Turnover box, sample table and wet-method material moving system

Abstract

The utility model discloses a turnover box, a sample table and a wet-method material moving system, and relates to the technical field of semiconductor processing. The turnover box comprises a box body, a box cover and a one-way air valve; a storage cavity is formed in the box body; an opening communicated with the storage cavity is formed in the top of the box body; the box cover is installed on the opening in an openable and closable mode, and an operation structure used for operating the box cover to be opened or closed is arranged on the box cover. The one-way air valve is mounted on the box body and is unidirectionally communicated with the storage cavity from outside to inside; the box body is further provided with a transfer matching structure used for moving the box body. The box body, the box cover and the one-way air valve are matched to provide an independent clean space with protective gas for the sample, when the turnover box is matched with an accompanying device, multi-layer isolation protection on the sample can be achieved, the cleanliness of the sample in the turnover process is further improved, and then the machining quality is improved. In addition, due to the design of an operation structure and a transfer matching structure of the turnover box, convenience is provided for achieving automatic cooperative control, and the efficiency is further improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and in particular to a turnover box, a sample stage and a wet transfer system. Background Technology

[0002] In the manufacturing process of semiconductor micro- and nano-devices, wet etching stations are required for wafer surface cleaning and acid / alkali etching. Traditional wet etching machines are single-machine designs, which can only achieve single-machine automation, making it difficult to further improve efficiency. For example, Chinese patent CN118053795B discloses a research-oriented fully automated wet etching system and machine. To address the above shortcomings, Chinese patent CN118824908B discloses a research-oriented dark-light wet etching laboratory, which uses a transfer robot to move materials between various machine devices, thereby achieving automated collaboration of multiple machines and significantly improving efficiency.

[0003] However, the patent solution in announcement number CN118824908B relies solely on the temporary storage space provided by the accompanying device on the transfer robot to maintain the cleanliness of the sample during sample transfer. However, the temporary storage space provided by the accompanying device is not only used to load the sample but also to load the liquid container for changing the liquid. This mixed loading method cannot provide a good clean environment for the sample and poses a risk of contaminating the sample, thereby affecting the sample processing quality.

[0004] Therefore, there is an urgent need to provide a new solution to address the aforementioned technical problems. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a turnover box, a sample stage and a wet transfer system that can provide a separate clean space for the turnover sample to improve the sample processing quality.

[0006] To achieve the above technical objectives, this application provides a turnover box, including a box body, a box cover, and a one-way air valve;

[0007] The box contains a storage cavity;

[0008] The top of the box body has an opening that communicates with the storage cavity;

[0009] The lid is closable and can be installed in the opening, and is provided with an operating structure for operating itself to open or close.

[0010] The one-way air valve is installed on the housing and communicates unidirectionally with the storage cavity from the outside to the inside;

[0011] The box body is also provided with a transfer mechanism for moving itself.

[0012] Furthermore, the lid is slidably mounted on the opening, and when the opening is closed, at least a portion of one end of the lid extends beyond one end of the opening.

[0013] The operating structure is located on the portion of the box cover outside the opening.

[0014] Furthermore, protruding beams are provided on both sides of the opening;

[0015] A groove is formed between the two protruding beams;

[0016] The box cover is slidably mounted on the slide groove;

[0017] When the lid closes the opening, at least a portion of its structure extends out of one end of the groove.

[0018] The operating structure is located on the portion of the box cover outside one end of the slide groove.

[0019] Furthermore, the operating structure includes a plurality of sockets;

[0020] The insertion hole is located at the bottom of the box cover.

[0021] Furthermore, the transfer mating structure includes several fork slots.

[0022] Furthermore, there are two fork slots, which are arranged one-to-one on one side of the protruding beam and located above the box cover.

[0023] Furthermore, the storage cavity is provided with a positioning structure for positioning the sample holder.

[0024] This application also discloses a sample stage, including the machine body, a lid opening mechanism, an inflation mechanism, and a turnover box;

[0025] The machine body is provided with several material loading stations, which are used to carry the turnover boxes one by one;

[0026] The opening mechanism is installed on the machine body and is arranged one-to-one on one side of the material loading station. It is used to operate the operating structure on the lid of the turnover box to control the opening or closing of the lid.

[0027] The inflation mechanism is installed on the machine body and is used to fill the storage cavity of the turnover box with protective gas through the one-way air valve of the turnover box.

