Reaction furnace and processing equipment

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a reaction furnace and processing equipment, and solves the problem that the film coating efficiency is low when multiple sheets borne by a graphite boat are subjected to film coating in the prior art. The reaction furnace comprises a furnace body, the furnace body is provided with a furnace cavity, the furnace cavity is configured to contain at least one bearing piece, and each bearing piece is configured to bear a sheet with at least one surface to be coated; at least part of the conveying part extends into the furnace chamber, the conveying part has a conveying direction, at least one bearing position is arranged on the conveying part in the conveying direction, each bearing position is configured to bear a bearing part, and the conveying part can drive the bearing parts borne by the bearing positions to move in the conveying direction; and the at least one spraying piece is connected to the furnace body, and the spraying piece is configured to spray gas to the to-be-coated surface of the sheet moving in the furnace chamber. According to the reaction furnace and the processing equipment provided by the invention, the single battery piece can be coated, so that the coating reaction time is shortened, and the coating efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of semiconductor and photovoltaic technology, and in particular, to a reaction furnace and processing equipment. BACKGROUND

[0002] With the development of photovoltaic technology, semiconductors and solar cells are widely used in various fields. In the manufacturing equipment of semiconductors and solar cells, a process equipment for coating the process surface of a substrate is generally included. For example, in the process of coating the process surface of a substrate by using an atomic layer deposition (ALD) equipment, the ALD equipment has a coating chamber, a plurality of substrates are loaded into a graphite boat and then enter the coating chamber, and the coating reaction takes a long time, resulting in low coating efficiency. SUMMARY

[0003] Therefore, the present disclosure provides a reaction furnace and processing equipment to solve the problem of low coating efficiency when coating a plurality of substrates carried by a graphite boat in the related art.

[0004] In a first aspect, an embodiment of the present disclosure provides a reaction furnace, comprising: a furnace body having a furnace cavity, the furnace cavity being configured to accommodate at least one carrier, each carrier being configured to carry a substrate having at least one surface to be coated; a conveying member at least partially extending into the furnace cavity, the conveying member having a conveying direction, and the conveying member being arranged with at least one carrying position along the conveying direction, each carrying position being configured to carry a carrier, and the conveying member being capable of moving the carrier carried by the carrying position along the conveying direction; and at least one spraying member connected to the furnace body, the spraying member being configured to spray gas to the surface to be coated of the substrate moving in the furnace cavity.

[0005] In some embodiments, the furnace body is provided with an inlet and an outlet at both ends in a first direction, the first direction being parallel to the conveying direction, the conveying member passing through the inlet and the outlet respectively, the conveying member being capable of moving the substrate carried by the carrying position into the furnace cavity through the inlet and out of the furnace cavity through the outlet in sequence, and the spraying member being configured to spray gas to the surface to be coated of the at least one substrate moving in the furnace cavity in sequence.

[0006] In some embodiments, the conveying member comprises: a first conveying belt group extending along the first direction, the first conveying belt group being arranged in the furnace cavity, and the first conveying belt group extending out of the inlet and the outlet at both ends in the first direction, the upper surface of the first conveying belt group being arranged with a plurality of carrying positions in the first direction; and a first driving part connected to the first conveying belt group, the first driving part being configured to drive the first conveying belt group to move along the first direction, so that the substrates carried on the plurality of carrying positions enter the furnace cavity through the inlet or move out of the furnace cavity through the outlet in sequence.

[0007] In some embodiments, the furnace body is provided with an inlet and outlet opening in communication with the furnace cavity, the sheet material can be placed in a carrying position in the furnace cavity from the inlet and outlet opening, the conveying member is configured to drive the sheet material in the carrying position to reciprocate in the furnace cavity along the conveying direction, and the spraying member is configured to spray the gas to the surface to be plated of the sheet material reciprocating in the furnace cavity.

[0008] In some embodiments, the conveying member comprises: a second conveying belt group extending along a first direction, the first direction being parallel to the conveying direction, the second conveying belt group being arranged in the furnace cavity, and an upper surface of the second conveying belt group being provided with the carrying position; and a second driving part connected with the second conveying belt group, the second driving part being configured to drive the second conveying belt group to reciprocate along the first direction; or, the conveying member comprises: at least one push rod extending into the furnace cavity at least partially, an end of the push rod extending into the furnace cavity being provided with the carrying position, the push rod extending along a vertical direction, the vertical direction being parallel to the conveying direction and perpendicular to the first direction; and a pneumatic cylinder connected with the push rod, the pneumatic cylinder being configured to drive the push rod to reciprocate along the vertical direction, so that the sheet material carried by the carrying position reciprocates along the vertical direction in the furnace cavity.

[0009] In some embodiments, the furnace body is further provided with a heating member arranged in the carrying member, the heating member being configured to heat the sheet material carried by the carrying member.

[0010] In some embodiments, the number of the spraying members comprises two or more, and the plurality of spraying members are arranged in the furnace body along the conveying direction and / or are arranged in the furnace body oppositely along a second direction, the second direction being perpendicular to the conveying direction and perpendicular to the vertical direction.

[0011] In some embodiments, the spraying member is provided with a plurality of gas holes in communication with the furnace cavity, the gas holes being configured to spray the gas to the surface to be plated moving in the furnace cavity; wherein the plurality of gas holes comprises: a plurality of gas inlet holes arranged along the conveying direction, the plurality of gas inlet holes being respectively configured to spray a plurality of reaction gases required for plating the surface to be plated, and the plurality of gas inlet holes spraying different types of reaction gases; a plurality of gas extraction holes arranged at least on one side of each of the gas inlet holes along the conveying direction, the gas extraction holes being configured to extract the excess reaction gases sprayed by the corresponding gas inlet holes; and a plurality of gas separation holes, at least one gas separation hole being arranged between each adjacent two gas inlet holes, the gas separation holes being configured to introduce inert gas into the furnace cavity to separate the reaction gases sprayed by the adjacent gas inlet holes.

