Boat structure and coating equipment

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a boat structure and coating equipment, and solves the problems of poor coating uniformity and coating efficiency when gas filled into a reaction cavity is used for coating a sheet in a material box borne by the boat structure in the prior art. The boat structure comprises at least one carrier boat, the carrier boat is provided with at least one containing cavity, each containing cavity is configured to contain a material box, a gap communicated with an air hole is formed between the contained material box and the inner wall of the containing cavity, an air inlet and an air outlet which are communicated with the gap are formed in the two opposite sides of the carrier boat in the first direction respectively, and the air inlet and the air outlet are communicated with the air hole. The carrier boat is further provided with at least one first through hole communicated with the gap, so that gas at least can enter the gap from the gas inlet and the first through hole and then enter the material cavity from the gas hole to act on the surface to be coated. According to the boat structure and the coating equipment provided by the invention, the coating uniformity and the coating efficiency are improved when the sheets in the loaded material box are coated.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of semiconductor and photovoltaic, and particularly relates to a boat structure and a coating equipment. BACKGROUND

[0002] At present, in the market, through research, cutting photovoltaic silicon wafers into two halves can improve power output and efficiency, alleviate temperature effect, alleviate shadow effect, improve material utilization, and reduce cost. Therefore, wafer slicing or multiple slicing gradually becomes a common process for wafer processing. After wafer slicing, a cross section appears at the cutting position, and repairing the cross section can improve the overall photovoltaic conversion efficiency of the wafer. Therefore, after wafer slicing, a cross section repair device is needed to process the cross section of the wafer, for example, an edge passivation deposition (EPD) device is used to coat and passivate the cross section of the wafer.

[0003] When repairing the cross section of the wafer by using the EPD device, a box is generally used to load the wafer, and then the box is loaded into the grid of the boat structure. The boat structure has a gas inlet and a gas outlet arranged opposite to each other. The gas can only enter the gap formed between the box and the shielding plate through the gas inlet. In the case of the same source amount at the same time, the wafer in the box is prone to uneven coating thickness. If the uneven coating thickness is to be improved, the gas inlet time needs to be increased, which leads to waste of gas and increase of coating time, and reduces the production capacity. UTILITY MODEL CONTENT

[0004] Therefore, an embodiment of the present disclosure provides a boat structure and a coating equipment to solve the problems of poor coating uniformity and coating efficiency when the gas filled into the reaction chamber is used to coat the wafer in the box carried by the boat structure.

[0005] In a first aspect, an embodiment of the present disclosure provides a boat structure configured to carry a box having a material cavity, the material cavity being configured to carry a plurality of wafers, the box having a gas hole in communication with the material cavity, and the gas entering from the gas hole being configured to coat a surface to be coated of the wafer, the boat structure comprising: at least one boat carrier having at least one accommodation chamber, each accommodation chamber being configured to accommodate a box, and having a gap in communication with the gas hole between the accommodated box and the inner wall of the accommodation chamber, the boat carrier being provided with a gas inlet and a gas outlet in communication with the gap on the opposite sides in a first direction, and the boat carrier being further provided with at least one first through hole in communication with the gap, so that the gas can at least enter the gap from the gas inlet and the first through hole and then enter the material cavity from the gas hole to act on the surface to be coated.

[0006] In some embodiments, the boat structure comprises: a bottom plate; two first side plates oppositely arranged along a first direction on two sides of the bottom plate, the two first side plates being respectively provided with an air inlet and an air outlet; two second side plates oppositely arranged along a second direction on two sides of the bottom plate, and adjacent first side plates and second side plates being connected, the second direction intersecting the first direction, a space enclosed by the bottom plate, the two first side plates and the two second side plates having at least one accommodation chamber, and at least one of the bottom plate and the two second side plates being provided with a first through hole.

[0007] In some embodiments, the number of accommodation chambers comprises one, the bottom plate, the two first side plates and the two second side plates enclosing the accommodation chamber, and a plurality of first through holes being dispersedly arranged on the bottom plate and / or at least one of the second side plates; the number of accommodation chambers comprises a plurality, and the boat structure further comprises: a plurality of groups of partition plate assemblies arranged along the first direction between the two first side plates, each group of partition plate assemblies comprising two first partition plates arranged along the first direction, the first partition plates being connected to the bottom plate, and the two first partition plates being respectively connected to the two second side plates at two ends in the second direction, the first partition plates being parallel to the first side plates, and the two first partition plates belonging to the same group of partition plate assemblies being configured to form a side wall of the accommodation chamber; wherein the first partition plates are provided with second through holes, so that the gas can enter the interspace of each accommodation chamber through at least one of the air inlet, the first through hole and the second through hole, and then enter the material cavity through the air hole.

[0008] In some embodiments, in the case where the number of accommodation chambers is a plurality, at least one of the bottom plate and the second side plates corresponding to the two first partition plates of each group of partition plate assemblies is provided with a first through hole; and / or at least one of the bottom plate and the second side plates corresponding to the two adjacent first partition plates of adjacent groups of partition plate assemblies is provided with a first through hole.

