Supporting frame suitable for wafer baskets of multiple sizes

Abstract

The utility model relates to a supporting frame suitable for multi-size wafer baskets, and belongs to the technical field of wafer production equipment. According to the supporting frame suitable for the wafer baskets of multiple sizes, the first supporting block, the second supporting block, the third supporting block and the two side plates are used for supporting the first wafer basket and the second wafer basket of different sizes through one supporting frame, so that wafer cleaning production equipment can directly adapt to wafers of different sizes; the adaptive capacity of the equipment is improved, and meanwhile, the wafer basket is stably and reliably supported.

Description

Technical Field

[0001] This application belongs to the field of wafer manufacturing equipment technology, and in particular relates to a support frame for wafer baskets of various sizes. Background Technology

[0002] For semiconductor wafer cleaning, the wafers require processes such as alkaline cleaning solution cleaning, pure water cleaning, hydrofluoric acid cleaning, ozone water cleaning, and drying. Wafer drying is generally the final step in wafer cleaning, which removes residual cleaning solution from the wafer surface, prevents wafer oxidation, and controls surface moisture and cleanliness. Both drying and cleaning require support frames to hold the wafer baskets. CN115274492A discloses a wafer basket support frame, but existing wafer basket support frames can only support wafer baskets of a fixed size. Currently, wafers come in various sizes, such as 6-inch, 8-inch, and even 12-inch, and sometimes a single device needs to process wafers of different sizes. In such cases, existing support frames cannot accommodate wafer baskets and wafers of multiple sizes. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a support frame that can be used for wafer baskets of multiple sizes, in order to overcome the shortcomings of the prior art.

[0004] The technical solution adopted by this utility model to solve its technical problem is:

[0005] A multi-size wafer basket support frame, comprising:

[0006] Base;

[0007] There are two side panels, located at both ends of the base;

[0008] The first support block, the second support block, and the third support block are all disposed on the base between the two side plates, and the third support block is located between the first support block and the second support block;

[0009] The first support block is provided with a first step surface and a second step surface, the second support block is provided with a third step surface, and the third support block is provided with a fourth step surface. The height of the third step surface is lower than that of the second step surface. The first step surface and the third step surface are at the same height, and the second step surface and the fourth step surface are at the same height.

[0010] The first and third stepped surfaces are used to support the bottom of the first wafer basket, and the side of the second support block and the side plate that is farther away from the second support block respectively limit the side of the first wafer basket.

[0011] The second and fourth stepped treads are used to support the bottom of the second wafer basket, and the two side plates limit the sides of the second wafer basket.

[0012] Preferably, in the multi-size wafer basket support frame of this invention, the orientation of the first step riser corresponding to the second step tread is opposite to the orientation of the second step riser corresponding to the third step tread.

[0013] Preferably, in the multi-size wafer basket support frame of this utility model, the first support block has a U-shaped groove, and the bottom of the U-shaped groove is the first stepped tread.

[0014] Preferably, in the multi-size wafer basket support frame of this utility model, the side plate is hollowed out in the middle, an mounting block is installed between the two side plates, the mounting block is fixed to the inner wall of the hollow part of the side plate, and top plates are provided on both sides of the mounting block.

[0015] Preferably, in the multi-size wafer basket support frame of this utility model, the top surfaces of the first step tread, the second step tread, the third step tread, and the fourth step tread are inclined surfaces.

[0016] Preferably, in the multi-size wafer basket support frame of this utility model, the mounting block has a hollow center.

[0017] Preferably, in the multi-size wafer basket support frame of this utility model, the third support block is located at the midpoint of the two side plates.

[0018] Preferably, the multi-size wafer basket support frame of this utility model has three mounting slots formed on the base. A first support block, a second support block, and a third support block are installed in the mounting slots. The mounting slots can be used to position the first support block, the second support block, and the third support block.

[0019] Preferably, the multi-size wafer basket support frame of this utility model has a first wafer basket that accommodates 6-inch wafers and a second wafer basket that accommodates 8-inch wafers.