[0012] In some embodiments, the furnace cavity is provided with a preset space extending along the conveying direction, and the carried sheet is located in the preset space when the conveying member drives the carrier to move along the conveying direction; the central projection of the air inlet hole, the air isolation hole and the air outlet hole in the second direction to the furnace cavity is located in the preset space, the second direction is perpendicular to the conveying direction, the first connecting line between the center of any air inlet hole and the center of any air isolation hole extends in parallel to the conveying direction, and / or the second connecting line between the center of any air inlet hole and the center of any air outlet hole extends in parallel to the conveying direction.

[0013] In a second aspect, the embodiments of the present disclosure further provide a processing equipment, comprising: a feeding and discharging conveying assembly configured to convey sheets; the above-described reaction furnace configured to process a single sheet; and a transfer assembly arranged between the feeding and discharging conveying assembly and the reaction furnace, and configured to transfer unprocessed sheets to the reaction furnace or to transfer processed sheets to the feeding and discharging conveying assembly.

[0014] The reaction furnace and the processing equipment provided by the embodiments of the present disclosure use the conveying member and the spraying member arranged on the furnace body to enable the conveying member to complete the plating of the surface to be plated of a single sheet during the movement of the sheet in the conveying direction, that is, to achieve the plating of the single sheet by moving. Compared with the conventional method of placing a whole boat structure carrying multiple sheets in the furnace cavity for plating, the single sheet plating by moving significantly improves the plating efficiency, avoids the accumulation of battery sheets, and improves the production capacity.

[0015] In addition, when the conveying member is provided with multiple carrying positions arranged at intervals along the conveying direction, each carrying position can carry a single sheet, so that the conveying member can simultaneously convey multiple sheets to move in the furnace cavity, so that the multiple sheets complete plating during movement, thereby increasing the number of sheets that can be simultaneously accommodated in the furnace cavity, further increasing the proportion of sheets in the furnace cavity, shortening the time required for batch plating of sheets, and further improving the production capacity per unit time. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and other objects, features and advantages of the present disclosure will become more apparent from the following detailed description taken in conjunction with the accompanying drawings. The drawings provided in the specification and the contents of the specification fully convey the principles of the present disclosure to those skilled in the art, and serve as a basis for explaining the present disclosure. In the drawings, the same reference numerals generally indicate the same components or steps throughout the specification.

[0017] Figure 1 A schematic diagram of a plating equipment provided by an embodiment of the present disclosure is shown.

[0018] Figure 2 A schematic diagram of a plating equipment provided by another embodiment of the present disclosure is shown.

[0019] Figure 3 Fig. 1 shows a top view of a coating equipment according to an embodiment of the present disclosure.

[0020] Figure 4 Fig. 2 shows a perspective view of the coating equipment according to an embodiment of the present disclosure. Figure 3

[0021] Figure 5 Fig. 3 shows a schematic view of a reaction furnace arranged on a workbench according to an embodiment of the present disclosure.

[0022] Figure 6 Fig. 4 shows a schematic view of a reaction furnace arranged on a workbench according to another embodiment of the present disclosure.

[0023] Figure 7 Fig. 5 shows a schematic view of a reaction furnace arranged on a workbench according to another embodiment of the present disclosure.

[0024] Figure 8 Fig. 6 shows a schematic view of a spray member according to an embodiment of the present disclosure.

[0025] Figure 9 Fig. 7 shows a partial enlarged view of part A of the spray member according to an embodiment of the present disclosure. Figure 8

[0026] Fig. 8 shows a sectional view of the spray member cooperating with a furnace body according to an embodiment of the present disclosure. Figure 10

[0027] Fig. 9 shows a schematic view of a gas hole of the spray member cooperating with a sheet according to an embodiment of the present disclosure. Figure 11

[0028] Fig. 10 shows a top view of the spray member cooperating with the sheet according to an embodiment of the present disclosure. Figure 12

[0029] Fig. 11 shows a top view of the spray member according to an embodiment of the present disclosure. Figure 13 Fig. 12 shows a top view of the spray member according to another embodiment of the present disclosure.

[0030]

[0031] 100, coating equipment; 10, reaction furnace; 1, furnace body; 101, furnace cavity; 101a, preset space; 102, feeding port; 103, discharging port; 11, exhaust port; 2, conveying member; 3, spray member; 3a, opening; 3b, through hole; 31, spray head; 311, gas hole; 311a, gas inlet hole; 311b, gas isolation hole; 311c, exhaust hole; 4, cover plate; 5, bearing member; 20, feeding and discharging conveying assembly; 201, feeding conveying belt; 202, discharging conveying belt; 30, workbench; 40, sheet; 401, cut surface; B, center line; L1, first distance; X, first direction; Y, second direction; Z, vertical direction.​​ Detailed Implementation

[0032] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0033] Figure 1 The diagram shown is a schematic diagram of a coating apparatus provided in an embodiment of this disclosure. Figure 2 The diagram shown is a schematic diagram of a coating apparatus provided in another embodiment of this disclosure. Figure 3 The diagram shown is a schematic diagram of a coating apparatus provided in another embodiment of this disclosure. Figure 4 As shown Figure 3 A three-dimensional view of the coating equipment shown. Figure 5 The diagram shown is a schematic representation of a reactor disposed on a workbench according to an embodiment of the present disclosure. Figure 6 The diagram shown is a schematic of a reactor disposed on a workbench according to another embodiment of this disclosure. Figure 7 The diagram shown is a schematic representation of a reactor disposed on a workbench according to another embodiment of this disclosure. Arrow X points to a first direction, and arrow Y points to a second direction. The first direction X and the second direction Y are perpendicular to each other, and both the first direction X and the second direction Y are perpendicular to the vertical direction Z.

