Auxiliary device for cleaning Wedge process carrier

Abstract

The utility model relates to an auxiliary device for cleaning a web process carrier, which comprises a plurality of web bodies, a plurality of chock plugs and an upper carrier plate, the upper ends of the web bodies are connected with the chock plugs, the upper carrier plate is provided with a plurality of clamping holes, the diameter of the chock plugs is larger than that of the clamping holes, the web bodies extend below the clamping holes, and the chock plugs are clamped above the clamping holes. According to the ultrasonic cleaning device, the wedge bodies stretch into the lower portions of the clamping holes, the chock plugs are clamped above the clamping holes, then the multiple wedge bodies are immersed into the containing bottle containing the 10% sodium hydroxide solution through the upper carrying plate together to be subjected to ultrasonic cleaning, the clamping holes are formed at intervals, collision of the tip ends of the multiple wedge bodies is avoided, the wedge bodies are borne by the upper carrying plate to be cleaned, and the cleaning efficiency is improved. The number of cleaned wedges is controlled, and the number of cleaning times of the sodium hydroxide solution is controlled more reasonably.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semiconductor accessory cleaning equipment technical field, concretely relates to a kind of auxiliary device of cleaning wedge process carrier. BACKGROUND

[0002] The existing wedge cleaning process is as follows: 1. remove the wedge plug, and place all the wedges to be cleaned in a beaker containing 10% sodium hydroxide solution; 2. place the beaker containing the wedges into an ultrasonic cleaner; 3. set the power (60%-80%), time (25 min), and temperature (30°) of the ultrasonic cleaner for cleaning. However, this method has the following disadvantages: 1. the wedges may collide with each other when being placed in the beaker, which may damage the wedge tips and affect use; 2. the wedge tips may contact the bottom of the beaker and be damaged under the action of ultrasonic waves, which may affect use; 3. the number of wedges cleaned each time is different, but the replacement period of the sodium hydroxide solution is regular, which may result in uncleaned wedges and affect product welding quality. Therefore, the present application is proposed. SUMMARY

[0003] In view of the shortcomings of the prior art, the present application provides an auxiliary device for cleaning a wedge process carrier, which can simultaneously clean multiple wedge bodies without collision.

[0004] To solve the above technical problems, the present application adopts the following technical scheme: an auxiliary device for cleaning a wedge process carrier, comprising multiple wedge bodies, multiple plugs, and an upper loading plate. The wedge bodies are connected to the plugs at the upper end. The upper loading plate has multiple clamping holes. The diameter of the plugs is greater than that of the clamping holes. The wedge bodies extend below the clamping holes, and the plugs are clamped above the clamping holes.

[0005] Further, the auxiliary device further comprises a lower fixing plate. The lower fixing plate has multiple limiting holes corresponding to the clamping holes. The lower end of the wedge body extends from the limiting hole. A connecting component is arranged between the lower fixing plate and the upper loading plate.

[0006] Further, the connecting component comprises a bolt and a nut. The outer side of the upper surface of the upper loading plate is provided with a first connecting hole. The lower fixing plate is provided with a second connecting hole corresponding to the first connecting hole. The head of the bolt is clamped on the upper surface of the upper loading plate. The bolt passes through the first connecting hole and the second connecting hole and is connected to the nut.

[0007] Further, the auxiliary device further comprises a containing bottle, the upper loading plate is located at the opening of the containing bottle and abuts against the upper surface of the containing bottle, the wedge body extends into the containing bottle from the clamping hole.

[0008] Further, the auxiliary device further comprises a containing bottle, the upper loading plate is located at the opening of the containing bottle and abuts against the upper surface of the containing bottle, the wedge body extends into the containing bottle from the clamping hole, and the lower fixing plate is located in the containing bottle.

[0009] Further, the clamping ring is formed on the lower surface of the upper loading plate close to the outer circumferential surface and is matched with the outer diameter of the containing bottle.

[0010] Further, the diameter of the lower fixing plate is less than or equal to the inner diameter of the containing bottle.

[0011] Further, the lower surface of the plug has a plug-in hole, and the upper end of the wedge body is clamped through interference fit with the plug-in hole.