[0020] The beneficial effects of this utility model are:

[0021] The multi-size wafer basket support frame of this application utilizes three support blocks (first support block, second support block, and third support block) and two side plates to support two first and second wafer baskets of different sizes with one support frame. This allows the wafer cleaning production equipment to directly adapt to wafers of different sizes, improving the adaptability of the equipment, while ensuring stable and reliable support for the wafer baskets. Attached Figure Description

[0022] The technical solution of this application will be further described below with reference to the accompanying drawings and embodiments.

[0023] Figure 1 This is a schematic diagram of the structure of a multi-size wafer basket support frame supporting a first wafer basket according to an embodiment of this application;

[0024] Figure 2 This is a schematic diagram of the structure of a multi-size wafer basket support frame that supports a second wafer basket according to an embodiment of this application;

[0025] Figure 3 This is a schematic diagram of the structure of a multi-size wafer basket support frame according to an embodiment of this application;

[0026] Figure 4 This is a side view of a multi-size wafer basket support frame supporting a first wafer basket according to an embodiment of this application;

[0027] Figure 5 This is a side view of a multi-size wafer basket support frame supporting a second wafer basket according to an embodiment of this application;

[0028] The attached figures are labeled as follows:

[0029] 11. Base;

[0030] 12. Side panels;

[0031] 13 First support block;

[0032] 14. Second support block;

[0033] 15. Third support block;

[0034] 16. Top slab;

[0035] 17 mounting blocks;

[0036] 91 First wafer basket;

[0037] 92 Second wafer basket;

[0038] 111 Mounting slot;

[0039] 131 First step tread;

[0040] 132 Second step tread;

[0041] 133 First step riser;

[0042] 141 Third step tread;

[0043] 142 Second-tier riser;

[0044] 151. Fourth step tread. Detailed Implementation

[0045] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0046] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the scope of protection of this application. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0047] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art will understand the specific meaning of the above terms in this application based on the specific circumstances.

[0048] The technical solution of this application will now be described in detail with reference to the accompanying drawings and embodiments.

[0049] Example

[0050] This embodiment provides a support frame suitable for wafer baskets of various sizes, such as... Figure 1 As shown, it includes:

[0051] Base 11;

[0052] There are two side panels 12, located at both ends of the base 11 respectively;

[0053] The first support block 13, the second support block 14 and the third support block 15 are all disposed on the base 11 between the two side plates 12, and the third support block 15 is located between the first support block 13 and the second support block 14.

[0054] The first support block 13 is provided with a first step tread 131 and a second step tread 132, the second support block 14 is provided with a third step tread 141, and the third support block 15 is provided with a fourth step tread 151. The height of the third step tread 141 is lower than that of the second step tread 132. The first step tread 131 and the third step tread 141 are at the same height, and the second step tread 132 and the fourth step tread 151 are at the same height.

[0055] The first step tread 131 and the third step tread 141 are used to support the bottom of the first wafer basket. The side of the second support block 14 and the side plate 12 which is far away from the second support block 14 respectively limit the side of the first wafer basket.

[0056] The second step tread 132 and the fourth step tread 151 are used to support the bottom of the second wafer basket and the two side plates 12 limit the sides of the second wafer basket.

[0057] The multi-size wafer basket support frame of this application utilizes three support blocks (first support block 13, second support block 14, and third support block 15) and two side plates 12 to support two first and second wafer baskets of different sizes with one support frame. This allows the wafer cleaning production equipment to directly adapt to wafers of different sizes, improves the adaptability of the equipment, and ensures stable and reliable support for the wafer baskets.

[0058] Furthermore, the orientation of the first step riser 133 corresponding to the second step tread 132 is opposite to the orientation of the second step riser 142 corresponding to the third step tread 141, and the wafer basket is positioned laterally by the two risers.

[0059] Furthermore, the first support block 13 has a U-shaped groove, the bottom of which is the first stepped tread surface 131. The U-shaped groove is also for securing the bottom of the first wafer basket.

[0060] Furthermore, the side plate 12 has a hollow center, and an mounting block 17 is installed between the two side plates 12. The mounting block 17 is fixed to the inner wall of the hollow part of the side plate 12. Top plates 16 are provided on both sides of the mounting block 17. The wafer basket is placed on a multi-size wafer basket support frame. The top plate 16 can lift the wafer in the wafer basket to a certain height.