[0034] This disclosure provides a reactor, such as... Figures 1 to 4 The reactor 10 is used in processing equipment and is configured to process a single sheet 40. The reactor 10 includes a furnace body 1, a conveyor 2, and at least one sprayer 3. The furnace body 1 has a furnace cavity 101, which is configured to accommodate at least one carrier 5. Each carrier 5 is configured to carry a sheet 40 having at least one surface to be coated. The conveyor 2 extends at least partially into the furnace cavity 101. The conveyor 2 has a conveying direction and at least one bearing position is arranged along the conveying direction. Each bearing position is configured to carry a carrier 5. The conveyor 2 is capable of driving the carrier 5 carried by the bearing position to move along the conveying direction. The sprayer 3 is connected to the furnace body 1 and is configured to spray gas onto the surface to be coated of the sheet 40 moving inside the furnace cavity 101.

[0035] Optionally, the processing equipment can be a coating equipment 100 for coating the sheet 40, and the conveying member 2 can spray a gas to the surface of the sheet 40 carried by the carrier 5 to be coated by the spraying member 3 during the movement of the carrier 5 in the conveying direction in the furnace cavity 101, so that the single sheet 40 is coated in the furnace cavity 101 while moving in the conveying direction. The coating equipment 100 can be an ALD equipment, an oxidation equipment, a plasma enhanced chemical vapor deposition (PECVD) equipment, a cross-section passivation equipment, a low pressure chemical vapor deposition (LPCVD) equipment, etc. In the embodiment of the present disclosure, the coating equipment 100 is an ALD equipment.

[0036] The coating equipment 100 can further include an in-out conveying assembly 20 and a transfer assembly (not shown in the figure), the in-out conveying assembly 20 is arranged on at least one side of the furnace body 1, and the transfer assembly is arranged between the in-out conveying assembly 20 and the furnace body 1. The in-out conveying assembly 20 is configured to convey the sheet 40 (including the unprocessed sheet 40 and the processed sheet 40), and the transfer assembly is configured to transfer the unprocessed sheet 40 to the reaction furnace 10 or transfer the processed sheet 40 to the in-out conveying assembly 20. The transfer assembly can be a mechanical hand capable of carrying the sheet 40, and the in-out conveying assembly 20 can be a conveying belt or a conveying roller structure arranged on at least one side of the furnace body 1. For example, as shown in FIG. 2, the in-out conveying assembly 20 is a conveying belt arranged on one side of the furnace body 1, and the transfer assembly is a mechanical hand capable of carrying the sheet 40. Figure 2 and Figure 3 The in-out conveying assembly 20 can be a conveying belt arranged on both sides of the furnace body 1, i.e., an in conveying belt 201 and an out conveying belt 202, the in conveying belt 201 is used to convey the unprocessed sheet 40, and the mechanical hand can transfer the unprocessed sheet 40 to the carrier 5 in the carrying position when the in conveying belt 201 conveys the unprocessed sheet 40 to a position close to the furnace body 1. After the sheet 40 is moved in the reaction furnace 10 and the single sheet coating is completed, the mechanical hand can transfer the processed sheet 40 to the out conveying belt 202 on the other side, and the out conveying belt 202 can further convey the processed sheet 40 to the next process. Figure 1 The in-out conveying assembly 20 can be a conveying belt arranged on one side of the furnace body 1, and the conveying belt is used to convey the unprocessed sheet 40 and the processed sheet 40 at the same time. Along the conveying direction of the conveying belt, the unprocessed sheet 40 can be transferred to the reaction furnace 10 by the mechanical hand when the unprocessed sheet 40 moves to a position close to the furnace body 1, and after the coating is completed, the mechanical hand can transfer the processed sheet 40 back to the conveying belt, so that the processed sheet 40 continues to move along the conveying belt to the next process.

[0037] It should be emphasized that the carrier plate can be pre-set on the corresponding carrier position, or the mechanical hand can take and place the carrier plate on the corresponding working position in the working process of the conveying member 2, or the sheet 40 can be carried on the carrier plate when the feeding and discharging conveying assembly 20 conveys the sheet 40, and the mechanical hand can carry the carrier plate and the sheet 40 together between the conveying member 2 and the feeding and discharging conveying assembly 20. The actual demand can be adjusted adaptively, and no specific limitation is made.

[0038] Optionally, the conveying direction of the feeding and discharging conveying assembly 20 conveying the sheet 40 can be perpendicular to the conveying direction of the conveying member 2. The feeding and discharging conveying assembly 20 and the reaction furnace 10 can be arranged on a workbench 3, and the specific position of the feeding and discharging conveying assembly 20 on the workbench 3 can be adaptively adjusted according to the actual matching structure of the conveying member 2 and the furnace body 1 in the reaction furnace 10, and no specific limitation is made.

[0039] In addition, the coating equipment 100 can further include a vacuum pump, and the furnace body 1 is provided with an exhaust port 11 communicating with the furnace cavity 101, and the vacuum pump communicates with the exhaust port 11 through an exhaust pipeline to vacuumize the furnace cavity 101, so that the furnace cavity 101 forms a vacuum chamber.

[0040] Optionally, the sheet 40 can be a substrate including a silicon-based material or a perovskite material for preparing a solar cell sheet, and the substrate needs to be processed through different processes to finally become a solar cell product that can be used. The shape of the sheet 40 can be, for example, a rectangular, square, circular, etc. sheet, and no specific limitation is made. In the embodiment of the present disclosure, in order to facilitate description, the sheet 40 is arranged in a rectangular sheet structure, but is not limited thereto. In addition, the coating equipment 100 can be used for coating the upper surface of the sheet 40, or can be used for coating at least one side of the cutting section 401 of the sheet 40. The specific position of the spray member 3 on the furnace body 1 is set according to the specific position of the sheet 40 to be coated when the sheet 40 is placed on the carrier plate. For example, when the cutting section 401 on one side of the sheet 40 or the upper surface of the sheet 40 is coated, the spray member 3 can be arranged on only one side of the furnace body 1 opposite to the upper surface or the cutting section 401 of the sheet 40. When the cutting sections 401 on the opposite sides of the sheet 40 are coated, the spray member 3 needs to be arranged on both sides of the furnace body 1 opposite to the cutting sections 401. In addition, no matter whether the spray member 3 is arranged on one side or multiple sides of the furnace body 1, the number of the spray member 3 arranged on each side can be one or multiple, which can be adaptively adjusted according to the actual demand, and no specific limitation is made. In the embodiment of the present disclosure, the specific structure of the reaction furnace 10 is described in detail taking the coating of the cutting sections 401 on the opposite sides of the sheet 40 (at this time, the spray member 3 is arranged on the opposite sides of the furnace body 1 in the second direction Y) as an example.