[0028] Furthermore, a positioning area is provided on the material loading station along the vertical direction for the box body of the turnover box to be inserted vertically.

[0029] Furthermore, the one-way air valve of the turnover box is installed at the bottom of the box body;

[0030] The air nozzle of the inflation mechanism is installed at the bottom of the positioning area and is used to connect and cooperate with the one-way air valve when the turnover box is placed into the positioning area.

[0031] Furthermore, the lid of the turnover box is slidably mounted on the opening of the box body, and when the turnover box is closed, at least one end of its structure extends out of the opening;

[0032] The operating structure includes several sockets;

[0033] The insertion hole is located at the bottom of the box cover;

[0034] The lid opening mechanism includes a first lid opening displacement mechanism and a second lid opening displacement mechanism;

[0035] The first lid opening displacement mechanism is connected to the second lid opening displacement mechanism, and is used to drive the second lid opening displacement mechanism to move along the sliding direction of the lid;

[0036] The second cover-opening displacement mechanism has a lifting control rod;

[0037] The push rod can be movably inserted into the insertion hole.

[0038] This application also discloses a wet transfer system, including a transfer robot and a sample stage;

[0039] The transfer robot includes a mobile device, a robotic arm device, at least one end effector, and a following device;

[0040] The accompanying device is installed on the mobile device to provide temporary storage space;

[0041] The robotic arm is mounted on the mobile device, and its end is detachably connected to the end effector;

[0042] The end effector is used to grasp the sample holder and / or the turnover box on the sample stage.

[0043] Furthermore, the transfer mechanism on the body of the turnover box includes several fork slots;

[0044] The end effector capable of gripping the turnover box has a fork that can be inserted into the fork slot.

[0045] As can be seen from the above technical solutions, the turnover box designed in this application has the following beneficial effects:

[0046] 1. The combination of the box body, lid, and one-way valve can provide the sample with an independent clean space with protective gas. When this turnover box is used with the accompanying device, it can achieve multi-layer isolation and protection of the sample, further improving the cleanliness of the sample during the turnover process, thereby improving the processing quality.

[0047] 2. The lid design facilitates automated control of opening and closing, while the box body features a transfer mechanism that facilitates its own handling and transfer, providing convenience for automated collaborative control and further improving efficiency. Attached Figure Description

[0048] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0049] Figure 1 A perspective view of a turnover box provided in this application;

[0050] Figure 2 This is a top view of a turnover box without a lid provided in this application;

[0051] Figure 3 This is a perspective view of a sample stage provided in this application;

[0052] Figure 4 This is a perspective view of a sample stage without a turnover box provided in this application;

[0053] Figure 5 This is a perspective view of a wet material transfer system provided in this application;

[0054] In the diagram: 1. Box body; 11. Storage cavity; 12. Opening; 13. Protruding beam; 2. Box lid; 31. Operating structure; 311. Insertion hole; 32. Transfer mating structure; 321. Fork groove; 4. One-way air valve; 100. Sample rack; 200. Transfer robot; 201. Moving device; 202. Accompanying device; 203. Robotic arm device; 204. End effector; 5. Machine body; 51. Positioning area; 52. Positioning block; 6. Lid opening mechanism; 61. First lid opening displacement mechanism; 611. Positioning groove; 62. Second lid opening displacement mechanism; 621. Push rod; 7. Fork claw. Detailed Implementation

[0055] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the embodiments of this application.

[0056] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0057] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0058] This application discloses a turnover box.

[0059] Please see Figure 1 as well as Figure 2 One embodiment of a turnover box provided in this application includes:

[0060] Box body 1, box lid 2, and one-way air valve 4.

[0061] The box body 1 has a storage cavity 11 inside, and the top of the box body 1 has an opening 12 that communicates with the storage cavity 11; the box cover 2 is installed in the opening 12 in an openable and closable manner, and has an operating structure 31 for operating itself to open or close.

[0062] A one-way air valve 4 is installed on the housing 1 and communicates unidirectionally with the storage cavity 11 from the outside to the inside; the housing 1 is also provided with a transfer mechanism 32 for moving itself.