[0009] In some embodiments, the material box comprises a fixed plate and a movable plate oppositely arranged to form a material cavity, the sheet material being arranged between the fixed plate and the movable plate, and the sheet material and the movable plate being configured to move towards the material cavity under the action of an external force to make the plurality of sheet materials mutually adhere to each other, and the plurality of sheet materials adhering to each other being parallel to the fixed plate, and the boat structure further comprises: at least one group of clamping and limiting assemblies connected to each boat structure, in the case where the material box is accommodated in the accommodation chamber, the clamping and limiting assemblies being configured to push the movable plate to move along the first direction to clamp the plurality of sheet materials between the fixed plate and the movable plate and maintain the plurality of sheet materials in the clamped and adhered state.

[0010] In some embodiments, when the number of the accommodation chambers includes a plurality, the clamping limiting assembly includes: at least one support rod arranged between every two adjacent partition plate assemblies; a transmission rod extending in the first direction, the transmission rod being slidably connected to the outer side of the boat, and the transmission rod being connected to each support rod, the transmission rod being capable of driving the support rod to move in the first direction; at least one elastic member connected to the support rod, the first partition plate being provided with at least one avoiding hole, the elastic member being capable of penetrating through the avoiding hole to at least partially extend into the accommodation chamber, the movable plate being opposite to the elastic member when the material box is placed in the accommodation chamber; and at least one locking assembly connected to the outer side of the boat, when the transmission rod is driven to move in the first direction to the position where the elastic member abuts against the movable plate and is compressed to clamp the sheet under the action of an external force, the locking assembly is configured to limit the movement of the transmission rod, so that the elastic member is maintained in the compressed state.

[0011] In some embodiments, the locking assembly includes: a fixed block arranged on the boat; a movable block arranged on the transmission rod, the movable block being opposite to the fixed block in the first direction; a pushing member connected to the outer side of the boat; and a stop block connected to the pushing member, the pushing member being capable of driving the stop block to move in the vertical direction, the fixed block and the movable block having a first gap therebetween when the transmission rod is driven to move in the first direction to the position where the elastic member is in the compressed state, the stop block being located in the first gap and abutting against the movable block to maintain the elastic member in the compressed state, the pushing member being capable of driving the stop block to move in the vertical direction to disengage the stop block from the movable block when the pushing member is driven, and the elastic member being disengaged from clamping the sheet.

[0012] In some embodiments, the number of the boats includes two or more, the plurality of boats being stacked in the vertical direction, each boat being provided with an opening in communication with the accommodation chamber, and each material box being placed in one accommodation chamber from the opening, the material box and the accommodation chamber surrounding a gap therebetween.

[0013] In some embodiments, the boat further includes: at least one first positioning block connected to the boat, the first positioning block being provided with a protrusion; and at least one second positioning block connected to the boat, the second positioning block being provided with a recess matched with the protrusion, the first positioning block and the second positioning block of two adjacent boats being correspondingly arranged when the plurality of boats are stacked, so that the protrusion at least partially extends into the recess.

[0014] In a second aspect, the embodiments of the present disclosure further provide a coating equipment, including: the boat structure described above, configured to carry a material box having a material cavity, the material cavity being configured to carry a sheet; and a furnace body having a furnace cavity, the furnace cavity being configured to accommodate the boat structure.

[0015] The boat structure and the coating equipment provided by the embodiment of the present disclosure can make the gas in the furnace cavity enter the gap through the first through hole on the boat, so that more gas can enter the gap from the gas holes in different directions in a short time, improve the speed and uniformity of the gas diffusion in the gap to the spray hole, improve the coating uniformity and coating rate of the cross section of the multiple sheets in the box, and further shorten the coating time, which is beneficial to the improvement of the production capacity.

[0016] In addition, the heat for heating the furnace cavity can act on the box through the first through hole, so that the heat can be quickly conducted to the sheets in the box, which is beneficial to the rapid heating of the sheets and further improves the coating efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0017] The above and other objects, features and advantages of the present disclosure will become more apparent from the following detailed description of embodiments of the present disclosure, taken in conjunction with the accompanying drawings. The drawings provided in the specification and the embodiments of the present disclosure together constitute a part of the detailed description of the present disclosure and serve to explain the present disclosure, but do not constitute a limitation on the present disclosure. In the drawings, the same reference numerals generally designate the same components or steps throughout the specification.

[0018] Figure 1 A schematic diagram of a coating equipment provided by an embodiment of the present disclosure is shown.

[0019] Figure 2 A schematic diagram of a boat structure provided by an embodiment of the present disclosure without loading a box is shown.

[0020] Figure 3 A schematic diagram of a boat structure provided by an embodiment of the present disclosure with loading a box is shown.

[0021] Figure 4 A schematic diagram of a box provided by an embodiment of the present disclosure is shown.

[0022] Figure 5 A schematic diagram of a box provided by an embodiment of the present disclosure without a shielding plate is shown.

[0023] Figure 6 A front view of a boat structure provided by an embodiment of the present disclosure is shown.