[0041] Optionally, the shape of the furnace body 1 can be selected according to actual needs, for example, the furnace body 1 can be provided as a hollow circular cylindrical structure, or can be provided as a hollow square cylindrical structure, without specific limitation. In the embodiment of the present disclosure, the furnace body 1 is provided as a hollow square cylindrical structure, but is not limited thereto.

[0042] It can be understood that the carrier 5 can include at least one carrier plate, each carrier plate can be placed on a carrier position of the conveying member 2 to enable the conveying member 2 to drive the carrier plate to move in the conveying direction, the size of the carrier plate can be matched with the size of the sheet 40 and the size of the carrier position, and the number of carrier plates can be matched with the number of carrier positions provided on the conveying member 2, so that each carrier position carries a sheet 40 individually, without specific limitation.

[0043] The reaction furnace 10 provided by the embodiment of the present disclosure utilizes the conveying member 2 and the spraying member 3 provided on the furnace body 1, so that the conveying member 2 can complete the film plating of the film-plating surface of the single sheet 40 during the movement of the sheet 40 in the conveying direction, that is, the film plating of the single sheet 40 is realized by moving, compared with the traditional method of placing the boat structure carrying multiple sheets 40 in the furnace cavity 101 for film plating, the moving film plating of the single sheet 40 significantly improves the film plating efficiency, avoids the accumulation of battery sheets, and improves the production capacity.

[0044] In addition, when the conveying member 2 is provided with a plurality of carrier positions arranged at intervals in the conveying direction, each carrier position can carry a sheet 40 individually, so that the conveying member 2 can simultaneously convey a plurality of sheets 40 to move in the furnace cavity 101, so that the plurality of sheets 40 can complete the film plating during the movement, which improves the number of sheets 40 that can be simultaneously accommodated in the furnace cavity 101, thereby improving the proportion of sheets 40 in the furnace cavity 101, shortening the time required for batch film plating of the sheets 40, and further improving the production capacity per unit time.

[0045] Optionally, the furnace body 1 further comprises a heating member (not shown in the figure), which is configured to heat the sheets 40 in the furnace cavity 101. Compared with the original heating member which needs to heat the multiple sheets 40 stacked in the boat structure, the heating member in the embodiment of the present disclosure can heat the single sheet 40 moving in the furnace cavity 101 more quickly, has higher heating efficiency, and reduces heat loss.

[0046] It can be understood that the heating member can be further arranged on each of the bearing members 5, and the heating member is configured to heat the sheet 40 carried on the bearing member 5. For example, when the bearing member 5 includes a plurality of bearing plates arranged at each bearing position, the bearing plate can be arranged as a metal plate with heat conduction capability, and the lower surface of each bearing plate can be provided with a heating member. The heating member generates heat that can be conducted to the sheet 40 through the bearing plate, further improving the heating efficiency of the sheet 40, and further reducing heat loss.

[0047] It should be emphasized that the heating member can be arranged as a heating wire, a heating rod, etc. The arrangement of the heating member on the bearing plate can be adaptively adjusted according to actual needs, and is not specifically limited.

[0048] It can be understood that the conveying direction of the conveying member 2 can be adaptively adjusted according to the length of the reaction furnace 10, the arrangement position of the feeding and discharging conveying assembly 20, and the matching structure, etc. For example, Figure 1 When the feeding and discharging conveying assembly 20 is arranged on one side of the furnace body 1 and the length of the reaction furnace 10 cannot be arranged to be relatively long, the conveying direction of the conveying member 2 is arranged to reciprocate bidirectionally along the length direction of the reaction furnace 10, or, for example, Figure 2 When the length of the reaction furnace 10 cannot be arranged to be relatively long, but there is a certain space in the height direction, the conveying direction of the conveying member 2 is arranged to reciprocate bidirectionally along the height direction of the reaction furnace 10, or, for example, Figure 3 When the length of the reaction furnace 10 can be arranged to be relatively long, the conveying direction of the conveying member 2 is arranged to move unidirectionally along the length direction of the reaction furnace 10. The setting of the conveying direction of the conveying member 2 and the specific matching structure of the conveying member 2 in the reaction furnace 10 can be adaptively adjusted according to actual conditions. The specific structure of the reaction furnace 10 is introduced below based on the above three cases, but is not limited thereto.

[0049] In some embodiments, for example, Figure 3 , Figure 4 and Figure 5 The furnace body 1 is respectively provided with a feeding port 102 and a discharging port 103 communicating with the furnace cavity 101 at both ends in the first direction X, the first direction X is parallel to the conveying direction, the conveying member 2 passes through the feeding port 102 and the discharging port 103 respectively, the conveying member 2 can drive the sheet 40 at the bearing position to enter the furnace cavity 101 from the feeding port 102 in turn and move out from the discharging port 103, and the spraying member 3 is configured to spray gas to the surface to be plated of at least one sheet 40 moving into the furnace cavity 101 in turn.

[0050] It can be understood that the conveying direction is parallel to the first direction X, and the conveying direction is a unidirectional conveying direction from the feeding port 102 to the discharging port 103.

[0051] Specifically, the conveying member 2 comprises a first conveying belt group and a first driving part, the first conveying belt group extends along a first direction X, the first conveying belt group is arranged in the furnace cavity 101, and the first conveying belt group extends out of the feeding port 102 and the discharging port 103 at two ends of the first direction X, and the upper surface of the first conveying belt group is provided with a plurality of bearing positions arranged at intervals along the first direction X; the first driving part is connected with the first conveying belt group, and the first driving part is configured to drive the first conveying belt group to move along the first direction X, so that the sheet 40 carried on the plurality of bearing positions enters the furnace cavity 101 from the feeding port 102 or moves out of the discharging port 103 in sequence.