[0063] The turnover box designed in this application has the following beneficial effects:

[0064] 1. The combination of box body 1, box cover 2 and one-way gas valve 4 can provide the sample with an independent clean space with protective gas. When the turnover box is used in conjunction with the accompanying device 202, it can achieve multi-layer isolation and protection of the sample, further improve the cleanliness of the sample during the turnover process, and thus improve the processing quality.

[0065] 2. The lid 2 is designed with an operation structure 31 to facilitate the automatic control of opening and closing of the lid 2, while the box body 1 is equipped with a transfer and cooperation structure 32 to facilitate its own handling and transfer, which provides convenience for realizing automated collaborative control and further improves efficiency.

[0066] The above is an embodiment of a turnover box provided in this application. The following is an embodiment of a turnover box provided in this application. Please refer to the following for details. Figures 1 to 2 .

[0067] Based on the solution of Embodiment 1 above:

[0068] Furthermore, the lid 2 is slidably mounted on the opening 12, and when the opening 12 is closed, at least a portion of its structure extends beyond that end of the opening 12; the operating structure 31 is located on the portion of the lid 2 located outside the opening 12. This design allows external mechanical structures to more easily contact the operating structure 31 during automated operation, thereby precisely controlling the opening and closing of the lid 2 and greatly improving operational efficiency and accuracy. Simultaneously, this design, where a portion of the structure extends beyond the opening 12, provides more space for the layout of the operating structure 31, allowing for flexible configuration of different types and functions of the operating structure 31 to meet diverse automated control requirements.

[0069] Furthermore, protruding beams 13 are provided on both sides of the opening 12; a sliding groove is formed between the two protruding beams 13; the cover 2 is slidably installed in the sliding groove; when the cover 2 closes the opening 12, at least a portion of its structure extends out of the end of the sliding groove; the operating structure 31 is provided on the portion of the cover 2 located outside the end of the sliding groove.

[0070] This structural design not only enhances the stability of the sliding of the lid 2, but also ensures that the lid 2 will not deviate during opening and closing through the guiding effect of the slide groove, thus guaranteeing the precise docking of the lid 2 and the opening 12. Furthermore, by setting the operating structure 31 on the part of the lid 2 located outside one end of the slide groove, the spatial layout of the automated operation is further optimized. When the automated equipment operates the lid 2, it can avoid interference with the slide groove, making the operation smoother and more efficient.

[0071] A sealing ring may be provided at the bottom of the lid 2 or the top of the opening 12 to increase the sealing performance of the connection between the lid 2 and the box body 1 when they are closed. No specific restrictions are imposed.

[0072] Furthermore, the operating structure 31 includes several insertion holes 311; the insertion holes 311 are located at the bottom of the cover 2, and can extend upwards or not through the cover 2, without limitation.

[0073] The insertion hole 311 is located at the bottom of the lid 2. In automated operation, when a device with a push rod 621 or similar structure is inserted into the insertion hole 311, the lid 2 can be opened and closed in conjunction with the displacement mechanism. Furthermore, this placement of the insertion hole 311 is relatively concealed, not affecting the overall appearance and structural integrity of the turnover box, and also reducing the possibility of accidental collisions or damage to the insertion hole 311 during handling or use. If the insertion hole 311 extends upwards through the lid 2, cleaning or maintenance can be performed from above when necessary; if it does not extend through the lid 2, it can prevent dust and other impurities from entering the insertion hole 311 and affecting its use.

[0074] The number of sockets 311 can be varied according to actual needs, such as two or more, and there is no specific limit.

[0075] Furthermore, the transfer mechanism 32 includes several fork slots 321. The fork slots 321 are designed to provide ideal gripping points for automated handling mechanisms. In practical applications, the robotic arm's working structure can be precisely inserted into these fork slots 321, and then, through lifting and moving actions, the tote box can be smoothly transported and accurately positioned. This design not only improves handling efficiency but also greatly reduces the risk of the tote box falling or being damaged due to unstable gripping during handling. At the same time, the number and position of the fork slots 321 can be flexibly adjusted according to the actual size of the tote box and usage requirements to adapt to the automated handling requirements of different scenarios. For example, in situations requiring high handling precision, the number of fork slots 321 can be increased, allowing the forks 7 to be more evenly distributed on the bottom of the tote box, thus providing more stable support; while in environments with limited space, the position of the fork slots 321 can be reasonably adjusted to ensure that the forks 7 can be smoothly inserted and complete the handling task.