[0012] Compared with the prior art, the auxiliary device has the following beneficial effects:

[0013] The upper loading plate is provided, a plurality of clamping holes are arranged on the upper loading plate, the wedge body extends below the clamping hole and the plug is clamped above the clamping hole, then the plurality of wedge bodies are immersed into the containing bottle containing 10% sodium hydroxide solution together with the upper loading plate for ultrasonic cleaning, the clamping holes are arranged at intervals, collision of the tips of the plurality of wedge bodies is avoided, the wedge bodies are carried by the upper loading plate for cleaning, the number of the wedge bodies for cleaning is controlled, and the control of the cleaning frequency of the sodium hydroxide solution is more reasonable. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a front view structural schematic diagram of the embodiment 1 of the utility model;

[0015] Figure 2 It is a three-dimensional structural schematic diagram of the upper loading plate and the wedge body in the embodiment 1 of the utility model;

[0016] Figure 3 It is a three-dimensional structural schematic diagram of the upper loading plate and the wedge body in the embodiment 1 of the utility model in another direction;

[0017] Figure 4 It is a three-dimensional structural schematic diagram of the upper loading plate, the lower fixing plate and the wedge body in the embodiment 2 of the utility model;

[0018] Figure 5 It is a front view structural schematic diagram of the embodiment 2 of the utility model;

[0019] Figure 6It is the three-dimensional structure schematic view of the upper loading plate and the lower fixed plate in the embodiment 2 of the utility model.

[0020] Figure 7 It is the three-dimensional structure schematic view of another direction of the upper loading plate and the lower fixed plate in the embodiment 2 of the utility model.

[0021] Marked in the drawing: 1, wedge body;2, plug;3, upper loading plate;31, snap ring;32, clamping hole;4, containing bottle;5, lower fixed plate;51, limiting hole;52, connecting part;521, bolt;522, nut. DETAILED DESCRIPTION

[0022] In order to make the above features and advantages of the utility model more obvious and easy to understand, the following specific examples are described in detail as follows with the aid of drawings.

[0023] Embodiment 1

[0024] As Figures 1-3 Indicated, the embodiment provides a kind of auxiliary device for cleaning wedge process carrier, including multiple wedge body 1, multiple plug 2, upper loading plate 3 and containing bottle 4.

[0025] The material of wedge body 1 is tungsten steel, wedge body 1 upper end is connected with plug 2, specifically, plug 2 lower surface has plug-in hole, wedge body 1 upper end and plug-in hole are clamped by interference fit.

[0026] Upper loading plate 3 has multiple clamping holes 32, the number of clamping holes 32 in the embodiment is 15, plug 2 diameter is greater than the diameter of clamping hole 32, wedge body 1 is inserted into the lower clamping hole 32, plug 2 is clamped on the upper clamping hole 32, and the lower surface of upper loading plate 3 is formed with snap ring 31 near the outer peripheral surface, and snap ring 31 is adapted to the outer diameter of containing bottle 4.

[0027] Upper loading plate 3 is covered on the upper end of containing bottle 4, wedge body 1 is inserted into containing bottle 4 from clamping hole 32, containing bottle 4 is filled with 10% sodium hydroxide solution, and the welding end of wedge body 1 is covered with 10% sodium hydroxide solution.

[0028] Through upper loading plate 3, 15 wedge bodies 1 are loaded at a time and immersed in sodium hydroxide solution in containing bottle 4, and then ultrasonic cleaning is carried out, compared with the existing cleaning method, the plurality of wedge bodies 1 in the embodiment will not collide with the tip in the cleaning process, and the tip of wedge body 1 will not collide with beaker.

[0029] Embodiment 2

[0030] As Figures 4-7The embodiment is different from the embodiment 1 in that the auxiliary device further comprises a lower fixing plate 5, and the number of the clamping holes 32 on the upper loading plate 3 is more than that on the upper loading plate 3 in the embodiment 1. In the embodiment, the number of the clamping holes 32 is 21.

