Photomask substrate performance testing device
By designing a photomask substrate performance testing device with a black base plate, lighting mechanism, and suspension mechanism, the device automatically adjusts the substrate position and angle, solving the problems of low efficiency and poor accuracy in existing technologies, and achieving efficient and accurate testing results.
Patent Information
- Application Number
- CN202520010724.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-03
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2035-01-03
AI Technical Summary
Existing photomask substrate suspension testing is inefficient and inaccurate. Hand-held substrate adjustment makes it difficult to accurately control the detection spacing, affecting the detection effect.
A photomask substrate performance testing device is adopted, which includes a black base plate, an illumination mechanism, and a suspension mechanism. The suspension mechanism automatically adjusts the position and angle of the substrate, and the position of the test lamp is adjusted to achieve accurate testing.
It improves the accuracy and efficiency of photomask substrate inspection, adapts to the optimal illumination distance for substrates of different sizes, and meets actual testing needs.
Smart Images
Figure CN223841790U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of photomask substrate technology, specifically to a photomask substrate performance testing device. Background Technology
[0002] Photomask substrates require high performance in terms of light transmittance and stability. One aspect of performance testing is the suspension test, where the substrate is suspended below a test lamp and above a black background. The angle and position of the substrate are continuously adjusted to observe its surface for defects, ensuring high light transmittance. Currently, suspension tests are mostly conducted by an inspector holding the substrate and adjusting its angle and position to find the optimal location for observing foreign objects. However, this method is time-consuming and labor-intensive. Furthermore, accurately determining the optimal detection distance between the substrate, the black background, and the test lamp by hand is difficult, resulting in insufficient precision and affecting the testing results. Utility Model Content
[0003] Therefore, it is necessary to provide a photomask substrate performance testing device to address the problems of low efficiency and poor accuracy in suspended handheld substrate testing.
[0004] To achieve the above objectives, the present invention adopts the following technical solution:
[0005] A photomask substrate performance testing device for performing suspension testing on a photomask substrate includes a black base plate, an illumination mechanism, and a suspension mechanism.
[0006] The lighting mechanism includes a support frame and a test lamp; the support frame is mounted on the side wall of the black base plate, and the test lamp is mounted on the top of the support frame, with the light source of the test lamp facing the black base plate.
[0007] The suspension mechanism includes a linear slide module, forward and reverse motors, a fixed clamping plate, and a movable clamping plate. The linear slide module is installed at the longitudinal support part of the support frame. The forward and reverse motors are installed at the movable end of the linear slide module. The movable clamping plate is movably disposed inside the fixed clamping plate, and the two are located in the longitudinal gap between the test lamp and the black base plate to clamp the photomask substrate. The output shaft of the forward and reverse motors is connected to the fixed clamping plate to drive the fixed clamping plate and the movable clamping plate to rotate longitudinally.
[0008] Furthermore, the movable clamping plate is slidably disposed inside the fixed clamping plate, and a first screw is movably connected to the inner side of the fixed clamping plate. The axial direction of the first screw is parallel to the sliding direction of the movable clamping plate, and one end of the first screw is connected to the output shaft of the drive motor. The drive motor is installed on the outer side of the fixed clamping plate, and the movable clamping plate is screwed to the first screw.
[0009] Furthermore, the movable clamping plate is provided with a limiting protrusion at the inner end of the fixed clamping plate, and a limiting groove adapted to the limiting protrusion is provided on the inner side of the fixed clamping plate.
[0010] Furthermore, the movable clamping plate is slidably disposed inside the fixed clamping plate, and a transverse telescopic cylinder is installed on the fixed clamping plate. The movable end of the transverse telescopic cylinder is connected to the movable clamping plate, and the extension and retraction direction of the transverse telescopic cylinder is parallel to the sliding direction of the movable clamping plate.
[0011] Furthermore, flexible pads are provided on the inner sides of both the fixed clamp and the movable clamp.
[0012] Furthermore, the inner sides of the fixed clamp and the movable clamp are provided with limiting grooves that are adapted to the photomask substrate.
[0013] Furthermore, the top of the test lamp is fixed to the bottom of the second screw, the top of the second screw passes through the support frame and extends above the support frame, and a limit nut is screwed onto the outer surface of the second screw, with the limit nut located at the top of the support frame.
[0014] Furthermore, a longitudinal telescopic cylinder is fixed to the top of the support frame, and the movable end of the longitudinal telescopic cylinder passes through the support frame and is connected to the top of the test lamp.
