Target material structure and physical vapor deposition equipment

Abstract

The utility model relates to the technical field of thin film deposition, in particular to a target material structure and physical vapor deposition equipment. The target material structure comprises a target material body, arc-shaped protruding target materials are arranged on the outer wall faces of the two ends of the target material body, and the middle of the target material body is sunken towards the center of the target material body to form an arc-surface groove. Compared with the prior art, the target material structure has the advantages that the utilization rate of the target material is improved, the service life is prolonged, the use amount and the replacement frequency of the target material can be reduced, and the production cost is further reduced; and meanwhile, the maintenance period is prolonged, the shutdown time can be reduced, the production efficiency is improved, and the cost is indirectly reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to thin film deposition technical field especially is related to a target material structure and physical vapor deposition equipment. BACKGROUND

[0002] At present, in the PVD (physical vapor deposition) process of many heterojunction (HJT) solar cell production workshops, the PVD target material pattern used is a cylindrical structure. Taking new and old target materials as examples, after the target material is periodically maintained and goes offline, it is found that the two sides are easily punched due to the diagonal effect, resulting in low efficiency of the battery piece. The service life of such target material is only 9000 KWH, and the target material utilization rate is 76%. At the same time, in the normal etching area, there is still a remaining target material thickness, and the length of the non-etching area on both sides is about 30mm, which causes a serious waste of ITO target material. Since the PVD target material is expensive, the waste of target material is not conducive to cost control.

[0003] Based on this, a new type of target material structure and physical vapor deposition equipment are developed in the utility model to solve the above problems. CONTENT OF THE UTILITY MODEL

[0004] One purpose of the utility model is to provide a target material structure which improves the target material utilization rate and prolongs the service life, can reduce the use amount and replacement frequency of the target material, and thus reduces the production cost; at the same time, prolonging the maintenance period can also reduce the downtime and improve the production efficiency, thereby indirectly reducing the cost.

[0005] The utility model adopts the following technical scheme: a target material structure, the target material structure comprises a target material body, the outer wall surface of both ends of the target material body is provided with an arc convex target material, and the middle part of the target material body is recessed to the center to form an arc concave groove.

[0006] Further, the target material body is sequentially divided into a first non-etching area, a first strong etching area, a normal etching area, a second strong etching area and a second non-etching area along the length direction thereof;

[0007] The arc convex target material is arranged at the first strong etching area and the second strong etching area of the target material body; and the arc concave groove is arranged at the normal etching area of the target material body.

[0008] Further, the arc convex target material and the target material body are integrally formed.

[0009] Further, the arc convex target material and the target material body are detachably connected.

[0010] Further, the arc convex target material is sleeved and installed on the target material body.

[0011] Further, the arc convex target material and the target material body are fixedly connected through the locking piece plug-in connection.

[0012] The material of the locking member is the same as that of the target material body.

[0013] Further, one of the arc-shaped protruding target material and the target material body is provided with at least one groove, and the other is provided with at least one protrusion matched with the groove.

[0014] Further, the thickness of the protruding part of the arc-shaped protruding target material is 2mm-4mm; and / or the recess depth of the arc-shaped recess is 1mm-2mm.

[0015] Further, the length of the first non-etching area and the second non-etching area is 10mm-15mm.

[0016] Compared with the related art, the utility model has the advantages that:

[0017] In the utility model, the target material body is designed as a middle recess and two end protrusions, which can match the etching speed of the middle area with that of the two ends, ensure the balanced use of the whole target material, promote the synchronous consumption of the two ends and the middle part of the target material, meet the actual etching demand, improve the target material utilization rate, and avoid the excessive waste of the target material in the middle area of the traditional cylindrical target material structure. On the other hand, the arc-shaped protruding target material is arranged at the two ends of the target material body, the thickness of the two sides is increased, and the risk of being punched due to the diagonal effect is greatly reduced. Thus, the service life of the target material structure is improved from 9000KWH of the traditional cylindrical structure to more than 10500KWH, the target material utilization rate is improved from 76% to more than 90%, the maintenance period is prolonged, and the production interruption and cost increase caused by frequent replacement of the target material are reduced.