[0076] Furthermore, taking the setting of two protruding beams 13 as an example, there can be two fork slots 321, which are set on one side of the protruding beams 13 and located above the cover 2. Those skilled in the art can make appropriate design changes based on this without limitation.

[0077] Furthermore, the storage cavity 11 is provided with a positioning structure for positioning the sample holder 100. The sample holder 100 referred to in this application can be an existing basket rack, and the sample refers to a wafer / wafer or other sample. Taking a basket rack as an example, the positioning structure can include two spaced positioning posts. The sample holder 100 is positioned and fixed between the two positioning posts to prevent displacement within the box 1 during transportation.

[0078] like Figure 3 as well as Figure 4 As shown, this application also discloses a sample stage, including a machine body 5, a lid opening mechanism 6, an inflation mechanism (not shown in the figure), and a turnover box; the machine body 5 is provided with several material loading stations, which are used to carry the turnover boxes one by one; the lid opening mechanism 6 is installed on the machine body 5 and is set on one side of the material loading station, and is used to operate the operating structure 31 on the lid 2 of the turnover box to control the lid 2 to open or close; the inflation mechanism is installed on the machine body 5 and is used to fill the storage cavity 11 of the turnover box with protective gas through the one-way air valve 4 of the turnover box.

[0079] The sample stage design integrates the automated operation of the turnover box with the protective gas filling process. Specifically, the machine body 5 serves as the basic support structure, achieving precise positioning and support of the turnover box through the material loading station. Each station is equipped with an independent lid opening mechanism 6 and a gas filling mechanism, forming a modular operating unit. The lid opening mechanism 6, linked with the turnover box's operating structure 31, controls the opening and closing of the lid 2. The gas filling mechanism utilizes existing gas supply technology, injecting inert protective gases such as nitrogen into the storage chamber 11 through a one-way gas valve 4. This can be further enhanced by a pressure sensor to monitor the internal gas pressure in real time, forming a closed-loop control system.

[0080] Furthermore, such as Figure 4 As shown, a positioning area 51 is set vertically on the material loading station, allowing the box body 1 of the turnover box to be inserted vertically. Designing the turnover box's positioning and installation method as a vertically movable installation facilitates the automation of the turnover box's gripping and placement. By simply designing a corresponding gripping structure in the vertical direction, precise gripping and placement of the turnover box can be easily achieved. This positioning and installation method not only simplifies the automated operation process but also improves the accuracy and stability of the operation.

[0081] Furthermore, taking the vertical installation design of the turnover box as an example, the one-way air valve 4 of the turnover box is installed at the bottom of the box body 1; the air nozzle of the inflation mechanism is installed at the bottom of the positioning area 51, and is used to connect and cooperate with the one-way air valve 4 when the turnover box is placed into the positioning area 51. This bottom docking design allows the air nozzle to naturally and accurately dock with the one-way air valve 4 during the process of placing the turnover box into the positioning area 51, without the need for additional positioning adjustment steps, which greatly improves the efficiency and reliability of the inflation operation.

[0082] Furthermore, such as Figure 1 as well as Figure 2As shown, from the above specific design of the turnover box, it can be seen that the lid 2 of the turnover box can be slidably installed, specifically slidably installed at the opening 12 of the box body 1, and when the turnover box is closed, at least part of its structure extends out of the opening 12. The operating structure 31 includes several insertion holes 311, which are located at the bottom of the lid 2. Taking this design as an example, the opening mechanism 6 can be designed as follows:

[0083] The lid opening mechanism 6 includes a first lid opening displacement mechanism 61 and a second lid opening displacement mechanism 62; the first lid opening displacement mechanism 61 is connected to the second lid opening displacement mechanism 62 and is used to drive the second lid opening displacement mechanism 62 to move along the sliding direction of the lid 2; the second lid opening displacement mechanism 62 has a lifting control rod 621; the rod 621 can be movably inserted into the insertion hole 311.

[0084] like Figure 3 as well as Figure 4 As shown, when the lid 2 needs to be opened, the first lid opening displacement mechanism 61 is activated, driving the second lid opening displacement mechanism 62 to move along the sliding direction of the lid 2, so that the push rod 621 moves to the position corresponding to the insertion hole 311. Subsequently, the second lid opening displacement mechanism 62 controls the push rod 621 to rise upward. After the push rod 621 is inserted into the insertion hole 311, the first lid opening displacement mechanism 61 drives the second lid opening displacement mechanism 62 to move, thereby pulling open the lid 2. Then the sample holder 100 can be placed into the storage cavity 11. Afterward, the first lid opening displacement mechanism 61 is controlled to push the lid 2 back to the closed state, and the push rod 621 of the second lid opening displacement mechanism 62 descends and exits the insertion hole 311.