[0015] Furthermore, the support frame adopts a longitudinal telescopic bracket, the test lamp is installed on the movable part of the longitudinal telescopic bracket, and the linear slide module is installed on the fixed part of the longitudinal telescopic bracket.
[0016] Furthermore, the linear slide module is longitudinally slidably mounted on the support frame.
[0017] Compared with the prior art, the beneficial effects of this utility model include:
[0018] 1. This utility model uses a suspension mechanism to suspend the photomask substrate between a black base plate and an illumination mechanism, and makes corresponding position and angle adjustments, which makes it convenient for inspectors to observe defects or foreign objects on the surface of the photomask substrate, thereby improving the accuracy and efficiency of testing.
[0019] 2. This utility model can meet the optimal illumination distance for photomask substrates of different sizes by adjusting the longitudinal relative position of the test lamp, thereby meeting the actual testing requirements. Attached Figure Description
[0020] The disclosure of this utility model is illustrated with reference to the accompanying drawings. It should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. In the drawings, the same reference numerals are used to refer to the same parts. Wherein:
[0021] Figure 1 This is a perspective view of a photomask substrate performance testing device described in Embodiment 1 of this utility model;
[0022] Figure 2 For based on Figure 1Another perspective view of a photomask substrate performance testing device;
[0023] Figure 3 This is a perspective view of a photomask substrate performance testing device described in Example 2;
[0024] Figure 4 This is a perspective view of a photomask substrate performance testing device described in Example 5.
[0025] The diagram is labeled as follows: 1. Black base plate; 2. Lighting mechanism; 21. Support frame; 22. Test light; 23. Second screw; 24. Limit nut; 3. Suspension mechanism; 31. Linear slide module; 32. Forward and reverse motor; 33. Fixed clamping plate; 34. Movable clamping plate; 35. First screw; 36. Drive motor; 37. Lateral telescopic cylinder. Detailed Implementation
[0026] It is readily understood that, based on the technical solution of this utility model, those skilled in the art can propose various interchangeable structural methods and implementations without altering the essential spirit of this utility model. Therefore, the following detailed embodiments and accompanying drawings are merely illustrative descriptions of the technical solution of this utility model and should not be considered as the entirety of this utility model or as limitations or restrictions on the technical solution of this utility model.
[0027] Example 1
[0028] Please see Figure 1 and Figure 2 This embodiment introduces a photomask substrate performance testing device, mainly composed of a black base plate 1, an illumination mechanism 2, and a suspension mechanism 3. The illumination mechanism 2 includes a support frame 21 and a test lamp 22. The support frame 21 consists of a longitudinal support portion and a transverse support portion. The bottom end of the longitudinal support portion is connected to the black base plate 1, and the transverse support portion is located at the top end of the longitudinal support portion and directly above the black base plate 1. The test lamp 22 is mounted on the transverse support portion, and the light-emitting part of the test lamp 22 faces the black base plate 1.
[0029] To allow for longitudinal position adjustment of the test lamp 22, a hole is provided in the transverse support portion of the support frame 21. The bottom end of the second screw 23 is fixed to the test lamp 22, and the other end passes through the transverse support portion and is located above it. A limiting nut 24 is screwed onto the second screw 23. Preferably, there are two limiting nuts 24, located above and below the transverse support portion respectively, to limit the relative position of the second screw 23 and the transverse support portion. When it is necessary to adjust the longitudinal position of the test lamp 22, simply loosen the limiting nut 24.
[0030] like Figure 2As shown, the suspension mechanism 3 includes a linear slide module 31, a forward and reverse motor 32, a fixed clamping plate 33, and a movable clamping plate 34. The linear slide module 31 is installed at the longitudinal support portion of the support frame 21, and is located within the longitudinal gap between the test lamp 22 and the black base plate 1. The forward and reverse motor 32 is installed at the movable end of the linear slide module 31. To ensure that the fixed clamping plate 33 and the movable clamping plate 34 are within the illumination range below the test lamp 22, the forward and reverse motor 32 can be connected to the movable end of the linear slide module 31 using an auxiliary bracket. Furthermore, the output shaft of the forward and reverse motor 32 is connected to the fixed clamping plate 33. Since the fixed clamping plate 33 and the movable clamping plate 34 are located on the same plane and the movable clamping plate 34 is movably mounted on the fixed clamping plate 33, the forward and reverse motor 32 can synchronously drive the fixed clamping plate 33 and the movable clamping plate 34 to rotate, thereby driving the photomask substrate held by them to rotate and achieving angle adjustment.
