Drawing type supporting device without oil lubrication

Abstract

The utility model belongs to the technical field of semiconductor technology, and discloses an oil-free lubrication drawing type supporting device which comprises an upper tray, a lower tray and a first sliding block, the upper tray and the lower tray are both in a U shape, the upper tray comprises a carrying plate and first vertical plates on the two sides of the carrying plate, the lower tray comprises a supporting plate and second vertical plates on the two sides of the supporting plate, and the first sliding block is arranged on the supporting plate. The upper tray is located in the U-shaped space of the lower tray, two second vertical plates of the lower tray are each provided with a first sliding way in the length direction of the corresponding second vertical plate, the upper edge of each second vertical plate is provided with a notch, and the notches are formed in one ends of the first sliding ways and communicate with the first sliding ways; the first sliding block slides into the first sliding way through the notch, the first sliding block slides along the first sliding way to drive the upper tray to slide relative to the lower tray, and the upper tray has a first state in which the upper tray is located above the lower tray and a second state in which the lower tray is pulled out. Lubricating oil and other particles or elements influencing the clean environment of the clean room are not introduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor process technology, and more specifically, to an oil-free, pull-out support device. Background Technology

[0002] In recent years, with the rapid development of the semiconductor industry and the widespread application of semiconductors, the cleanliness requirements of the cleanroom where semiconductor equipment is located have become increasingly stringent. The support device in the cleanroom that carries the items required for semiconductor processes uses a bearing slide rail structure for pull-out. The bearing slide rail structure requires lubrication. Oil stains may cause contamination of semiconductor equipment components or the working environment, generating impurity particles or introducing other elements, thereby affecting the semiconductor process and the quality of semiconductors. Utility Model Content

[0003] To address the shortcomings of existing technologies, this utility model innovatively provides an oil-free, pull-out support device. It has a simple structure, requires no lubricating oil, and does not introduce any other particles or elements that may affect the cleanliness of the cleanroom environment. It slides smoothly with a long sliding distance, has high load-bearing strength, and is structurally stable and reliable.

[0004] To achieve the aforementioned technical objectives, this utility model discloses an oil-free, pull-out support device, comprising an upper tray, a lower tray, and a first slider.

[0005] Both the upper tray and the lower tray are U-shaped. The upper tray includes a central carrying plate and first upright plates on both sides of the carrying plate. The lower tray includes a central support plate and second upright plates on both sides of the support plate. The upper tray is located within the U-shaped space of the lower tray.

[0006] Each of the two second upright plates of the lower tray is provided with a first slide rail along the length of the second upright plate. A notch is provided on the upper edge of the second upright plate, the notch being located at one end of the first slide rail and extending downward to communicate with the first slide rail.

[0007] The first slider is fixed on each of the two first upright plates of the upper tray. The first slider slides into the first slide rail through the notch. The first slider slides along the first slide rail to drive the upper tray to slide relative to the lower tray. The upper tray includes a first state of being above the lower tray and a second state of pulling out the lower tray.

[0008] Furthermore, a partition is provided between the first upright plate and the second upright plate, the partition being fixed to the first upright plate and located between the first slider and the first upright plate.

[0009] Furthermore, the first slider and the partition are fixed to the first upright plate by a first bolt and nut assembly, the first bolt and nut assembly including a first bolt and a first press-fit nut that matches the first bolt, the first press-fit nut being riveted to the first upright plate, and the thread of the first bolt passing through the first slider and the partition being threadedly connected to the first press-fit nut.

[0010] Furthermore, a support block is provided between the support plate and the carrier plate, and the support block is fixedly connected to the support plate.

[0011] Furthermore, a second slide rail with the same direction as the first slide rail is provided on the edge of each of the two first upright plates on the carrier plate. A second slider matching the second slide rail is fixed on the support plate. The second slide rail is sleeved on the second slider and can slide relative to the second slider. While the first slider slides along the first slide rail, the second slide rail slides relative to the second slider.

[0012] Furthermore, a support block is provided between the support plate and the carrier plate, the support block is fixedly connected to the support plate, and the support block is located below the second slider.

[0013] Furthermore, the support block and the second slider are fixedly connected to the support plate by a second bolt and nut assembly, the second bolt and nut assembly including a second bolt and a second press-fit nut, the second press-fit nut being riveted to the support plate, and the thread of the second bolt passing through the second slider and the support block and being threadedly connected to the second press-fit nut.