[0024] Figure 7 A Figure 6 A A-directional cross-sectional view of the boat structure is shown.

[0025] Figure 8 A schematic diagram of a boat structure provided by another embodiment of the present disclosure is shown.

[0026] Figure 9 A top view of a boat structure provided by an embodiment of the present disclosure is shown.

[0027] Figure 10 Fig. 6 shows a schematic view of a boat structure loaded with a material box according to another embodiment of the present disclosure.

[0028] Figure 11 Fig. 7 shows a partial enlarged view of part B of the boat structure. Figure 10

[0029] Figure 12 Fig. 8 shows a partial structure schematic view of a clamping and limiting assembly according to an embodiment of the present disclosure.

[0030] Reference signs:

[0031] 100, coating equipment; 10, boat structure; 1, boat; 1a, accommodating chamber; 1b, gap; 11, gas inlet; 12, gas outlet; 13, first through hole; 14, second through hole; 15, bottom plate; 16, first side plate; 17, second side plate; 18, partition assembly; 18a, avoiding hole; 181, first partition; 19, second partition; 2, clamping and limiting assembly; 21, support rod; 22, transmission rod; 23, elastic member; 24, locking assembly; 24a, first gap; 241, fixed block; 242, movable block; 243, stop block; 244, push rod; 245, limiting block; 25, pressing block; 3, first positioning block; 4, second positioning block; 5, handle; 20, furnace body; 201, furnace cavity; 30, material box; 301, material cavity; 31, shielding plate; 311, air hole; 32, fixed plate; 33, movable plate; 34, cover plate; 341, spraying hole; 35, backing plate; X, first direction; Y, second direction; Z, vertical direction. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present disclosure.

[0033] Figure 1 Fig. 1 shows a schematic view of a coating equipment according to an embodiment of the present disclosure. Figure 2 Fig. 2 shows a schematic view of a boat structure unloaded with a material box according to an embodiment of the present disclosure. Figure 3 Fig. 3 shows a schematic view of a boat structure loaded with a material box according to an embodiment of the present disclosure. Figure 4 Fig. 4 shows a schematic view of a material box according to an embodiment of the present disclosure. Figure 5 Fig. 5 shows a schematic view of a material box without a shielding plate according to an embodiment of the present disclosure. Figure 6 ​Fig. 1 shows a front view of a boat structure according to an embodiment of the present disclosure. Figure 7 For Figure 6 Fig. 2 shows a cross-sectional view of the boat structure along the direction A-A. The arrow X indicates the first direction, the arrow Y indicates the second direction, and the arrow Z indicates the vertical direction. The first direction X, the second direction Y, and the vertical direction Z are perpendicular to each other.

[0034] The boat structure according to an embodiment of the present disclosure is provided, which is applied to a coating device 100. The boat structure 10 is configured to carry at least one box 30 having a cavity 301. The box 30 is configured to carry a plurality of sheets. The coating device 100 is configured to coat the surfaces of the sheets carried by the box 30 in the boat structure 10. Figures 1 to 7

[0035] Optionally, the sheets can be substrates made of silicon-based materials or perovskite materials for solar cell production. The substrates need to be processed through different processes to become usable solar cell products. The shape of the sheets 40 can be, for example, rectangular, square, circular, or other thin sheets, without specific limitation. In addition, the surfaces to be coated of the sheets can be the front surface, the back surface, or the cut surface. In the present embodiment, the surfaces to be coated of the sheets are the cut surfaces for ease of description, which will not be emphasized separately in the following.

[0036] It can be understood that the coating device 100 can be an EPD device for coating the cut surfaces of the sheets. The EPD device includes a furnace body 20 having a furnace cavity 201 configured to accommodate the boat structure 10 to coat the cut surfaces of the sheets in the box 30 of the boat structure 10. In other examples, the coating device 100 can also be an atomic layer deposition (ALD) device, without specific limitation. Figure 1

[0037] In the present embodiment, the coating device 100 is an EPD device. The furnace cavity 201 of the furnace body 20 is configured to accommodate the boat structure 10 to coat the cut surfaces of the sheets in the box 30 of the boat structure 10. Figure 4 and Figure 5 ​​For the convenience of description, the direction of the material box 30 is set to be consistent with the direction in which the material box 30 is placed on the boat structure 10, the material box 30 includes a box body and a cover plate 34 covering the box body, and a plurality of sheets can be vertically inserted into the box body so that the cross sections of the sheets face the cover plate 34. The cover plate 34 is provided with at least one spray hole 341 through which gas can enter to act on the cross sections of the sheets in the material cavity 301. The material box 30 further includes a gasket plate 35 arranged around the cover plate 34, and the side of the gasket plate 35 facing the cover plate 34 is provided with at least one through groove extending in the horizontal direction, and when the gasket plate 35 is arranged on the cover plate 34, the through groove is enclosed to form an air hole 311, which is in communication with the spray hole 341. The material box 30 in the embodiment of the present disclosure is arranged with air holes 311 extending in the horizontal direction in four directions of the material box 30, which are not limited in particular.

