Reaction kettle device

Abstract

The utility model discloses a reaction kettle device, and belongs to the field of high-purity chemical equipment for semiconductors. The reaction kettle device comprises a kettle body and a reaction cavity used for providing a filtering reaction, a pressurizing opening is formed in the kettle body and is used for applying air pressure into the reaction cavity; the reaction kettle device further comprises a filtering device, the filtering device comprises a first connecting piece and a filtering piece, and the first connecting piece is fixedly connected with the filtering piece and arranged on the upper portion of the filtering piece. A second connecting piece is arranged on the kettle body, the first connecting piece and the second connecting piece are embedded so that the filtering device can be fixed in the kettle body, and a gap with the width ranging from 10 mm to 20 mm is formed between the filtering piece and the inner wall of the kettle body. According to the invention, the first connecting piece and the second connecting piece are embedded, so that the filtering device is fixed in the kettle body, and a gap with the width range of 10-20 mm is formed between the filtering piece and the inner wall of the kettle body; the volume of the filtering device capable of accommodating materials is ensured; and the problem that the filtering piece is too close to the inner wall of the kettle body to cause the filtering difficulty is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of high-purity chemical equipment for semiconductors, and more particularly to a reaction kettle device. BACKGROUND

[0002] As a commonly used reaction container in chemical production, the reaction kettle can ensure that the reaction is carried out under specific temperature, pressure and stirring conditions, thereby improving the reaction efficiency and product quality. In the process of producing precursor materials in the field of semiconductors, the reaction kettle is often used to dry the precursor materials. A stirring mechanism and a filtering mechanism are provided in the reaction kettle. The stirring mechanism stirs the materials sufficiently, and the filtering mechanism separates the liquid and the solid in the precursor and filters them out respectively during pressure increase.

[0003] In the prior art, the filter sleeve is used to filter the filtrate during the solid-liquid separation of the reaction kettle. The installation mode of the filter sleeve in the reaction kettle is limited by the overall volume of the reaction kettle. When the filter sleeve is too close to the inner wall of the reaction kettle, the filtration of the liquid is not smooth, and the filtering effect is poor. When the filter sleeve is too far away from the inner wall of the reaction kettle, the volume of the liquid filtered at a time is too small, which affects the production efficiency. SUMMARY

[0004] The summary part of the present application is used to introduce the concepts in a brief form, which will be described in detail in the specific embodiment part. The summary part of the present application is not intended to identify the key features or essential features of the claimed technical solution, nor is it intended to limit the scope of the claimed technical solution.

[0005] Some embodiments of the present application propose a reaction kettle device to solve the technical problems mentioned in the background part.

[0006] As a first aspect of the present application, some embodiments of the present application provide a reaction kettle device, comprising

[0007] a kettle body for providing a reaction cavity for filtering reaction;

[0008] wherein a pressurizing port is provided on the kettle body for applying air pressure to the reaction cavity;

[0009] The reaction kettle device further comprises a filtering device, and the filtering device comprises a first connecting piece and the filtering piece. The first connecting piece is fixedly connected to the filtering piece and is arranged on the upper part of the filtering piece.

[0010] wherein a second connecting piece is provided on the kettle body, the first connecting piece and the second connecting piece are fitted to fix the filtering device inside the kettle body, and a gap with a width ranging from 10mm to 20mm is formed between the filtering piece and the inner wall of the kettle body.

[0011] Further, the first connecting piece comprises a supporting part and a connecting part, the connecting part is fixedly connected with the filtering piece, and the supporting part is arranged outside the connecting part.

[0012] Further, a plurality of filtering holes are arranged on the filtering piece, the filtering holes close to the connecting part have a smaller diameter than the filtering holes far away from the connecting part.

[0013] Further, the ratio of the length of the connecting part in the first straight line direction to the length of the filtering piece in the first straight line direction ranges from 1 / 8 to 1 / 6.

[0014] Further, the supporting part comprises a clamping mechanism and a protruding mechanism, the clamping mechanism is fixedly connected with the connecting part and flush with the uppermost end of the connecting part, the protruding mechanism is arranged on the side of the clamping mechanism away from the connecting part, and a sealing ring is arranged on the side of the protruding mechanism away from the connecting part.