[0052] Optionally, the first conveying belt group can be provided as two or more conveying belts penetrating through the furnace cavity 101 and extending out of the feeding port 102 and the discharging port 103, and the plurality of conveying belts are arranged at intervals along a second direction Y, so that the carrier plate carrying the sheet 40 can be smoothly placed on the bearing positions on the conveying belts, and the plurality of bearing positions are arranged at intervals along the first direction X. The first conveying belt group can also be provided as a plurality of conveying roller structures arranged along the first direction X, which can be adaptively adjusted according to actual needs.

[0053] Optionally, the first driving part can be provided as a motor electrically connected with the first conveying belt group, so that the first conveying belt group can drive the carrier plate to enter the furnace cavity 101 from the feeding port 102 or move out of the discharging port 103 in sequence.

[0054] It can be understood that the spray members 3 arranged on the opposite sides of the furnace body 1 in the second direction Y can be provided as a plurality of spray members arranged at intervals along the first direction X, so that different spray members 3 can work simultaneously to coat the plurality of sheets 40 moving in the conveying direction in one direction, thereby improving the coating efficiency of the sheets 40, avoiding the accumulation of the sheets 40, and improving the production capacity.

[0055] In other embodiments, as Figure 1 and Figure 6 , the furnace body 1 is provided with a feeding and discharging port communicating with the furnace cavity 101, the sheet 40 can be placed on a bearing position in the furnace cavity 101 from the feeding and discharging port, the conveying member 2 is configured to drive the sheet 40 on the bearing position to reciprocate in the furnace cavity 101 along the conveying direction, and the spray member 3 is configured to spray gas to the surface to be coated of the sheet 40 reciprocating in the furnace cavity 101.

[0056] It can be understood that in this embodiment, the conveying direction of the conveying member 2 is parallel to the first direction X, and the conveying direction is bidirectional reciprocating conveying along the first direction X.

[0057] Optionally, the feeding and discharging port is arranged above the furnace body 1, and the furnace body 1 is provided with a cover plate 4 capable of blocking the feeding and discharging port, and the cover plate 4 is rotationally connected to one side of the feeding and discharging port, so as to facilitate the taking and placing of the sheet 40.

[0058] Specifically, the conveying member 2 comprises a second conveying belt group and a second driving part, the second conveying belt group extends along a first direction X, the first direction X is parallel to the conveying direction, the second conveying belt group is arranged in the furnace cavity 101, and an upper surface of the second conveying belt group is provided with a bearing position; the second driving part is connected with the second conveying belt group, and the second driving part is configured to drive the second conveying belt group to reciprocate along the first direction X.

[0059] Optionally, the second conveying belt group can be arranged as a conveying belt or a conveying roller in the furnace cavity 101, and at least one bearing position is arranged on the conveying belt or the conveying roller along the first direction X for placing the carrier plate, and the specific matching structure of the second conveying belt group can be adaptively adjusted according to actual needs.

[0060] Optionally, the second driving part can be arranged as a motor electrically connected with the second conveying belt group, so that the second conveying belt group can drive the carrier plate to reciprocate along the first direction X in the furnace cavity 101.

[0061] It can be understood that the furnace body 1 is provided with the spray member 3 on the opposite sides in the second direction Y, and the spray member 3 on each side can be arranged as a plurality of spray members 3 arranged at intervals along the first direction X, or can be arranged as one spray member 3, which can be adaptively adjusted according to actual needs and is not specifically limited.

[0062] In some optional embodiments, the conveying member 2 comprises at least one push rod and a cylinder, the cylinder is connected with the push rod, and the cylinder is configured to drive the push rod to reciprocate along the vertical direction Z. Figure 2 and Figure 7 The inlet and outlet is arranged below the furnace body 1, and the cover plate 4 for plugging the inlet and outlet is arranged in a separable matching structure with the furnace body 1. That is, the furnace body 1 is arranged above the workbench 3, the inlet and outlet faces the workbench 3, the workbench 3 is provided with the cover plate 4, the cover plate 4 can be raised to plug the inlet and outlet or lowered to open the inlet and outlet through the lifting assembly. Moreover, the cover plate 4 is provided with a through hole through which the push rod passes, and the cylinder can be arranged on a side of the cover plate 4 away from the inlet and outlet. When the carrier plate bearing the sheet 40 is placed on the cover plate 4, the movement of the push rod along the vertical direction Z driven by the cylinder can make the push rod protrude out of the through hole to make the carrier plate on the cover plate 4 rise or fall.

[0063] For example, in the case that the cover plate 4 is placed on the workbench 3, a carrier plate carrying the unprocessed sheet material 40 is placed on the cover plate 4 at a position corresponding to the push rod (i.e. the carrying position), the lifting assembly drives the cover plate 4 to rise to block the material inlet and outlet, the carrier plate is located in the furnace cavity 101, the cylinder can drive the push rod to at least partially extend into the furnace cavity 101 or extend out of the furnace cavity 101, so that the carrier plate reciprocates along the vertical direction Z with the push rod, and in the process of reciprocating, the spray member 3 performs film plating on the surface of the sheet material 40 to be plated. After completion, the lifting assembly drives the cover plate 4 to descend to open the material inlet and outlet, so as to replace the new unprocessed sheet material 40.

[0064] The following will be described in detail Figure 6 The spray member 3 will be described in detail, but is not limited thereto. In addition, for the convenience of description, the spray member 3 is provided as one, and the spray member 3 is arranged on one side of the furnace body 1 in the second direction Y, so as to face the cutting section 401 of the sheet material 40.

[0065] Figure 8 The spray member provided by an embodiment of the present disclosure is shown in the schematic view. Figure 9 For Figure 8 The partial enlarged view of the A part of the spray member is shown. Figure 10 The spray member and the furnace body cooperating with each other provided by an embodiment of the present disclosure are shown in the sectional view. Figure 11 The gas hole and the sheet material cooperating with each other in the spray head provided by an embodiment of the present disclosure are shown in the schematic view. Figure 12 The spray head and the sheet material cooperating with each other provided by an embodiment of the present disclosure are shown in the top view. Figure 13 The top view of the spray head provided by an embodiment of the present disclosure is shown. In order to distinguish the plurality of gas holes 311, the gas isolation hole 311b is represented by black shading, the gas inlet hole 311a is represented by white shading, and the gas extraction hole 311c is represented by grid shading. In addition, Figure 12 And Figure 13 In the spray head, the two arrows on the sheet material 40 point in opposite directions, and the arrow pointing to the side of the cutting section 401 of the gas hole 311 points to the flow direction of the gas.

