crystal furnace thermal field piece placing device

Abstract

The utility model relates to the technical field of semiconductors, in particular to a single crystal furnace thermal field piece placing device which comprises a bottom frame, a supporting frame and a bracket, and the supporting frame is arranged on the bottom frame; the bracket is arranged on the bottom frame, and a groove is formed in the bracket; wherein the groove is used for supporting a supporting rod detached from the single crystal furnace, the supporting frame is used for supporting a heater detached from the single crystal furnace, and the bottom frame is used for supporting a crucible bottom material basin detached from the single crystal furnace. The placing device for the thermal field piece of the single crystal furnace can be used for placing a support rod, a heater and a crucible bottom material basin which are detached from the single crystal furnace at the same time, so that the carrying convenience degree of the detached thermal field piece is improved; in addition, the problem that the supporting rod rolls down during carrying can be solved, and the problem that the supporting rod is damaged or cracked in a hidden mode can be solved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically, to a device for arranging hot zone components in a single crystal furnace. Background Technology

[0002] The Czochralski method is one of the important methods for producing monocrystalline silicon; the Czochralski method requires a single crystal furnace. After running for a certain period of time (e.g., 360 hours), the single crystal furnace needs to be disassembled and cleaned in order to reliably reuse the single crystal furnace for the production of monocrystalline silicon.

[0003] The cleaning of the single crystal furnace after disassembly needs to be carried out in a special cleaning room. Therefore, it is necessary to move the heaters, support rods and crucible bottom trays of the single crystal furnace after disassembly.

[0004] However, when handling various hot zone components, the relevant technologies require the use of multiple placement devices to place each component individually, which makes the handling of hot zone components very inconvenient. Moreover, the placement devices provided by the relevant technologies are not easy to fix the placement position of the support rods, which can easily cause the support rods to roll off during handling, resulting in damage or hidden cracks to the support rods. Utility Model Content

[0005] The purpose of this utility model is to provide a single crystal furnace hot zone component placement device, which can be used to place the support rods, heaters and crucible bottom trays disassembled from the single crystal furnace at the same time, thereby improving the convenience of handling the disassembled hot zone components; moreover, it can improve the problem of the support rods rolling off during handling, which is beneficial to improving the problem of support rod damage or microcracks.

[0006] The embodiments of this utility model can be implemented as follows:

[0007] This utility model provides a device for arranging hot zone components in a single crystal furnace, including:

[0008] Base frame;

[0009] Support frame, the support frame is set on the bottom frame;

[0010] The bracket is mounted on the base frame and has a groove; wherein,

[0011] The groove is used to support the support rods removed from the single crystal furnace, the support frame is used to support the heaters removed from the single crystal furnace, and the bottom frame is used to support the crucible bottom trays removed from the single crystal furnace.

[0012] In an optional embodiment, the support frame includes a first bracket, a second bracket, and a third bracket, which are spaced apart from each other and are all used to support the heaters removed from the single crystal furnace.

[0013] In an optional embodiment, at least one of the first support, the second support, and the third support includes a support body and a support plate. The support plate is connected to the bottom frame through the support body and is used to support the heater that has been removed from the single crystal furnace.

[0014] In an optional embodiment, the surface of the support plate used to support the heater removed from the single crystal furnace is provided with a first heat insulation pad.

[0015] In an optional embodiment, the bracket passes through the support frame and is supported by the support frame.

[0016] In an alternative embodiment, at least one of the groove wall and the groove bottom is provided with a second heat insulation pad.

[0017] In an optional embodiment, the bottom frame is connected to a crossbeam for supporting the crucible bottom tray that has been removed from the single crystal furnace.

[0018] In an optional embodiment, the crossbeam is connected to a first heat-insulating and anti-slip sleeve.

[0019] In an optional embodiment, the single crystal furnace hot zone component placement device further includes a moving component, which is disposed on the side of the bottom frame away from the support frame.

[0020] In an optional embodiment, the single crystal furnace hot zone component placement device further includes a handle, which is connected to at least one of the base frame and the support frame, and the handle is connected to a second heat-insulating anti-slip sleeve.

