Coating preparation device

Abstract

The utility model relates to the technical field of film coatings, in particular to a coating preparation device which comprises a base and a shell, the shell and the base define a containing cavity, a reaction groove is formed in the base in a concave mode, the reaction groove is located in the containing cavity, the base is detachably connected with a bearing piece used for supporting a relay ring, and the bearing piece is located in the containing cavity. The shell is provided with a guide face, the guide face and the side face of the bearing part are arranged on the two opposite sides of the reaction tank respectively, the guide face is obliquely arranged in the direction facing the bearing part, and an air hole is formed in the top of the shell. The distribution of gas density is improved, diffusion and dilution of gas away from a tantalum source and a carbon-based reaction tank are reduced, the gas tightness of the tantalum oxide atmosphere in the length direction of the relay ring is uniform, tantalum oxide reacts with a carbon base on the surface of the relay ring to form a uniform tantalum carbide coating, and the quality and performance of the coating are ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to thin film coating technical field, especially in a kind of coating preparation device. BACKGROUND

[0002] With the rapid development of ultra-high voltage transmission, new energy vehicles and other fields, silicon carbide substrate market demand expands rapidly, and physical vapor transport method (PVT) growth silicon carbide single crystal is the current mainstream silicon carbide single crystal growth process. In physical vapor transport method (PVT) process, silicon (Si) atmosphere has strong corrosive effect on crucible material, which leads to carbon powder falling off the surface of the crucible and affecting the quality of silicon carbide crystal growth. Therefore, coating graphite crucible with tantalum carbide (TaC) coating to ensure the quality of crystal growth is an ideal choice.

[0003] The existing relay ring tantalum carbide plating device and method (CN202310994198) proposes to obtain a tantalum carbide coating by reacting a tantalum source with a carbon base. Since the tantalum source produces a tantalum atmosphere, the carbon base reacts with the tantalum atmosphere on the surface of the relay ring, resulting in a lower gas density of the tantalum atmosphere away from the tantalum source and the carbon base reaction area. The gas density of the tantalum atmosphere is not uniform, resulting in uneven coating on the surface of the relay ring. UTILITY MODEL CONTENT

[0004] The utility model aims to provide a coating preparation device to solve the problem of uneven tantalum carbide coating on the surface of the relay ring in the prior art.

[0005] The technical solution of the utility model is a coating preparation device, which comprises a base and a shell. The shell and the base form a containing cavity. A reaction tank is recessed in the base to generate a tantalum oxide atmosphere by reacting a tantalum source and a carbon base. The reaction tank is located in the containing cavity. The base is detachably connected to a carrier for supporting the relay ring. The shell is provided with a guide surface. The guide surface and the side surface of the carrier are located on opposite sides of the reaction tank. The guide surface is inclined towards the carrier. The top of the shell is provided with a gas hole.

[0006] Preferably, the shell comprises an outer shell and an inner shell. The outer shell is detachably connected to the base. The inner shell is built into the containing cavity of the outer shell. The inner shell divides the containing cavity into a reaction chamber and a transition chamber that are in communication with each other. The reaction tank is in communication with the reaction chamber. The carrier is detachably connected in the reaction chamber. The space of the transition chamber gradually decreases in the direction away from the reaction tank. The gas hole is in communication with the transition chamber.

[0007] Preferably, the inner shell is annular, and the inner shell cooperates with the outer shell to divide the reaction cavity into an annular chamber, and the reaction groove is an annular groove for applying a coating to the inner wall of the relay ring.

[0008] Preferably, the base comprises a base plate and a crucible, the crucible is annular, the crucible is detachably arranged on the base plate, the reaction groove is arranged on the crucible, and the outer shell, the carrier and the crucible are sequentially attached.

[0009] Preferably, the middle of the base plate protrudes to form a positioning portion, the inner wall of the inner shell is attached to a limiting shell, the outer wall of the limiting shell is attached to the inner wall of the inner shell, and the bottom of the inner shell abuts against the crucible.

[0010] Preferably, the top inner wall of the limiting shell and the outer shell has a gap, and the top inner wall of the inner shell and the outer shell has a gap.

[0011] Preferably, the inner shell and the outer shell are coaxially arranged, and the distance between the inner wall of the inner shell and the outer wall of the outer shell is the same in the radial direction.

[0012] Preferably, the top of the crucible is provided with a filter screen, and the filter screen covers the opening of the reaction groove.