[0085] The first cover-opening displacement mechanism 61 can be an electric slide structure, where a motor drives a lead screw to rotate, thereby causing a nut seat that cooperates with the lead screw to move linearly. This nut seat is fixedly connected to the second cover-opening displacement mechanism 62, thus enabling the second cover-opening displacement mechanism 62 to move along the sliding direction of the lid 2. Alternatively, a synchronous belt drive structure can be used, where a motor drives a synchronous pulley to rotate, and the synchronous belt circulates on the pulley. The second cover-opening displacement mechanism 62 is fixed to the synchronous belt, and its movement is driven by the linear motion of the synchronous belt. Another option is a linear cylinder structure, where the piston rod of the linear cylinder is connected to the second cover-opening displacement mechanism 62. By controlling the inflow and outflow of gas in the cylinder, the piston rod is driven to perform linear extension and retraction, thereby causing the second cover-opening displacement mechanism 62 to move along the sliding direction of the lid 2. These different designs of the first cover-opening displacement mechanism 61 can all meet the functional requirements of driving the second cover-opening displacement mechanism 62 to move, thus realizing the opening and closing control of the lid 2. Furthermore, the appropriate design can be flexibly selected based on actual usage scenarios, cost budgets, and accuracy requirements.

[0086] The second cover-opening displacement mechanism 62 can be a modular structure with a lifting function, the core component of which is a lifting rod 621 that can be precisely controlled for lifting. This mechanism drives a precision lead screw pair through a servo motor or stepper motor to convert the rotational motion into the vertical linear motion of the lifting rod 621. It can also be equipped with a grating ruler or encoder to form a closed-loop control system, the details of which will not be elaborated.

[0087] like Figure 4 As shown, regarding the formation of the positioning area 51 in this application, taking the first opening displacement mechanism 61 having a mechanism base as an example, a positioning groove can be provided on one side of the mechanism base, and then at least one positioning block 52 is provided on one side of the positioning groove. The positioning block 52 and the positioning groove form the required positioning area 51. Taking the box 1 as a rectangular box 1 as an example, then there can be two positioning blocks 52, distributed at intervals, and each of them has an L-shaped cross-section. Those skilled in the art can make appropriate design variations based on this, without limitation.

[0088] like Figure 5 As shown, this application also discloses a wet transfer system, including a transfer robot 200 and a sample stage; the transfer robot 200 includes a moving device 201, a robotic arm device 203, at least one end effector 204, and a following device 202; the following device 202 is mounted on the moving device 201 to provide temporary storage space; the robotic arm device 203 is mounted on the moving device 201 and its end is detachably connected to the end effector 204; the end effector 204 is used to grasp the sample rack 100 and / or the turnover box on the sample stage.

[0089] This wet transfer system achieves efficient and automated sample transfer from storage to processing through the collaborative work of the transfer robot 200 and the sample stage. Specifically, the mobile device 201 serves as the basic carrier, carrying the robotic arm device 203 and the accompanying device 202 to form a multi-functional working unit. Among them, the accompanying device 202, through its built-in temporary storage space design, can temporarily store the transfer box when the robotic arm performs the grasping task.

[0090] The robotic arm device 203 can meet corresponding grasping requirements by quickly changing end effectors 204 of different specifications. The mobile robot can be designed with reference to or directly adopted from the transfer robot 200 disclosed in the background patent, and specific details will not be elaborated upon. Furthermore, a single end effector 204 can simultaneously possess the function of grasping both the sample rack 100 and the turnover box, or each end effector 204 can be configured with a single grasping function; there are no specific limitations.

[0091] Furthermore, taking the transfer mechanism 32 on the box body 1 of the turnover box as an example, which includes several fork slots 321, the end effector 204 that can be used to grab the turnover box has a fork 7 that can be inserted into the fork slots 321.