[0014] Furthermore, it also includes a locking and positioning component, which includes a third bolt and a third rivet nut that matches the third bolt. The third rivet nut is riveted to one of the first upright plate and the second upright plate. The other of the first upright plate and the second upright plate is provided with a positioning hole corresponding to the position of the third rivet nut. When the upper tray is in the first state, the positioning hole is aligned with the third rivet nut, and the screw of the third bolt passes through the positioning hole and is threadedly connected to the third rivet nut.

[0015] Furthermore, the carrier plate is provided with multiple pipeline fixing clip mounting holes, and some or all of the pipeline fixing clip mounting holes are equipped with pipeline fixing clips. The pipeline fixing clips are detachably connected to the carrier plate by bolt and nut assemblies or screws.

[0016] Furthermore, the carrier plate is provided with a plurality of carrier fasteners, the carrier fasteners including a fourth bolt and a fourth press-fit nut that matches the fourth bolt, the fourth press-fit nut being riveted to the carrier plate.

[0017] The beneficial effects of this utility model are as follows:

[0018] This utility model presents an oil-free, pull-out support device with a simple structure. It requires no lubricating oil and does not introduce any other particles or elements that may affect the cleanliness of the cleanroom environment. It slides smoothly with a long sliding distance, has high load-bearing strength, and is structurally stable and reliable. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural diagram of the oil-free lubrication pull-out support device according to an embodiment of the present invention.

[0020] Figure 2 This is a front view of the oil-free lubrication pull-out support device according to an embodiment of the present invention.

[0021] Figure 3 This is a right view of the oil-free lubrication pull-out support device according to an embodiment of the present invention.

[0022] Figure 4 This is a top view of the oil-free lubrication pull-out support device according to an embodiment of the present invention.

[0023] Figure 5 This is a bottom view of the oil-free, pull-out support device according to an embodiment of the present invention.

[0024] Figure 6 This is a schematic diagram of the upper tray structure according to an embodiment of the present utility model.

[0025] Figure 7 This is a schematic diagram of the structure of the lower tray according to an embodiment of the present invention.

[0026] Figure 8 This is a schematic diagram of the structure of the upper tray pulling out the lower tray according to an embodiment of the present invention.

[0027] Figure 9 yes Figure 4 Enlarged diagram of point A in the middle.

[0028] Figure 10 This is a diagram showing the connection relationship between the support block, the second slider, and the second bolt in an embodiment of this utility model.

[0029] Figure 11 This is a schematic diagram of the structure of the oil-free pull-out support device of this utility model carrying the load-bearing item.

[0030] In the picture,

[0031] 1. Upper tray; 11. Loading plate; 111. Second slide rail; 112. Pipeline fixing clamp mounting hole; 113. Mounting hole; 12. First upright plate; 13. First slider; 14. Baffle; 2. Lower tray; 21. Support plate; 211. Connecting hole; 22. Second upright plate; 221. First slide rail; 222. Notch; 223. Positioning hole; 23. Second slider; 24. Support upright plate; 3. Partition plate; 4. First bolt and nut assembly; 41. First bolt; 42. First rivet nut; 5. Support block; 6. Second bolt and nut assembly; 61. Second bolt; 62. Second rivet nut; 7. Locking and positioning component; 71. Third bolt; 72. Third rivet nut; 8. Pipeline fixing clamp; 9. Loading fastener; 91. Fourth bolt; 92. Fourth rivet nut; 10. Washer; 20. Loading item. Detailed Implementation

[0032] The oil-free, pull-out support device provided by this utility model will be explained and described in detail below with reference to the accompanying drawings.

[0033] This embodiment specifically discloses an oil-free, pull-out support device, such as... Figure 1-5 As shown, it includes an upper tray 1, a lower tray 2, and a first slider 13, as follows. Figure 6 and 7 As shown, both the upper tray 1 and the lower tray 2 are U-shaped. The upper tray 1 includes a central carrying plate 11 and first upright plates 12 on both sides of the carrying plate 11. The carrying plate 11 is flat, and the first upright plates 12 on both sides of the carrying plate 11 are vertically arranged and perpendicular to the carrying plate 11. The lower tray 2 includes a central support plate 21 and second upright plates 22 on both sides of the support plate 21. The support plate 21 is flat, and the second upright plates 22 on both sides of the support plate 21 are vertically arranged and perpendicular to the support plate 21. Figure 1-5 As shown in Figure 8, the upper tray 1 is located within the U-shaped space of the lower tray 2. The carrier plate 11 is used to carry items required for semiconductor processes, while the lower tray 2 provides support. The lower tray 2 can be placed directly on a flat surface in the cleanroom or fixedly connected to semiconductor equipment.

