Device for transferring carrier and substrate transferring assembly

Abstract

The utility model provides a device for transferring a carrier and a substrate transferring assembly, and the device comprises a first clamping part which comprises a first clamping rod and a first clamping groove, and one end of the first clamping rod is fixedly connected with the first clamping groove; the second clamping part comprises a second clamping rod and a second clamping groove, and one end of the second clamping rod is fixedly connected with the second clamping groove; the end, deviating from the first clamping groove, of the first clamping rod is connected with the end, deviating from the second clamping groove, of the second clamping rod. An included angle with a preset angle is formed between the first clamping rod and the second clamping rod; wherein the length of the first clamping rod is the same as that of the second clamping rod, and the ratio of the length of the first clamping rod to the height of the carrier is larger than or equal to 2: 1. The device is simple in design and can be suitable for carriers of various sizes, and the production cost and the management difficulty are effectively reduced.

Description

Technical Field

[0001] This application relates to the field of hybrid integrated circuit processing equipment technology, and more specifically, to a device for a transfer carrier and a substrate transfer assembly. Background Technology

[0002] Hybrid Integrated Circuits (HICs), an innovative technology in the field of integrated circuits, combine semiconductor integration processes with thin-film or thick-film processes. This allows for the construction of thin-film or thick-film components and their interconnections on a single substrate using film deposition techniques, while simultaneously integrating discrete semiconductor chips, monolithic integrated circuits, or micro-components, ultimately forming a complete circuit through packaging. Compared to traditional modules integrated from discrete components, hybrid integrated circuits exhibit high assembly density, high reliability, and excellent electrical performance. Compared to monolithic integrated circuits, hybrid integrated circuits stand out due to their wide range of component parameters, high-precision manufacturing standards, superior stability, and ability to withstand high voltage and high power.

[0003] Currently, the hybrid integrated circuit market is dominated by customized products, leading to a preference for high-variety, low-batch production. This production model places specific demands on processing equipment, resulting in significant differences between hybrid integrated circuit processing equipment and general-purpose integrated circuit equipment. For example, while fully automated etching equipment is widely used in traditional integrated circuits, it faces challenges such as frequent program switching and long debugging cycles when processing hybrid integrated circuits. This not only affects production efficiency but may also pose a potential threat to product quality. Therefore, semi-automatic etching equipment is preferred in hybrid integrated circuit manufacturing. During the etching process, operators manually place the substrate to be etched into a special carrier, then send the carrier into the etching tank for processing. After one stage of etching is completed, the substrate is manually transferred to another etching tank to continue the process until all etching steps are completed.

[0004] However, since the liquids in the etching tank are mostly highly corrosive, a carrier made of corrosion-resistant material must be used to support the substrate, and a transfer device must be used to move the carrier and substrate safely and effectively. This carrier transfer device has two main problems: first, design limitations—its fixed size cannot flexibly adapt to carriers of different specifications, which not only increases production costs but also increases the complexity of inventory management and equipment configuration; second, high cost—traditional carrier transfer devices have complex structures, which not only increases the manufacturing cost of the carrier itself but also limits its application potential in a wider range of scenarios.

[0005] Therefore, designing a simple vehicle that can be used in various sizes has become an urgent problem to be solved. Utility Model Content

[0006] To address the aforementioned problems in the prior art, embodiments of this application provide an apparatus for transferring a carrier and a substrate transfer assembly.

[0007] In a first aspect, embodiments of this application provide a device for transferring a vehicle, specifically comprising: a first clamping part, including a first clamping rod and a first clamping groove, one end of the first clamping rod being fixedly connected to the first clamping groove; a second clamping part, including a second clamping rod and a second clamping groove, one end of the second clamping rod being fixedly connected to the second clamping groove; one end of the first clamping rod facing away from the first clamping groove being connected to one end of the second clamping rod facing away from the second clamping groove; and the first clamping rod and the second clamping rod having an included angle of a preset angle.

[0008] The ratio of the length of the first clamping rod to the height of the carrier is greater than or equal to 2:1, preferably 2:1 to 5:1; the ratio of the length of the second clamping rod to the height of the carrier is greater than or equal to 2:1, preferably 2:1 to 5:1.