[0038] The material box 30 further includes a shielding plate 31 which is detachably connected to the gasket plate 35, and the shielding plate 31, the gasket plate 35 and the cover plate 34 enclose a closed space extending in the horizontal direction, and the closed space is in communication with the outside only through the pre-set air hole 311, so that the area above the spray hole 341 forms a gap extending in the horizontal direction, and the gas can only enter the gap through the air hole 311 and then enter the material cavity 301 from the spray hole 341.

[0039] Optionally, the distance between the shielding plate 31 and the cover plate 34 in the vertical direction Z is between 0.2 mm and 2 mm, such as 0.2 mm, 0.5 mm, 1 mm or 2 mm.

[0040] It can be understood that the number, arrangement position and extension direction of the air holes 311 in the material box 30 can be adaptively adjusted according to actual needs, which are not limited in particular. In the embodiment of the present disclosure, the boat structure 10 is described by taking the air holes 311 arranged in four directions of the material box 30 in the horizontal plane as an example.

[0041] In addition, among a group of opposite two side plates in the box body, one is arranged as a fixed plate 32 and the other is arranged as a movable plate 33, and the sheets are placed between the fixed plate 32 and the movable plate 33, and the movable plate 33 can move towards the fixed plate 32 under the action of an external force. When a plurality of sheets are inserted into the material cavity 301, the sheets are parallel to the fixed plate 32, and the movement of the movable plate 33 towards the fixed plate 32 can make the plurality of sheets close to each other, and make the fixed plate 32 and the movable plate 33 abut against the adjacent sheets, and the plurality of sheets after abutting against each other are parallel to the fixed plate 32, so that the gas entering the material cavity 301 can only act on the cross sections.

[0042] Specifically, as Figure 2 , Figure 3 , Figure 6 and Figure 7The boat structure 10 comprises at least one boat 1, and each of the at least one boat 1 comprises at least one accommodating cavity 1a, each of the at least one accommodating cavity 1a is configured to accommodate a material box 30, and a gap 1b is formed between the material box 30 and the inner wall of the accommodating cavity 1a, and the gap 1b is in communication with the air hole 311, the boat 1 is provided with an air inlet 11 and an air outlet 12 on opposite sides in the first direction X, respectively, and the air inlet 11 and the air outlet 12 are in communication with the gap 1b, and the boat 1 is further provided with at least one first through hole 13 in communication with the gap 1b, so that the gas can enter the gap 1b from the air inlet 11 and the first through hole 13, respectively, and then enter the material cavity 301 from the air hole 311 to act on the surface to be plated.

[0043] Optionally, the boat 1 can be made of aluminum material, and in other examples, the boat 1 can also be made of other materials with good heat conduction performance and not easy to be corroded, without specific limitation.

[0044] It can be understood that the air inlet 11 and the air outlet 12 can be arranged opposite to each other in the first direction X, and the number of the air inlet 11 and the air outlet 12 can be multiple. In the case of loading the material box 30 into the accommodating cavity 1a, along the first direction X, the air inlet 11 can be opposite to the air hole 311, so that the gas can enter the material box 30 from the air hole 311 more quickly. In addition, the air inlet 11 and the air outlet 12 can be arranged in the same shape as the air hole 311, and the size of the air inlet 11 and the air outlet 12 can be the same as or larger than the size of the air hole 311, which can be adjusted adaptively according to actual needs, without specific limitation.

[0045] Optionally, the gasket 35 of the material box 30 can have a flange extending outward from the box body, and when the material box 30 is placed in the accommodating cavity 1a, a gap 1b is formed between the side of the box body and the accommodating cavity 1a, and the flange can abut against the boat structure 10 to close the gap 1b. The air inlet 11 and the air outlet 12 are arranged in positions in communication with the gap 1b, so that the air inlet 11, the gap 1b, the air hole 311 and the air outlet 12 are in communication with each other.

[0046] The boat structure 10 provided by the embodiment of the present disclosure can make the gas in the furnace cavity 201 enter the gap 1b from the air inlet 11 and the first through hole 13, so that more gas can enter the gap from the air holes 311 in different directions in a short time, improve the speed and uniformity of the gas diffusing in the gap to the spray hole 341, improve the uniformity and plating rate of the cross section of the plurality of sheets in the material box 30, and shorten the plating time, which is conducive to improving the production capacity.

[0047] In addition, the heat generated by heating the furnace cavity 201 can pass through the first through hole 13 and act on the material box 30, so that the heat can be quickly conducted to the sheet inside the material box 30, which is conducive to the rapid heating of the sheet and further improves the coating efficiency.

[0048] Understandably, the number of carriers 1 can be one, two, or more. When multiple carriers 1 are set, the multiple carriers 1 are stacked along the vertical direction Z. Each carrier 1 has an opening communicating with the receiving chamber 1a. Each material box 30 is placed in a receiving chamber 1a through the opening, and a gap 1b is formed between the material box 30 and the receiving chamber 1a.