[0034] like Figure 1 , 3As shown in Figures 7 and 8, each of the two second upright plates 22 of the lower tray 2 has a first slide rail 221 along its length. A notch 222 is formed along the upper edge of the second upright plate 22, located at one end of the first slide rail 221 and extending downwards to communicate with it. The notch 222 and the first slide rail 221 form an L-shaped structure. The notch 222 can be located at either end of the first slide rail 221. The second upright plate 22 can be a double-layer structure, with the notch 222 and the first slide rail 221 located on the inner upright plate near the support plate 21. Alternatively, the second upright plate 22 can be a single-layer structure, with the notch 222 and the first slide rail 221 penetrating the second upright plate 22 in its thickness direction. That is, the notch 222 and the first slide rail 221 are holes opened in the second upright plate 22, and the first slide rail 221 is an oblong hole. Preferably, the second upright plate 22 has a single-layer structure, which is simple and easy to process.

[0035] like Figure 1 , 8 As shown in Figure 9, each of the two first upright plates 12 of the upper tray 1 is fixed with a first slider 13, and the two first sliders 13 are matched one-to-one with the two first slide rails 221. The first sliders 13 are fixed to the outer side wall of the first upright plate 12. The first sliders 13 slide into the first slide rails 221 through the notch 222, installing the upper tray 1 into the U-shaped space of the lower tray 2. The first sliders 13 slide along the first slide rails 221 to drive the upper tray 1 to slide relative to the lower tray 2, thereby realizing the pull-out of the upper tray 1. The upper tray 1 includes a first state above the lower tray 2 ( Figure 1-5 The state shown) and the second state where the lower tray 2 is pulled out ( Figure 8 (As shown in the diagram). The initial state of the upper tray 1 is when the first slider 13 is located at the end of the notch 222 within the first slide rail 221. At this time, the upper tray 1 can be in either the first state or the second state, depending on which end of the first vertical plate 12 the first slider 13 is closer to. When the upper tray 1 is in the first state, the carrier item 20 is mounted on it for semiconductor processing. When the carrier item 20 needs repair, maintenance, or replacement, the upper tray 1, carrying the carrier item 20, is pulled out of the lower tray 2 to switch to the second state, facilitating operation by staff.

[0036] The first slider 13, located within the first slide rail 221, also serves as a support, maintaining a distance between the carrying plate 11 and the support plate 21, thus preventing friction between the carrying plate 11 and the support plate 21 when the upper tray 1 slides relative to the lower tray 2.

[0037] The notch 222 facilitates the installation of the upper tray 1 and the adjustment and replacement of the first slider 13, making maintenance easier.

[0038] The size of the carrying tray 11, the length and height of the first upright plate 12 are set according to the size of the item 20 being carried. The dimension of the support plate 21 perpendicular to the second upright plate 22 (the width of the support plate 21) is greater than the dimension of the carrying tray 11 in that direction (the width of the carrying tray 11); the dimension of the support plate 21 along the length of the second upright plate 22 (the length of the support plate 21) is not specifically limited, and can be greater than, less than or equal to the dimension of the carrying tray 11 in that direction (the length of the carrying tray 11), specifically set according to the distance from which the upper tray 1 is pulled out of the lower tray 2. The length of the first slide rail 221 is set according to the distance from which the upper tray 1 is pulled out of the lower tray 2. The first slide rail 221 is located on both sides of the lower tray 2, and the first slider 13 is located on both outer sides of the upper tray 1, which does not affect the carrying area and has a high load-bearing capacity.

[0039] like Figure 2 and 9 As shown, a gap is also maintained between the first upright plate 12 and the second upright plate 22 to avoid friction between the first upright plate 12 and the second upright plate 22 when the upper tray 1 slides. Preferably, a partition 3 is provided between the first upright plate 12 and the second upright plate 22, and the partition 3 is fixed on the first upright plate 12 and located between the first slider 13 and the first upright plate 12.