[0031] The lower fixing plate 5 is formed with a plurality of limiting holes 51 corresponding to the clamping holes 32, the wedge body 1 extends from the limiting hole 51 at the lower end, the connecting component 52 is arranged between the lower fixing plate 5 and the upper loading plate 3, the connecting component 52 comprises a bolt 521 and a nut 522, the first connecting hole is arranged on the outer side of the upper surface of the upper loading plate 3, the second connecting hole corresponding to the first connecting hole is arranged on the lower fixing plate 5, the head of the bolt 521 is clamped on the upper surface of the upper loading plate 3, and the bolt 521 passes through the first connecting hole and the second connecting hole and is connected with the nut 522.

[0032] The lower fixing plate 5 extends into the containing bottle 4, and the diameter of the lower fixing plate 5 is less than or equal to the inner diameter of the containing bottle 4. In the embodiment, the diameter of the lower fixing plate 5 is less than the inner diameter of the containing bottle 4.

[0033] The reason for arranging the lower fixing plate 5 is to avoid collision between the tips of the plurality of wedge bodies 1 or between the tip of the wedge body 1 and the containing bottle 4. Therefore, a distance needs to be arranged between the clamping holes 32. If the distance is too small, the wedge body 1 will collide with the containing bottle 4 or the adjacent wedge body 1 when the wedge body 1 shakes slightly. Therefore, the number of the clamping holes 32 in the embodiment cannot exceed 18. In the present scheme, the lower fixing plate 5 extending into the containing bottle 4 is arranged below the upper loading plate 3, the lower fixing plate 5 is provided with a plurality of limiting holes 51, and the two-point limiting of the wedge body 1 is realized through the clamping holes 32 and the limiting holes 51, so that the plurality of wedge bodies 1 will not be in contact during the cleaning process and will not be damaged.

[0034] The basic principle and main features of the present application and the advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above embodiments. The above embodiments and descriptions in the specification are only to illustrate the principle of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application. These changes and improvements all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. An auxiliary device for cleaning a wedge process carrier, characterized in that: The auxiliary device comprises a plurality of wedge bodies, a plurality of plugs and an upper loading plate, the upper end of the wedge body is connected with the plug, the upper loading plate has a plurality of clamping holes, the diameter of the plug is larger than that of the clamping hole, the wedge body extends below the clamping hole, and the plug is clamped above the clamping hole.

2. An auxiliary device for cleaning a wedge flow carrier according to claim 1, characterized in that: The auxiliary device further comprises a lower fixing plate, a plurality of limiting holes corresponding to the clamping holes are formed on the lower fixing plate, the lower end of the wedge body extends from the limiting hole, and a connecting component is arranged between the lower fixing plate and the upper loading plate.

3. An auxiliary device for cleaning a wedge flow carrier according to claim 2, characterized in that: The connecting component comprises a bolt and a nut, a first connecting hole is arranged on the outer side of the upper surface of the upper loading plate, a second connecting hole corresponding to the first connecting hole is arranged on the lower fixing plate, the head of the bolt is clamped on the upper surface of the upper loading plate, and the bolt passes through the first connecting hole and the second connecting hole and is connected with the nut.

4. An auxiliary device for cleaning a wedge flow carrier according to claim 1, characterized in that: The auxiliary device further comprises a containing bottle, the upper loading plate is located at the opening of the containing bottle and abuts against the upper surface of the containing bottle, and the wedge body extends into the containing bottle from the clamping hole.

5. An auxiliary device for cleaning a wedge flow process carrier according to claim 2, characterized in that: The auxiliary device further comprises a containing bottle, the upper loading plate is located at the opening of the containing bottle and abuts against the upper surface of the containing bottle, and the wedge body extends into the containing bottle from the clamping hole.

6. An auxiliary device for cleaning a wedge flow carrier according to claim 4 or 5, characterized in that: The lower surface of the upper loading plate is formed with a clamping ring near the outer circumferential surface, and the clamping ring is matched with the outer diameter of the containing bottle.

7. An auxiliary device for cleaning a wedge flow process carrier according to claim 5, characterized in that: The diameter of the lower fixing plate is smaller than or equal to the inner diameter of the containing bottle.

8. An auxiliary device for cleaning a wedge flow process carrier according to claim 1, characterized in that: The lower surface of the plug has a plug-in hole, and the upper end of the wedge body and the plug-in hole are clamped through interference fit.

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