[0049] Optionally, the carrier 1 includes at least one first positioning block 3 and at least one second positioning block 4. The first positioning block 3 and the second positioning block 4 are connected to the carrier 1. The first positioning block 3 has a protrusion, and the second positioning block 4 has a recess that cooperates with the protrusion. When multiple carriers 1 are stacked, the first positioning block 3 and the second positioning block 4 in two adjacent carriers 1 are correspondingly arranged so that the protrusion at least partially extends into the recess, so as to connect multiple carriers 1 together and avoid the problem that the carriers 1 stacked on top are prone to falling off.

[0050] Optionally, the outer side of the carrier boat 1 may also be provided with a handle 5 to facilitate the handling or stacking of the carrier boat 1.

[0051] The following describes the specific structure of the boat structure 10 in detail, taking a boat 1 as an example.

[0052] Figure 8 The diagram shown is a schematic diagram of a boat structure provided in another embodiment of this disclosure. Figure 9 The image shown is a top view of a boat structure provided in an embodiment of this disclosure. Figure 10 The diagram shown is a schematic of a boat structure with a material box 30 loaded according to another embodiment of this disclosure. Figure 11 for Figure 10 A magnified view of part B in the boat structure shown. Figure 12 The diagram shown is a partial structural schematic of a clamping and limiting assembly provided in an embodiment of this disclosure.

[0053] like Figure 2 , Figure 8 and Figure 9, the boat 1 comprises a bottom plate 15, two first side plates 16 and two second side plates 17, the two first side plates 16 are oppositely arranged on two sides of the bottom plate 15 along a first direction X, and the two first side plates 16 are respectively provided with the gas inlet 11 and the gas outlet 12; the two second side plates 17 are oppositely arranged on two sides of the bottom plate 15 along a second direction Y, and adjacent first side plates 16 and second side plates 17 are connected, the space enclosed by the bottom plate 15, the two first side plates 16 and the two second side plates 17 has at least one accommodating chamber 1a, and at least one of the bottom plate 15 and the two second side plates 17 is provided with a first through hole 13. In addition to the gas inlet 11 and the gas outlet 12, the first through hole 13 is arranged on the second side plate 17 and the bottom plate 15 in other directions of the boat 1, so that the gas in the furnace cavity 201 can enter the gap 1b from the boat 1 in different directions, which is more conducive to the rapid entry of the gas from different directions into the gas holes 311, and is conducive to the rapid and uniform diffusion of the gas in the gap above the spray holes 341, thereby improving the cross-section coating uniformity and coating speed of the sheet in the material box 30.

[0054] In an optional embodiment, the boat 1 has one accommodating chamber 1a, and the bottom plate 15, the two first side plates 16 and the two second side plates 17 form the accommodating chamber 1a with an opening, and a plurality of first through holes 13 can be dispersedly arranged on at least one of the bottom plate 15 and the two second side plates 17.

[0055] It can be understood that, in order to improve the gas diffusion rate, a plurality of first through holes 13 can be arranged on the bottom plate 15 and the two second side plates 17 respectively, so that the gas in the furnace cavity 201 can enter the gas holes 311 from different directions from multiple directions, and the specific arrangement position, number and size of the first through hole 13 on the boat 1 can be adaptively adjusted according to actual needs, and are not specifically limited.

[0056] In the embodiments of the present disclosure, the number of accommodating chambers 1a is set to be multiple, and the boat 1 further comprises a plurality of groups of partition plate assemblies 18, the plurality of groups of partition plate assemblies 18 are arranged between the two first side plates 16 along the first direction X, the partition plate assembly 18 comprises two first partition plates 181 arranged along the first direction X, the first partition plate 181 is connected to the bottom plate 15, and the two ends of the first partition plate 181 in the second direction Y are respectively connected to the two second side plates 17, the first partition plate 181 is parallel to the first side plate 16, and the two first partition plates 181 belonging to the same partition plate assembly 18 are configured to form the side wall of the accommodating chamber 1a; wherein the first partition plate 181 is provided with a second through hole 14, so that the gas can enter the gas holes 311 from the material cavity 301 through at least one of the gas inlet 11, the first through hole 13 and the second through hole 14. The second through hole 14 is arranged to facilitate the rapid diffusion of the gas in the furnace cavity 201 into the gas holes 311 of the material box 30 located at the middle position of the boat structure 10 and close to the gas outlet 12.

[0057] It can be understood that the second through hole 14 of each first partition plate 181 can be provided in a plurality of forms, and the plurality of second through holes 14 can be opposite to the air inlet 11 in the first direction X, so that the gas entering from the air inlet 11 and the first through hole 13 can be quickly diffused into the different cartridge 30 in the accommodation chamber 1a.

[0058] Optionally, the number, shape and size of the second through hole 14 can be the same as the air inlet 11, or can be different, and can be adjusted according to actual needs, without specific limitation.

[0059] In an optional embodiment, the boat 1 can further include a second partition plate 19 arranged between the two second side plates 17, and the second partition plate 19 is parallel to the second side plate 17. The boat 1 is divided into a plurality of rows and columns of cells by the first partition plate 181 and the second partition plate 19, and each cell serves as an accommodation chamber 1a. The row direction is parallel to the first direction X, and the column direction is parallel to the second direction Y.

