Isolation device for heater of single crystal furnace

Abstract

The utility model relates to a single crystal furnace heater isolation device which comprises a main heating assembly, the main heating assembly comprises a main heater and first fixing supporting legs, and the inner side of the main heater is symmetrically and fixedly connected with the first fixing supporting legs; and the auxiliary heating assembly comprises an auxiliary heater and U-shaped structures, the two sides of the outer ring of the auxiliary heater are each fixedly connected with one U-shaped structure, and the bottom ends of the U-shaped structures are located below the first fixing supporting legs. The main heating assembly and the U-shaped structure are separated through the isolation assembly, the deformed U-shaped structure is prevented from making contact with the main heating assembly, then arc discharge and ignition accidents are prevented, and therefore the safety of the device is greatly improved.

Description

Technical Field

[0001] This invention belongs to the field of heater isolation devices, specifically a single crystal furnace heater isolation device. Background Technology

[0002] The novel heater system for single-crystal furnaces is a combination of a main heater and an auxiliary heater. The main heater's heating zone is located on the furnace side wall, primarily providing heat to the upper-middle area of ​​the crucible side wall via thermal radiation, and then conducting heat to the upper-middle area of ​​the crucible side wall via heat transfer. The auxiliary heater is located below the main heater, primarily providing heat to the lower-middle area of ​​the crucible side wall via thermal radiation, and then conducting heat to the lower-middle area of ​​the crucible side wall via heat transfer. Ultimately, this system effectively melts the silicon material during the melting process and dynamically stabilizes the temperature gradient during the growth stage.

[0003] Due to the positions of the heater and electrodes, the auxiliary heater needs to have a graphite connecting structure to bypass the main heater structure, thus forming a U-shaped structure. The U-shaped structure is the weakest point of the overall structure. During use, the U-shaped structure is prone to deformation and close to the main heater, furnace bottom, insulation barrel, electrodes, etc., causing accidents such as arcing and sparking, damaging the heater, and shutting down the furnace. Therefore, a single crystal furnace heater isolation device is proposed. Utility Model Content

[0004] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the invention.

[0005] Given the following technical problems in the existing technology: the U-shaped structure is the weakest point of the overall structure. During use, the U-shaped structure is prone to deformation and close to the main heater, furnace bottom, insulation barrel, electrodes, etc., causing accidents such as arcing and sparking, damaging the heater, and shutting down the furnace.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution: an isolation device for a single crystal furnace heater, comprising,

[0007] The main heating assembly includes a main heater and a fixed support leg. The fixed support leg is symmetrically fixedly connected to the inner side of the main heater.

[0008] A secondary heating assembly, comprising an auxiliary heater and a U-shaped structure, wherein a U-shaped structure is fixedly connected to each side of the outer ring of the auxiliary heater, and the bottom end of the U-shaped structure is located below the first fixed support leg;

[0009] The U-shaped structure is connected to an isolation component, which includes an upper isolation block, a lower isolation block, a side groove, a connecting bolt, a connecting plate, a connecting groove, and a mating groove. The upper and lower isolation blocks are joined together vertically. The bottom ends of the upper and lower isolation blocks are recessed on both sides, and the connecting groove and mating groove are recessed on both sides. A connecting bolt is provided on the mating groove. The connecting bolt on the upper isolation block is inserted into the connecting groove on the lower isolation block, and the connecting groove on the upper isolation block is sleeved onto the connecting bolt on the lower isolation block. The side of the mating groove is recessed. The bottom of the connecting plate is inserted into the side groove in the lower isolation block, and the top of the connecting plate is inserted into the side groove in the upper isolation block.

[0010] As a preferred technical solution for the isolation device of a single crystal furnace heater, the connecting plate is made of silicon nitride ceramic, and the length of the connecting plate is 1.8 times the length of the side groove;

[0011] The side groove and connecting plate work together to enhance the connection strength between the upper and lower isolation blocks.