[0009] Optionally, the lengths of the first clamping part and the second clamping part are 100mm to 500mm, for example, 100mm to 300mm.

[0010] Optionally, the first clamping groove and the first clamping rod are fixedly connected; the second clamping groove and the second clamping rod are fixedly connected.

[0011] Optionally, the first clamping groove and the first clamping rod are integrally formed, or connected by welding, or are detachably connected; the second clamping groove and the second clamping rod are integrally formed, or connected by welding, or are detachably connected.

[0012] Optionally, the length of the first clamping groove is greater than the width of the first clamping rod, and the shape of the first clamping groove matches the shape of the frame of the vehicle; the length of the second clamping groove is greater than the width of the second clamping rod, and the shape of the second clamping groove matches the shape of the frame of the vehicle.

[0013] Optionally, the first clamping groove is a groove whose cross-section includes an arc or multiple straight lines; the second clamping groove is a groove whose cross-section includes an arc or multiple straight lines.

[0014] Optionally, the openings of the first clamping groove and the second clamping groove are opposite to each other or back to back, and their length directions are both perpendicular to the first clamping rod and the second clamping rod.

[0015] Optionally, the depth directions of the first clamping groove and the second clamping groove are parallel to each other.

[0016] Optionally, the outer middle portion of the first clamping rod and the second clamping rod is provided with an anti-slip part.

[0017] Optionally, the anti-slip part includes a plurality of anti-slip grooves arranged in parallel, the depth direction and length direction of the anti-slip grooves being perpendicular to the length direction of the first clamping rod or the second clamping rod on which they are provided.

[0018] Optionally, the width of the anti-slip groove is 2mm to 3mm; the spacing between adjacent anti-slip grooves is 0.5mm to 1.5mm.

[0019] Optionally, the length of the anti-slip part is 1 / 5 to 1 / 3 of the length of the first or second clamping rod in which it is located.

[0020] Secondly, embodiments of this application provide a substrate transfer assembly, including a carrier for placing a substrate and the apparatus provided in any embodiment of the first aspect;

[0021] A carrier for placing a substrate includes a first support, a second support, and multiple limiting rods between the first and second supports;

[0022] Of the multiple limiting rods, at least two limiting rods are used to limit the sides of the substrate, and at least one limiting rod is used to limit the bottom of the substrate;

[0023] Among them, multiple serrated limiting grooves are provided at the junction of multiple limiting rods and the substrate. The limiting grooves on the multiple limiting rods are correspondingly provided, and the width of the limiting grooves matches the thickness of the substrate.

[0024] Using the device for transferring the carrier provided in this application embodiment, by setting a first clamping part and a second clamping part, and particularly by setting clamping grooves at the free ends of the two clamping parts, the transfer of the carrier and the substrate can be completed smoothly. This device has a simple design and is applicable to the handling of carriers of various sizes, effectively reducing production costs and management difficulty. Using the substrate transfer assembly provided in this application embodiment, because the first clamping part and the second clamping part are relatively long, the distance between the operator's hand and corrosive liquids can be effectively increased, enabling the smooth and safe transfer of the substrate during etching and other processes, meeting the processing requirements of current hybrid integrated circuit products. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the embodiments of this application will be described below.

[0026] Figure 1 This is a schematic diagram of the device for transferring a vehicle provided in an embodiment of this application.

[0027] Figure 2 This is a schematic diagram of the anti-slip part in the device for transferring a vehicle provided in the embodiments of this application.

[0028] Figure 3This is a side view of the device for transferring a vehicle provided in an embodiment of this application.

[0029] Figure 4 This is a schematic diagram of the substrate transfer assembly provided in an embodiment of this application.

[0030] Figure 5 This is a schematic diagram of the substrate transfer component provided in Example 2 of this application.