[0060] In some embodiments, in the case where the accommodation chamber 1a is provided in a plurality of forms, at least one of the bottom plate 15 and the second side plate 17 corresponding to the two first partition plates 181 included in each group of partition plate assemblies 18 is provided with the first through hole 13. Alternatively, at least one of the bottom plate 15 and the second side plate 17 corresponding to the two adjacent first partition plates 181 in the adjacent partition plate assemblies 18 is provided with the first through hole 13.

[0061] It can be understood that the number, position, size and shape of the first through hole 13 can be adjusted according to actual needs. In the embodiment of the present disclosure, the first through hole 13 is provided in a plurality of forms, and the plurality of first through holes 13 are respectively arranged on the bottom plate 15 and the two side plates. Moreover, the first through hole 13 is arranged at the gap position between the corresponding adjacent two partition plate assemblies 18, and a part of the gas in the furnace cavity 201 can enter the gap 1b and directly enter the opposite air hole 311 through the air inlet 11; another part of the gas can enter the gap between the partition plate assemblies 18 through the first through hole 13 arranged on the second side plate 17 and the bottom plate 15, and then enter the gap 1b and the air hole 311 through the second through hole 14. It should be emphasized that the first through hole 13 arranged on the boat 1 can be adjusted according to actual needs, and the difference is only that the specific flow path of the gas in the furnace cavity 201 entering the plurality of air holes 311 in different directions through the first through hole 13 and the air inlet 11 is different, but compared with the air inlet 11 entering the air hole 311 from one direction, the arrangement of the first through hole 13 can improve the rate and diffusion uniformity of the air entering the air hole 311, thereby improving the uniformity and coating efficiency of the plurality of sheet films in the different cartridges 30.

[0062] In some embodiments, as Figure 2 , Figure 9 , Figure 10 , Figure 11 and Figure 12 , the boat structure 10 further comprises at least one clamping and limiting assembly 2 connected to each boat 1, in the case that the material box 30 is accommodated in the accommodation chamber 1a, the clamping and limiting assembly 2 is configured to be able to push the movable plate 33 to move in the first direction X to make the plurality of sheets be clamped between the fixed plate 32 and the movable plate 33 and maintain the plurality of sheets in the clamped and fitted state. By setting the clamping and limiting assembly 2, the plurality of sheets placed in each material box 30 in the accommodation chamber 1a can be clamped, so that the gas entering the material cavity 301 from the air hole 311 does not contact other surfaces except the cross section. In the state that the material box 30 is taken out of the accommodation chamber 1a, the movable plate 33 can be reset in the direction away from the fixed plate 32 without external force, so that a gap can be left between the plurality of sheets to facilitate the taking out of the sheets from the material box 30.

[0063] In an optional embodiment, in the case that the number of the accommodation chambers 1a includes a plurality, the clamping and limiting assembly 2 comprises at least one supporting rod 21, a transmission rod 22, at least one elastic member 23 and at least one locking assembly 24, the supporting rod 21 is at least provided between each two adjacent partition assembly 18; the transmission rod 22 extends in the first direction X, the transmission rod 22 is slidingly connected to the outer side of the boat 1, and the transmission rod 22 is connected to each supporting rod 21, the transmission rod 22 can drive the supporting rod 21 to move in the first direction X; the elastic member 23 is connected to the supporting rod 21, the first partition 181 is provided with at least one avoiding hole 18a, the elastic member 23 can pass through the avoiding hole 18a to at least partially extend into the accommodation chamber 1a, in the case that the material box 30 is placed in the accommodation chamber 1a, the movable plate 33 is opposite to the elastic member 23; the locking assembly 24 is connected to the outer side of the boat 1, in the case that the material box 30 is placed in the accommodation chamber 1a, when the transmission rod 22 moves in the first direction X under the action of external force to abut against the elastic member 23 and compressively deform to clamp the sheets, the locking assembly 24 is configured to limit the movement of the transmission rod 22, so that the elastic member 23 is maintained in the compressed state.

[0064] Optionally, as Figure 12 , the clamping and limiting assembly 2 can further comprise a connecting rod, the transmission rod 22 can be provided in two, and is slidingly connected to the outer side wall of the two second side plates 17 respectively, the connecting rod connects the two transmission rods 22, and the two ends of the supporting rod 21 located in the gap can be detachably connected to the two transmission rods 22 respectively, so as to improve the stability of the transmission rod 22 driving the supporting rod 21 to move in the first direction X.

[0065] Optionally, the clamping and limiting assembly 2 can further include a plurality of pressing blocks 25 arranged on the side of the support rod 21 away from the elastic members 23 in the first direction X, and the pressing blocks 25 are fixedly connected with the elastic members 23 through the support rod 21, so as to improve the stability of the elastic members 23 when the elastic members 23 are pressed by the material box 30. The side of the pressing blocks 25 away from the elastic members 23 can abut against the first partition plate 181, so as to limit the movement distance of the support rod 21 in the first direction X. The gap between the two first partition plates 181 of adjacent groups can be adaptively adjusted according to the demand of the reciprocating movement of the transmission member in the first direction X, and is not specifically limited.