[0015] Further, the cross-sectional diameter of the sealing ring is greater than the length of the protruding mechanism in the first straight line direction.

[0016] Further, the protruding mechanism is arranged at the middle position of the clamping mechanism in the first straight line direction, so that the upper half of the clamping mechanism and the protruding mechanism form a first step, and the lower half of the clamping mechanism and the protruding mechanism form a second step.

[0017] Further, the kettle body comprises a kettle body and a kettle cover, the kettle body and the kettle cover are detachably connected, the kettle cover is provided with a feeding port, and the kettle body is provided with a discharging port.

[0018] Further, the connection part of the kettle body and the kettle cover forms a second connecting piece, the second connecting piece comprises a sealing cavity, so that the upper surface of the protruding mechanism is flush with the connecting surface of the kettle body and the kettle cover when the protruding mechanism and the sealing ring are arranged in the sealing cavity.

[0019] Further, the second connecting piece further comprises a third step and a fourth step, the third step and the first step are fitted when the protruding mechanism and the sealing ring are arranged in the sealing cavity, and the fourth step and the second step are fitted.

[0020] Compared with the prior art, the technical scheme provided in the application has the following beneficial effects:

[0021] The first connecting piece and the second connecting piece are fitted in the application, so that the filtering device is fixed in the interior of the kettle body, and a gap with a width ranging from 10 mm to 20 mm is formed between the filtering piece and the inner wall of the kettle body, that is, the volume of the filtering device itself can accommodate the material, and the filtering piece and the inner wall of the kettle body are not too close to cause difficulty in filtering. Attached Figure Description

[0022] The accompanying drawings, which form part of this application, are used to provide a further understanding of the application and to make other features, objects, and advantages of the application more apparent. The illustrative embodiments and descriptions of this application are used to explain the application and do not constitute an undue limitation of the application.

[0023] Furthermore, throughout the accompanying drawings, the same or similar reference numerals denote the same or similar elements. It should be understood that the drawings are schematic, and the elements are not necessarily drawn to scale.

[0024] Fig. 1 This is a schematic diagram of the overall structure of a reactor apparatus according to an embodiment of this application;

[0025] Fig. 2 This is a schematic diagram of the filter device structure of a reaction vessel apparatus according to an embodiment of this application;

[0026] Fig. 3 This is a schematic diagram of the structure of the filtration device inside the reactor body of a reactor apparatus according to an embodiment of this application;

[0027] Explanation of the labels in the diagram:

[0028] 100, vessel body; 110, reaction chamber; 120, second connecting piece; 121, sealing chamber; 122, third step; 123, fourth step; 130, vessel body; 140, vessel lid;

[0029] 200, Filtering device; 210, First connecting member; 211, Support part; 211a, Clamping mechanism; 211b, Protruding mechanism; 211a-1, First step; 211a-2, Second step; 212, Connecting part; 220, Filter element; 221, Filter hole; 230, Sealing ring;

[0030] L1, the first straight line;

[0031] A. Gap. Detailed Implementation

[0032] Embodiments of this disclosure will now be described in more detail with reference to the accompanying drawings. While some embodiments of this disclosure are shown in the drawings, it should be understood that this disclosure can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this disclosure. It should be understood that the accompanying drawings and embodiments of this disclosure are for illustrative purposes only and are not intended to limit the scope of protection of this disclosure.

[0033] It should also be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings. Unless otherwise specified, the embodiments and features described in this disclosure can be combined with each other.

[0034] It should be noted that the concepts of "first" and "second" mentioned in this disclosure are used only to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependencies.

[0035] It should be noted that the terms "a" and "a plurality of" used in this disclosure are illustrative rather than restrictive, and those skilled in the art should understand that, unless otherwise expressly indicated in the context, they should be understood as "one or more".

[0036] The names of messages or information exchanged between multiple devices in the embodiments of this disclosure are for illustrative purposes only and are not intended to limit the scope of such messages or information.

[0037] This disclosure will now be described in detail with reference to the accompanying drawings and embodiments.