[0031] The image is labeled as follows:

[0032] 1: First clamping part; 11: First clamping rod; 12: First clamping groove;

[0033] 2: Second clamping part; 21: Second clamping rod; 22: Second clamping groove;

[0034] 3: Anti-slip part; 31: Anti-slip groove; 4: Vehicle;

[0035] 41: First support; 42: Second support; 43: Limiting rod;

[0036] 431: Limiting groove; Detailed Implementation

[0037] In this specification, it will also be understood that when a component is referred to as being "connected to" other components relative to them, such as "connected to" other components, the component can be directly connected to the other components, or there may be an intermediary third component; in addition, in the embodiments of this application, "connection" mainly refers to mechanical structural connection, which can be a connection method such as bonding or welding, or it can be integrally constructed during the component processing stage and have a connection relationship.

[0038] This application will now be described more fully below with reference to the accompanying drawings. However, this application can be implemented in many different ways and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided herein to make this application more detailed and complete, and to fully convey the scope of this application to those skilled in the art. The same reference numerals denote the same objects throughout the drawings.

[0039] At least in order to solve or improve the problems existing in the aforementioned prior art, the first aspect of the embodiments of this application provides an apparatus (hereinafter referred to as "apparatus") for transferring a vehicle, such as Figure 1 As shown, it includes a first clamping part 1 and a second clamping part 2, connected at one end, wherein:

[0040] The first clamping part 1 includes a first clamping rod 11 and a first clamping groove 12. The first clamping rod 11 has a first end and a second end that are disposed opposite to each other, wherein the first end is fixedly connected to the first clamping groove 12.

[0041] The second clamping part 2 includes a second clamping rod 21 and a second clamping groove 22. The second clamping rod 21 has a first end that is disposed opposite to the second clamping groove 22.

[0042] The end of the first clamping rod 11 that is away from the first clamping groove 12 is connected to the end of the second clamping rod 21 that is away from the second clamping groove 22, that is, the second end of the first clamping rod 11 is connected to the second end of the second clamping rod 21; in the free state, there is a preset angle between the first clamping rod 11 and the second clamping rod 21.

[0043] The aforementioned "free state" refers to the state of the device when it is not affected by external forces and has not undergone elastic deformation. Of course, when subjected to external forces, the angle between the first clamping rod 11 and the second clamping rod 21 will change accordingly. For ease of explanation, the first clamping rod 11 and the second clamping rod 21 will be collectively referred to as "clamping rods" and the first clamping groove 12 and the second clamping groove 22 will be collectively referred to as "clamping grooves".

[0044] like Figure 3 As shown, the two clamping rods can be of the same length. (Reference) Figure 5 The ratio of the length of each clamping rod to the height of the carrier 4 is preferably greater than or equal to 2:1. Optionally, the ratio of the length of the clamping rod to the height of the carrier 4 is between 2:1 and 5:1, with typical options being 4:1, 3.5:1, 2.5:1, 4.9:1, 5:1, and 2.1:1.

[0045] In this embodiment, the operator manually operates the first clamping part 1 and the second clamping part 2 to cause elastic deformation at their connection point, thereby changing the angle between the first clamping rod 11 and the second clamping rod 21, or causing the two clamping rods to bend and deform, so that the two clamping slots can approach or move away. Thus, the first clamping slot 12 and the second clamping slot 22 can respectively engage or disengage with the two sides of the carrier 4, thereby achieving the function of clamping the carrier 4, and the carrier 4 can be easily transferred by holding the device that has clamped the carrier 4.

[0046] In this embodiment, the first clamping rod 11 and the second clamping rod 21 have a preset angle in their free state. Optionally, this preset angle is between 20 degrees and 40 degrees. It should be understood that this preset angle is related to the width of the adapted carrier 4 and the lengths of the first clamping rod 11 and the second clamping rod 21.

[0047] The device in the aforementioned embodiments has a simple design and can be adapted to vehicles of different sizes. It eliminates the need to customize a special transfer device for each type of vehicle, thus reducing production costs and management difficulty.