[0031] The movable clamping plate 34 slides within the fixed clamping plate 33 via a first screw 35 and a drive motor 36, thereby adjusting the distance between their clamping surfaces. The first screw 35 is movably connected to the inner side of the fixed clamping plate 33, and the movable clamping plate 34 is screwed to the first screw 35. Rotation of the first screw 35 adjusts the clamping distance between the movable clamping plate 34 and the fixed clamping plate 33, thus accommodating photomask substrates of different sizes. The drive motor 36 is mounted on the fixed clamping plate 33 to drive the first screw 35.
[0032] To ensure that the movable clamping plate 34 does not rotate with the first screw 35, a limiting protrusion is provided on the inner end of the movable clamping plate 34 located on the fixed clamping plate 33. A limiting groove adapted to the limiting protrusion is formed on the inner side of the fixed clamping plate 33, with the limiting protrusion located within the limiting groove to limit the movable clamping plate 34, ensuring that the movable clamping plate 34 only moves and does not rotate. In addition, to better clamp the photomask substrate, flexible pads are provided on the inner sides of the fixed clamping plate 33 and the movable clamping plate 34 to reduce damage to the photomask substrate caused by clamping. A limiting groove adapted to the photomask substrate can also be formed on the inner sides of the fixed clamping plate 33 and the movable clamping plate 34, with the edge of the photomask substrate located within the limiting groove, reducing the possibility of the photomask substrate falling off the fixed clamping plate 33 and the movable clamping plate 34.
[0033] When testing is required, the distance between the test lamp 22 and the black base plate 1 is adjusted in advance. Then, the photomask substrate is placed between the fixed clamping plate 33 and the movable clamping plate 34 so that the photomask substrate is clamped. Then, the horizontal position is adjusted by the linear slide module 31 and the angle is adjusted by the forward and reverse motors 32.
[0034] In this embodiment, the photomask substrate is suspended between the black base plate 1 and the illumination mechanism 2 by the suspension mechanism 3, and the position and angle are adjusted accordingly. This facilitates the inspector's observation of defects or foreign objects on the surface of the photomask substrate, improving the accuracy and efficiency of the test.
[0035] Example 2
[0036] like Figure 3 As shown, this embodiment introduces a photomask substrate performance testing device, which has a basically the same structure as the photomask substrate performance testing device introduced in Embodiment 1. The difference is that this embodiment uses a longitudinal telescopic cylinder connected to the test lamp 22. The fixed end of the longitudinal telescopic cylinder is connected to the transverse support part of the support frame 21, and the movable end is located below the transverse support part and connected to the top of the test lamp 22. The extension or retraction of the longitudinal telescopic cylinder adjusts the longitudinal position of the test lamp 22.
[0037] This embodiment has the same beneficial effects as Embodiment 1.
[0038] Example 3
[0039] This embodiment introduces a photomask substrate performance testing device, which has a basically the same structure as the photomask substrate performance testing device introduced in Embodiment 1. The difference is that the support frame 21 in this embodiment adopts a longitudinal telescopic bracket, which can be an electrically operated telescopic bracket or a manually operated telescopic bracket. The test lamp 22 is installed on the movable part of the longitudinal telescopic bracket, and the linear slide module 31 is installed on the fixed part of the longitudinal telescopic bracket. The longitudinal position of the test lamp 22 installed on the support frame 21 can be adjusted by the longitudinal movement of the longitudinal telescopic bracket.
[0040] This embodiment has the same beneficial effects as Embodiment 1.
[0041] Example 4
[0042] This embodiment introduces a photomask substrate performance testing device, which is basically the same in structure as the photomask substrate performance testing device introduced in Embodiment 1. The difference is that in this embodiment, the linear slide module 31 is longitudinally slidably mounted on the support frame 21. That is, a longitudinal groove is opened on the support frame 21, and the linear slide module 31 has a slider located in the groove. The distance between the test lamp 22, the black base plate 1, and the photomask substrate can be adjusted by adjusting the longitudinal position of the linear slide module 31 on the support frame 21. If it is necessary to fix the linear slide module 31, the linear slide module 31 can be mounted on the support frame 21 with bolts.
[0043] This embodiment has the same beneficial effects as Embodiment 1.