[0040] Optional, such as Figure 1 , 3 As shown in Figures 6, 8, and 9, the first slider 13 and the partition 3 are fixed to the first upright plate 12 by a first bolt and nut assembly 4. The first bolt and nut assembly 4 includes a first bolt 41 and a first press-fit nut 42 that matches the first bolt 41. The first press-fit nut 42 is riveted to the first upright plate 12. The thread of the first bolt 41 passes through the first slider 13 and the partition 3 and is threadedly connected to the first press-fit nut 42. The nut of the first bolt 41 is located on the side of the first slide rail 221 away from the second upright plate 22. The installation and removal of the first slider 13 and the partition 3 are convenient, facilitating operation in a limited space.

[0041] In this embodiment, both the upper tray 1 and the lower tray 2 are made of metal, such as 316 stainless steel, providing sufficient support strength. The first bolt 41 and the first rivet nut 42 are made of metal, such as stainless steel or titanium alloy. The first slider 13 and the partition 3 are made of non-metallic materials, such as nylon, rubber, or silicone, to reduce friction with metal. The first slider 13 and the partition 3 are fitted onto the threaded rod of the first bolt 41 and are fixed relative to the first bolt 41. The first slider 13 can be cylindrical, and the partition 3 can be a circular plate with a diameter larger than that of the first slider 13.

[0042] Optional, such as Figure 1 and 9 As shown, a washer 10 can be provided between the nut of the first bolt 41 and the first slider 13. The washer 10 is made of non-metallic material.

[0043] In some embodiments, such as Figure 1 , 2 As shown in Figure 10, a support block 5 is provided between the support plate 21 and the carrier plate 11, and the support block 5 is fixedly connected to the support plate 21. The support block 5 is used to support the upper tray 1, ensuring the stability of the upper tray 1 during sliding and reducing the shaking of the upper tray 1 during sliding. The support block 5 is made of non-metallic material to reduce friction with the metallic upper tray 1. The support block 5 can be cylindrical.

[0044] In some embodiments, such as Figure 1 , 4 As shown in Figures 6 and 8, a second slide rail 111 is provided on the edge of the carrying plate 11 near the two first upright plates 12, with the same direction as the first slide rail 221. The length of the second slide rail 111 is greater than or equal to the length of the first slide rail 221. A second slider 23 matching the second slide rail 111 is fixed on the support plate 21. The second slide rail 111 is sleeved on the second slider 23 and can slide relative to the second slider 23. While the first slider 13 slides along the first slide rail 221, the second slide rail 111 slides relative to the second slider 23. The second slide rail 111 and the second slider 23 are provided to assist the sliding of the upper tray 1, prevent the upper tray 1 from shaking when sliding, and improve the stability of the sliding. In the initial state, the first slider 13 is installed at the notch 222. If the upper tray 1 is in the second state where the lower tray 2 is pulled out, the position of the second slider 23 on the support plate 21 is closer to the end where the notch 222 is located relative to the two ends of the first slide rail 221. In the initial state, the first slider 13 is installed at the notch 222. If the upper tray 1 is in the first state, the position of the second slider 23 on the support plate 21 is closer to the end of the first slide rail 221 that is away from the notch 222. The position of the second slider 23 on the support plate 21 is determined according to the initial state of the upper tray 1, and this application does not impose any special limitations.

[0045] like Figure 11 As shown, the second slide rail 111 is located on both sides of the loading plate 11, which does not affect the loading area and has a high load-bearing capacity.

[0046] like Figure 10 As shown, the support block 5 is positioned below the second slider 23, which is inserted into the second slide rail 111. The second slide rail 111 has an oblong hole, and the second slider 23 is cylindrical. The second slider 23 is also made of non-metallic material to reduce friction with the metallic upper tray 1.