[0048] In the aforementioned embodiments, the ratio of the length of the first clamping rod 11 and the second clamping rod 21 to the height of the carrier 4 is greater than or equal to 2:1, particularly controlled within the range of 2:1 to 5:1, such as 2:1 to 4:1. This ensures that the device has sufficient clamping force while avoiding operational inconvenience due to excessively long clamping rods, injuries caused by operators' hands being too close to corrosive liquids due to excessively short clamping rods, or decreased stability due to deflection of the clamping rods. This improves the operator's work efficiency and safety. In actual use, the aforementioned length settings of the first clamping rod 11 and the second clamping rod 21, with their moderate angles, and the operator's hands maintaining a safe distance from the carrier 4, facilitate gripping and safe operation.

[0049] In an embodiment, optionally, in the free state, the distance between the first clamping groove 12 and the second clamping groove 22 can be greater than the width of the carrier 4 or less than the width of the carrier 4.

[0050] In one embodiment, in the free state, the distance between the first clamping groove 12 and the second clamping groove 22 is greater than the width of the carrier 4, and the opening directions of the first clamping groove 11 and the second clamping groove 12 are opposite. In use, a force from the outside to the inside can be applied to and maintained on the two clamping rods, and the clamping grooves can be aligned with the side frames on both sides of the carrier 4, so that the clamping grooves clamp the carrier 4 from the outside to the inside, thereby playing the role of clamping the carrier 4.

[0051] In one embodiment, in the free state, the distance between the first clamping groove 12 and the second clamping groove 22 is greater than the width of the carrier 4, and the opening directions of the first clamping groove 11 and the second clamping groove 12 are opposite. In use, by first applying an outward-inward force to the clamping rod, the distance between the two clamping grooves can be shortened to less than the width of the carrier 4. Then, the two clamping grooves can be aligned with the side frames of the carrier 4. Since the clamping rod is elastic, after the force is removed, the clamping grooves will apply an inward-outward force to the side frame of the carrier, thereby fixing the carrier 4.

[0052] In one embodiment, in the free state, the distance between the first clamping groove 12 and the second clamping groove 22 is less than the width of the carrier 4, and the opening directions of the first clamping groove 11 and the second clamping groove 12 are opposite. In use, an inward force can be applied to the first clamping groove 12 and the second clamping groove 22 to make the distance between the two clamping grooves greater than the width of the carrier 4. Then, the clamping grooves are aligned with the side frames of the carrier 4. Since the clamping rod is elastic, after the force is removed, the clamping grooves will apply an inward clamping force to the side frame of the carrier 4, thereby clamping the carrier 4.

[0053] In the embodiment, the width of the carrier 4 is related to the maximum number of substrates that can be stored in the carrier 4 and the spacing between the substrates; optionally, the number of substrates that the carrier 4 can store is between 20 and 40, and the spacing between adjacent substrates can be about twice the thickness of the substrate.

[0054] Optionally, the surfaces in contact with the vehicle within the first clamping groove 12 and the second clamping groove 22 are provided with corrosion-resistant and anti-slip structures, such as rubber coatings, fitted or attached rubber structural layers, which can effectively increase the friction between the clamping grooves and the vehicle's four-sided frame, improve clamping stability, and prevent the vehicle from falling off accidentally.

[0055] like Figure 1 As shown, in a typical embodiment, the openings of the first clamping groove 12 and the second clamping groove 22 are arranged opposite to each other and have a certain curvature, so that during the clamping process, not only can a horizontal force be applied to the frame of the carrier 4 from the outside to the inside, but also a vertical dragging force can be applied from the bottom to the top. In this way, the carrier can be hooked during operation, further preventing the carrier from falling.

[0056] In some embodiments, optionally, considering the size of commonly used carriers, the lengths of both the first clamping part 1 and the second clamping part 2 are set to 100mm to 500mm. This length range allows the device to adapt to carriers 4 of different sizes, thereby enhancing its adaptability and flexibility. Preferably, the lengths of both the first clamping part 1 and the second clamping part 2 are set to 100mm to 300mm. Simultaneously, this length range is ergonomic, facilitating handling and movement by operators, and improving work efficiency. Furthermore, the longer clamping part length allows for a greater safe distance between the operator's hands and corrosive liquids, thereby improving operational safety.