[0066] It can be understood that the elastic member 23 can be, for example, a spring, rubber or the like having elastic deformation capability, and is not specifically limited.

[0067] Optionally, the outer side wall of the second side plate 17 can be provided with a plurality of sliding blocks arranged at intervals in the first direction X, and the sliding blocks are provided with sliding grooves penetrating in the first direction X, and the transmission rod 22 can be slidably connected in the sliding grooves.

[0068] In some embodiments, as Figure 10 and Figure 11 The locking assembly 24 includes a fixed block 241, a movable block 242, a pushing block and a stop block 243. The fixed block 241 is arranged on the boat 1. The movable block 242 is arranged on the transmission rod 22, and the movable block 242 is arranged opposite to the fixed block 241 in the first direction X. The pushing member is connected to the outer side of the boat 1. The stop block 243 is connected with the pushing member, and the pushing member can drive the stop block 243 to move in the vertical direction Z. When the transmission rod 22 moves in the first direction X under the action of an external force, the fixed block 241 and the movable block 242 have a first gap 24a in the case that the elastic member 23 is in a compressed state, the stop block 243 is located in the first gap 24a, and the stop block 243 abuts against the movable block 242, so as to maintain the elastic member 23 in the compressed state. When the pushing member is driven, the pushing member can drive the stop block 243 to move in the vertical direction Z, so as to make the stop block 243 disengage from the movable block 242, and the elastic member 23 releases the clamping of the sheet.

[0069] Optionally, the pushing member can include a pushing rod 244 extending along the vertical direction Z and a limiting block 245 provided with a limiting hole extending along the vertical direction Z, and a spring is arranged in the limiting hole, and the pushing rod 244 is fixedly connected with the stop block 243 through the spring. Under the action of no external force, the spring is in a slightly compressed state in the limiting hole, so that the stop block 243 is pressed against the fixed block 241 and the movable block 242 with the first gap 24a by the restoring force generated by the compression of the spring, so as to limit the movement of the movable block 242 in the first direction X towards the fixed block 241, so that the elastic member 23 can be maintained in the compressed state under the stop action of the stop block 243 after the external force applied to the transmission rod 22 is removed, so that the sheet is maintained in the state of being clamped by the fixed plate 32 and the movable plate 33. When it is needed to release the compression state of the elastic member 23, it is only needed to pull down the pushing rod 244 under the action of external force, so that the spring is further compressed and deformed, the pushing rod 244 drives the stop block 243 to descend, and the movable block 242 can move towards the fixed block 241, which is convenient and fast. The locking or unlocking of the transmission rod 22 is realized by the movement of the pushing rod 244 in the vertical direction Z, so that even after the boat 1 is deformed by heating in the furnace cavity 201 or is plated with a film, the use performance of the locking assembly 24 is not affected.

[0070] The present disclosure also provides a film plating device, such as Figure 1 and Figure 2 The film plating device 100 includes a boat structure 10 and a furnace body 20, the boat structure 10 is configured to carry a boat 30 with a material cavity 301, the material cavity 301 is configured to carry a sheet; the furnace body 20 has a furnace cavity 201, the furnace cavity 201 is configured to accommodate the boat structure 10.

[0071] It can be understood that the boat structure 10 can refer to the related description of the above-mentioned embodiments, and will not be described again.

[0072] In the embodiments of the present disclosure, if not specifically limited, the form of connection can be bolt-nut, screw, buckle, magnetic attraction and the like for detachable connection. In some connections, if there is no special requirement for the form of detachable connection, welding, bonding and the like can be used for non-detachable connection.

[0073] The above describes the basic principles of the present disclosure in combination with specific embodiments, but it should be pointed out that the advantages, advantages, effects and the like mentioned in the present disclosure are only examples and not limitations, and these advantages, advantages, effects and the like cannot be considered as the must-have of each embodiment of the present disclosure. In addition, the above-mentioned specific details are only for the purpose of example and for the purpose of understanding, and not for the purpose of limitation, and the above-mentioned details do not limit the present disclosure to the above-mentioned specific details.

[0074] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0075] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0076] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0077] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A boat structure, characterized by, A boat structure configured to carry a cartridge having a material cavity configured to carry a plurality of sheets, the cartridge having a gas hole in communication with the material cavity, a gas entering from the gas hole being configured to coat a surface to be coated of the sheets, the boat structure comprising: at least one boat having at least one accommodation chamber, each of the accommodation chambers being configured to accommodate one of the cartridges, and having a gap between the accommodated cartridge and an inner wall of the accommodation chamber in communication with the gas hole, the boat being provided with a gas inlet and a gas outlet on opposite sides in a first direction in communication with the gap, the boat further being provided with at least one first through hole in communication with the gap, so that the gas can enter the gap from at least the gas inlet and the first through hole and then enter the material cavity from the gas hole to act on the surface to be coated.