[0047] like Figure 1 , 2As shown in Figures 4, 5, 7, 8, and 10, the support block 5 and the second slider 23 are fixedly connected to the support plate 21 via the second bolt and nut assembly 6. The second bolt and nut assembly 6 includes a second bolt 61 and a second press-fit nut 62, as shown in Figures 4, 5, 7, 8, and 10. Figure 5 and 7 As shown, the second press-fit nut 62 is riveted to the support plate 21. The shank of the second bolt 61 passes through the second slider 23 and the support block 5 and is threadedly connected to the second press-fit nut 62. The nut of the second bolt 61 is positioned above the carrying plate 11. Both the second bolt 61 and the second press-fit nut 62 are made of metal, such as stainless steel or titanium alloy. Optional, such as... Figure 1 and 10 As shown, a washer 10 is provided between the second slider 23 and the nut of the second bolt 61. The washer 10 is made of non-metallic material to isolate the metal-to-metal friction between the nut of the second bolt 61 and the upper tray 1 when the upper tray 1 slides. The diameter of the washer 10 above the second slider 23 is larger than the width of the second slide rail 111, and the diameter of the support block 5 is also larger than the width of the second slide rail 111. The cooperation between the washer 10 and the support block 5 also serves as a limiting function, confining the second slider 23 within the second slide rail 111. Figure 10 As shown, the support block 5, the second slider 23 and the washer 10 are all sleeved on the screw of the second bolt 61 and fixed relative to the second bolt 61. The support block 5, the second slider 23 and the washer 10 cover the screw portion between the second rivet nut 62 and the nut of the second bolt 61 to prevent the screw from being exposed and rubbing against the upper tray 1.

[0048] In some embodiments, such as Figure 1-6 As shown in Figures 8 and 9, the oil-free pull-out support device of this application further includes a locking and positioning component 7. The locking and positioning component 7 includes a third bolt 71 and a third press-fit nut 72 that matches the third bolt 71. The third press-fit nut 72 is riveted to one of the first vertical plate 12 and the second vertical plate 22. The other of the first vertical plate 12 and the second vertical plate 22 is provided with a positioning hole 223 corresponding to the position of the third press-fit nut 72. In this embodiment, as shown in Figures 8 and 9, the oil-free pull-out support device of this application further includes a locking and positioning component 7. The locking and positioning component 7 includes a third bolt 71 and a third press-fit nut 72 that matches the position of the third press-fit nut 72. Figure 6 As shown, the third press-fit nut 72 is riveted to the first vertical plate 12, as follows. Figure 7 As shown, positioning holes 223 are provided on the second upright plate 22. Figure 1-5 As shown, when the upper tray 1 is in the first state, the positioning hole 223 is aligned with the third rivet nut 72, and the screw of the third bolt 71 passes through the positioning hole 223 and is threadedly connected to the third rivet nut 72, thereby locking the upper tray 1 to maintain the stability of the carried item 20.

[0049] In some embodiments, such as Figure 1 , 4As shown in Figures 6 and 8, the carrying plate 11 has multiple pipe fixing clip mounting holes 112, and pipe fixing clips 8 are installed in some or all of the pipe fixing clip mounting holes 112. The pipe fixing clips 8 are detachably connected to the carrying plate 11 by bolt and nut assemblies or screws. The pipe fixing clips 8 are used to classify and secure the water pipes, gas pipes, control cables, and other wire harnesses belonging to the carried item 20. The number and position of the pipe fixing clips 8 are set according to actual needs. Optionally, the pipe fixing bracket mounting holes 113 are arranged in a row, located on one side between the two first upright plates 12 on the carrying plate 11. When the pipe fixing clips 8 are detachably connected to the carrying plate 11 by bolt and nut assemblies, the nut is located below the carrying plate 11, and the bolt shank passes through the pipe fixing clip 8 and the pipe fixing clip mounting hole 112 and is screwed into the nut, fixing the pipe fixing clip 8 to the upper surface of the carrying plate 11. When the pipeline fixing clamp 8 is connected to the carrier plate 11 by screws, the pipeline fixing clamp mounting hole 112 is a threaded hole, and the screw shank passes through the pipeline fixing clamp 8 and is screwed into the pipeline fixing clamp mounting hole 112.

[0050] In some embodiments, such as Figure 1-5 As shown, the carrying plate 11 is provided with multiple carrying fasteners 9, each including a fourth bolt 91 and a fourth press-fit nut 92 that matches the fourth bolt 91. The fourth press-fit nut 92 is riveted to the carrying plate 11. Figure 6 As shown, the carrying plate 11 has multiple mounting holes 113. The positions of the mounting holes 113 are set according to actual needs. The fourth rivet nut 92 is pressed into the mounting hole 113. The fourth bolt 91 passes through the mounting hole on the carrying item 20 and is screwed into the fourth rivet nut 92, thus mounting the carrying item 20 onto the upper surface of the carrying plate 11 (e.g., ...). Figure 11 (As shown).

[0051] The nuts used in this embodiment are press-fit nuts, which are pre-pressed onto the upper tray 1 or lower tray 2. This reduces the need for repeated nut removal during the installation and removal of the slider, pipeline fixing clamp 8, load-bearing item 20, or locking and unlocking, and avoids the problem of difficult installation and removal due to limited operating space.