[0057] In some embodiments, the first clamping groove 12 is optionally integrally formed with the first clamping rod 11, or connected by welding, or is detachably connected; the second clamping groove 22 is integrally formed with the second clamping rod 21, or connected by welding, or is detachably connected. In other embodiments, the clamping groove and the corresponding clamping rod are detachably connected, for example, by screws.

[0058] In this embodiment, there is no connecting gap between the integrally formed first clamping groove 12 and the first clamping rod 11, thus possessing high structural strength and rigidity, capable of withstanding large clamping forces and impacts. The welded connection fuses the contact surfaces of the clamping groove and the corresponding clamping rod, resulting in a strong connection capable of withstanding large tensile, shear, and torsional forces. The detachable connection provides greater flexibility to the device; during operation, suitable clamping grooves and clamping rods can be selected and assembled according to the specific specifications of the carrier 4.

[0059] In some embodiments, the length of the first clamping groove 12 is greater than the width of the first clamping rod 11, and the shape of the first clamping groove 12 matches the shape of the frame of the carrier 4; the length of the second clamping groove 22 is greater than the width of the second clamping rod 21, and the shape of the second clamping groove 22 matches the shape of the frame of the carrier 4.

[0060] like Figure 1 and Figure 3 For ease of explanation, in this embodiment, the direction in which the groove extends is defined as the "length direction," the distance between the two sides of the groove opening is defined as the "width direction," and the distance between the bottom of the groove and the opening is defined as the "depth direction." For example, Figure 1 The L direction indicated in the figure is the length direction of the first clamping groove 12. Figure 1 and Figure 3 The W and D directions are marked as the width and depth directions of the first clamping groove 12, respectively.

[0061] The lengths of the first clamping groove 12 and the second clamping groove 22, as well as their fit with the shape of the frame of the carrier 4, improve the clamping effect. The first clamping groove 12 and the second clamping groove 22 have sufficient length to allow for more complete contact with the frame of the carrier 4. By increasing the contact area, the clamping stability of the device on the carrier 4 can be significantly improved, preventing the carrier from slipping or shaking during handling or movement.

[0062] In some embodiments, optionally, the first clamping groove 12 and the second clamping groove 22 have the same shape, both being grooves with a cross-section including an arc or multiple straight lines, in the shape of a "C" or "U". Specifically, the shape of the clamping groove can be determined according to the shape of the frame of the carrier 4. In the foregoing embodiments, the shape design of the clamping groove allows the device to more widely adapt to carrier frames of different shapes and sizes. Whether it is a circular, elliptical, rectangular, or other polygonal frame, it can be accommodated to a certain extent by this groove shape, thereby improving the compatibility and application range of the device.

[0063] Figure 1 and Figure 3 In the illustrated embodiment, the openings of the first clamping groove 12 and the second clamping groove 22 are opposite to each other, and their length directions are perpendicular to their respective clamping rods (first clamping rod 11 and second clamping rod 21). During clamping, the clamping grooves apply pressure to the carrier frame from the direction of the clamping groove towards the carrier 4, as well as a downward dragging force, which helps to stabilize the clamping of the carrier and improves the clamping efficiency.

[0064] In another embodiment, the length direction of the clamping groove is not perpendicular to the length direction of the corresponding clamping rod, and is at a preset angle, such as 45°, 30°, 15°, etc., so that the tilting device can be used to operate the carrier, which is suitable for special working environments.

[0065] In this embodiment, the depth direction of the clamping groove may be perpendicular to the length direction of the clamping rod. In a typical embodiment, the depth direction of the clamping groove is at an angle to the length direction of the clamping rod, such as... Figure 3 As shown, the opening of the clamping groove faces inward. Since its depth direction D is at a certain angle to the length direction of the clamping rod, the clamping groove is in an "inward" state, which enhances the clamping groove's fixing effect on the vehicle.

[0066] In a typical embodiment, such as Figure 3 As shown, in the free state of the device, the depth directions of the first clamping groove 12 and the second clamping groove 22 are parallel to each other.