[0021] The beneficial effects of the single crystal furnace hot zone component placement device according to this embodiment of the utility model include: the single crystal furnace hot zone component placement device provided by this utility model includes a base frame, a support frame, and a bracket. Both the support frame and the bracket are disposed on the base frame, and the bracket has a groove. The groove is used to support the support rods removed from the single crystal furnace, the support frame is used to support the heaters removed from the single crystal furnace, and the base frame is used to support the crucible bottom trays removed from the single crystal furnace. In this way, the single crystal furnace hot zone component placement device can simultaneously place the support rods, heaters, and crucible bottom trays removed from the single crystal furnace, thereby improving the ease of handling the disassembled hot zone components. Furthermore, the groove wall of the bracket can prevent the support rods from rolling, thus improving the problem of the support rods rolling off during handling and helping to mitigate the problem of damage or microcracks in the support rods. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of the single crystal furnace hot zone component placement device in an embodiment of this utility model.

[0024] Icons: 010-Single crystal furnace hot zone component placement device; 100-Bottom frame; 101-Crossbeam; 110-Frame rod; 120-Support rod; 210-First bracket; 211-Bracket body; 212-Support plate; 213-Vertical rod; 214-Horizontal rod; 220-Second bracket; 230-Third bracket; 300-Bracket; 301-Groove; 310-Side support; 320-Bottom support; 400-Moving component; 500-Handle. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0027] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0028] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0029] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0030] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0031] Please refer to Figure 1 This embodiment provides a single crystal furnace hot zone component placement device 010, which can be used to place hot zone components such as heaters, support rods and crucible bottom trays removed from the single crystal furnace, and can transport the hot zone components together with the single crystal furnace hot zone component placement device 010 to the cleaning chamber for cleaning.

[0032] The single crystal furnace hot zone component placement device 010 includes a base frame 100, a support frame, and a bracket 300. Both the support frame and the bracket 300 are mounted on the base frame 100, and the bracket 300 has a groove 301. The groove 301 supports the support rods removed from the single crystal furnace, the support frame supports the heaters removed from the single crystal furnace, and the base frame 100 supports the bottom material basins removed from the single crystal furnace. In this way, the single crystal furnace hot zone component placement device 010 can simultaneously hold the support rods, heaters, and bottom material basins removed from the single crystal furnace, thereby improving the ease of handling the disassembled hot zone components. Furthermore, the groove wall of the bracket 300 can prevent the support rods from rolling, thus improving the problem of support rods rolling off during handling and helping to mitigate the problem of support rod damage or microcracks.

[0033] Furthermore, the support frame includes a first bracket 210, a second bracket 220, and a third bracket 230, which are arranged in pairs at intervals and in a triangular pattern. All three brackets (210, 220, and 230) are used to support the heater disassembled from the single crystal furnace. By using these three brackets to support the heater, the heater can be supported directly on its main structure, rather than just on its legs. This increases the surface area of ​​the heater and reduces the risk of damage during transport.

[0034] Of course, in other embodiments, the support frame may also include other supports such as a fourth support, a fifth support, etc., for supporting the heater, which are not specifically limited here.

[0035] The structures of the first support 210, the second support 220, and the third support 230 can all be selected as needed. In this embodiment, the structures of the first support 210, the second support 220, and the third support 230 are similar. Taking the first support 210 as an example, the first support 210 includes a support body 211 and a support plate 212. The support plate 212 is connected to the bottom frame 100 through the support body 211. The support plate 212 is used to support the heater disassembled from the single crystal furnace. Supporting the heater with the support plate 212 can increase the stress-bearing area of ​​the heater and improve the problem of stress concentration and easy damage when the heater is supported by the support frame.

[0036] Furthermore, the support body 211 can be a frame structure, which helps to reduce the overall weight of the single crystal furnace hot zone component placement device 010 and reduce the difficulty of handling.

[0037] Optionally, the support body 211 includes a plurality of vertical rods 213 and a plurality of horizontal rods 214. One end of the plurality of vertical rods 213 is connected to the bottom frame 100, and any two vertical rods 213 are spaced apart. At least two adjacent vertical rods 213 are connected by at least one horizontal rod 214. The other end of the plurality of vertical rods 213 is connected to the support plate 212.

[0038] The connection methods of the vertical rod 213 to the bottom frame 100, the connection methods of the vertical rod 213 to the horizontal rod 214, and the connection methods of the vertical rod 213 to the support plate 212 include, but are not limited to, welding and integral molding.

[0039] The number of vertical rods 213 includes, but is not limited to, three, four, five, six, etc., and is not specifically limited here.