[0012] As a preferred technical solution for the isolation device of a single crystal furnace heater, the auxiliary heating component further includes two fixed supports, and two fixed supports are symmetrically installed on the inner ring of the auxiliary heater;

[0013] The second fixed support leg facilitates the fixing of the auxiliary heating component.

[0014] It includes a heat insulation cylinder, and a furnace bottom heat insulation layer is provided at the bottom of the inner side of the heat insulation cylinder. Electrodes are provided on the furnace bottom heat insulation layer and the electrodes are connected to the main heating component.

[0015] As a preferred technical solution for a single crystal furnace heater isolation device, the crucible is located inside the auxiliary heating assembly;

[0016] Both the main heating element and the auxiliary heating element are used to heat the crucible.

[0017] The beneficial effects of the single crystal furnace heater isolation device of the present invention are as follows: by using the isolation component to separate the main heating component and the U-shaped structure, the deformed U-shaped structure is prevented from contacting the main heating component, thereby preventing arcing and sparking accidents, and thus greatly improving the safety of the device. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0019] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0020] Figure 2 This is a cross-sectional view of the isolation component of the present invention;

[0021] Figure 3 This is a schematic diagram of the side structure of the lower isolation block of the present invention;

[0022] Figure 4 For the present invention Figure 2 A magnified schematic diagram of part A in the middle section;

[0023] Figure 5 This is a front structural diagram of the auxiliary heating component of the present invention;

[0024] Figure 6 This is a side view of the auxiliary heating component of the present invention;

[0025] Figure 7 This is a top view of the auxiliary heating component of the present invention;

[0026] Figure 8 This is a three-dimensional structural diagram of the isolation component of the present invention;

[0027] Figure 9 This is a three-dimensional structural diagram of the main heating component of the present invention.

[0028] Reference numerals: 100, Main heating assembly; 101, Main heater; 102, Fixed support leg one; 200, Secondary heating assembly; 201, Auxiliary heater; 202, Fixed support leg two; 203, U-shaped structure; 300, Isolation assembly; 301, Upper isolation block; 302, Lower isolation block; 303, Side groove; 304, Connecting bolt; 305, Connecting plate; 306, Connecting groove; 307, Fitting groove; 400, Insulation cylinder; 500, Electrode; 600, Furnace bottom insulation layer. Detailed Implementation

[0029] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0030] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0031] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0032] Secondly, the present invention is described in detail with reference to the schematic diagrams. When detailing the embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In addition, actual fabrication should include three-dimensional spatial dimensions of length, width, and depth.

[0033] like Figures 1-9 As shown, the present invention proposes an isolation device for a single crystal furnace heater, comprising,

[0034] The main heating assembly 100 includes a main heater 101 and a fixed support leg 102. The fixed support leg 102 is symmetrically fixedly connected to the inner side of the main heater 101.

[0035] Auxiliary heating component 200, which includes auxiliary heater 201 and U-shaped structure 203. A U-shaped structure 203 is fixedly connected to each side of the outer ring of the auxiliary heater 201. The bottom end of the U-shaped structure 203 is located below the fixed support leg 102.

[0036] The U-shaped structure 203 is connected to the isolation component 300. The isolation component 300 includes an upper isolation block 301, a lower isolation block 302, a side groove 303, a connecting bolt 304, a connecting plate 305, a connecting groove 306, and a mating groove 307. The upper isolation block 301 and the lower isolation block 302 are joined vertically. The bottom ends of the upper isolation block 301 and the bottom ends of the lower isolation block 302 are recessed on both sides by the connecting groove 306 and the mating groove 307. The mating groove 307 is provided with... The connecting bolt 304 on the upper isolation block 301 is inserted into the connecting groove 306 on the lower isolation block 302. The connecting groove 306 on the upper isolation block 301 is sleeved onto the connecting bolt 304 on the lower isolation block 302. A side groove 303 is recessed on the side of the mating groove 307. The bottom of the connecting plate 305 is inserted into the side groove 303 in the lower isolation block 302, and the top of the connecting plate 305 is inserted into the side groove 303 in the upper isolation block 301.