[0067] In some embodiments, optionally, such as Figure 2 and Figure 3 As shown, an anti-slip portion 3 is provided on the outer middle portion of the first clamping rod 11 and the second clamping rod 21. The anti-slip portion 3 includes multiple anti-slip grooves 31 arranged side by side. The depth and length directions of the anti-slip grooves 31 are perpendicular to the length direction of the first clamping rod 11 or the second clamping rod 21 to which they are provided. Here, the depth and length directions of the anti-slip grooves 31 refer to the aforementioned description of the clamping grooves.

[0068] The anti-slip part 3, especially the multiple parallel anti-slip grooves 31, significantly increases the friction between the clamping rod and the operator's hand or glove. This increased friction helps prevent operational errors or accidents caused by hand slippage during clamping and handling of the vehicle. The anti-slip part 3 is particularly effective in wet or oily working environments, ensuring operational safety and stability.

[0069] It should be understood that since the first clamping rod 11 and the second clamping rod 21 in the embodiments always have an included angle, the device is easy to slip when gripped. The anti-slip part 3 in the aforementioned embodiments effectively solves this problem.

[0070] In some embodiments, the width of the anti-slip groove 31 is optionally 2 mm to 3 mm; the spacing between adjacent anti-slip grooves 31 is 0.5 mm to 1.5 mm. This ensures that the operator's fingers or gloves are provided with sufficient friction when gripping the clamping rod, preventing hand slippage. Especially in wet working environments, this close groove layout and size setting can significantly improve anti-slip performance, ensuring operational safety and stability.

[0071] In some embodiments, the overall length of the anti-slip part 3 is optionally 1 / 5 to 1 / 3 of the length of the first clamping rod 11 or the second clamping rod 21 to which it is located, for example, multiple anti-slip grooves 31 are provided within 1 / 4 of the length of the clamping rod. This proportion ensures that the operator's fingers naturally rest on the anti-slip part 3 when holding the clamping rod, resulting in better ergonomics. The moderate length of the anti-slip part 3 ensures that the contact area between the operator's fingers and the anti-slip grooves 31 is large enough when the operator holds the clamping rod, thereby improving the anti-slip effect. Especially when it is necessary to hold or handle a large number of substrates for a long time, the length design of the anti-slip part 3 ensures that the operator's hand is stably supported, reducing the occurrence of operational instability caused by hand slippage.

[0072] In some embodiments, the first clamping part 1 and the second clamping part 2 are optionally made of stainless steel. This material is also corrosion-resistant, and is less expensive and easier to process than certain corrosion-resistant materials (such as polytetrafluoroethylene).

[0073] A second aspect of this application provides a substrate transfer assembly, including a carrier 4, and the means for transferring the carrier described in the aforementioned first aspect embodiment and any preferred embodiment thereof.

[0074] like Figure 4 As shown, the carrier 4 is used to place the substrate, and specifically includes a first bracket 41, a second bracket 42, and a plurality of limiting rods 43 connecting the first bracket 41 and the second bracket 42.

[0075] Of the multiple limiting rods 43, at least two limiting rods 43 are used to limit the sides of the substrate, and at least one limiting rod 43 is used to limit the bottom of the substrate.

[0076] Among them, multiple limiting rods 43 are provided with multiple serrated limiting grooves 431 at the contact points with the substrate, and the limiting grooves 431 on the multiple limiting rods 43 are correspondingly provided, and the width of the limiting grooves 431 matches the thickness of the substrate.

[0077] The first support 41 and the second support 42 mentioned above can be plate-shaped structures or frame-shaped structures, such as the structure shown in the figure, where the first support 41 and the second support 42 are rectangular frames.

[0078] The carrier 4, through the first bracket 41, the second bracket 42, and multiple limiting rods 43 located between them, forms a stable support structure, ensuring the stability of the substrate during placement and transfer, and preventing damage caused by shaking or tilting. Considering that the substrate is generally a rectangular plate structure, at least two limiting rods 43 are used to limit the two sides of the substrate, preventing horizontal movement. Simultaneously, at least one limiting rod 43 is used to limit the bottom edge of the substrate. By providing limiting grooves 431 on the limiting rods 43, and with corresponding limiting grooves 431 on multiple limiting rods 43, a receiving position for the substrate is provided. The width of the limiting grooves 431 matches the thickness of the substrate, allowing for the loading of substrates of different thicknesses and models by replacing the limiting rods, thus improving the versatility of the substrate transfer assembly.