[0040] Optionally, the support plate 212, which supports the heater removed from the single crystal furnace, is provided with a first heat insulation pad, such as a PTFE plate. The first heat insulation pad can prevent the support plate 212 from being burned by the heater and can also mitigate the problem of the heater being bumped or knocked.

[0041] The first heat insulation pad is connected to the support plate 212 by means including but not limited to adhesive bonding or fasteners such as screws.

[0042] To reduce the overall size of the single crystal furnace hot zone placement device and achieve a more compact structural design; please refer to... Figure 1 The bracket 300 is inserted through the support frame and supported by the support frame.

[0043] Furthermore, the bracket 300 passes through the first support 210, and both ends of the bracket 300 in its length extension direction are supported by the first support 210 and the base frame 100, respectively. Specifically, one end of the bracket 300 in its length extension direction is connected to and supported by one of the crossbars 214 of the first support 210, while the other end of the bracket 300 in its length extension direction is connected to and supported by the base frame 100. The height of the end of the bracket 300 connected to the first support 210 is higher than the height of the end of the bracket 300 connected to the base frame 100. Both the bracket 300 and the groove 301 provided in the bracket 300 are inclined. This arrangement ensures the structural stability of the bracket 300 and improves the stability of the support rod placed in the groove 301.

[0044] Optionally, the bracket 300 includes a side support 310 and a bottom support 320. The side support 310 is provided with a groove 301, and the bottom support 320 is connected to one end of the side support 310 along its length. The connection between the side support 310 and the bottom support 320 is connected to and supported by the bottom frame 100. The side support 310 passes between at least two spaced vertical bars 213 of the first support 210, and the end of the side support 310 away from the bottom support 320 is connected to the horizontal bar 214 of the first support 210. When the support rod is placed in the groove 301, the support rod is supported by both the side support 310 and the bottom support 320, and one end of the support rod along its length is supported by the bottom support 320. This ensures the stability of the support rod when placed in the bracket 300.

[0045] The connection methods between the base support 320 and the side support 310 include, but are not limited to, welding and integral molding.

[0046] Optionally, at least one of the groove wall and the groove bottom of the groove 301 is provided with a second heat insulation pad, that is, at least one of the side of the side support 310 supporting the support rod and the side of the bottom support 320 supporting the support rod is provided with a second heat insulation pad, such as a PTFE plate; in this way, the side support 310 or the bottom support 320 can be prevented from being burned by the support rod, and the second heat insulation pad can be used to improve the problem of the support rod being bumped.

[0047] In this embodiment, both the side support portion 310 and the bottom support portion 320 are provided with a second heat insulation pad. In other embodiments, the second heat insulation pad may be provided only in the side support portion 310 or the bottom support portion 320.

[0048] To further reduce the overall weight of the single crystal furnace hot zone component placement device 010, the bottom frame 100 of this embodiment includes four side frame rods 110 connected in sequence.

[0049] To improve the structural stability of the base frame 100, the base frame 100 also includes two support rods 120. The two ends of one support rod 120 are connected to two oppositely distributed side frame rods 110, and the two ends of the other support rod 120 are connected to two other oppositely distributed side frame rods 110, and the two support rods 120 are connected to each other.

[0050] Of course, in other embodiments, the number of frame rods 110 and support rods 120 can be increased or decreased as needed.

[0051] Furthermore, the base frame 100 is connected to a crossbeam 101 for supporting the crucible bottom tray removed from the single crystal furnace. Specifically, the base frame 100 has a pair of relatively distributed side frame bars 110. A first support 210 and a third support 230 are distributed close to one of the side frame bars 110, and a second support 220 is distributed close to the other side of the side frame bar 110, forming a triangular distribution with the first support 210 and the third support 230. There is a space between the second support 220 and the first support 210. The crossbeam 101 connects to two adjacent side frame bars 110 in this space. The crossbeam 101, the two side frame bars 110 connected to the crossbeam 101, and the two support bars 120 can be used together to support the crucible bottom tray removed from the single crystal furnace. In this way, the stability of the crucible bottom tray placed by the single crystal furnace hot zone component placement device 010 is improved, and the overall weight of the single crystal furnace hot zone component placement device 010 is reduced, making it easier to transport.

[0052] It should be noted that each of the vertical rods 213 of the first bracket 210, the second bracket 220 and the third bracket 230 can be connected to the frame rod 110 or the support rod 120 as needed according to the distribution. For example, two of the four vertical rods 213 of the first bracket 210 are connected to the same frame rod 110, another vertical rod 213 is connected to the connection between one of the support rods 120 and another frame rod 110, and another vertical rod 213 is connected to the connection between two support rods 120.