[0018] In addition, improving the target material utilization rate and prolonging the service life can reduce the use amount and replacement frequency of the target material, and thus reduce the production cost. Meanwhile, prolonging the maintenance period can also reduce the downtime and improve the production efficiency, thereby indirectly reducing the cost.

[0019] The second object of the utility model is to provide a physical vapor deposition equipment which comprises the above target material structure. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the following embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating any creative labor.

[0021] Figure 1 It is a structural schematic view of the old target material structure in the prior art;

[0022] Figure 2 This is a schematic diagram of the target structure in a specific embodiment of the present invention. Figure 1 ;

[0023] Figure 3 This is a schematic diagram of the target structure in a specific embodiment of the present invention. Figure 2 ;

[0024] Figure 4 This is a schematic diagram of the target structure in a specific embodiment of the present invention. Figure 3 ;

[0025] Figure 5 This is a schematic diagram of the target structure in a specific embodiment of the present invention. Figure 4 ;

[0026] In the figure: target body 1, first non-etched area 10, first strongly etched area 11, normal etched area 12, second strongly etched area 13, second non-etched area 14, protrusion 15; arc-shaped protruding target 2, groove 20; arc-shaped groove 3; locking part 4. Detailed Implementation

[0027] The technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0028] The following is in conjunction with the appendix Figure 2 To be continued Figure 5 The present invention will be described in detail with specific embodiments:

[0029] like Figures 2 to 5 As shown, this utility model provides a target structure, which includes a target body 1. The outer wall surfaces at both ends of the target body 1 are provided with arc-shaped protruding target 2, and the middle part of the target body 1 is recessed towards its center to form an arc-shaped groove 3.

[0030] The target material structure, the target material body 1 adopts the design of middle part recess, two end protrusion, on one hand can make the middle area etching speed and both ends match, ensure that the target material overall balanced use, make the target material both ends and middle part synchronous consumption complete, accord with actual etching demand, improve the target material utilization rate, avoid the excessive waste of the target material in the middle area in the traditional cylindrical target material structure. On the other hand, by setting the arc-shaped protruding target material 2 at the two ends of the target material body 1, the thickness of the two sides is increased, and the risk of being punched due to the diagonal effect is greatly reduced. Therefore, the service life of the target material structure is improved from 9000KWH of the traditional cylindrical structure to more than 10500KWH, the target material utilization rate is improved from 76% to more than 90%, the maintenance cycle is prolonged, and the production interruption and cost increase caused by frequent replacement of the target material are reduced.

[0031] In addition, improving the target material utilization rate and prolonging the service life can reduce the use amount and replacement frequency of the target material, and further reduce the production cost. At the same time, prolonging the maintenance cycle can also reduce the downtime and improve the production efficiency, thereby indirectly reducing the cost.

[0032] Further, in some specific embodiments, as shown in the drawings, the target material body 1 is sequentially divided into a first non-etching area 10, a first strong etching area 11, a normal etching area 12, a second strong etching area 13 and a second non-etching area 14 along the length direction thereof. Figure 2 As shown in the drawings, the first non-etching area 10, the first strong etching area 11, the normal etching area 12, the second strong etching area 13 and the second non-etching area 14 are sequentially arranged from left to right. Figure 1

[0033] Among them, the arc-shaped protruding target material 2 is arranged at the first strong etching area 11 and the second strong etching area 13 of the target material body 1; the arc surface groove 3 is arranged at the normal etching area 12 of the target material body 1.

[0034] In the target material structure of the utility model, the arc-shaped protruding target material 2 is arranged in the strong etching area, which can better cope with the influence of strong etching and enhance the anti-punching performance. The arc surface groove 3 is arranged in the normal etching area 12, which can make the etching of the area more in line with the actual demand and avoid waste. Through the targeted structure design of different areas, not only the overall etching effect and service life of the target material are improved, but also the utilization rate of the target material is improved, and the production cost is further reduced.

[0035] Further, in some specific embodiments, the utility model does not make specific limitation on the mounting mode of the arc-shaped protruding target material 2 on the target material body 1, and all belong to the protection scope of the utility model.