[0037] The connecting plate 305 is made of silicon nitride ceramic, and the length of the connecting plate 305 is 1.8 times the length of the side groove 303;

[0038] The side groove 303 and the connecting plate 305 work together to enhance the connection strength between the upper isolation block 301 and the lower isolation block 302.

[0039] The auxiliary heating assembly 200 also includes a second fixed support leg 202, and two second fixed supports 202 are symmetrically installed on the inner ring of the auxiliary heater 201;

[0040] Fixed support foot 202 facilitates the fixing of auxiliary heating component 200.

[0041] The crucible 400 is located inside the auxiliary heating assembly 200;

[0042] Both the main heating assembly 100 and the auxiliary heating assembly 200 are used to heat the crucible 400.

[0043] Heating wires are installed inside the main heater 101 and the auxiliary heater 201.

[0044] It includes a heat insulation cylinder 400, and a furnace bottom heat insulation layer 600 is provided on the bottom of the inner side of the heat insulation cylinder 400. An electrode 500 is provided on the furnace bottom heat insulation layer 600, and the electrode 500 is connected to the main heating component 100.

[0045] The specific implementation method is as follows: the auxiliary heating component 200 and the main heating component 100 are sequentially sleeved on the outside of the crucible 400, and then the isolation component 300 is installed on the U-shaped structure 203, so that the U-shaped structure 203 is separated from the main heater 101 and the fixed support leg 102.

[0046] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0047] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. An isolation device for a single crystal furnace heater, characterized in that: include, The main heating assembly (100) includes a main heater (101), and a fixed support leg (102) is symmetrically fixedly connected to the inner side of the main heater (101). The auxiliary heating assembly (200) includes an auxiliary heater (201). A U-shaped structure (203) is fixedly connected to both sides of the outer ring of the auxiliary heater (201). The bottom end of the U-shaped structure (203) is located below the fixed support leg (102). The U-shaped structure (203) is connected to the isolation component (300). The isolation component (300) includes an upper isolation block (301), and the upper isolation block (301) and the lower isolation block (302) are connected vertically. The bottom end of the upper isolation block (301) and the bottom end of the lower isolation block (302) are recessed on both sides of the connecting groove (306) and the mating groove (307). The mating groove (307) is provided with a connecting bolt (304). The connecting bolt (304) on the upper isolation block (301) is inserted into the connecting groove (306) on the lower isolation block (302). The connecting groove (306) on the upper isolation block (301) is fitted with the connecting bolt (304) on the lower isolation block (302). The side groove (303) is recessed on the side of the mating groove (307). The bottom of the connecting plate (305) is inserted into the side groove (303) in the lower isolation block (302), and the top of the connecting plate (305) is inserted into the side groove (303) in the upper isolation block (301).

2. The isolation device for a single crystal furnace heater according to claim 1, characterized in that: The connecting plate (305) is made of silicon nitride ceramic, and the length of the connecting plate (305) is 1.8 times the length of the side groove (303).

3. The isolation device for a single crystal furnace heater according to claim 1, characterized in that: The auxiliary heating assembly (200) also includes two fixed support legs (202), and two fixed support legs (202) are symmetrically installed on the inner ring of the auxiliary heater (201).

4. The isolation device for a single crystal furnace heater according to claim 1, characterized in that: The crucible (400) is located inside the auxiliary heating assembly (200).

5. The isolation device for a single crystal furnace heater according to claim 1, characterized in that: It includes a heat insulation cylinder (400), and a furnace bottom heat insulation layer (600) is provided at the bottom of the inner side of the heat insulation cylinder (400). An electrode (500) is provided on the furnace bottom heat insulation layer (600), and the electrode (500) is connected to (100).

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