[0038] like Figs. 1 to 3 As shown, an embodiment of this application discloses a reaction vessel apparatus, including a vessel body 100 for providing a reaction chamber 110 for filtering reactions; wherein, the vessel body 100 is provided with a pressurization port for applying gas pressure into the reaction chamber 110; the reaction vessel apparatus further includes a filtering device 200, the filtering device 200 including a first connector 210 and a filter element 220, the first connector 210 being fixedly connected to the filter element 220 and disposed on the upper part of the filter element 220; wherein, the vessel body 100 is provided with a second connector 120, the first connector 210 and the second connector 120 being fitted together to fix the filtering device 200 inside the vessel body 100 and forming a gap A with a width ranging from 10 mm to 20 mm between the filter element 220 and the inner wall of the vessel body 100.

[0039] Specifically, the reaction kettle device of the present application comprises a kettle body 100 and a pressurizing device provided on the kettle body 100, the pressurizing device is used to fill high-pressure inert gas, such as nitrogen and other relatively stable gases, into the reaction cavity 110, and the water in the material can be filtered out more quickly by using the inert gas to act on the material. The reaction kettle device is also provided with a filtering device 200, which is used to separate the liquid and solid in the material, and the filtering device 200 comprises a first connecting piece 210 and a filter 220, which are fixedly connected. The first connecting piece 210 is used to fix the filter 220 inside the kettle body 100, and the first connecting piece 210 is embedded with the second connecting piece 120 of the kettle body 100, that is, the first connecting piece 210 is clamped in the second connecting piece 120, so that the first connecting piece 210 and the filter 220 are fixed on the kettle body 100, and the first connecting piece 210 and the filter 220 cannot relatively displace with the kettle body 100.

[0040] More specifically, the kettle body 100 is a hollow cylinder, and the filtering device 200 and the kettle body 100 are adapted in shape, that is, the filtering device 200 is a cylinder in shape, and the upper end thereof has an opening for the material to enter the inside of the filtering device 200, and the lower end is connected with the discharge port to enable the solid material after filtering to be discharged from the discharge port. The first connecting piece 210 and the second connecting piece 120 are embedded, and the gap between the filtering device 200 and the inner wall of the kettle body 100 has a width ranging from 10 mm to 20 mm, specifically 10 mm, 12 mm, 13 mm, 14 mm, 15 mm, 16 mm, 18 mm, 19 mm, and 20 mm. In this range, the gap A between the filtering device 200 and the inner wall of the kettle body 100 enables the filtering device 200 to filter the liquid without forming surface tension between the liquid and the liquid adhered to the inner wall of the kettle body 100 to block the filter holes 221 of the filtering device 200, and also does not cause the space inside the filtering device 200 to be relatively small in volume compared with the reaction cavity 110, effectively increasing the filtering speed and improving the production efficiency.

[0041] In one specific embodiment, the first connecting piece 210 comprises a supporting part 211 and a connecting part 212, the connecting part 212 is fixedly connected with the filtering piece 220, the supporting part 211 is arranged outside the connecting part 212, and the filtering piece 220 is provided with a plurality of filtering holes 221. The supporting part 211 is a metal ring for supporting the whole filtering device 200 so that the filtering device 200 is adapted to the shape of the kettle body 100. The connecting part 212 is fixedly connected with the filtering piece 220, the filtering piece 220 is provided with filtering holes 221, the connecting part 212 is not provided with filtering holes 221, and the ratio of the length of the connecting part 212 in the first straight line L1 direction to the length of the filtering piece 220 in the first straight line L1 direction ranges from 1 / 8 to 1 / 6. Since the connecting part 212 is the transition part between the outside of the filtering device 200 and the filtering piece 220, when the inside of the kettle body 100 is pressurized, in order to make the pressure inside the filtering device 200 greater than the pressure in the gap A between the filtering piece 220 and the inner wall of the kettle body 100, the connecting part 212 is arranged between the outside of the filtering device 200 and the filtering piece 220, the connecting part 212 separates the gap A and the inside space of the filtering device 200, at the same time, the inside of the filtering device 200 is pressurized, that is, the pressure difference between the gap A and the inside area of the filtering device 200 is ensured, and then the water in the material inside the filtering device 200 can be more smoothly discharged to the gap A, and the effect of accelerating the filtration rate is achieved. The first straight line L1 is the straight line in the direction of gravity.