[0013] Compared with the prior art, the utility model has the advantages that:

[0014] The tantalum source and the carbon base react in the reaction groove to generate a tantalum oxide atmosphere and a carbon monoxide atmosphere, the guide surface of the shell body is inclined towards the carrier, the tantalum oxide atmosphere is guided to flow towards the relay ring in the containing cavity, on the one hand, the space of the containing cavity is gradually compressed, the distribution of gas density is improved, the diffusion and dilution of the gas away from the reaction region (the reaction groove) of the tantalum source and the carbon base are reduced, the gas tightness of the tantalum oxide atmosphere is uniform along the length direction of the relay ring, the tantalum oxide reacts with the carbon base on the surface of the relay ring to form a uniform tantalum carbide coating, and the quality and performance of the coating are ensured. BRIEF DESCRIPTION OF DRAWINGS

[0015] The utility model will be further described below in combination with the drawings and examples:

[0016] Figure 1 It is a structure schematic view of a coating preparation device of the utility model;

[0017] Figure 2 It is a sectional structure schematic view of a coating preparation device of the utility model;

[0018] Figure 3 It is a structure schematic view of a transition screen and a crucible of example 2 of the utility model;

[0019] Figure 4The sectional structure schematic view of the transition net and the crucible of embodiment 2 is described in the utility model.

[0020] Mark explanation:

[0021] 1, base; 11, bottom plate; 111, positioning part; 12, crucible; 121, reaction tank; 2, shell; 21, outer shell; 211, air hole; 22, inner shell; 221, guide surface; 23, limiting shell; 3, relay ring; 4, containing cavity; 41, reaction cavity; 42, transition cavity; 5, bearing; 6, filter screen. Specific implementation

[0022] In order to make the purpose, technical scheme and advantage of the utility model more clear, the following will combine the specific embodiment and corresponding drawing of the utility model to clearly and completely describe the technical scheme of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, rather than all the embodiment. Based on the embodiment in the utility model, all other embodiments obtained by the person skilled in the art without making creative labor belong to the protection scope of the utility model.

[0023] The following will describe the embodiment of the utility model in detail, the example of the embodiment is shown in the drawing, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar function throughout. The embodiment described below by referring to the drawing is exemplary, only for explaining the utility model, and cannot be understood as the limitation of the utility model.

[0024] In the description of the utility model, it is understood that the orientation or position relationship indicated by the terms "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and is not indicative or implied that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as the limitation of the utility model.

[0025] As Figure 1 And Figure 2As shown, a coating preparation device for coating a relay ring 3, improving the uniformity of the coating of the relay ring 3, comprising a base 1 and a shell 2, the base 1 and the shell 2 jointly form a containing cavity 4, the relay ring 3 is coated in the containing cavity 4. The top of the base 1 is recessed with a reaction groove 121, the reaction groove 121 is located in the containing cavity 4, the base 1 is provided with a carrier 5 for supporting the relay ring 3, the inner side of the relay ring 3 is exposed to the reaction groove 121. The reaction groove 121 is added with tantalum source and graphite, and the application is placed in a high temperature environment, the tantalum source and the graphite generate and generate a tantalum oxide atmosphere at high temperature, and the tantalum oxide atmosphere reacts with the carbon-based material on the inner wall of the relay ring 3 to form a tantalum carbide coating.

[0026] The tantalum source in the crucible 12 is a mixture of tantalum pentoxide powder and graphite powder, the tantalum pentoxide and graphite powder react to generate a tantalum oxide and carbon monoxide atmosphere, and then the tantalum oxide atmosphere reacts with the carbon-based material on the inner wall of the relay ring 3 to form a tantalum carbide coating.

[0027] The shell 2 is provided with a guide surface 221, the guide surface 221 and the side surface of the carrier 5 are separately arranged on both sides of the reaction groove 121, the guide surface 221 is inclinedly arranged towards the direction of the carrier 5, that is, the guide surface 221 is inclinedly arranged towards the relay ring 3, so as to guide the tantalum oxide atmosphere to flow towards the inner wall of the relay ring 3, and improve the gas density of the tantalum oxide, the tantalum oxide can more uniformly react with the carbon-based material on the inner wall of the relay ring 3 to form a tantalum oxide coating, avoiding the situation of local accumulation or absence, thereby improving the uniformity of the coating. The top of the shell 2 is provided with an air hole 211, which improves the flowability of the tantalum oxide atmosphere in a high temperature environment, and the existence of the air hole 211 can balance the pressure difference between the inside and outside of the shell 2, preventing the structure from being damaged or the performance from being reduced due to excessive pressure.