[0066] As Figures 8 to 10The spray member 3 comprises at least one spray head 31 connected to the furnace body 1, and the spray head 31 is provided with a plurality of gas holes 311 respectively communicating with the furnace cavity 101 and facing the surface to be plated, and the gas holes 311 are configured to spray gas to the moving surface to be plated. Wherein, the plurality of gas holes 311 can respectively comprise a plurality of gas inlet holes 311a, a plurality of gas extraction holes 311c and a plurality of gas isolation holes 311b, the plurality of gas inlet holes 311a are arranged along the first direction X, the plurality of gas inlet holes 311a are respectively configured to spray a plurality of reaction gases required for plating the surface to be plated, and the plurality of gas inlet holes 311a spray different types of reaction gases; the plurality of gas extraction holes 311c are arranged on at least one side of each gas inlet hole 311a along the first direction X, and the gas extraction hole 311c is configured to suck the excess reaction gas sprayed by the corresponding gas inlet hole 311a; at least one gas isolation hole 311b is arranged between each adjacent two gas inlet holes 311a, and the gas isolation hole 311b is configured to introduce inert gas into the furnace cavity 101 to separate the reaction gases sprayed by the adjacent gas inlet holes 311a.

[0067] It can be understood that the spray head 31 in the spray member 3 can be one or multiple, which can be adjusted according to the number of surfaces to be plated of the sheet 40 to be plated and the number of films plated on the surface to be plated, etc. Moreover, the specific position of the spray head 31 in the spray member 3 arranged on the furnace body 1 can be adjusted according to the actual position of the surface to be plated of the sheet 40 carried by the carrier 5 in the furnace cavity 101, which is not specifically limited.

[0068] It can be understood that when the cutting section 401 of the sheet 40 in the furnace cavity 101 is plated by using the spray member 3, a plurality of reaction gases can be introduced into the furnace cavity 101 through a plurality of gas inlet holes 311a at the same time, and the inert gas sprayed by the plurality of gas isolation holes 311b can be distributed to form a curtain wall to separate different reaction gases, and the gas extraction hole 311c can timely suck the excess gas. So that the sheet 40 carried by the carrier 5 can pass through the area where different reaction gases are located in sequence under the separation of the curtain wall during the movement along the first direction X, so that different reaction gases can act on the cutting section 401 of the sheet 40 in sequence, thereby completing the plating of the cutting section 401 and improving the plating efficiency.

[0069] In addition, while the reaction gas is sprayed into the gas inlet hole 311a and the inert gas is sprayed into the gas isolation hole 311b, the gas extraction hole 311c can suck the sprayed reaction gas, thereby improving the flow rate of the reaction gas and further improving the uniformity and efficiency of the plating. Moreover, the reaction gas not acting on the cutting section 401 can be timely sucked away by using the arranged gas extraction hole 311c, so as to avoid the diffusion of the excess reaction gas to other surfaces of the sheet 40, thereby avoiding the misplating of other surfaces of the sheet 40.

[0070] Optionally, the suction hole 311c can also be configured to suck the excess inert gas sprayed by the air isolation hole 311b, so as to avoid the diffusion of the excess inert gas to other positions in the furnace cavity 101 and affect the film coating.

[0071] In an optional embodiment, the spray head 3 can include at least one box body having a hollow accommodating cavity, and the box body is provided with an opening 3a on one side in the second direction Y and in communication with the accommodating cavity. The box body is also provided with at least one through hole 3b in communication with the accommodating cavity, and a plurality of groups of pipeline groups are arranged in the accommodating cavity, each group of pipeline groups including a plurality of independent branch pipelines, one end of the plurality of branch pipelines being in communication with external air pipes through the through hole 3b. Moreover, the spray head 31 at least partially extends into the accommodating cavity through the opening 3a, so that the spray head 31 is connected to the other end of the plurality of branch pipelines, thereby enabling the plurality of gas holes 311 of the spray head 31 to spray gas into the furnace cavity 101 or to suck gas out of the furnace cavity 101 through the externally connected air pipes.

[0072] It can be understood that the external air pipes are configured to include a plurality of first sub-air pipes having a plurality of different reaction gases, a second sub-air pipe having inert gas, and a suction pipe in communication with a vacuum pump. According to whether the gas hole 311 connected by the branch pipeline is the gas inlet hole 311a, the suction hole 311c or the air isolation hole 311b, the corresponding air pipe is connected, and details are not repeated.

[0073] Optionally, the outer side of the spray head 31 can be provided with a fixing block, the fixing block being detachably connected with the box body through the opening 3a, and at least part of the spray head 31 extending out of the accommodating cavity through the opening 3a. It should be emphasized that the furnace body 1 is provided with a through hole, the box body can be detachably connected to the outer wall of the furnace body 1, and the spray head 31 can pass through the through hole so that the gas holes 311 are located in the furnace cavity 101, thereby realizing the communication between the gas holes 311 and the furnace cavity 101.

[0074] The specific structure of the spray head 31 will be described in detail below by taking an example of coating the cutting section 401 of one side of the sheet 40 by using one spray head 31. At this time, the spray head 31 is arranged on one side of the furnace body 1 in the second direction Y, and the gas holes 311 in the spray head 31 face the cutting section 401 of the sheet 40 in the furnace cavity 101.