[0042] More specifically, the diameter of the filtering hole 221 close to the connecting part 212 is smaller than the diameter of the filtering hole 221 away from the connecting part 212. Since the pressurizing port is arranged at the upper part of the kettle body 100, that is, the inert gas is filled from the upper part of the kettle body 100, therefore the pressure at the upper part of the filtering device 200 will be greater than the pressure at the lower part of the filtering device 200, in order to ensure that the pressures at different positions of the filtering device 200 are equal, the diameter of the filtering hole 221 is arranged to be smaller close to the connecting part 212 than away from the connecting part 212, which effectively ensures that the pressures at different positions of the filtering device 200 are equal, and the filtering effect is ensured.

[0043] In one specific embodiment, the kettle body 100 comprises a kettle body 130 and a kettle cover 140, the kettle body 130 and the kettle cover 140 are detachably connected, the kettle cover 140 is provided with a feeding port, and the kettle body 130 is provided with a discharging port.

[0044] The support part 211 comprises a clamping mechanism 211a and a protruding mechanism 211b. The clamping mechanism 211a is fixedly connected to the connecting part 212 and flush with the upper end of the connecting part 212. The protruding mechanism 211b is arranged on the side of the clamping mechanism 211a away from the connecting part 212. A sealing ring 230 is arranged on the side of the protruding mechanism 211b away from the connecting part 212. The protruding mechanism 211b is arranged at the middle position of the clamping mechanism 211a in the first straight line L1 direction, so that the upper half of the clamping mechanism 211a and the protruding mechanism 211b form a first step 211a-1, and the lower half of the clamping mechanism 211a and the protruding mechanism 211b form a second step 211a-2.

[0045] Specifically, the clamping mechanism 211a and the protruding mechanism 211b are integrally manufactured. The clamping mechanism 211a is welded to the connecting part 212 and flush with the upper end of the connecting part 212. When the filter device 200 needs to be cleaned, the filter device 200 can be removed from the kettle body 100 by clamping the clamping mechanism 211a (i.e. clamping the first step). The protruding mechanism 211b is integrally manufactured with the clamping mechanism 211a. The protruding mechanism 211b and the clamping mechanism 211a form a "T" shaped ring as a whole. The protruding mechanism 211b can be fitted into the second connecting piece 120 so that the filter device 200 is fixed to the inner wall of the kettle body 100.

[0046] The connecting part of the kettle body 130 and the kettle cover 140 forms a second connecting piece 120. The second connecting piece 120 comprises a sealing cavity 121. When the protruding mechanism 211b and the sealing ring 230 are arranged in the sealing cavity 121, the upper surface of the protruding mechanism 211b is flush with the connecting surface of the kettle body 130 and the kettle cover 140. The second connecting piece 120 further comprises a third step 122 and a fourth step 123. When the protruding mechanism 211b and the sealing ring 230 are arranged in the sealing cavity 121, the third step 122 and the first step 211a-1 are fitted, and the fourth step 123 and the second step 211a-2 are fitted. The cross-sectional diameter of the sealing ring 230 is greater than the length of the protruding mechanism 211b in the first straight line L1 direction.

[0047] Specifically, when the kettle cover 140 and the kettle body 130 are connected, the second connecting piece 120 is formed between the kettle cover 140 and the kettle body 130, that is, the sealing cavity 121 is formed, the convex mechanism 211b can be engaged in the sealing cavity 121, and a sealing ring 230 is further arranged on one side of the convex mechanism 211b, and the cross-sectional diameter of the sealing ring 230 is greater than the length of the convex mechanism 211b in the first straight line L1 direction. The sealing ring 230 is made of elastic material, when the kettle cover 140 and the kettle body 130 are closed, the sealing ring 230 is pressed, and the two ends thereof are in close contact with the surfaces of the kettle cover 140 and the kettle body 130 close to each other, thereby ensuring the sealing between the kettle cover 140 and the kettle body 130, and effectively preventing the high-pressure reactor from affecting the filtering effect due to pressure leakage.