[0036] As shown in the drawings, Figure 2 ​In the shown embodiment, the arc-shaped protruding target material 2 and the target material body 1 can be an integrally formed structure. Since the arc-shaped protruding target material 2 and the target material body 1 are integrally formed, there is no risk of loosening or separation of the connecting part, and the structural stability can be maintained during use, so that various forces during etching can be better coped with, and the service life of the target material is prolonged. At the same time, during production, the entire target material structure can be manufactured by one forming process, reducing the assembly link and improving the production efficiency.

[0037] As shown in the figure, the arc-shaped protruding target material 2 and the target material body 1 are connected in a detachable manner. If a part of the arc-shaped protruding target material 2 or the target material body 1 is damaged, it can be repaired or replaced individually, without the need to replace the entire target material structure, thereby improving the maintainability of the target material structure. In addition, different shaped thickening models can be detachably installed according to the etching degree of the two sides of different target material cycles, so as to improve the utilization rate of the target material. Figure 4

[0038] It should be noted that there are many ways to achieve detachable connection between the arc-shaped protruding target material 2 and the target material body 1. For example, the arc-shaped protruding target material 2 can be sleeved and installed on the target material body 1, which can be installed without damaging the target material body 1, and the operation is relatively simple. The arc-shaped protruding target material 2 and the target material body 1 can also be inserted and fixed, and the connection between them is firm, which can ensure that they will not fall off or shift during etching.

[0039] Specifically, as shown in the figure, in the embodiment, the arc-shaped protruding target material 2 and the target material body 1 are connected by the locking piece 4. The material of the locking piece 4 is the same as that of the target material body 1. The locking piece 4 is used for insertion and fixed connection, so that the connection between the arc-shaped protruding target material 2 and the target material body 1 is more firm. During etching, the target material will be subjected to various external forces, such as particle bombardment, airflow impact, etc. The firm connection can ensure that the arc-shaped protruding target material 2 will not fall off or shift, and the stability and reliability of the target material structure are ensured. At the same time, since the material of the locking piece 4 is the same as that of the target material body 1, there will be no problems such as stress concentration or mismatch of thermal expansion coefficient during connection, which further enhances the stability of the connection. The locking piece 4 can be a screw, a bolt, a stud, a latch, etc., as long as it can realize the fixed connection between the two. Meanwhile, the specific installation position and the number of the locking piece 4 are not limited in the utility model, which can be designed by the person skilled in the art according to the actual situation. Figure 4 Specifically, as shown in the figure,

[0040] Figure 5 ​​As shown, in the embodiment, one of the arc-shaped protruding target material 2 and the target material body 1 is provided with at least one groove 20, and the other is provided with at least one protrusion 15 matched with the groove 20, and the arc-shaped protruding target material 2 and the target material body 1 are detachably connected through the matching of the groove 20 and the protrusion 15. The matching design of the groove 20 and the protrusion 15 enables the arc-shaped protruding target material 2 and the target material body 1 to be quickly aligned and connected during installation, which can greatly save installation time and improve production efficiency. For application scenarios that require frequent replacement of target materials, this detachable connection method can quickly complete the replacement of target materials and reduce equipment downtime. At the same time, when the target material needs to be maintained, cleaned or replaced, the arc-shaped protruding target material 2 can be easily detached from the target material body 1, reinstalled after corresponding processing, and the maintenance cost and difficulty are reduced.

[0041] More specifically, the arc-shaped protruding target material 2 is provided with a groove 20, and the target material body 1 is provided with a protrusion 15. It should be noted that the shape, number, and setting position of the groove 20 in the utility model are not limited, and can be selected by those skilled in the art according to the actual situation.

[0042] Further, in some specific embodiments, as shown, Figure 3 The thickness b of the protrusion of the arc-shaped protruding target material 2 is 2mm-4mm. And / or, the recess depth a of the concave recess 3 is 1mm-2mm. The specific thickness range of the arc-shaped protruding target material 2 and the concave recess 3 matches each other to realize the balance of the overall structure of the target material. It should be noted that the protrusion refers to the position of the thickest value of the arc-shaped protruding target material 2, and the recess refers to the deepest recess position of the concave recess 3. The thicker arc-shaped protruding target material 2 provides sufficient strength and wear resistance in the strong etching area, and the appropriate depth of the concave recess 3 ensures the etching effect and material utilization rate in the normal etching area. This balanced design enables the target material to better play its respective role in different areas, improving the overall performance of the target material. At the same time, the reasonable thickness design makes the consumption of the target material in each area more balanced, the thickening of the arc-shaped protruding target material 2 can prolong the service life of the strong etching area, and the depth control of the concave recess 3 can avoid excessive waste in the normal etching area. In this way, the service life of the entire target material is prolonged, the utilization rate of the target material is improved, and the production cost is also reduced.