[0028] In this embodiment, the shell 2 comprises an outer shell 21 and an inner shell 22, the outer shell 21 is detachably connected with the base 1, specifically, the outer shell 21 abuts with the base 1 on the axis, the shell 2 is clamped with the base 1 in the radial direction, and the outer shell 21 and the base 1 jointly form the containing cavity 4. Specifically, the outer shell 21 is a thin-walled cylindrical shell 2, which is configured to have a side wall and a top end face and a bottom opening structure. Preferably, the inner shell 22 is a circular ring structure, the inner shell 22 abuts on the base 1, the inner shell 22 is in the outer shell 21, and the inner shell 22 divides the containing cavity 4 into a reaction cavity 41 and a transition cavity 42. The guide surface 221 is the outer side surface of the inner shell 22, the guide surface 221 is inclinedly arranged towards the direction of the relay ring 3, and the space of the transition cavity 42 gradually decreases from the base 1 upwards. In the process of the reaction of the tantalum oxide atmosphere with the carbon-based material on the inner wall of the relay ring 3 to form a tantalum oxide coating, the content of tantalum oxide in the gas in the transition cavity 42 closer to the top of the inner cavity gradually decreases, the space of the transition cavity 42 is gradually reduced to improve the gas density of the tantalum oxide in the gas, thereby ensuring the uniformity of the coating of the inner wall of the relay ring 3 from bottom to top.

[0029] The inner shell 22 is coaxially arranged with the outer shell 21, the reaction cavity 41 is a circular annular space, the transition cavity 42 is a cylindrical space, the bottom of the inner shell 22 is movably connected with the base 1, and the top of the inner shell 22 is spaced apart from the inner wall of the top of the outer shell 21, so that the reaction cavity 41 and the transition cavity 42 are communicated, and the gas hole 211 is communicated with the transition cavity 42. The gap between the outer wall of the inner shell 22 and the inner wall of the outer shell 21 is always the same, so as to ensure the uniformity of the space of the reaction cavity 41, thereby further ensuring the density of the tantalum oxide in the gas.

[0030] The carrier 5 is located in the reaction cavity 41 and is used to stably support the relay ring 3 in the reaction cavity 41. The reaction groove 121 is communicated with the reaction cavity 41. The tantalum oxide atmosphere generated in the reaction groove 121 flows upward. The tantalum oxide atmosphere reacts with the carbon base on the inner wall of the relay ring 3 to form a tantalum oxide coating. The excess tantalum oxide atmosphere flows into the transition cavity 42 through the gap between the outer shell 21 and the inner shell 22, flows out from the gas hole 211 or is deposited in the transition cavity 42.

[0031] The base 1 comprises a bottom plate 11 and a crucible 12. The crucible 12 is annular in structure and abuts against the top end surface of the bottom plate 11. The middle of the bottom plate 11 protrudes to form a positioning portion 111. The inner side wall of the crucible 12 is provided with an annular limiting shell 23. The outer wall of the limiting shell 23 abuts against the inner wall of the crucible 12, and the inner wall of the limiting shell 23 abuts against the outer side wall of the positioning portion 111. Preferably, the inner wall of the limiting shell 23 is in transition fit with the positioning portion 111, and the crucible 12 is in transition fit with the limiting shell 23. The limiting shell 23 and the inner shell 22 are both spaced apart from the top inner wall of the outer shell 21, and the gas hole 211 is communicated with the transition cavity 42, so that the gas flow can smoothly flow from the reaction cavity 41 into the transition cavity 42 and then flow out of the outside through the gas hole 211. Preferably, the cross-sectional shape of the inner recess of the crucible 12 can be rectangular, triangular or other shapes.

[0032] The carrier 5 is attached between the inner wall of the outer shell 21 and the outer wall of the crucible 12. The carrier 5 abuts against the bottom plate 11 and is higher than the crucible 12 to carry the annular relay ring 3. The inner wall of the inner shell 22 is attached to the outer wall of the limiting shell 23. The bottom end surface of the inner shell 22 abuts against the crucible 12. The guide surface 221 of the inner shell 22 is inclined toward the carrier 5, that is, the guide surface 221 is inclined toward the direction of the relay ring 3. The guide surface 221 and the side surface of the carrier 5 are respectively arranged on opposite sides of the reaction groove 121, that is, the inner wall of the relay ring 3 and the guide surface 221 are located on both sides of the reaction groove 121. The inclined guide surface 221 can guide the fluid to flow over the surface of the relay ring 3 in a more uniform manner, thereby ensuring that the tantalum oxide atmosphere can uniformly react with the carbon base on the inner wall of the relay ring 3 to form a tantalum carbide coating.