[0079] In order to disclose the technical solutions in this application in more detail, two specific examples are provided below: Example 1

[0080] This example provides a device for transferring vehicles, the specific structure and usage of which are as follows:

[0081] like Figure 1 As shown, the device includes a first clamping part 1 and a second clamping part 2. The first clamping part 1 includes a first clamping rod 11 and a first clamping groove 12. The first end of the first clamping rod 11 and the first clamping groove 12 are fixedly connected by integral molding, which ensures the stability of the structure and the reliability of use.

[0082] The second clamping part 2 includes a second clamping rod 21 and a second clamping groove 22. The first end of the second clamping rod 21 and the second clamping groove 22 are also fixedly connected by integral molding. The second end of the first clamping rod 11 and the second end of the second clamping rod 21 are connected by welding, so that the first clamping rod 11 and the second clamping rod 21 maintain an angle of about 30 degrees.

[0083] In this example, the distance between the first clamping groove 12 and the second clamping groove 22 is greater than the width of the carrier 4 to ensure that the carrier 4 can be clamped smoothly without getting stuck or damaged. The length of the first clamping part 1 and the second clamping part 2 is 400mm, and the lengths of the first clamping rod 11 and the second clamping rod 21 are the same, with a ratio of 4:1 to the height of the carrier 4. The length of the first clamping groove 12 is greater than the width of the first clamping rod 11, and its shape matches the shape of the frame of the carrier 4. The second clamping groove is correspondingly provided with the first clamping groove. The first clamping groove 12 and the second clamping groove 22 have the same shape, both being grooves with an arc-shaped cross-section.

[0084] In this example, an anti-slip portion is provided on the outer middle part of the first clamping rod 11 and the second clamping rod 21. The anti-slip portion includes multiple parallel anti-slip grooves 31. The depth and length directions of these anti-slip grooves 31 are perpendicular to the length direction of the first clamping rod 11 or the second clamping rod 21. The width of each anti-slip groove 31 is 2mm, the spacing between adjacent anti-slip grooves 31 is 1mm, and the overall length of the anti-slip portion 3 is 1 / 4 of the length of the first clamping rod 11 or the second clamping rod 21. In actual use, the operator can align the first clamping groove 12 and the second clamping groove 22 of the device with the two side frames of the carrier 4, and then forcefully clamp the first clamping portion 1 and the second clamping portion 2 together, so that the carrier 4 is stably clamped in the device. Due to the presence of the anti-slip portion 3, the operator can operate more easily and stably during the clamping process, avoiding damage to the carrier 4 and the substrate or operational failure caused by slippage.

[0085] Example 2

[0086] Example 2 is a substrate transfer component, such as Figure 5 As shown, the component includes the device for transferring the vehicle provided in Example 1 and the vehicle 4. The specific structure of the vehicle 4 includes:

[0087] The first support 41 and the second support 42 are set in parallel planes or at a certain angle, and together they serve as the main structure of the carrier 4.

[0088] Three limiting rods 43 are connected between the first bracket 41 and the second bracket 42. Two of the limiting rods 43 are located on both sides of the first bracket 41 and the second bracket 42 to limit the substrate from moving to the left or right. One of the limiting rods 43 is located at the bottom of the first bracket 41 and the second bracket 42 to limit the substrate from moving downward.

[0089] At the contact point between the limiting rod 43 and the substrate, a plurality of serrated limiting grooves 431 are provided. These limiting grooves 431 are correspondingly set, that is, the position and shape of the groove on each limiting rod 43 match the grooves on other limiting rods 43, and the width of the limiting groove 431 matches the thickness of the substrate, ensuring that the substrate can be tightly embedded in the groove, neither too tight to cause jamming nor too loose to cause shaking.