[0092] The above provides a detailed description of a turnover box, sample stage, and wet transfer system provided in this application. For those skilled in the art, based on the ideas of the embodiments of this application, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A turnover box, characterized in that, Includes a box body (1), a box lid (2), and a one-way air valve (4); The box (1) is provided with a storage cavity (11); The top of the box (1) is provided with an opening (12) that communicates with the storage cavity (11). The lid (2) is closable and can be installed on the opening (12), and is provided with an operating structure (31) for operating itself to open or close. The one-way air valve (4) is installed on the box (1) and is in one-way communication with the storage cavity (11) from the outside to the inside; The box (1) is also provided with a transfer mechanism (32) for moving itself.

2. The turnover box according to claim 1, characterized in that, The lid (2) is slidably mounted on the opening (12), and when the opening (12) is closed, at least a portion of its structure extends out of the opening (12); The operating structure (31) is located on the part of the cover (2) outside the opening (12).

3. The turnover box according to claim 2, characterized in that, The opening (12) is provided with protruding beams (13) on both sides. A groove is formed between the two protruding beams (13); The box cover (2) is slidably mounted on the groove; When the lid (2) closes the opening (12), at least a portion of its structure extends out of one end of the groove. The operating structure (31) is located on the part of the box cover (2) located outside one end of the slide groove.

4. The turnover box according to claim 3, characterized in that, The operating structure (31) includes a plurality of sockets (311); The insertion hole (311) is located at the bottom of the cover (2).

5. The turnover box according to claim 3, characterized in that, The transfer mating structure (32) includes a plurality of fork slots (321).

6. The turnover box according to claim 5, characterized in that, There are two fork slots (321), which are arranged one-to-one on one side of the protruding beam (13) and located above the box cover (2).

7. The turnover box according to claim 1, characterized in that, The storage cavity (11) is provided with a positioning structure for positioning the sample holder (100).

8. A sample stage, characterized in that, Includes the machine body (5), the opening mechanism (6), the inflation mechanism, and the turnover box as described in claim 1; The machine body (5) is provided with several material loading stations, which are used to carry the turnover boxes one by one; The opening mechanism (6) is installed on the machine body (5) and is set on one side of the material loading station. It is used to operate the operating structure (31) on the box cover (2) of the turnover box to control the opening or closing of the box cover (2). The inflation mechanism is installed on the machine body (5) and is used to fill the storage cavity (11) of the turnover box with protective gas through the one-way air valve (4) of the turnover box.

9. The sample stage according to claim 8, characterized in that, The material loading station has a positioning area (51) set in the vertical direction for the box body (1) of the turnover box to be inserted in the vertical direction.

10. The sample stage according to claim 9, characterized in that, The one-way air valve (4) of the turnover box is installed at the bottom of the box body (1); The air nozzle of the inflation mechanism is installed at the bottom of the positioning area (51) and is used to engage with the one-way air valve (4) when the turnover box is placed into the positioning area (51).

11. The sample stage according to claim 8, characterized in that, The lid (2) of the turnover box is slidably mounted on the opening (12) of the box body (1), and when the turnover box is closed, at least one end of its structure extends out of the opening (12). The operating structure (31) includes a plurality of sockets (311); The insertion hole (311) is located at the bottom of the box cover (2); The opening mechanism (6) includes a first opening displacement mechanism (61) and a second opening displacement mechanism (62); The first lid opening displacement mechanism (61) is connected to the second lid opening displacement mechanism (62) and is used to drive the second lid opening displacement mechanism (62) to move along the sliding direction of the lid (2); The second cover-opening displacement mechanism (62) has a lifting control rod (621); The push rod (621) can be movably inserted into the socket (311).

12. A wet material transfer system, characterized in that, Includes a transfer robot (200) and a sample stage as described in any one of claims 8 to 11; The transfer robot (200) includes a mobile device (201), a robotic arm device (203), at least one end effector (204), and a follower device (202). The accompanying device (202) is installed on the mobile device (201) to provide temporary storage space; The robotic arm device (203) is mounted on the mobile device (201) and its end is detachably connected to the end effector (204). The end effector (204) is used to grasp the sample holder (100) and / or the turnover box on the sample stage.

13. The wet transfer system according to claim 12, characterized in that, The transfer mechanism (32) on the box body (1) of the turnover box includes several fork slots (321). The end effector (204) capable of gripping the turnover box has a fork (7) that can be inserted into the fork slot (321).

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