[0052] The nuts of the first bolt and nut assembly 4, the second bolt and nut assembly 6, the locking and positioning member 7, and the load-bearing fastener 9 in this application can also be other types of nuts, as long as they can be connected to the bolt shank to achieve the connection and fastening function.

[0053] In some embodiments, the lower tray 2 may be mounted on a semiconductor device, such as... Figure 5 and 7As shown, the support plate 21 has multiple connecting holes 211. The connecting holes 211 are oblong in shape, and the directions of the multiple connecting holes 211 can be the same or different. The lower tray 2 can be connected to the semiconductor equipment by bolts and nuts passing through the connecting holes 211. The oblong shape of the connecting holes 211 allows the installation position of the support device to be adjusted according to actual needs, facilitating cooperation with the semiconductor equipment.

[0054] Optional, such as Figure 1 , 3 As shown in Figures 7, 8, and 11, the bottom of the lower tray 2 and the two sides adjacent to the second upright plate 22 are each fixed with a support plate 24. The support plates 24 are vertically arranged and extend downwards from the lower tray 2. The two support plates 24 are at the same height and serve as supports.

[0055] Optional, such as Figure 1-4 As shown in Figures 6, 8, and 11, a baffle 14 is provided on the side of the carrying plate 11 opposite to the pipeline fixing clamp mounting hole 112. The baffle 14 is vertically set, and the height of the baffle 14 is set as needed to prevent the carried items 20 from slipping off the upper tray 1 when the upper tray 1 is pulled out under special circumstances.

[0056] The method of using the support device in this application is as follows:

[0057] The lower tray 2 is fixed to the semiconductor equipment or installed in other locations within the cleanroom using bolt and nut assemblies that mate with the connecting holes 211 on the support plate 21. Alternatively, the support device can be placed directly on the surface of the cleanroom. The first slider 13 slides into the first slide rail 221 from the notch 222, the upper tray 1 is placed within the U-shaped space of the lower tray 2, the lower surface of the upper tray 1 contacts the upper surface of the support block 5, and the second slider 23 is located at the end of the second slide rail 111. If the upper tray 1 is at this time... Figure 1-5 In the first state shown, the third rivet nut 72 is aligned with the positioning hole 223. After the screw of the third bolt 71 passes through the positioning hole 223, it is connected to the third rivet nut 72, thus locking the upper tray 1 in place. The item 20 can then be mounted on the carrying plate 11. If the first slider 13 is within the notch 222, the upper tray 1 is in... Figure 8 In the second state shown, first slide the upper tray 1 to switch it to the first state, then screw the third bolt 71 and the third rivet nut 72 together to lock the upper tray 1 in place. Alternatively, the carrying item 20 can be installed on the upper tray 1 first, and then the third bolt 71 and the third rivet nut 72 can be screwed together. When installing the carrying item 20, the upper tray 1 can be in either the first state or the second state.

[0058] When the item 20 on the upper tray 1 needs to be replaced, disassembled or maintained, the connection between the third bolt 71 and the third rivet nut 72 can be released, and the upper tray 1 can be pulled outward from the lower tray 2, so that the first slider 13 slides to the other end of the first slide 221, and the other end of the second slide 111 moves to contact the second slider 23. The upper tray 1 is pulled out by a distance approximately equal to the length of the first slide 221.

[0059] The slider and slide rail of this application do not require the use of lubricating oil or other lubricants, and will not introduce oil stains, impurities, particles or other elements; the overall structure is simple and easy to operate; the upper tray 1 is installed on the upper tray 1 through the notch 222, which is convenient for installation and disassembly and easy to maintain; the tray size, the position of the locking positioning part 7, the tray height, etc. can be adjusted according to the actual size of the carried items 20 and the application environment, and the structure can be flexibly changed.

[0060] In summary, the support device of this application has a simple structure, requires no lubrication, and does not introduce any particles or elements that may affect the cleanliness of the cleanroom environment. It slides smoothly with a long sliding distance, has high load-bearing capacity, and is structurally stable and reliable. Furthermore, the installation position, overall height, and size of the support device can be adjusted according to the actual environment, making it highly maintainable.