[0044] Example 5
[0045] like Figure 4As shown, this embodiment introduces a photomask substrate performance testing device, which has a basically the same structure as the photomask substrate performance testing device introduced in Embodiment 1. The difference is that in this embodiment, the movable clamping plate 34 is slidably disposed inside the fixed clamping plate 33, and a transverse telescopic cylinder 37 is installed on the fixed clamping plate 33. The movable end of the transverse telescopic cylinder 37 is connected to the movable clamping plate 34, and the telescopic direction of the transverse telescopic cylinder 37 is parallel to the sliding direction of the movable clamping plate 34. The clamping distance between the fixed clamping plate 33 and the movable clamping plate 34 is adjusted by the transverse telescopic cylinder 37.
[0046] This embodiment has the same beneficial effects as Embodiment 1.
[0047] The technical scope of this utility model is not limited to the content described above. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this utility model, and all such modifications and variations should fall within the protection scope of this utility model.
Claims
1. A photomask substrate performance testing device, used for performing suspended testing on a photomask substrate, characterized in that, It includes: Black baseboard (1); The lighting mechanism (2) includes a support frame (21) and a test lamp (22); The support frame (21) is installed on the side wall of the black base plate (1), and the test lamp (22) is installed on the top of the support frame (21), with the light-emitting part of the test lamp (22) facing the black base plate (1). The suspension mechanism (3) includes a linear slide module (31), a forward and reverse motor (32), a fixed clamping plate (33), and a movable clamping plate (34). The linear slide module (31) is installed at the longitudinal support part of the support frame (21). The forward and reverse motor (32) is installed at the movable end of the linear slide module (31). The movable clamping plate (34) is movably disposed in the fixed clamping plate (33), and the two are located in the longitudinal gap between the test lamp (22) and the black base plate (1) to clamp the photomask substrate. The output shaft of the forward and reverse motor (32) is connected to the fixed clamping plate (33) to drive the fixed clamping plate (33) and the movable clamping plate (34) to rotate longitudinally.
2. The photomask substrate performance testing device according to claim 1, characterized in that, The movable clamp (34) is slidably disposed inside the fixed clamp (33). The inner side of the fixed clamp (33) is movably connected to the first screw (35). The axial direction of the first screw (35) is parallel to the sliding direction of the movable clamp (34). One end of the first screw (35) is connected to the output shaft of the drive motor (36). The drive motor (36) is installed on the outer side of the fixed clamp (33). The movable clamp (34) is screwed to the first screw (35).
3. The photomask substrate performance testing device according to claim 2, characterized in that, The movable clamp (34) is provided with a limiting protrusion at the inner end of the fixed clamp (33), and the fixed clamp (33) is provided with a limiting groove that matches the limiting protrusion on the inner side.
4. The photomask substrate performance testing apparatus according to claim 1, characterized in that, The movable clamp (34) is slidably disposed inside the fixed clamp (33). A transverse telescopic cylinder (37) is installed on the fixed clamp (33). The movable end of the transverse telescopic cylinder (37) is connected to the movable clamp (34). The telescopic direction of the transverse telescopic cylinder (37) is parallel to the sliding direction of the movable clamp (34).
5. The photomask substrate performance testing apparatus according to any one of claims 1-4, characterized in that, Flexible pads are provided on the inner sides of the fixed clamp (33) and the movable clamp (34).
6. The photomask substrate performance testing apparatus according to any one of claims 1-4, characterized in that, The inner sides of the fixed clamp (33) and the movable clamp (34) are provided with limiting grooves that are adapted to the photomask substrate.
7. The photomask substrate performance testing apparatus according to claim 1, characterized in that, The top of the test lamp (22) is fixed to the bottom of the second screw (23). The top of the second screw (23) passes through the support frame (21) and extends above the support frame (21). A limit nut (24) is screwed onto the outer surface of the second screw (23). The limit nut (24) is located at the top of the support frame (21).
8. The photomask substrate performance testing apparatus according to claim 1, characterized in that, A longitudinal telescopic cylinder is fixed to the top of the support frame (21), and the movable end of the longitudinal telescopic cylinder passes through the support frame (21) and is connected to the top of the test lamp (22).
9. The photomask substrate performance testing apparatus according to claim 1, characterized in that, The support frame (21) adopts a longitudinal telescopic bracket, the test lamp (22) is installed on the movable part of the longitudinal telescopic bracket, and the linear slide module (31) is installed on the fixed part of the longitudinal telescopic bracket.
10. The photomask substrate performance testing apparatus according to claim 1, characterized in that, The linear slide module (31) is longitudinally slidably mounted on the support frame (21).