[0075] As Figures 10 to 13The furnace cavity 101 is provided with a preset space 101a extending in the first direction X in the horizontal plane. When the carrier 5 carrying the supported sheet 40 moves in the furnace cavity 101, the sheet 40 is located in the preset space 101a. The central projection of the gas inlet hole 311a, the gas isolation hole 311b and the gas extraction hole 311c in the second direction Y to the furnace cavity 101 is located in the preset space 101a. The first connecting line between the center of any gas inlet hole 311a and the center of any gas isolation hole 311b is parallel to the first direction X, so that the inert gas sprayed from the gas isolation hole 311b can effectively separate the gas sprayed from the adjacent gas inlet hole 311a.

[0076] In an optional embodiment, the second connecting line between the center of any gas inlet hole 311a and the center of any gas extraction hole 311c is parallel to the first direction X. On the one hand, the gas extraction hole 311c can timely recycle the excess reaction gas around the cutting section 401, avoiding the gas from diffusing to the gas surface of the sheet 40. On the other hand, the arrangement of the gas inlet hole 311a and the gas extraction hole 311c enables the gas to quickly and uniformly diffuse around the cutting section 401, improving the film coating efficiency.

[0077] Optionally, the connecting line of the centers of the plurality of gas inlet holes 311a, the plurality of gas isolation holes 311b and the plurality of gas extraction holes 311c is a straight line, and the extension direction of the straight line is parallel to the first direction X.

[0078] It should be emphasized that the cross section of each gas hole 311 can be circular among the gas inlet hole 311a, the gas isolation hole 311b and the gas extraction hole 311c. In other examples, the cross section of each gas hole 311 can also be square, polygonal, etc., without specific limitation.

[0079] It can be understood that the preset space 101a can be limitedly or unlimitedly extended or shortened in the first direction X and the second direction Y, and can be adaptively adjusted according to the size of the furnace cavity 101 in the horizontal direction, the length and width of the sheet 40, the range of the movement of the sheet 40 in the furnace cavity 101 in the first direction X, etc. The size of the preset space 101a in the vertical direction Z can be matched with the thickness of the sheet 40 to be coated. The sheet 40 is located in the preset space 101a, and the two edges of the sheet 40 in the vertical direction Z substantially coincide with or have a gap with the two edges of the preset space 101a, without specific limitation.

[0080] In some embodiments, the center line B of the preset space 101a has a first distance L1 in the vertical direction Z to the bottom wall of the furnace cavity 101, and a first line has a second distance in the vertical direction Z to the bottom wall of the furnace cavity 101 in the extension direction parallel to the first direction X, the second distance being equal to the first distance L1; and a second line has a third distance in the vertical direction Z to the bottom wall of the furnace cavity 101 in the extension direction parallel to the first direction X, the third distance being equal to the first distance L1. That is, the center line B of the preset space 101a coincides with the first line and the second line respectively, so that the gas sprayed or sucked from the gas holes 311 can effectively act on the cutting section 401 around, improve the film coating efficiency and uniformity of the cutting section 401, and avoid the diffusion of excess gas to other positions of the furnace cavity 101.

[0081] Optionally, a plurality of channels extending in the second direction Y can be arranged in the spray head 31, and the plurality of channels are arranged at intervals in the first direction X. One end of the channel away from the preset space 101a is used for communication with different branch pipes, so that the one end of the channel close to the preset space 101a forms a corresponding gas inlet hole 311a, gas outlet hole 311c or gas isolation hole 311b according to the gas filled in the communicated branch pipe.

[0082] It can be understood that the distance between the plurality of gas holes 311 arranged at intervals in the first direction X can be adaptively adjusted according to actual needs, and the plurality of gas holes 311 can be arranged at equal intervals or non-equal intervals in the first direction X. Moreover, the distance of the gas hole 311 in the second direction Y to the preset space 101a can also be adaptively adjusted according to the film coating needs, which is not specifically limited.

[0083] In an optional embodiment, each gas inlet hole 311a and gas isolation hole 311b is provided with a gas outlet hole 311c on both sides (such as Figure 12 ), or each group of gas inlet holes 311a and gas isolation holes 311b is provided with a gas outlet hole 311c on both sides (such as Figure 13 ), and the arrangement of the gas inlet hole 311a, the gas outlet hole 311c and the gas isolation hole 311b in the first direction X can be adjusted according to actual needs, which is not specifically limited.

[0084] Optionally, the cross-sectional areas of the plurality of gas holes 311 can be the same. Alternatively, the cross-sectional areas of the plurality of gas holes 311 can be different. For example, the cross-sectional area of the gas inlet hole 311a can be less than or equal to the cross-sectional area of the gas isolation hole 311b, and the cross-sectional area of the gas outlet hole 311c can be greater than the cross-sectional area of the gas inlet hole 311a.

[0085] It is emphasized that the air inlet holes 311a, the air extraction holes 311c and the air isolation holes 311b are arranged as a plurality of micro-holes on the nozzle 31 in the first direction X, and the air inlet holes 311a have a diameter of 0.8mm-1.2mm. It can be understood that the diameters of the air inlet holes 311a, the air extraction holes 311c and the air isolation holes 311b can be adaptively adjusted according to the size of the cutting section 401 in the thickness direction, so that the diameter of the air inlet holes 311a in the vertical direction Z is not greater than three-quarters of the thickness of the cutting section 401.

[0086] In an optional embodiment, the inert gas can be nitrogen, helium, neon, argon, krypton, xenon, etc. In the embodiments of the present disclosure, the inert gas is set as nitrogen.

[0087] The present disclosure also provides a processing equipment, such as Figures 1 to 4 The processing equipment can be a coating equipment 100, which includes a feeding and discharging conveying assembly 20, a reaction furnace 10 and a transfer assembly. The feeding and discharging conveying assembly 20 is configured to convey a sheet 40, the reaction furnace 10 is configured to process a single sheet 40, and the transfer assembly is arranged between the feeding and discharging conveying assembly 20 and the reaction furnace 10. The transfer assembly is configured to transfer the unprocessed sheet 40 to the reaction furnace 10 or to transfer the processed sheet 40 to the feeding and discharging conveying assembly 20.

[0088] It can be understood that the specific structures of the feeding and discharging conveying assembly 20, the reaction furnace 10 and the transfer assembly and the specific cooperation mode can refer to the related descriptions of the above embodiments, and will not be described here.