[0061] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0062] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0063] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0064] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0065] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and simple improvements made on the substantive content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A pull-out support device without oil lubrication, characterized in that, Includes an upper tray (1), a lower tray (2), and a first slider (13). Both the upper tray (1) and the lower tray (2) are U-shaped. The upper tray (1) includes a central carrying plate (11) and first upright plates (12) on both sides of the carrying plate (11). The lower tray (2) includes a central support plate (21) and second upright plates (22) on both sides of the support plate (21). The upper tray (1) is located within the U-shaped space of the lower tray (2). The lower tray (2) has two second upright plates (22) each provided with a first slide rail (221) along the length of the second upright plate (22). The upper edge of the second upright plate (22) is provided with a notch (222), which is located at one end of the first slide rail (221) and extends downward to communicate with the first slide rail (221). The upper tray (1) has two first vertical plates (12) fixed with first sliders (13). The first sliders (13) slide into the first slide rail (221) through the notch (222). The first sliders (13) slide along the first slide rail (221) to drive the upper tray (1) to slide relative to the lower tray (2). The upper tray (1) includes a first state above the lower tray (2) and a second state in which the lower tray (2) is pulled out.

2. The oil-free lubrication pull-out support device according to claim 1, characterized in that, A partition (3) is provided between the first upright plate (12) and the second upright plate (22). The partition (3) is fixed on the first upright plate (12) and located between the first slider (13) and the first upright plate (12).

3. The oil-free lubrication pull-out support device according to claim 2, characterized in that, The first slider (13) and the partition (3) are fixed to the first upright plate (12) by a first bolt and nut assembly (4). The first bolt and nut assembly (4) includes a first bolt (41) and a first press-fit nut (42) that matches the first bolt (41). The first press-fit nut (42) is riveted to the first upright plate (12). The screw of the first bolt (41) passes through the first slider (13) and the partition (3) and is threadedly connected to the first press-fit nut (42).

4. The oil-free, pull-out support device according to claim 1, characterized in that, A support block (5) is provided between the support plate (21) and the carrier plate (11), and the support block (5) is fixedly connected to the support plate (21).

5. The oil-free, pull-out support device according to claim 1, characterized in that, The loading plate (11) has a second slide rail (111) with the same direction as the first slide rail (221) on the edge of each of the two first upright plates (12). The support plate (21) has a second slider (23) that matches the second slide rail (111). The second slide rail (111) is sleeved on the second slider (23) and can slide relative to the second slider (23). While the first slider (13) slides along the first slide rail (221), the second slide rail (111) slides relative to the second slider (23).

6. The oil-free, pull-out support device according to claim 5, characterized in that, A support block (5) is provided between the support plate (21) and the carrier plate (11). The support block (5) is fixedly connected to the support plate (21) and is located below the second slider (23).

7. The oil-free, pull-out support device according to claim 6, characterized in that, The support block (5) and the second slider (23) are fixedly connected to the support plate (21) by the second bolt and nut assembly (6). The second bolt and nut assembly (6) includes a second bolt (61) and a second press-fit nut (62). The second press-fit nut (62) is riveted to the support plate (21). The screw of the second bolt (61) passes through the second slider (23) and the support block (5) and is threadedly connected to the second press-fit nut (62).

8. The oil-free, pull-out support device according to any one of claims 1-7, characterized in that, It also includes a locking and positioning component (7), which includes a third bolt (71) and a third rivet nut (72) that matches the third bolt (71). The third rivet nut (72) is riveted to one of the first upright plate (12) and the second upright plate (22). The other of the first upright plate (12) and the second upright plate (22) is provided with a positioning hole (223) corresponding to the position of the third rivet nut (72). When the upper tray (1) is in the first state, the positioning hole (223) is aligned with the third rivet nut (72), and the screw of the third bolt (71) passes through the positioning hole (223) and is threadedly connected to the third rivet nut (72).

9. The oil-free, pull-out support device according to any one of claims 1-7, characterized in that, The carrier plate (11) has multiple pipeline fixing clip mounting holes (112), and some or all of the pipeline fixing clip mounting holes (112) are equipped with pipeline fixing clips (8). The pipeline fixing clips (8) are detachably connected to the carrier plate (11) by bolt and nut assembly or screws.

10. The oil-free, pull-out support device according to any one of claims 1-7, characterized in that, The loading plate (11) is provided with a plurality of loading fasteners (9), the loading fasteners (9) include a fourth bolt (91) and a fourth press-fit nut (92) that matches the fourth bolt (91), the fourth press-fit nut (92) being riveted to the loading plate (11).

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