[0090] The substrate transfer assembly provided in this example enables efficient and stable transfer of substrates. During the transfer process, the substrate is firmly fixed to the carrier, avoiding damage or errors caused by shaking or offset, ensuring that the substrate can be transferred along a predetermined path and speed, thereby improving production efficiency and product quality.

[0091] The above description is only a partial embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the embodiments of this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A device for transferring a vehicle, characterized in that, include: The first clamping part (1) includes a first clamping rod (11) and a first clamping groove (12), and one end of the first clamping rod (11) is fixedly connected to the first clamping groove (12); The second clamping part (2) includes a second clamping rod (21) and a second clamping groove (22), one end of the second clamping rod (21) being fixedly connected to the second clamping groove (22); The first clamping rod (11) is located at one end away from the first clamping groove (12) and connected to the second clamping rod (21) at one end away from the second clamping groove (22); the first clamping rod (11) and the second clamping rod (21) have a preset angle between them; The ratio of the length of the first clamping rod (11) to the height of the vehicle (4) is greater than or equal to 2:1, and the ratio of the length of the second clamping rod (21) to the height of the vehicle (4) is greater than or equal to 2:

1.

2. The apparatus according to claim 1, characterized in that, The lengths of the first clamping part (1) and the second clamping part (2) are 100mm to 500mm.

3. The apparatus according to claim 1, characterized in that, The first clamping groove (12) is fixedly connected to the first clamping rod (11); the second clamping groove (22) is fixedly connected to the second clamping rod (21).

4. The apparatus according to claim 3, characterized in that, The first clamping groove (12) and the first clamping rod (11) are integrally formed, or connected by welding, or are detachably connected; the second clamping groove (22) and the second clamping rod (21) are integrally formed, or connected by welding, or are detachably connected.

5. The apparatus according to claim 1, characterized in that, The length of the first clamping groove (12) is greater than the width of the first clamping rod (11), and the shape of the first clamping groove (12) matches the shape of the frame of the vehicle (4); the length of the second clamping groove (22) is greater than the width of the second clamping rod (21), and the shape of the second clamping groove (22) matches the shape of the frame of the vehicle (4).

6. The apparatus according to claim 5, characterized in that, The first clamping groove (12) is a groove whose cross-section includes an arc or multiple straight lines, and the second clamping groove (22) is a groove whose cross-section includes an arc or multiple straight lines; The openings of the first clamping groove (12) and the second clamping groove (22) are opposite to each other or back to back, and their length directions are perpendicular to the length directions of the first clamping rod (11) and the second clamping rod (21).

7. The apparatus according to claim 6, characterized in that, The depth directions of the first clamping groove (12) and the second clamping groove (22) are parallel to each other.

8. The apparatus according to any one of claims 1 to 6, characterized in that, An anti-slip part (3) is provided on the middle part of the outer side of the first clamping rod (11) and the second clamping rod (21); The anti-slip part (3) includes a plurality of anti-slip grooves (31) arranged in parallel. The depth direction and length direction of the anti-slip grooves (31) are perpendicular to the length direction of the first clamping rod (11) or the second clamping rod (21) provided thereon.

9. The apparatus according to claim 8, characterized in that, The length of the anti-slip part (3) is 1 / 5 to 1 / 3 of the length of the first clamping rod (11) or the second clamping rod (21) to which it is located; and / or, The width of the anti-slip groove (31) is 2mm to 3mm; the spacing between adjacent anti-slip grooves (31) is 0.5mm to 1.5mm.

10. A substrate transfer assembly, characterized in that, Includes a carrier (4) for placing a substrate and the apparatus according to any one of claims 1 to 9; The carrier (4) includes a first bracket (41), a second bracket (42), and a plurality of limiting rods (43) connected between the first bracket (41) and the second bracket (42); Of the plurality of limiting rods (43), at least two limiting rods (43) are used to limit the sides of the substrate, and at least one limiting rod (43) is used to limit the bottom of the substrate; The limiting rod (43) is provided with a plurality of serrated limiting grooves (431) at the junction with the substrate. The limiting grooves (431) on the plurality of limiting rods (43) are correspondingly provided, and the width of the limiting grooves (431) matches the thickness of the substrate.

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