[0089] In the embodiments of the present disclosure, if not specifically limited, the form of connection can be detachable connection in the form of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the form of detachable cooperation, it can be connected in a non-detachable manner by welding, bonding, etc.

[0090] The basic principles of the present disclosure are described above in combination with specific embodiments, but it should be pointed out that the advantages, advantages, effects, etc. mentioned in the present disclosure are only examples and not limitations, and these advantages, advantages, effects, etc. cannot be considered as the must-have of the various embodiments of the present disclosure. In addition, the above specific details are only for the purpose of example and for the purpose of understanding, and are not limited to the above specific details. The above details do not limit the present disclosure to the above specific details.

[0091] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0092] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0093] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0094] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A reactor furnace characterized by, The reaction furnace comprises: a furnace body having a furnace cavity configured to accommodate at least one carrier, each carrier being configured to carry a sheet having at least one surface to be plated; a conveying member at least partially extending into the furnace cavity, the conveying member having a conveying direction, and the conveying member being arranged with at least one carrying position along the conveying direction, each carrying position being configured to carry a carrier, the conveying member being capable of moving the carrier carried by the carrying position along the conveying direction; at least one spraying member connected to the furnace body, the spraying member being configured to spray gas to the surface to be plated of the sheet moving in the furnace cavity.

2. The reactor of claim 1, wherein The furnace body is provided with an inlet and an outlet respectively at two ends in a first direction, the first direction being parallel to the conveying direction, the conveying member respectively passing through the inlet and the outlet, the conveying member being capable of moving the sheet carried by the carrying position into the furnace cavity through the inlet and out of the furnace cavity through the outlet in sequence, and the spraying member being configured to spray gas to the surface to be plated of at least one sheet moving in the furnace cavity in sequence.

3. The reactor of claim 2, wherein The conveying member comprises: a first conveying belt group extending along the first direction, the first conveying belt group being arranged in the furnace cavity, and the first conveying belt group extending out of the inlet and the outlet respectively at two ends in the first direction, an upper surface of the first conveying belt group being arranged with a plurality of carrying positions spaced apart along the first direction; a first driving portion connected to the first conveying belt group, the first driving portion being configured to drive the first conveying belt group to move along the first direction, so that the sheets respectively carried by the plurality of carrying positions enter the furnace cavity through the inlet or move out of the furnace cavity through the outlet in sequence.

4. The reactor of claim 1, wherein The furnace body is provided with an inlet and an outlet respectively at two ends in a first direction, the first direction being parallel to the conveying direction, the conveying member respectively passing through the inlet and the outlet, the conveying member being capable of moving the sheet carried by the carrying position into the furnace cavity through the inlet and out of the furnace cavity through the outlet in sequence, and the spraying member being configured to spray gas to the surface to be plated of at least one sheet moving in the furnace cavity in sequence.

5. The reaction furnace according to claim 4, wherein The conveying member comprises: a second conveying belt group extending along a first direction, the first direction being parallel to the conveying direction, the second conveying belt group being arranged in the furnace cavity, and an upper surface of the second conveying belt group being arranged with the carrying positions; a second driving portion connected to the second conveying belt group, the second driving portion being configured to drive the second conveying belt group to move along the first direction in a reciprocating manner; or The conveying member comprises: at least one push rod at least partially extending into the furnace cavity, an end of the push rod extending into the furnace cavity being arranged with the carrying positions, the push rod extending along a vertical direction, the vertical direction being parallel to the conveying direction, and the vertical direction being perpendicular to the first direction. a cylinder connected with the push rod, the cylinder being configured to push the push rod to reciprocate along the vertical direction, so as to drive the sheet carried by the carrying position to reciprocate along the vertical direction in the furnace cavity.

6. The reactor of claim 1, wherein Further comprising: a heating member arranged on the carrying member, the heating member being configured to heat the sheet carried on the carrying member.

7. The reactor of claim 1, wherein The number of the spray members is two or more, and the plurality of spray members are arranged in the furnace body along the conveying direction and / or are arranged in the furnace body along a second direction perpendicular to the conveying direction and perpendicular to the vertical direction.

8. The reactor of claim 1, wherein The spray member is provided with a plurality of gas holes in communication with the furnace cavity, and the gas holes are configured to spray gas to the moving surface to be coated. The plurality of gas holes specifically include: a plurality of gas inlet holes arranged along the conveying direction, and the plurality of gas inlet holes are respectively configured to spray a plurality of reaction gases required for coating the surface to be coated, and the types of the reaction gases sprayed by the plurality of gas inlet holes are different; a plurality of gas extraction holes arranged on at least one side of each of the gas inlet holes along the conveying direction, and the gas extraction holes are configured to extract excess reaction gases sprayed by the corresponding gas inlet holes; a plurality of gas separation holes, at least one of which is arranged between each adjacent pair of gas inlet holes, and the gas separation holes are configured to introduce inert gas into the furnace cavity to separate the reaction gases sprayed by adjacent gas inlet holes.

9. The reactor of claim 8, wherein The furnace cavity is provided with a preset space extending along the conveying direction, and the sheet carried by the carrying member is located in the preset space when the carrying member is moved along the conveying direction by the conveying member. The projections of the gas inlet holes, the gas separation holes and the gas extraction holes on the furnace cavity in a second direction perpendicular to the conveying direction are located in the preset space, and the extension direction of a first connecting line between the center of any gas inlet hole and the center of any gas separation hole is parallel to the conveying direction, and / or the extension direction of a second connecting line between the center of any gas inlet hole and the center of any gas extraction hole is parallel to the conveying direction.

10. A processing apparatus characterized by comprising: Comprising: a feeding and discharging conveying assembly configured to convey the sheet; The reaction furnace of any one of claims 1-9 is configured to process a single sheet; a transfer assembly arranged between the feeding and discharging conveying assembly and the reaction furnace, and the transfer assembly is configured to transfer the sheet before processing to the reaction furnace or to transfer the sheet after processing to the feeding and discharging conveying assembly.

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