[0033] Example 2

[0034] As Figure 3 andFigure 4 The embodiment is different from the embodiment 1 in that the filter screen 6 is arranged on the top of the crucible 12 and covers the opening of the reaction tank 121. In the embodiment, the filter screen 6 has a circular ring structure, the filter screen 6 has a frame, the inner wall of the filter screen 6 abuts against the outer wall of the limiting shell 23, the outer wall of the filter screen 6 abuts against the inner wall of the bearing 5, the bottom of the inner shell 22 abuts against the frame of the filter screen 6. The filter screen 6 is used for filtering the tantalum source without atomization, avoiding the influence of the tantalum source without reaction on the surface coating quality of the relay ring 3, avoiding the convex point on the inner wall of the relay ring 3, and preventing the quality from being affected by the too violent reaction in the initial reaction and the uneven coating deposition.

[0035] The above embodiments are only used for illustrating the technical concept and characteristics of the present application, and the purpose is to enable the person skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application. For those skilled in the art, it is obvious that the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or basic characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application.

Claims

1. A coating preparation apparatus, characterized in that It includes: The base (1) and the shell (2), the shell (2) and the base (1) are enclosed to form a containing cavity (4), the base (1) is concave with a reaction groove (121), the source of tantalum and the carbon-based reaction produce the atmosphere of tantalum oxide, the reaction groove (121) is located in the containing cavity (4), the base (1) can be detachably connected with the carrier (5) for supporting the relay ring (3), the shell (2) is provided with a guide surface (221), the guide surface (221) and the side surface of the carrier (5) are separately arranged on the opposite sides of the reaction groove (121), the guide surface (221) is inclinedly arranged towards the carrier (5), and the top of the shell (2) is provided with a gas hole (211).

2. A coating preparation apparatus as claimed in claim 1, characterised in that: The shell (2) includes an outer shell (21) and an inner shell (22), the outer shell (21) is detachably connected with the base (1), the inner shell (22) is built-in in the containing cavity (4) of the outer shell (21), the inner shell (22) divides the containing cavity (4) into a reaction cavity (41) and a transition cavity (42) in communication with each other, the reaction groove (121) communicates with the reaction cavity (41), the carrier (5) is detachably connected in the reaction cavity (41), the transition cavity (42) gradually decreases in space in the direction away from the reaction groove (121), and the gas hole (211) communicates with the transition cavity (42).

3. A coating preparation apparatus as claimed in claim 2, characterised in that: The inner shell (22) is annular, the inner shell (22) cooperates with the outer shell (21) to separate the reaction cavity (41) into an annular chamber, and the reaction groove (121) is an annular groove for applying a coating to the inner wall of the relay ring (3).

4. The coating preparation apparatus of claim 2, wherein: The base (1) includes a bottom plate (11) and a crucible (12), the crucible (12) is annular, the crucible (12) is detachable on the bottom plate (11), the reaction groove (121) is arranged on the crucible (12), and the outer shell (21), the carrier (5) and the crucible (12) are sequentially attached.

5. A coating preparation apparatus as claimed in claim 4, characterised in that: The middle of the bottom plate (11) protrudes to form a positioning part (111), the inner wall of the inner shell (22) is attached to a limiting shell (23), the outer wall of the limiting shell (23) is attached to the inner wall of the inner shell (22), and the bottom of the inner shell (22) abuts against the crucible (12).

6. A coating preparation apparatus as claimed in claim 5, characterised in that: The top inner wall of the limiting shell (23) and the outer shell (21) has a gap, and the inner shell (22) and the top inner wall of the outer shell (21) have a gap.

7. The coating preparation apparatus of claim 2, wherein: The inner shell (22) and the outer shell (21) are coaxially arranged, the distance between the inner wall of the inner shell (22) and the outer wall of the outer shell (21) is the same in the radial direction.

8. The coating preparation apparatus of claim 4, wherein: The top of the crucible (12) is provided with a filter screen (6), and the filter screen (6) covers the opening of the reaction groove (121).

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