2. The boat structure of claim 1, wherein The boat structure comprises: a bottom plate; two first side plates arranged on opposite sides of the bottom plate in the first direction, the two first side plates being respectively provided with the gas inlet and the gas outlet; two second side plates arranged on opposite sides of the bottom plate in a second direction, and adjacent first side plates and second side plates are connected, the second direction intersecting the first direction, the space enclosed by the bottom plate, the two first side plates and the two second side plates having at least one accommodation chamber, at least one of the bottom plate and the two second side plates being provided with the first through hole.

3. The boat structure according to claim 2, wherein: the number of accommodation chambers includes one, the accommodation chamber being formed by the bottom plate, the two first side plates and the two second side plates, and a plurality of first through holes are dispersedly arranged on the bottom plate and / or at least one of the second side plates; the number of accommodation chambers includes a plurality, and the boat structure further comprises: a plurality of groups of partition plate assemblies arranged between the two first side plates in the first direction, each group of partition plate assemblies comprising two first partition plates arranged in the first direction, the first partition plates being connected to the bottom plate, and the first partition plates being connected to two second side plates at both ends in the second direction, the first partition plates being parallel to the first side plates, and the two first partition plates belonging to the same group of partition plate assemblies being configured to form a side wall of the accommodation chamber; wherein the first partition plates are provided with second through holes, so that the gas can enter the gap of each accommodation chamber from at least one of the gas inlet, the first through hole and the second through hole and then enter the material cavity from the gas hole.

4. The boat structure of claim 3, wherein In the case where the accommodation chambers are provided in a plurality, at least one of the bottom plate and the second side plates corresponding to the two first partition plates of each group of partition plate assemblies is provided with the first through hole; and / or at least one of the bottom plate and the second side plates corresponding to two adjacent first partition plates of adjacent groups of partition plate assemblies is provided with the first through hole.

5. The boat structure of claim 3, wherein The material box comprises a fixed plate and a movable plate oppositely arranged to enclose the material cavity, the sheet is placed between the fixed plate and the movable plate, and the sheet and the movable plate are configured to move towards the material cavity under external force to make the sheets in the material cavity adhere to each other, and the sheets adhered to each other are parallel to the fixed plate, and the boat structure further comprises: At least one clamping and limiting assembly connected to each of the boat, when the material box is accommodated in the accommodation chamber, the clamping and limiting assembly is configured to push the movable plate to move in the first direction to clamp the sheets between the fixed plate and the movable plate and maintain the sheets in the clamped and adhered state.

6. The boat structure of claim 5, wherein When the number of the accommodation chambers comprises a plurality, the clamping and limiting assembly comprises: At least one support rod arranged between each of the adjacent two partition plate assemblies; A transmission rod extending in the first direction, the transmission rod is slidingly connected to the outside of the boat, and the transmission rod is connected to each of the support rods, the transmission rod can drive the support rods to move in the first direction; At least one elastic member connected to the support rod, the first partition plate is provided with at least one avoiding hole, the elastic member can pass through the avoiding hole to at least partially extend into the accommodation chamber, when the material box is placed in the accommodation chamber, the movable plate is opposite to the elastic member; At least one locking assembly connected to the outside of the boat, when the material box is placed in the accommodation chamber, the transmission rod moves in the first direction under external force to abut against the elastic member and produce compression deformation to clamp the sheets, the locking assembly is configured to limit the movement of the transmission rod to maintain the elastic member in the compressed state.

7. The boat structure of claim 6, wherein The locking assembly comprises: A fixed block arranged on the boat; A movable block arranged on the transmission rod, the movable block and the fixed block are oppositely arranged in the first direction; A pushing member connected to the outside of the boat; A stop block connected to the pushing member, the pushing member can drive the stop block to move in the vertical direction, when the transmission rod moves in the first direction under external force to make the elastic member in the compressed state, the fixed block and the movable block have a first gap, the stop block is located in the first gap, and the stop block abuts against the movable block to maintain the elastic member in the compressed state; when the pushing member is driven, the pushing member can drive the stop block to move in the vertical direction to make the stop block disengage from the abutment with the movable block, and the elastic member disengages from clamping the sheets.

8. The boat structure according to any one of claims 1 to 7, characterized in that, The number of the boats comprises two or more, a plurality of the boats are stacked in the vertical direction, each of the boats is provided with an opening communicating with the accommodation chamber, each of the material boxes is placed in one of the accommodation chambers from the opening, and the material box and the accommodation chamber enclose the gap.

9. The boat structure of claim 8, wherein, Further comprising: At least one first positioning block connected to the boat, the first positioning block being provided with a protrusion; At least one second positioning block connected to the boat, the second positioning block being provided with a recess matched with the protrusion, the first positioning block and the second positioning block of two adjacent boats are correspondingly arranged when the plurality of boats are stacked, so that the protrusion at least partially extends into the recess.

10. A coating apparatus, characterized by, Comprising: The boat structure of any one of claims 1-9, configured to carry a magazine having a material cavity, the material cavity being configured to carry a sheet material; An oven body having an oven cavity, the oven cavity being configured to accommodate the boat structure.

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