[0048] When the filtering device 200 is installed in the kettle body 100, that is, the convex mechanism 211b is engaged in the sealing cavity 121, the first step 211a-1 and the third step 122 are engaged, and the second step 211a-2 and the fourth step 123 are engaged. The third step 122 and the fourth step 123 can fix the filtering device 200 in the kettle body 100 without displacement, thereby ensuring that the gap A between the filtering device 200 and the inner wall of the kettle body 100 always remains unchanged, thereby improving the stability of the entire filtering process. At the same time, the multi-stage steps are arranged, that is, the multi-stage sealing is arranged, which prevents the inert gas outside the filtering device 200 from leaking into the gap between the filtering device 200 and the inner wall of the kettle body 100 from the position where the convex mechanism 211b and the sealing cavity 121 are in contact.

[0049] The above description is only some of the preferred embodiments of the present disclosure and the explanation of the applied technical principles. Those skilled in the art should understand that the scope of the application involved in the embodiments of the present disclosure is not limited to the technical solutions formed by the specific combinations of the above technical features, and should also cover other technical solutions formed by any combination of the above technical features or equivalent features without departing from the above inventive concept. For example, the above features and the technical features disclosed in the embodiments of the present disclosure (but not limited to) having similar functions are replaced with each other to form a technical solution.

Claims

1. A reaction kettle device, comprising a kettle body for providing a reaction cavity for filtration reaction; wherein a pressurizing port provided on the kettle body for applying air pressure to the reaction cavity; characterized in that: the reaction kettle device further comprises a filtration device, the filtration device comprises a first connecting member and a filter member, the first connecting member is fixedly connected to the filter member and is arranged on the upper part of the filter member; wherein a second connecting member is arranged on the kettle body, the first connecting member and the second connecting member are fitted to fix the filtration device inside the kettle body, and a gap with a width ranging from 10 mm to 20 mm is formed between the filter member and the inner wall of the kettle body.

2. The reaction kettle device according to claim 1, characterized in that: the first connecting member comprises a supporting part and a connecting part, the connecting part is fixedly connected to the filter member, and the supporting part is arranged outside the connecting part.

3. The reaction kettle device according to claim 2, characterized in that: a plurality of filter holes are arranged on the filter member, the filter holes close to the connecting part have a smaller diameter than the filter holes away from the connecting part.

4. The reaction kettle device according to claim 3, characterized in that: the ratio of the length of the connecting part in the first straight line direction to the length of the filter member in the first straight line direction ranges from 1 / 8 to 1 / 6.

5. The reaction kettle device according to any one of claims 2 to 4, characterized in that: the supporting part comprises a clamping mechanism and a protruding mechanism, the clamping mechanism is fixedly connected to the connecting part and flush with the uppermost end of the connecting part, the protruding mechanism is arranged on the side of the clamping mechanism away from the connecting part, and a sealing ring is arranged on the side of the protruding mechanism away from the connecting part.

6. The reaction kettle device according to claim 5, characterized in that: the cross-sectional diameter of the sealing ring is greater than the length of the protruding mechanism in the first straight line direction.

7. The reaction kettle device according to claim 6, characterized in that: the protruding mechanism is arranged at the middle position of the clamping mechanism in the first straight line direction, so that the upper half of the clamping mechanism and the protruding mechanism form a first step, and the lower half of the clamping mechanism and the protruding mechanism form a second step.

8. The reaction kettle device according to claim 7, characterized in that: the kettle body comprises a kettle body and a kettle cover, the kettle body and the kettle cover are detachably connected, the kettle cover is provided with a feeding port, and the kettle body is provided with a discharging port.

9. The reaction kettle device according to claim 8, characterized in that: the connection between the kettle body and the kettle cover forms a second connecting member, the second connecting member comprises a sealing cavity, and when the protruding mechanism and the sealing ring are arranged in the sealing cavity, the upper surface of the protruding mechanism is flush with the connecting surface of the kettle body and the kettle cover.

10. The reaction kettle device according to claim 9, characterized in that: the second connecting member further comprises a third step and a fourth step, and when the protruding mechanism and the sealing ring are arranged in the sealing cavity, the third step and the first step are fitted, and the fourth step and the second step are fitted.

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