[0061] Furthermore, the top surfaces of the first step tread 131, the second step tread 132, the third step tread 141, and the fourth step tread 151 are inclined surfaces, forming sharp points to reduce the contact area with the wafer basket.

[0062] Furthermore, the mounting block 17 has a hollow center to reduce material usage, reduce weight, and make the airflow channel smoother.

[0063] Furthermore, the third support block 15 is located at the midpoint between the two side plates 12.

[0064] Furthermore, the base 11 has three mounting slots 111 formed therein, in which a first support block 13, a second support block 14, and a third support block 15 are installed. The mounting slots 111 allow for positioning of the first support block 13, the second support block 14, and the third support block 15. The first support block 13, the second support block 14, and the third support block 15 are mounted on the base 11 with screws. Elongated holes are provided on the first support block 13, the second support block 14, and the third support block 15 to facilitate position adjustment.

[0065] The applicable multi-size wafer basket support frame of this application can be used to accommodate a 6-inch wafer basket (first wafer basket 91) for accommodating a 6-inch wafer or an 8-inch wafer basket (second wafer basket 92) for accommodating an 8-inch wafer.

[0066] Based on the above-described preferred embodiments according to this application, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this application. The technical scope of this application is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A wafer basket support frame suitable for multiple sizes, characterized in that, include: Base (11); There are two side panels (12), located at both ends of the base (11); The first support block (13), the second support block (14) and the third support block (15) are all disposed on the base (11) between the two side plates (12), and the third support block (15) is located between the first support block (13) and the second support block (14); The first support block (13) is provided with a first step surface (131) and a second step surface (132), the second support block (14) is provided with a third step surface (141), and the third support block (15) is provided with a fourth step surface (151). The height of the third step surface (141) is lower than that of the second step surface (132). The first step surface (131) and the third step surface (141) are at the same height, and the second step surface (132) and the fourth step surface (151) are at the same height. The first step surface (131) and the third step surface (141) are used to support the bottom of the first wafer basket. The side of the second support block (14) and the side plate (12) which is far away from the second support block (14) respectively limit the side of the first wafer basket. The second step surface (132) and the fourth step surface (151) are used to support the bottom of the second wafer basket and the two side plates (12) limit the sides of the second wafer basket.

2. The applicable multi-size wafer basket support frame according to claim 1, characterized in that, The orientation of the first step riser (133) corresponding to the second step tread (132) is opposite to the orientation of the second step riser (142) corresponding to the third step tread (141).

3. The applicable multi-size wafer basket support frame according to claim 1, characterized in that, The first support block (13) has a U-shaped groove, the bottom of which is the first step surface (131).

4. The applicable multi-size wafer basket support frame according to claim 1, characterized in that, The side plate (12) has a hollow center, and an mounting block (17) is installed between the two side plates (12). The mounting block (17) is fixed to the inner wall of the hollow part of the side plate (12), and a top plate (16) is provided on both sides of the mounting block (17).

5. The applicable multi-size wafer basket support frame according to claim 1, characterized in that, The top surfaces of the first step tread (131), the second step tread (132), the third step tread (141), and the fourth step tread (151) are sloping surfaces.

6. The applicable multi-size wafer basket support frame according to claim 4, characterized in that, The mounting block (17) has a hollow center.

7. The applicable multi-size wafer basket support frame according to claim 4, characterized in that, The third support block (15) is located at the midpoint between the two side plates (12).

8. The applicable multi-size wafer basket support frame according to claim 1, characterized in that, The base (11) has three mounting slots (111) formed on it. The first support block (13), the second support block (14) and the third support block (15) are installed in the mounting slots (111). The mounting slots (111) can be used to position the first support block (13), the second support block (14) and the third support block (15).

9. The applicable multi-size wafer basket support frame according to claim 1, characterized in that, The first wafer basket is a 6-inch wafer basket that holds 6-inch wafers, and the second wafer basket is an 8-inch wafer basket that holds 8-inch wafers.

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