[0043] Further, in some embodiments, the length c of the first non-etching area 10 and the second non-etching area 14 is 10mm-15mm. Compared with the length of the non-etching area of about 30mm in the traditional cylindrical target structure, the length of the non-etching area is significantly shortened. In the traditional structure, a large amount of target material is not effectively utilized in the longer non-etching area, resulting in serious waste. In the present application, the length of the non-etching area is controlled to be 10mm-15mm, which greatly reduces the idle condition of the target material in the non-etching area, effectively improves the overall utilization rate of the target material, and avoids unnecessary material waste.

[0044] Secondly, due to the reduction of the amount of target material in the non-etching area, the total cost of the target material is reduced under the same conditions. Especially for expensive PVD target material, the improvement effect is significant.

[0045] Furthermore, the shorter length of the non-etching area makes the effective etching area of the target material more concentrated during the production process, improves the etching efficiency and precision, and reduces the interference of the non-etching area on the production process, which helps to improve the overall production efficiency.

[0046] With Figure 1 As a comparative example, the old target structure shown in Figure 2 As a comparative example, the old target structure shown in

[0047] The new target structure and the old target structure were used on the PVD machine respectively, and the product yield and efficiency during the entire target production cycle were continuously tracked. When the target was periodically offline, the target life was recorded, and the remaining thickness and weight of the target surface were measured and compared with the data of the old target structure.

[0048] According to the test data, the service life of the new target material is improved from 9000KWH to more than 10500KWH, the target utilization rate is improved from 76% to more than 90%, the waste of target material in the non-etching area is reduced, and the remaining amount of target material in the strong etching area and the normal etching area after etching is basically the same.

[0049] The physical vapor deposition equipment provided by the present application adopts all the technical solutions of the above-mentioned target structure, and therefore at least has all the beneficial effects brought by the technical solutions of the above-mentioned target structure, which will not be repeated here.

[0050] The utility model is further described above with the help of specific embodiments, but it should be understood that the specific description here should not be understood as limiting the essence and scope of the utility model, and various modifications made by the ordinary skilled in the art after reading the above embodiments belong to the scope protected by the utility model.

Claims

1.A target structure, characterized in that: the target structure comprises a target body, the outer wall surface of both ends of the target body is provided with an arc-shaped protruding target, and the middle part of the target body is recessed to the center to form an arc-shaped recess; the target body is sequentially divided into a first non-etching area, a first strong etching area, a normal etching area, a second strong etching area, and a second non-etching area along the length direction of the target body; the arc-shaped protruding target is arranged at the first strong etching area and the second strong etching area of the target body; and the arc-shaped recess is arranged at the normal etching area of the target body. 2.The target structure according to claim 1, characterized in that: the arc-shaped protruding target and the target body are integrally formed. 3.The target structure according to claim 1, characterized in that: the arc-shaped protruding target and the target body are detachably connected. 4.The target structure according to claim 3, characterized in that: the arc-shaped protruding target is sleeved and installed on the target body. 5.The target structure according to claim 3, characterized in that: the arc-shaped protruding target and the target body are fixedly connected through a locking piece; and the material of the locking piece is the same as that of the target body. 6.The target structure according to claim 3, characterized in that: one of the arc-shaped protruding target and the target body is provided with at least one recess, and the other is provided with at least one protrusion matched with the recess. 7.The target structure according to any one of claims 1 to 6, characterized in that: the thickness of the protruding part of the arc-shaped protruding target is 2 mm to 4 mm; and / or the recess depth of the recessed part of the arc-shaped recess is 1 mm to 2 mm. 8.The target structure according to any one of claims 1 to 6, characterized in that: the length of the first non-etching area and the second non-etching area is 10 mm to 15 mm. The target structure according to any one of claims 1 to 8. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 9. A physical vapor deposition apparatus, characterized by: ​

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