[0053] It should also be noted that the connection methods between the frame rods 110, the connection methods between the frame rods 110 and the support rods 120, and the connection methods between the support rods 120 can all be welding, integral molding, or connection by fasteners such as bolts, etc., and no specific limitation is made here.

[0054] Optionally, the crossbeam 101 is connected to a first heat-insulating and anti-slip sleeve; this can improve the stability of the bottom material basin placed on the bottom frame 100 and reduce heat damage.

[0055] Please refer to Figure 1The single crystal furnace hot zone component placement device 010 in this embodiment also includes a moving component 400, which is disposed on the side of the bottom frame 100 away from the support frame. The moving component 400 includes, but is not limited to, moving rollers. By providing the moving component 400, the convenience and labor-saving of handling hot zone components using the single crystal furnace hot zone component placement device 010 can be improved.

[0056] Optionally, the aforementioned movable roller is a roller with a shock absorber and a locking brake. The shock absorber can provide cushioning when the road surface is uneven, thereby improving the problem of thermal damage caused by bumps. The locking brake can lock the roller to prevent slippage and improve the collision problem caused by slippage.

[0057] Optionally, the single crystal furnace hot zone component placement device 010 further includes a handle 500, which is connected to at least one of the base frame 100 and the support frame, and the handle 500 is connected to a second heat-insulating and anti-slip sleeve. The handle 500 improves the convenience of handling, and the second heat-insulating and anti-slip sleeve can both insulate against heat to prevent users from being burned and prevent slipping, further improving the convenience and labor-saving of handling.

[0058] Please refer to Figure 1 In this embodiment, the handle 500 is connected to both the first bracket 210 and the second bracket 220 to improve the stability and reliability of the handling.

[0059] In summary, the single crystal furnace hot zone component placement device 010 of this utility model can be used to place the support rods, heaters and crucible bottom trays disassembled from the single crystal furnace at the same time, thereby improving the convenience of handling the disassembled hot zone components; moreover, it can improve the problem of the support rods rolling off during handling, which is beneficial to improving the problem of support rod damage or microcracks.

[0060] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A device for arranging components in a single crystal furnace's thermal field, characterized in that, include: Base frame (100); A support frame is disposed on the bottom frame (100). A bracket (300) is disposed on the base frame (100), and the bracket (300) is provided with a groove (301); wherein, The groove (301) is used to support the support rod removed from the single crystal furnace, the support frame is used to support the heater removed from the single crystal furnace, and the bottom frame (100) is used to support the bottom material basin removed from the single crystal furnace. The support frame includes a first support (210), a second support (220) and a third support (230). The first support (210), the second support (220) and the third support (230) are distributed in pairs at intervals in a triangular arrangement, and all are used to support the heaters disassembled from the single crystal furnace. At least one of the first support (210), the second support (220) and the third support (230) includes a support body (211) and a support plate (212). The support plate (212) is connected to the bottom frame (100) through the support body (211). The support plate (212) is used to support the heater removed from the single crystal furnace. The support plate (212) is used to support the surface of the heater that has been removed from the single crystal furnace and is provided with a first heat insulation pad.

2. The single crystal furnace hot zone component placement device according to claim 1, characterized in that, The bracket (300) passes through the support frame and is supported by the support frame.

3. The single crystal furnace hot zone component placement device according to claim 2, characterized in that, At least one of the groove wall and the bottom of the groove (301) is provided with a second heat insulation pad.

4. The single crystal furnace hot zone component placement device according to claim 1, characterized in that, The bottom frame (100) is connected to a crossbeam (101) for supporting the crucible bottom basin that has been removed from the single crystal furnace.

5. The single crystal furnace hot zone component placement device according to claim 4, characterized in that, The crossbeam (101) is connected to a first heat-insulating and anti-slip sleeve.

6. The single crystal furnace hot zone component placement device according to claim 1, characterized in that, The single crystal furnace hot zone component placement device also includes a moving component (400), which is located on the side of the bottom frame (100) away from the support frame.

7. The single crystal furnace hot zone component placement device according to claim 1, characterized in that, The single crystal furnace hot zone component placement device also includes a handle (500), which is connected to at least one of the bottom frame (100) and the support frame, and the handle (500) is connected to a second heat-insulating and anti-slip sleeve.

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